JP2000015180A - Vibration exciter, vibration excitation system, and control of vibration excitation system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily and rapidly obtain vibration corresponding to a desired vibration frequency and a desired vibration exciting force. SOLUTION: The revolutions of a rotating shaft provided with an eccentric weight and a hollow rotating shaft provided with an eccentric weight through which the rotating shaft is inserted are controlled, and based on a first rotation phase detection signal SP1 and a second rotation phase detection signal SP2, the rotation phase difference of the rotating shaft and the hollow rotating shaft is detected. Based on rotation phase difference control information showing the relation of the magnitude of the vibration exciting force to be generated in an vibration exciter 11 and the rotation phase difference, where the information is previously stored, the rotation phase difference of the rotating shaft and the hollow rotating shaft is held as the rotation phase difference corresponding to the magnitude of the vibration exciting force to be generated in the vibration exciter 11. In this way, by one vibration exciter, various vibration frequencies and vibration exciting forces can be coped with, and the kinds of electric motors to be prepared when constructing a vibration excitation system are reduced, and the vibration frequency and vibration exciting force of vibration generated by the vibration exciter can be easily and electrically adjusted to save the labor and time of the adjustment.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibrating apparatus, a vibrating system and a control method of a vibrating system. The present invention relates to a vibration device, a vibration system, and a method of controlling a vibration system.

[0002]

2. Description of the Related Art FIG. 5 is a partially broken cross-sectional view of a vibration device using a conventional three-phase induction motor. The vibration device 101 has a casing 102, a bearing 103 provided in the casing 102, a stator 104 of a three-phase induction motor provided in the casing 102, and a shaft 105, and can be rotated by the plurality of bearings 103. Eccentric weight 107A provided on one end side of shaft 105, and having a substantially sector shape as viewed in the direction of arrow A, and having the same shape as eccentric weight 107A. And the eccentric weight 107B having the same weight and provided on the other end side of the shaft 105.

In this case, eccentric weights 107A, 1
07B is configured so that the mounting position in the circumferential direction with respect to the shaft 105 can be set independently by loosening and retightening the mounting screw (not shown). When the rotor 106 rotates, each eccentric weight 10
The opening angle of two projection vectors obtained when the direction of the centrifugal force generated due to 7A and 107B is projected on a plane perpendicular to the rotation center axis of the shaft 105 can be arbitrarily set.

Next, the operation will be described. When commercial power is applied to the stator 101 of the vibrating device 101, the rotor 106, and thus the shaft 1, is rotated at a constant rotation speed according to the power supply voltage.
05 will rotate. And the shaft 105
Of the centrifugal force generated by the eccentric weight 107A and the centrifugal force generated by the eccentric weight 107B. When the centrifugal force vectors to be combined are combined, vibration by the exciting force corresponding to the combined centrifugal force vector is generated in the exciting device 101.

In this case, focusing on one eccentric weight, it is proportional to the mass of the eccentric weight and the shaft 105
Centrifugal force is generated in proportion to the square of the rotation speed of the motor.

[0006]

Since the conventional vibration device 101 uses a commercial power supply, the number of revolutions of the rotor becomes constant in accordance with the frequency of the used commercial power supply. The frequency of the generated vibration is also constant.
Therefore, in order to change the frequency, three-phase induction motors having different numbers of poles such as two poles, four poles, six poles, eight poles,... Are selected in accordance with the purpose of use (required frequency). There was a problem that it had to be used.

In order to change the magnitude of the resultant centrifugal force vector and change the exciting force, it is necessary to manually adjust the mounting positions of the eccentric weights 107A and 107B as described above. Therefore, in order to obtain a desired excitation force, it is necessary to repeat adjustment → operation (excitation force measurement) → stop → adjustment →..., And a great deal of labor and time must be spent. there were. Therefore, there is a problem that it is not possible to quickly cope with the change in the excitation force.

Accordingly, an object of the present invention is to provide a vibration device, a vibration system, and a vibration system control method capable of easily and quickly obtaining a vibration corresponding to a desired vibration frequency and a desired vibration excitation force. Is to provide.

[0009]

According to a first aspect of the present invention, a first eccentric weight is provided,
A first electric motor having a rotating shaft that rotates about a predetermined center of rotation, a hollow cylindrical hollow body that is provided with a second eccentric weight while the rotating shaft is inserted therethrough and that rotates about the center of rotation; A second motor having a shaft, a casing holding the first motor and the second motor, first rotation phase detection means for detecting a rotation phase of the rotation shaft and outputting a first rotation phase detection signal, And a second rotational phase detecting means for detecting a rotational phase of the hollow rotary shaft and outputting a second rotational phase detection signal.

A second aspect of the present invention is the configuration of the first aspect, further comprising a pair of hollow rotary shaft holding means for rotatably holding the hollow rotary shaft at a substantially symmetrical position separated by a predetermined distance, The second eccentric weight is constituted by at least one pair of eccentric weights provided at substantially symmetrical positions on both ends of the hollow rotary shaft with respect to each of the rotary shaft holding means. And

According to a third aspect of the present invention, there is provided a first electric motor having a first eccentric weight, having a rotating shaft that rotates about a predetermined center of rotation, and a second eccentric while the rotating shaft is inserted. A second motor having a hollow cylindrical hollow rotary shaft provided with a weight and rotating about the rotation center, and rotation of the hollow rotary shaft via a space outside the rotatable range of the first eccentric weight. A rotation transmitting member that transmits the rotation center in the extension direction, and supported by the rotation transmitting member,
In addition, a rotating shaft holding member that rotatably holds the rotating shaft, and a casing that holds the first electric motor and the second electric motor are provided.

According to a fourth aspect of the present invention, in the configuration of the third aspect, there is provided a pair of hollow rotary shaft holding means for rotatably holding the hollow rotary shaft at a substantially symmetrical position separated by a predetermined distance, The second eccentric weight is constituted by at least one pair of eccentric weights provided at substantially symmetrical positions on both ends of the hollow rotary shaft with respect to each of the rotary shaft holding means. And

According to a fifth aspect of the present invention, in the configuration of the third or fourth aspect, the rotation transmission member has a cup shape provided with a rotation transmission shaft, and the rotation shaft holding member includes a plurality of rotation shaft holding members. Characterized by having the above-mentioned needle roller bearing.

According to a sixth aspect of the present invention, there is provided the vibrating apparatus according to the first or second aspect, a rotational speed control means for controlling the rotational speeds of the rotary shaft and the hollow rotary shaft, and the first rotational phase. Rotation phase difference detection means for detecting a rotation phase difference between the rotation shaft and the hollow rotation shaft based on a detection signal and the second rotation phase detection signal; and a magnitude of the excitation force generated by the vibration device and the rotation. Rotation phase difference control information storage means for storing the relationship of the phase difference in advance as rotation phase difference control information,
A phase difference holding control that holds a rotation phase difference between the rotating shaft and the hollow rotating shaft to a rotating phase difference corresponding to a magnitude of a vibration force to be generated in the vibration device based on the rotation phase difference control information. Means.

According to a seventh aspect of the present invention, there is provided a vibrating apparatus according to any one of the third to fifth aspects, a rotational speed control means for controlling the rotational speeds of the rotary shaft and the hollow rotary shaft,
First rotation phase detection means for detecting a rotation phase of the rotation shaft and outputting a first rotation phase detection signal; and detecting a rotation phase of the hollow rotation shaft via the rotation transmission member to generate a second rotation phase detection signal. A second rotational phase detecting means for outputting the first rotational phase;
A rotation phase difference detection unit configured to detect a rotation phase difference between the rotation shaft and the hollow rotation shaft based on a rotation phase detection signal and the second rotation phase detection signal; and a magnitude of a vibration force generated by the vibration device. A rotation phase difference control information storage unit that stores the relationship of the rotation phase difference in advance as rotation phase difference control information, and a magnitude of a vibration force to be generated in the vibration device based on the rotation phase difference control information. Phase difference holding control means for holding a rotation phase difference between the rotating shaft and the hollow rotating shaft at a corresponding rotating phase difference.

According to an eighth aspect of the present invention, in the control method of the vibration system for controlling the vibration device according to the first or second aspect, the rotation speed controlling the rotation speeds of the rotary shaft and the hollow rotary shaft is provided. A control step; a rotation phase difference detection step of detecting a rotation phase difference between the rotation shaft and the hollow rotation shaft based on the first rotation phase detection signal and the second rotation phase detection signal; The rotational phase difference corresponding to the magnitude of the exciting force to be generated in the vibrating device based on the rotational phase difference control information representing the relationship between the magnitude of the exciting force generated in the device and the rotational phase difference. And a phase difference holding control step of holding a rotation phase difference between the shaft and the hollow rotary shaft.

According to a ninth aspect of the present invention, in the control method of the vibration system for controlling the vibration device according to any one of the third to fifth aspects, the number of rotations of the rotary shaft and the hollow rotary shaft is controlled. A rotation speed control step of controlling, a first rotation phase detection step of detecting a rotation phase of the rotation shaft, and a second rotation phase detection step of detecting the rotation phase of the hollow rotation shaft via the rotation transmission member, The rotational phase difference between the rotating shaft and the hollow rotating shaft is determined based on the rotating phase of the rotating shaft detected in the first rotating phase detecting step and the rotating phase of the hollow rotating shaft detected in the second rotating phase detecting step. The rotational phase difference detecting step to be detected and the rotational phase difference control information indicating the relationship between the magnitude of the exciting force generated in the vibrating device and the rotational phase difference stored in advance should be generated in the vibration device. Exciting force It is characterized by comprising: a phase difference holding control step of holding the rotational phase difference of the rotary shaft and the hollow rotating shaft to the rotational phase difference corresponding to of come.

[0018]

Preferred embodiments of the present invention will now be described with reference to the drawings. [1] First Embodiment

[1.1] Configuration of Excitation System FIG. 1 is a schematic block diagram of an excitation system according to the first embodiment. The vibration system 10 includes two three-phase induction motors (= a main motor 23 and an adjustment motor 25;
) In a casing, a first variable inverter 13 that varies the frequency of an AC power supply from a commercial power supply 12 based on a first control signal SC1 and supplies it to a main motor 23, and a commercial power supply The frequency of the AC power from the motor 12 is varied based on the second control signal SC2 to adjust the motor 25 for adjustment.
And a second variable inverter 14 that supplies the first rotational phase detection signal SP2 corresponding to the rotational phase of the main motor 23 and the first rotational phase detection signal SP1 corresponding to the rotational phase of the adjusting motor 25. A controller 15 for controlling the inverter 13 and the second variable inverter 14 and outputting a first control signal SC1 and a second control signal SC2 for keeping the rotation speed and the rotation phase of the main motor 23 and the adjusting motor 25 constant; , The controller 15 and the vibration device 11
And a setting unit 16 for inputting a setting signal SSET for setting the frequency of the vibration to be generated and the exciting force.

[1.2] Configuration of Vibration Apparatus FIG. 2 is a half sectional view of the vibration apparatus. The vibration device 11 includes a casing 21, a main motor 23 having a hollow cylindrical hollow shaft 22, and a shaft 24 inserted through the hollow shaft 22 and having the same rotation center axis as the rotation center axis of the hollow shaft 22. An adjustment motor 25, a rotation position of the hollow shaft 22, and a second rotation sensor 26 that outputs a second rotation phase signal SP2; and a rotation position of the shaft 24, and outputs a first rotation phase signal SP1. First rotation sensor 27, ball bearing units 28A and 28B rotatably supporting hollow shaft 22, and ball bearing unit 2 rotatably supporting shaft 24.
9A and 29B. In this case, the first rotation sensor 26 and the second rotation sensor 27 use optical rotary encoders, but may be any sensor that can detect the rotation phase.

The vibration device 11 further includes a hollow shaft 22
Eccentric weights 30A and 30B fixed to both ends of the shaft 24, and eccentric weights 31A and 31B fixed to the vicinity of the end surface of the hollow shaft 22 of the shaft 24.

[1.3] Operation of Vibration System The setting signal SSE from the setting unit 16 of the vibration system 10
When T is input, the controller 15 sets the setting signal SSET
Control signal S corresponding to the frequency of the excitation signal corresponding to
C1 is output to the first variable inverter 13. This makes the first
The variable inverter 13 varies the frequency of the AC power supply from the commercial power supply 12 based on the first control signal SC1 and supplies the first drive signal SPW1 to the main motor 23.

As a result, the rotor of the main motor 23 rotates, and the hollow shaft 22 and the eccentric weights 30A and 30B
It rotates at a predetermined number of revolutions corresponding to the frequency of the first drive signal SPW1. In parallel with this, the second rotation sensor 26 detects the rotation position of the hollow shaft 22 and outputs the second rotation phase signal S
P2 is output to the controller 15. The first rotation sensor 27 detects the rotation position of the shaft 24 (in a non-rotation state), and outputs the first rotation phase signal SP1 to the controller 15.
Output to

Next, the controller 15 sets the setting signal SSET
And outputs to the second variable inverter 14 a second control signal SC2 substantially corresponding to the frequency of the excitation signal corresponding to. Thereby, the second variable inverter 14 varies the frequency of the AC power from the commercial power supply 12 based on the second control signal SC2 and supplies the second drive signal SPW2 to the adjusting motor 25. As a result, the rotor of the adjusting motor 25 rotates and the shaft 2
4 and the eccentric weights 31A and 31B are the second drive signals SPW2
At a predetermined number of rotations corresponding to the frequency.

At this time, based on the first rotational phase signal SP1 and the second rotational phase signal SP2, the controller 15
As shown in FIG. 1, an angle θ between a centrifugal force vector V1 indicating the direction of the centrifugal force caused by the eccentric weight 30A and a centrifugal force vector V2 indicating the direction of the centrifugal force caused by the eccentric weight 31A is calculated. Then, the second control signal SC2 is set so that the angle θ becomes the reference angle θREF corresponding to the setting signal SSET.
To adjust.

In this case, the reference angle θREF
Is the number of revolutions corresponding to the first control signal SC1,
When the adjustment motor 25 is driven, the magnitude of the combined centrifugal force vector obtained by combining the centrifugal force vector V1 and the centrifugal force vector V2, that is, the magnitude of the generated excitation force is included in the setting signal SSET. Corresponding information is set and stored in the controller 15 in advance as rotational phase difference control information. When the detected angle θ becomes the reference angle θREF corresponding to the setting signal SSET,
The second control signal SC2 gives the shaft a rotation speed equal to the rotation speed of the hollow shaft corresponding to the first control signal SC1.

As a result, the eccentric weights 30A and 30B and the eccentric weights 31A and 31B rotate while maintaining a predetermined rotation phase angle corresponding to the setting signal SSET. Therefore, the vibration device 11 generates vibration having a frequency and a vibration force corresponding to the setting signal SSET.

[1.4] Effects of First Embodiment As described above, according to the first embodiment, it is possible to arbitrarily set the frequency of the generated vibration and the exciting force within its adjustable range. And the adjustment need only be made by the setting unit 16. For example, the setting unit 16
If a configuration is provided in which the dial buttons are provided, the vibration frequency and the exciting force can be set to desired values only by operating the dial buttons. Therefore, it is possible to save time and effort for adjustment, and to respond more quickly to changes in the vibration frequency and the excitation force.

Further, since the eccentric weight 30A and the eccentric weight 30B are provided at substantially symmetrical positions on the end side of the ball bearing unit with respect to the hollow shaft 22 of the main motor, driving can be performed more stably. , Vibration device 1
1 can be reduced in size.

[2] Second Embodiment FIG. 2 is a half sectional view of a vibration device according to a second embodiment. The vibration device of the second embodiment differs from the vibration device of the first embodiment in that a rotation sensor for detecting the rotation phases of the rotating shaft and the hollow rotating shaft can be externally attached. Therefore, the configuration of the vibration system is the same as that of the first embodiment, and the detailed description is omitted.

[2.1] Configuration of Vibration Apparatus FIG. 4 is a half sectional view of the vibration apparatus. The vibration device 40 includes a casing 41, a main motor 43 having a hollow shaft 42 having a hollow cylindrical shape, and a shaft 44 inserted through the hollow shaft 42 and having the same rotation center axis as the rotation center axis of the hollow shaft 42. Adjusting motor 45 and eccentric weights 45A, 45 fixed to both ends of the hollow shaft 42
B, and eccentric weights 46A and 46B fixed to the shaft 44 near the end face of the hollow shaft 42.

Further, a rotation transmitting shaft 47 is provided on the hollow shaft 42 of the vibration device 40, has a cup shape, and rotates the rotation of the hollow shaft 42 through a space outside the rotatable range of the eccentric weight 46A. A direct connection shaft 48 for transmitting the force in the center extension direction (left direction in the drawing) is provided.

Further, the vibrating device 40 has ball bearing units 49A, 49B, 49C for rotatably holding the hollow shaft 42 and the directly connected shaft 48 in cooperation.
Ball bearing unit 50 and needle roller bearing unit 5 that rotatably support shaft 44 in cooperation with each other
1 is provided. The vibration device 40
The second rotation sensor 53 detects the rotational position of the hollow shaft 42 via the rotation transmission shaft 47 of the direct connection shaft 48 and the flexible joint 52 and outputs the second rotation phase signal SP2, and the shaft via the flexible joint 54. And a first rotation sensor 55 that detects the rotation position of the first rotation signal 44 and outputs a first rotation phase signal SP1.

[2.2] Operation of Exciting System The setting signal SSE from the setting unit 16 of the exciting system 10
When T is input, the controller 15 sets the setting signal SSET
Control signal S corresponding to the frequency of the excitation signal corresponding to
C1 is output to the first variable inverter 13. This makes the first
The variable inverter 13 varies the frequency of the AC power supply from the commercial power supply 12 and supplies the first drive signal SPW1 to the main motor 43.

As a result, the rotor of the main motor 43 rotates, and the hollow shaft 42, the directly connected shaft 48, and the eccentric weight 45 are rotated.
A and 45B rotate at a predetermined rotation speed corresponding to the frequency of the first drive signal SPW1.

In parallel with this, the second rotation sensor 53
The rotational position of the hollow shaft 22 is detected via the rotation transmission shaft 47 of the direct connection shaft 48 and the constant velocity flexible joint 52, and the second rotation phase signal SP2 is output to the controller 15. Also, the first
The rotation sensor 55 is connected to the shaft 44 (in a non-rotation state).
And outputs the first rotation phase signal SP1 to the controller 15.

Next, the controller 15 sets the setting signal SSET
And outputs to the second variable inverter 14 a second control signal SC2 substantially corresponding to the frequency of the excitation signal corresponding to. Thereby, the second variable inverter 14 varies the frequency of the AC power supply from the commercial power supply 12 based on the second control signal SC2 and supplies the second drive signal SPW2 to the adjustment motor 45.

As a result, the rotor of the adjusting motor 45 rotates, and the shaft 44 and the eccentric weights 46A and 46B rotate at a predetermined rotational speed corresponding to the frequency of the second drive signal SPW2.

At this time, based on the first rotational phase signal SP1 and the second rotational phase signal SP2, the controller 15 generates a centrifugal force vector indicating the direction of the centrifugal force caused by the eccentric weight 45A and the centrifugal force generated by the eccentric weight 46A. Of the centrifugal force vector indicating the direction of the centrifugal force to be calculated.

Then, the second control signal SC2 is adjusted so that the angle θ becomes the reference angle θREF corresponding to the setting signal SSET. When the angle θ similarly detected becomes the reference angle θREF corresponding to the setting signal SSET, the second control signal SC2 is given to the shaft a rotation speed equal to the rotation speed of the hollow shaft corresponding to the first control signal SC1. Becomes

As a result, the eccentric weights 45A and 45B and the eccentric weights 46A and 46B rotate while maintaining a predetermined rotation phase angle corresponding to the setting signal SSET. Therefore, the vibration device 40 generates vibration having a frequency and a vibration force corresponding to the setting signal SSET.

[2.3] Effects of Second Embodiment As described above, according to the second embodiment, it is possible to arbitrarily set the frequency and the exciting force of the generated vibration within the adjustable range. And the adjustment is performed by the setting unit 1
6, it is possible to save time and effort for adjustment and to respond more quickly to changes in the vibration frequency and the excitation force.

Further, since the eccentric weight 45A and the eccentric weight 45B are provided at the end of the hollow shaft 42 of the main motor with respect to the ball bearing units 49A and 49B, the driving can be performed more stably. , Vibration device 40
It is possible to reduce the size of the device itself.

In addition, according to the second embodiment,
Since the rotation sensors 53 and 54 can be provided on the outer surface and both ends of the vibration device 40, the rotation sensors can be arbitrarily set and attached according to detection accuracy and the like. Further, maintenance such as repair and adjustment of the rotation sensor can be facilitated.

[3] Modification of Embodiment In the description of each of the embodiments described above, a configuration in which the vibration frequency and the excitation force are adjusted in a stepless manner has been described. The vibration frequency and the excitation force can be switched in a stepwise manner.

[4] Effects of Embodiments According to each embodiment, even when various vibration frequencies and exciting forces are required, it is possible to cope without replacing the electric motor. Conventionally, two-pole, four-pole,
While it is necessary to prepare a plurality of three-phase induction motors such as six-pole and eight-pole motors and select them as needed, it is possible to deal with only a four-pole three-phase induction motor.

Further, the adjustment of the vibration frequency and the excitation force can be performed electrically from the setting unit, and the labor of the adjustment is greatly simplified.

[0048]

According to the present invention, since one vibration device can cope with various vibration frequencies and vibration forces, the number of motors to be prepared when constructing a vibration system is reduced. It becomes possible.

Further, since the vibration frequency and the vibration force of the vibration generated by the vibration device can be easily adjusted electrically, the trouble of the adjustment can be simplified and the adjustment time can be greatly reduced. it can.

[Brief description of the drawings]

FIG. 1 is a schematic configuration block diagram of a vibration system according to an embodiment.

FIG. 2 is a half sectional view of the vibration device of the first embodiment.

FIG. 3 is a diagram for explaining a relationship between an exciting force and a rotational phase difference.

FIG. 4 is a half sectional view of a vibration device according to a second embodiment.

FIG. 5 is a half sectional view of a conventional vibration device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 ... Exciting system, 11, 40 ... Exciting device, 12 ... Commercial power supply, 13 ... 1st variable inverter, 14 ... 2nd variable inverter, 15 ... Controller, 16 ... Setting unit, 21, 41 ... Casing, 22, 42: hollow shaft (hollow rotating shaft), 23, 43 ... main motor (second motor), 24, 44 ... shaft (rotating shaft), 25, 45 ... adjusting motor (first motor), 26, 53 ... 2 rotation sensor, 27, 55: first rotation sensor, 30A, 31B: eccentric weight (second eccentric weight), 31A, 31B: eccentric weight (first eccentric weight), 45A, 45B: eccentric weight (Second eccentric weight), 46A, 46B: eccentric weight (first eccentric weight), 47: rotation transmission shaft, 48: direct connection shaft, 52, 54: constant velocity flexible coupling SC1: first control signal, SC2 ... second control signal, SPW1 ... first Doshingo, SPW2 ... second driving signal, SP1 ... first rotational phase signal, SP2 ... second rotational phase signal, SSET ... setting signal SSET

Claims (9)

[Claims] 1. A first motor having a first eccentric weight, having a rotating shaft that rotates about a predetermined center of rotation, a first eccentric weight inserted through the rotating shaft, and a second eccentric weight provided. A second motor having a hollow cylindrical hollow rotation shaft rotating about the rotation center; a casing holding the first motor and the second motor; a first rotation detecting a rotation phase of the rotation shaft; A first rotation phase detection unit that outputs a phase detection signal; and a second rotation phase detection unit that detects a rotation phase of the hollow rotation shaft and outputs a second rotation phase detection signal. Exciter. 2. The vibration device according to claim 1, further comprising a pair of hollow rotary shaft holding means for rotatably holding the hollow rotary shaft at a substantially symmetrical position separated by a predetermined distance, wherein the second eccentricity is provided. The weight is constituted by at least one pair of eccentric weights provided at substantially symmetric positions on both ends of the hollow rotary shaft with respect to each of the rotary shaft holding means. apparatus. 3. A first motor having a first eccentric weight, having a rotating shaft that rotates about a predetermined center of rotation, a second eccentric weight being inserted through the rotating shaft, A second electric motor having a hollow cylindrical hollow rotation shaft that rotates about the rotation center; and extending the rotation center by rotating the hollow rotation shaft through a space outside a rotatable range of the first eccentric weight. A rotation transmission member for transmitting the rotation in the direction, a rotation shaft holding member supported by the rotation transmission member and rotatably holding the rotation shaft, and a casing holding the first electric motor and the second electric motor. A vibration device, comprising: 4. The vibration device according to claim 3, further comprising a pair of hollow rotary shaft holding means for rotatably holding the hollow rotary shaft at a substantially symmetrical position separated by a predetermined distance, and wherein the second eccentricity is provided. The weight is constituted by at least one pair of eccentric weights provided at substantially symmetric positions on both ends of the hollow rotary shaft with respect to each of the rotary shaft holding means. apparatus. 5. The vibration device according to claim 3, wherein the rotation transmission member has a cup shape provided with a rotation transmission shaft, and the rotation shaft holding member includes a plurality of needle rollers. A vibration device having a bearing. 6. The vibration device according to claim 1 or 2, a rotation speed control means for controlling rotation speeds of the rotation shaft and the hollow rotation shaft, a first rotation phase detection signal and the second rotation phase detection signal. A rotation phase difference detection means for detecting a rotation phase difference between the rotation shaft and the hollow rotation shaft based on a rotation phase detection signal; and rotating a relationship between a magnitude of a vibration force generated in the vibration device and the rotation phase difference. A rotational phase difference control information storage unit that stores in advance as phase difference control information; and a rotational phase difference corresponding to a magnitude of a vibrating force to be generated in the vibrating device based on the rotational phase difference control information. And a phase difference holding control means for holding a rotational phase difference of the hollow rotary shaft. 7. A vibrating device according to claim 3, wherein: a rotational speed control means for controlling the rotational speeds of the rotary shaft and the hollow rotary shaft; and a rotational phase of the rotary shaft. First rotation phase detection means for detecting and outputting a first rotation phase detection signal; second rotation phase detection for detecting a rotation phase of the hollow rotation shaft via the rotation transmission member and outputting a second rotation phase detection signal Means, a rotation phase difference detection means for detecting a rotation phase difference between the rotation shaft and the hollow rotation shaft based on the first rotation phase detection signal and the second rotation phase detection signal, and the vibration device generates the rotation phase difference. Rotation phase difference control information storage means for storing in advance the relationship between the magnitude of the excitation force and the rotation phase difference as rotation phase difference control information; and an excitation device to be generated by the vibration device based on the rotation phase difference control information. Against the magnitude of the vibration And a phase difference holding control means for holding a rotation phase difference between the rotation shaft and the hollow rotation shaft at a corresponding rotation phase difference. 8. The method for controlling a vibration system for controlling a vibration device according to claim 1 or 2, wherein a rotation speed control step of controlling rotation speeds of the rotating shaft and the hollow rotating shaft; A rotation phase difference detection step of detecting a rotation phase difference between the rotation shaft and the hollow rotation shaft based on the one rotation phase detection signal and the second rotation phase detection signal; and a vibration generated in the vibration device stored in advance. The rotation shaft and the hollow rotation shaft are provided with a rotation phase difference corresponding to a magnitude of a vibration force to be generated in the vibration device based on rotation phase difference control information representing a relationship between a magnitude of a force and the rotation phase difference. And a phase difference holding control step of holding the rotational phase difference. 9. A method for controlling a vibration system for controlling a vibration device according to claim 3, wherein the rotation speed of the rotation shaft and the hollow rotation shaft is controlled. A first rotation phase detection step of detecting a rotation phase of the rotation shaft; a second rotation phase detection step of detecting a rotation phase of the hollow rotation shaft via the rotation transmission member; Rotation phase difference detection for detecting a rotation phase difference between the rotation shaft and the hollow rotation shaft based on the rotation phase of the rotation shaft detected in the step and the rotation phase of the hollow rotation shaft detected in the second rotation phase detection step And a magnitude of a vibration force to be generated in the vibration device based on rotational phase difference control information representing a relationship between the magnitude of the vibration force generated in the vibration device and the rotational phase difference stored in advance. Times corresponding to The method of vibration system, characterized in that it and a phase difference holding control step of holding the rotational phase difference of the rotary shaft and the hollow rotating shaft to the phase difference.