JP2000023295A - Ultrasonic wave sensor - Google Patents

Ultrasonic wave sensor

Info

Publication number
JP2000023295A
JP2000023295A JP10186340A JP18634098A JP2000023295A JP 2000023295 A JP2000023295 A JP 2000023295A JP 10186340 A JP10186340 A JP 10186340A JP 18634098 A JP18634098 A JP 18634098A JP 2000023295 A JP2000023295 A JP 2000023295A
Authority
JP
Japan
Prior art keywords
metal plate
case
ultrasonic sensor
case body
step part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10186340A
Other languages
Japanese (ja)
Other versions
JP4126758B2 (en
Inventor
Shozo Odera
昭三 大寺
Koichi Nitta
晃一 新田
Hidetoshi Iwatani
英俊 岩谷
Junichi Etsuno
潤一 越野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP18634098A priority Critical patent/JP4126758B2/en
Publication of JP2000023295A publication Critical patent/JP2000023295A/en
Application granted granted Critical
Publication of JP4126758B2 publication Critical patent/JP4126758B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Transducers For Ultrasonic Waves (AREA)

Abstract

PROBLEM TO BE SOLVED: To make joining work of a metal plate to a case main body easier and to suppress dispersion of characteristics by providing a step part to at least one of opening parts of the case main body of an almost cylindrical shape and consisting of an insulation material and making a side peripheral surface of the step part partially tapered. SOLUTION: A ultrasonic wave sensor consists of an insulation material and is composed of a case which consists of a case body 11 of an almost cylindrical shape and having a step part 20 at one of opening parts and a metal plate 12 as an oscillation part which is fitted and joined to the step part 20 of the case body 11 with an adhesive material, a piezoelectric oscillation element 13 joined to an inner side of the metal plate 12 and input/output members 14a and 14b. A side face of the step part 20 provided at one of the opening parts of the case body 11 is formed into a taper shape, a position of the metal plate 12 is fixed at a specified position by pressing the metal plate 12 into the step part 20, a position in the case of the piezoelectric oscillation element 13 joined to the metal plate 12 becomes fixed and a resonance frequency and sensitivity characteristics are stabilized.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、自動車のバックソ
ナー、コーナーソナーとして使用される超音波センサに
関する。
The present invention relates to an ultrasonic sensor used as a back sonar or a corner sonar of an automobile.

【0002】[0002]

【従来の技術】超音波センサは、超音波を利用してセン
シングを行うものであり、圧電振動素子から超音波パル
ス信号を間欠的に送信し、周辺に存在する障害物からの
反射波を圧電振動素子で受信することにより障害物の存
在を検知したり、あるいは、超音波パルス信号を送信し
てから受信するまでの経過時間を外部の回路で演算し障
害物までの距離を測定するものである。
2. Description of the Related Art An ultrasonic sensor performs sensing using ultrasonic waves, intermittently transmits an ultrasonic pulse signal from a piezoelectric vibrating element, and piezoelectrically reflects a reflected wave from an obstacle present in the vicinity. It detects the presence of an obstacle by receiving the vibration element, or measures the distance to the obstacle by calculating the elapsed time from transmitting the ultrasonic pulse signal to receiving it by an external circuit. is there.

【0003】この様な原理に基づいて動作する超音波セ
ンサには、遠距離の検知を可能とし、かつ微弱な反射波
を外乱ノイズ等に埋もれさせることなく確実に電気信号
として取り出す特性が要求される。そのためには、超音
波センサの送信出力音圧と受信感度特性をともに高めら
れるよう、振動部の振動動作を阻害しない構造を採用す
る必要がある。具体的には、振動部に配置される圧電振
動素子に直接接続される配線については、特に細く柔ら
かいものを用いることが広く一般に用いられてきた。
[0003] An ultrasonic sensor operating based on such a principle is required to have a characteristic capable of detecting a long distance and reliably extracting a weak reflected wave as an electric signal without being buried in disturbance noise or the like. You. For this purpose, it is necessary to adopt a structure that does not hinder the vibration operation of the vibrating section so that both the transmission output sound pressure and the reception sensitivity characteristics of the ultrasonic sensor can be enhanced. Specifically, for the wiring directly connected to the piezoelectric vibrating element disposed in the vibrating portion, it has been widely and generally used to use a particularly thin and soft wiring.

【0004】しかし、細く柔らかい配線を超音波センサ
の小さな筐体内で安定的に接続配線することは極めて困
難であり、生産コストの上昇要因となり、また電気的接
続の信頼性が低く、センサの特性の不安定化の原因とも
なっていた。
However, it is extremely difficult to stably connect thin and soft wiring in a small housing of an ultrasonic sensor, which causes an increase in production cost, and has a low reliability of electrical connection and a characteristic of the sensor. Cause instability.

【0005】以上の問題点を克服するために、本出願人
は特願平10―4882号において、細く柔らかい配線
を用いることなく、安定した電気的接続を作業性良く得
られる超音波センサの構造を既に提案している。以下、
公知技術ではないが本出願人が特願平10―4882号
において提案している超音波センサを、図3に基づいて
説明する。
In order to overcome the above problems, the present applicant has disclosed in Japanese Patent Application No. 10-4882 a structure of an ultrasonic sensor capable of obtaining stable electrical connection with good workability without using thin and soft wiring. Has already been proposed. Less than,
An ultrasonic sensor which is not a known technique but has been proposed by the present applicant in Japanese Patent Application No. 10-4882 will be described with reference to FIG.

【0006】図3の断面図に示すように従来の超音波セ
ンサ110は、絶縁性材料からなり一方の開口部に段差部1
20を有する略筒状をしたケース本体111、およびそのケ
ース本体111の段差部120に嵌合して接着剤によりケース
本体111と接合される振動部としての金属板112とからな
るケースと、金属板112の内側面に接合される圧電振動
素子113と、入出力用部材114a、114bとから構成されて
いる。
As shown in the cross-sectional view of FIG. 3, a conventional ultrasonic sensor 110 is made of an insulating material and has a step portion 1 at one opening.
A case consisting of a substantially cylindrical case body 111 having 20, a metal plate 112 as a vibrating part fitted to the step part 120 of the case body 111 and joined to the case body 111 by an adhesive; It is composed of a piezoelectric vibration element 113 joined to the inner surface of the plate 112, and input / output members 114a and 114b.

【0007】圧電振動素子113の表裏面にはそれぞれ電
極が形成され(図示せず)、裏面の電極は導電性接着剤
などにより金属板112に接続されている。42ニッケル
(鉄−42%ニッケルの合金)などからなる入出力用部材1
14a、114bは、ケース本体111に埋設されるように一体成
形されており、そのうちの一方の入出力用部材114aは一
端が圧電振動素子113の表面に形成された電極に接続さ
れ、他方の入出力部材114bの一端は金属板112に接続さ
れることにより圧電振動素子113裏面に形成された電極
と導通している。また、入出力用部材114a、114bそれぞ
れの他端はケース本体111外部に導出されている。
Electrodes (not shown) are formed on the front and back surfaces of the piezoelectric vibrating element 113, respectively, and the electrodes on the back surface are connected to the metal plate 112 by a conductive adhesive or the like. Input / output member made of 42 nickel (iron-42% nickel alloy) etc.
14a and 114b are integrally formed so as to be embedded in the case main body 111. One of the input / output members 114a has one end connected to an electrode formed on the surface of the piezoelectric vibration element 113 and the other input / output member 114a. One end of the output member 114b is electrically connected to an electrode formed on the back surface of the piezoelectric vibration element 113 by being connected to the metal plate 112. The other ends of the input / output members 114a and 114b are led out of the case body 111.

【0008】[0008]

【発明が解決しようとする課題】従来の超音波センサに
おいて振動部としての金属板は、ケース本体の一方の開
口部の設けられた段差部に嵌合され、接着剤などにより
接合されていた。また一方で、金属板とケース本体が接
合された後に圧電振動素子を金属板の内側面に接合する
ことは作業上困難であるため、前もって金属板の内側面
に圧電振動素子を接合した後に金属板とケース本体とは
接合されていた。
In a conventional ultrasonic sensor, a metal plate as a vibrating portion has been fitted to a step portion provided with one opening of a case main body and joined by an adhesive or the like. On the other hand, it is difficult to join the piezoelectric vibrating element to the inner surface of the metal plate after the metal plate and the case body are joined. The plate and the case body were joined.

【0009】金属板とケース本体の一方開口部に設けら
れた段差部との形状がほぼ同形状となるように金属板と
ケース本体とはそれぞれ形成されているが、金属板をそ
の段差部に嵌合させるためには、作業上の都合から、あ
る程度段差部の形状を金属板よりも大きくすることは避
けられない。すなわち、金属板をケース本体に嵌合する
工程やそれらを接着剤などにより接合する工程におい
て、ケース本体の一方の開口部に設けられた段差部内で
金属板の位置がずれる可能性があるということである。
The metal plate and the case body are formed so that the shape of the metal plate and the shape of the step portion provided at one opening of the case body are substantially the same, but the metal plate is attached to the step portion. In order to fit, it is unavoidable to make the shape of the stepped portion larger than the metal plate to some extent from the viewpoint of work. That is, in the step of fitting the metal plate to the case main body or the step of joining them with an adhesive or the like, the position of the metal plate may be shifted within the step provided in one opening of the case main body. It is.

【0010】ケース本体の一方の開口部に設けられた段
差部内で金属板の位置がずれると金属板に接合された圧
電振動素子の位置も連動してずれる。圧電振動素子のケ
ース内での位置がわずかでも変化すると、圧電振動素子
とケース本体との位置関係の変化などが原因となって、
超音波センサにおいては共振周波数や感度特性に無視で
きない程度の変化が生じる。すなわち、作業上金属板の
位置がずれることは不可避なので、従来の超音波センサ
では金属板の位置のずれにより超音波センサそれぞれの
特性がばらつくという問題があった。
When the position of the metal plate shifts within the step provided in one of the openings of the case body, the position of the piezoelectric vibrating element joined to the metal plate also shifts. If the position of the piezoelectric vibrating element in the case changes even slightly, the positional relationship between the piezoelectric vibrating element and the case body may change.
In the ultrasonic sensor, a change that cannot be ignored in the resonance frequency and the sensitivity characteristic occurs. That is, since it is inevitable that the position of the metal plate is shifted in operation, the conventional ultrasonic sensor has a problem that the characteristics of each ultrasonic sensor vary due to the shift of the position of the metal plate.

【0011】本発明の超音波センサは、上述の問題を鑑
みてなされたものであり、これらの問題を解決し、金属
板とケース本体との接合作業が容易で、特性のばらつき
が少ない超音波センサを提供することを目的としてい
る。
The ultrasonic sensor of the present invention has been made in view of the above-described problems, and solves these problems. The ultrasonic sensor has an ultrasonic wave sensor that is easy to join a metal plate and a case body and has little characteristic variation. It is intended to provide a sensor.

【0012】[0012]

【課題を解決するための手段】上記目的を達成するため
本発明の超音波センサは、絶縁性材料からなり少なくと
も一方開口部に段差部を有する略筒状のケース本体と、
導電性材料からなり前記段差部に嵌合されて固定される
振動部とから構成されるケースと、前記振動部の内側面
に接合される圧電振動素子と、前記ケース本体に埋設さ
れ、前記圧電振動素子に電気的に接続される入出力用部
材とを含んでなる超音波センサであって、前記段差部の
側周面が少なくとも部分的にテーパ状である。
In order to achieve the above object, an ultrasonic sensor according to the present invention comprises a substantially cylindrical case body made of an insulating material and having a step at at least one opening.
A case made of a conductive material, comprising a vibrating part fitted and fixed to the step part, a piezoelectric vibrating element joined to an inner surface of the vibrating part, and a piezoelectric element embedded in the case main body; An ultrasonic sensor including an input / output member electrically connected to a vibration element, wherein a side peripheral surface of the step portion is at least partially tapered.

【0013】これにより、ケース本体の一方の開口部に
設けられた段差部内で振動部の位置がずれることがなく
なる。
Accordingly, the position of the vibrating portion does not shift within the step provided in the one opening of the case body.

【0014】[0014]

【発明の実施の形態】以下、本発明の実施例である超音
波センサを、図1に基づいて説明する。なお、図1は本実
施例の超音波センサの断面図である。図1に示すように
本実施例の超音波センサ10は、絶縁性材料からなり一方
の開口部に段差部20を有する略筒状をしたケース本体11
および、そのケース本体11の段差部20に嵌合して接着剤
によりケース本体11と接合される振動部としての金属板
12とからなるケースと、金属板12の内側面に接合される
圧電振動素子13と、入出力用部材14a、14bとから構成さ
れている。なお、ケース本体11の絶縁性材料には耐熱性
や耐久性に優れたエンジニアリングプラスチック、具体
的にはポリフェニレンサルファイド、ポリエーテルエー
テルケトン、ポリエーテルスルフォンや液晶ポリマなど
が用いられる。さらに、振動部としての金属板12には軽
量で弾性率の高いアルミニウムなどが用いられる。さら
にまた、入出力用部材14a、14bとしては42ニッケル、洋
白、燐青銅のような剛性の高い金属や、銅などの剛性の
低い金属が用いられる。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An ultrasonic sensor according to an embodiment of the present invention will be described below with reference to FIG. FIG. 1 is a sectional view of the ultrasonic sensor according to the present embodiment. As shown in FIG. 1, an ultrasonic sensor 10 of the present embodiment has a substantially cylindrical case body 11 made of an insulating material and having a step portion 20 in one opening.
And a metal plate as a vibrating part which is fitted to the step part 20 of the case body 11 and is joined to the case body 11 by an adhesive
12, a piezoelectric vibration element 13 joined to the inner surface of the metal plate 12, and input / output members 14a and 14b. The insulating material of the case body 11 is an engineering plastic having excellent heat resistance and durability, specifically, polyphenylene sulfide, polyether ether ketone, polyether sulfone, a liquid crystal polymer, or the like. Further, the metal plate 12 as the vibrating portion is made of aluminum or the like, which is lightweight and has a high elastic modulus. Furthermore, as the input / output members 14a and 14b, a metal having high rigidity such as 42 nickel, nickel silver, phosphor bronze, or a metal having low rigidity such as copper is used.

【0015】圧電振動素子13の表裏面にはそれぞれ電極
が形成され(図示せず)、裏面の電極は導電性接着剤や
半田などにより金属板12の内側面に接続されている。入
出力用部材14a、14bはケース本体11に埋設されるように
一体成形されており、そのうちの一方の入出力用部材14
aは一端が圧電振動素子13の表面に形成された電極に導
電性接着剤15などにより接続され、他方の入出力部材14
bの一端は金属板12に接続されることにより圧電振動素
子13裏面に形成された電極と導通している。また、入出
力用部材14a、14bそれぞれの他端はケース本体11外部に
導出されている。
Electrodes (not shown) are formed on the front and back surfaces of the piezoelectric vibrating element 13, respectively. The electrodes on the back surface are connected to the inner surface of the metal plate 12 by a conductive adhesive or solder. The input / output members 14a and 14b are integrally formed so as to be embedded in the case body 11, and one of the input / output members 14a and 14b is
a has one end connected to an electrode formed on the surface of the piezoelectric vibrating element 13 by a conductive adhesive 15 or the like, and the other input / output member 14
One end of b is electrically connected to an electrode formed on the back surface of the piezoelectric vibrating element 13 by being connected to the metal plate 12. The other ends of the input / output members 14a and 14b are led out of the case body 11.

【0016】図1に示すように、本実施例の超音波セン
サ10においては、ケース本体11の一方の開口部に設けら
れた段差部20の側周面がテーパ状に形成されている。段
差部20の側周面をテーパ状とすると、金属板12を段差部
20内に押し込むことで金属板12の位置が所定の位置で固
定される。すなわち、段差部20のテーパ形状と金属板12
の形状とをそれぞれ正確に形成しておけば、金属板12の
段差部20への嵌合工程やそれらの接合工程での作業上の
原因によって、金属板12の位置がずれることがなくな
る。金属板12の位置が一定であると金属板12に接合され
た圧電振動素子13のケース内での位置も一定となり、超
音波センサ10の共振周波数や感度特性が安定する。つま
り、超音波センサごとに特性がばらつくことがなくなり
生産性が高まる。また、従来は金属板12の位置に注意を
払うために、金属板12の段差部20への嵌合工程などは手
間のかかる作業であったが、段差部20にテーパを設ける
ことでこれらの工程が大まかなものでも構わなくなり、
金属板12の段差部20への嵌合工程などの作業性が向上す
る。
As shown in FIG. 1, in the ultrasonic sensor 10 of the present embodiment, a side peripheral surface of a step portion 20 provided at one opening of the case main body 11 is formed in a tapered shape. If the side peripheral surface of the step portion 20 is tapered, the metal plate 12
By pushing it into 20, the position of the metal plate 12 is fixed at a predetermined position. That is, the tapered shape of the step portion 20 and the metal plate 12
If the shape of the metal plate 12 is accurately formed, the position of the metal plate 12 will not be displaced due to the work in the fitting process of the metal plate 12 to the stepped portion 20 and the joining process thereof. When the position of the metal plate 12 is constant, the position of the piezoelectric vibrating element 13 joined to the metal plate 12 in the case also becomes constant, and the resonance frequency and sensitivity characteristics of the ultrasonic sensor 10 are stabilized. That is, the characteristics do not vary for each ultrasonic sensor, and the productivity is increased. In addition, conventionally, in order to pay attention to the position of the metal plate 12, the fitting process of the metal plate 12 to the step portion 20 and the like is a laborious operation, but by providing the step portion 20 with a taper Even if the process is rough,
Workability such as a process of fitting the metal plate 12 to the step 20 is improved.

【0017】なお、上記の実施例においてはケース本体
11の一方の開口部に設けられた段差部20に形成されたテ
ーパは段差部20の側周面全面にわたっていたが、例えば
三つあるいは四つの部分というように部分的に形成され
ていても本発明の効果は得られる。
In the above embodiment, the case body
Although the taper formed in the step portion 20 provided in one opening of the 11 extends over the entire side peripheral surface of the step portion 20, even if it is partially formed, for example, three or four portions, the taper is formed. The effects of the invention can be obtained.

【0018】また、超音波センサにおいては遠距離の検
知のみならず近距離の検知が必要とされることもある。
超音波センサが被検出物からの距離などを測定する場合
には、超音波パルス信号を送信して被検出物からの反射
波を電気信号に変換して外部の回路に送り演算している
が、近距離の場合、送信する際の振動が超音波センサの
ケース本体などに残っており、反射波との区別がつきに
くくなる。すなわち、超音波センサには、超音波パルス
信号の送信後、速やかにケース本体などに残る残響を収
束させる機能、つまり残響特性を改善することが必要と
なる。このため、図2の断面図に示すように、超音波セ
ンサ10aのケース内にフェルトなどからなる吸音材16を
挿入し、シリコンゴムやウレタンゴム、発泡性樹脂など
弾性を有する絶縁性樹脂17をケース内に充填、硬化した
超音波センサ10aにも本発明は適用できる。
Further, the ultrasonic sensor may need to detect not only a long distance but also a short distance.
When an ultrasonic sensor measures the distance from an object to be detected, it transmits an ultrasonic pulse signal, converts a reflected wave from the object into an electric signal, and sends the signal to an external circuit for calculation. In the case of a short distance, the vibration at the time of transmission remains in the case body of the ultrasonic sensor and the like, making it difficult to distinguish the reflected wave from the reflected wave. In other words, it is necessary for the ultrasonic sensor to improve the function of converging reverberation remaining in the case body or the like immediately after transmitting the ultrasonic pulse signal, that is, to improve reverberation characteristics. Therefore, as shown in the cross-sectional view of FIG. 2, a sound absorbing material 16 made of felt or the like is inserted into the case of the ultrasonic sensor 10a, and an insulating resin 17 having elasticity such as silicon rubber, urethane rubber, or foaming resin is used. The present invention can be applied to the ultrasonic sensor 10a filled and cured in the case.

【0019】[0019]

【発明の効果】以上のように本発明によれば、絶縁性材
料からなり一方の開口部に段差部を有する略筒状をした
ケース本体の段差部に、導電性材料からなる振動部を嵌
合してケースを構成する超音波センサにおいて、ケース
本体の側周面をテーパ状にした。これにより、振動部を
段差部に嵌合させる工程やそれらを接合する工程におけ
る作業上の原因で、振動部の段差部内での位置がずれる
ことがなくなり、超音波センサごとの振動部位置のばら
つきが生じない。振動部の位置が一定であるということ
は、すなわち振動部に接合される圧電振動素子のケース
内での位置も一定であるということであり、これにより
超音波センサの共振周波数や感度特性にばらつきが生じ
ない。つまり、特性的にばらつきがない超音波センサを
容易に製造することができる。
As described above, according to the present invention, a vibrating portion made of a conductive material is fitted to a step portion of a substantially cylindrical case body made of an insulating material and having a step portion at one opening. In the ultrasonic sensor constituting the case in combination, the side peripheral surface of the case body is tapered. As a result, the position of the vibrating portion within the step portion does not shift due to the work in the process of fitting the vibrating portion to the step portion and the process of joining them, and the variation in the position of the vibrating portion for each ultrasonic sensor is prevented. Does not occur. The fact that the position of the vibrating part is constant means that the position of the piezoelectric vibrating element that is joined to the vibrating part in the case is also constant, which causes variations in the resonance frequency and sensitivity characteristics of the ultrasonic sensor. Does not occur. That is, an ultrasonic sensor having no variation in characteristics can be easily manufactured.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の第一の実施例における超音波センサの
断面図である。
FIG. 1 is a sectional view of an ultrasonic sensor according to a first embodiment of the present invention.

【図2】本発明の他の実施例における超音波センサの断
面図である。
FIG. 2 is a sectional view of an ultrasonic sensor according to another embodiment of the present invention.

【図3】従来の超音波センサの断面図である。FIG. 3 is a sectional view of a conventional ultrasonic sensor.

【符号の説明】[Explanation of symbols]

10,10a 超音波センサ 11 ケース本体 12 金属板 13 圧電振動素子 14a,14b 入出力用部材 15 導電性接着剤 16 吸音材 17 絶縁性樹脂 20 段差部 10,10a Ultrasonic sensor 11 Case body 12 Metal plate 13 Piezoelectric vibrating element 14a, 14b Input / output member 15 Conductive adhesive 16 Sound absorbing material 17 Insulating resin 20 Step

───────────────────────────────────────────────────── フロントページの続き (72)発明者 越野 潤一 京都府長岡京市天神二丁目26番10号 株式 会社村田製作所内 Fターム(参考) 5D019 AA26 BB09 BB28 EE01 FF01 HH03  ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Junichi Koshino 2-26-10 Tenjin, Nagaokakyo-shi, Kyoto F-term in Murata Manufacturing Co., Ltd. 5D019 AA26 BB09 BB28 EE01 FF01 HH03

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】絶縁性材料からなり少なくとも一方開口部
に段差部を有する略筒状のケース本体と、導電性材料か
らなり前記段差部に嵌合されて固定される振動部とから
構成されるケースと、 前記振動部の内側面に接合される圧電振動素子と、 前記ケース本体に埋設され、前記圧電振動素子に電気的
に接続される入出力用部材とを含んでなる超音波センサ
であって、 前記段差部の側周面が少なくとも部分的にテーパ状であ
ることを特徴とする超音波センサ。
1. A substantially cylindrical case body made of an insulating material and having a step in at least one opening, and a vibrating part made of a conductive material and fitted and fixed to the step. An ultrasonic sensor comprising: a case; a piezoelectric vibrating element joined to an inner surface of the vibrating portion; and an input / output member embedded in the case body and electrically connected to the piezoelectric vibrating element. An ultrasonic sensor, wherein a side peripheral surface of the step portion is at least partially tapered.
JP18634098A 1998-07-01 1998-07-01 Ultrasonic sensor Expired - Fee Related JP4126758B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18634098A JP4126758B2 (en) 1998-07-01 1998-07-01 Ultrasonic sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18634098A JP4126758B2 (en) 1998-07-01 1998-07-01 Ultrasonic sensor

Publications (2)

Publication Number Publication Date
JP2000023295A true JP2000023295A (en) 2000-01-21
JP4126758B2 JP4126758B2 (en) 2008-07-30

Family

ID=16186649

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18634098A Expired - Fee Related JP4126758B2 (en) 1998-07-01 1998-07-01 Ultrasonic sensor

Country Status (1)

Country Link
JP (1) JP4126758B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015509301A (en) * 2011-12-13 2015-03-26 ピエゾテック・エルエルシー Extended bandwidth transducer for well integrity measurements
WO2019087634A1 (en) 2017-11-02 2019-05-09 株式会社村田製作所 Ultrasonic sensor

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015509301A (en) * 2011-12-13 2015-03-26 ピエゾテック・エルエルシー Extended bandwidth transducer for well integrity measurements
US9976406B2 (en) 2011-12-13 2018-05-22 Piezotech Llc Enhanced bandwidth transducer method for well integrity measurement
WO2019087634A1 (en) 2017-11-02 2019-05-09 株式会社村田製作所 Ultrasonic sensor
US11486758B2 (en) 2017-11-02 2022-11-01 Murata Manufacturing Co., Ltd. Ultrasonic sensor

Also Published As

Publication number Publication date
JP4126758B2 (en) 2008-07-30

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