JP2000009142A - Manufacture of bearing device and bearing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To manufacture a bearing device provided with each bearing high in reliability with no fear of unevenness in rotation of each rotor wherein each bearing is stably and firmly joined with a housing by means of a simple method. SOLUTION: In a manufacturing method of a bearing device including each bearing formed out of a porous sintered body, and a housing capable of housing each bearing and each rotor supported by each bearing, each aforesaid bearing and the housing 2 are sintered so as to be joined together when sintering and forming each bearing. It is preferable that the sintering is carried out by means of discharge plasma sintering process, and each bearing is perferably formed out of powder material 7 of an average grain size of 1 to 10 mm by means of sintering. The power material 7 formed out of an alloy of Cu-Sn is most preferable.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a bearing device, and more particularly to a method of manufacturing a sliding bearing device having a porous bearing.

[0002]

2. Description of the Related Art For example, a fluid bearing such as a hydrostatic air bearing supplies air from pores of a porous bearing to form a thin air layer between a bearing surface and a sliding surface of a rotating shaft. In this way, the rotating shaft is supported and the rotating shaft is smoothly rotated.

However, if the pores of the bearing are formed non-uniformly, the flow and supply of air will be uneven, resulting in uneven rotation of the rotating shaft. Such uneven rotation tends to appear more conspicuously as the bearing becomes smaller.

In general, a bearing and a housing for accommodating the bearing are joined by a method such as adhesive, screwing, interference fitting, or the like. However, when using these joining methods,
Depending on the operating conditions such as the number of rotations and the rotation time of the rotating shaft, the joining force between the bearing and the housing may decrease over time, which may lead to a shortage of supply air or galling of the bearing due to whirling of the rotating shaft. There was a problem.

Further, in the case of joining by screwing or interference fitting, after forming the bearing, it is necessary to perform secondary processing for joining, such as providing a screw hole in the bearing or housing. In addition, steps such as alignment, screwing, and fitting of joints are required, and there is a problem that manufacturing (assembly) of the bearing structure is complicated and time-consuming.

In order to solve these problems, the manufacture of the bearing and the joining of the bearing and the housing are performed by a sintering method such as hot press sintering (HP) or hot isostatic sintering (HIP). Methods have also been proposed. However, there are problems such as difficulty in controlling the sintering energy, a long time for sintering, and limitations on the materials to be joined.

[0007]

SUMMARY OF THE INVENTION An object of the present invention is to stably and firmly join a bearing and a housing by a simple method,
Provided are a method of manufacturing a bearing device having a highly reliable bearing that does not cause rotation unevenness of a rotating body, and a bearing device manufactured by the method.

[0008]

This and other objects are achieved by the present invention which is defined below as (1) to (26).

(1) In a method of manufacturing a bearing device having a bearing made of a porous material and a housing capable of accommodating the bearing and a rotating body supported by the bearing, the bearing and the housing are subjected to discharge plasma sintering. A method for manufacturing a bearing device, comprising joining by a method.

(2) The sintering temperature at the time of the joining is 500-500.
The method for producing a bearing device according to the above (1), wherein the temperature is 1000 ° C.

(3) The pressure at the time of joining is 100 to 10
The method for producing a bearing device according to the above (1) or (2), which is 00 kgf / cm ² .

(4) The method of manufacturing a bearing device according to any one of (1) to (3), wherein the bearing is formed by a sintering method.

(5) The method for manufacturing a bearing device according to (4), wherein the sintering method is spark plasma sintering.

(6) The bearing (4) or (5), wherein the bearing is formed by sintering a powder material having an average particle size of 1 to 10 mm.
3. The method for manufacturing a bearing device according to claim 1.

(7) The powder material is mainly Cu-S
The method for manufacturing a bearing device according to the above (6), wherein the bearing device is made of an n alloy.

(8) The Cu content of the alloy is 60 to 9
The method for producing a bearing device according to the above (7), wherein the content is 5 wt%.

(9) The method of manufacturing a bearing device according to any one of (1) to (8), wherein the bearing has a hole communicating between the front and back surfaces.

(10) The open porosity of the bearing is 30 to 60.
%. The method of manufacturing a bearing device according to any one of (1) to (9) above,

(11) The method for manufacturing a bearing device according to any one of (1) to (10), wherein the bearing device is a hydrostatic air bearing device.

(12) In a method of manufacturing a bearing device having a bearing made of a porous sintered body and a housing capable of accommodating the bearing and a rotating body supported by the bearing, the method includes the steps of: A method for manufacturing a bearing device, comprising sintering a bearing and the housing.

(13) The method of manufacturing a bearing device according to (12), wherein the sintering is performed by a spark plasma sintering method.

(14) The sintering temperature during the sintering is 500-500.
The method for producing a bearing device according to the above (12) or (13), wherein the temperature is 1000 ° C.

(15) The sintering pressure is 100 to 10
The method for producing a bearing device according to any one of the above (12) to (14), wherein the bearing device has a pressure of 00 kgf / cm ² .

(16) The bearing (12) to (15), wherein the bearing is formed by sintering a powder material having an average particle diameter of 1 to 10 mm.
The manufacturing method of the bearing device according to any one of the above.

(17) The powder material is mainly Cu-S
The method for producing a bearing device according to the above (16), comprising an n alloy.

(18) The alloy having a Cu content of 60 to 9
The method for producing a bearing device according to (17), wherein the content is 5 wt%.

(19) The method of manufacturing a bearing device according to any one of the above (12) to (18), wherein the bearing has a hole communicating between the front and back surfaces.

(20) The open porosity of the bearing is 30 to 60.
%. The method for manufacturing a bearing device according to any one of the above (12) to (19), wherein

(21) The method of manufacturing a bearing device according to any one of the above (12) to (20), wherein the bearing device is a hydrostatic air bearing device.

(22) The method of manufacturing a bearing device according to any one of (12) to (21), wherein an intermediate molded body is formed in the housing before the sintering.

(23) The intermediate molded body is made of a mixture containing a hardly sinterable material and a resin hardener.
3. The method for manufacturing a bearing device according to claim 1.

(24) The method of manufacturing a bearing device according to the above (23), wherein the mixture contains the hardly sinterable material and the resin hardening agent in a ratio of 6: 4 to 9: 1.

(25) The method for manufacturing a bearing device according to (23) or (24), wherein the hardly sinterable material is alumina.

(26) A bearing device manufactured by any one of the above (1) to (25).

[0035]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A method for manufacturing a bearing device according to the present invention will be described below with reference to FIGS. 1 to 6 are longitudinal sectional views showing a first embodiment of a method for manufacturing a bearing device.

The method of manufacturing a bearing device according to the present invention is, for example, as shown in FIG. 6, a housing 2 capable of accommodating a bearing 4 made of a porous sintered body and a rotating body 19 supported by the bearing 4 and the bearing 4. And a method of manufacturing the bearing device 1 having:
When the bearing 4 is formed by sintering, the bearing 4 and the housing 2 are joined by sintering.

First, a cylindrical housing 2 as shown in FIG. 1 is formed. The housing 2 has a space 3 in which at least a bearing and a rotating body supported by the bearing can be accommodated. The housing 2 has a passage communicating the space 3 with the outside, and has an air supply port 5 for supplying a fluid (gas) into the space 3 and an exhaust port 6 for discharging the fluid from the inside. Is provided.

The method of forming the housing 2 is not particularly limited, and is formed by, for example, machining using a lathe, a milling machine, or the like.

As the constituent material of the housing 2, for example, an Fe-based alloy such as SUS steel, SS steel, SK steel, SKS steel, etc.
Metal materials such as Cu-based alloys, Al-based alloys, and Cd-based alloys, various ceramic materials, and composite materials of metals and ceramics can be used.

Next, an intermediate molded body 31 is formed in the space 3 as shown in FIG. The intermediate molded body 31 functions as a middle mold that determines the shape, size, and position of a bearing described later, and plays a role of securing a fluid flow path.

The intermediate molded body 31 is preferably formed from a mixture containing, for example, a hardly sinterable material and a resin hardener such as an epoxy resin. Thereby, the intermediate molded body 31 can maintain its shape retaining property until the sintering formation of the bearing is completed,
The shape and dimensions of the bearing can be precisely formed.

The space 3 is filled with the above mixture through the air supply port 5. Thereafter, the resin-made curing agent in the mixture is solidified by heating or the like, whereby the intermediate molded body 31 is formed. At this time, it is preferable that a molding die for molding the intermediate molded body 31 is inserted into the space 3.

The hardly sinterable material constituting the intermediate molded body 31 is not particularly limited, but is preferably a material whose state such as melting and vaporization does not change at least under the sintering conditions described later. By using the hardly sinterable material, it is possible to prevent the material from sticking to the inner wall surface of the housing 2 or a powder material to be described later even after the sintering process. Examples of such a non-sinterable material include ceramic materials such as zirconia and alumina, and materials having a high sintering temperature such as titanium and mica.
These may be used alone or in combination of two or more.

It is preferable to use a spherical powder as the hardly sinterable material. Thereby, the intermediate molded body 31 can have a predetermined strength, easily collapse after the sintering process, and can be easily removed.

The average particle size of the spherical powder of the non-sinterable material is as follows:
It is preferably about 0.5 to 2 mm. By setting the particle diameter in this range, the intermediate molded body 31 can have excellent shape maintaining properties and can be easily taken out after sintering.

On the other hand, the hardening agent made of resin is not particularly limited. For example, thermosetting resins such as epoxy resin, phenol resin, urea resin, melamine resin, polyester resin, polyimide resin, silicone resin, polyurethane resin, etc. And one or two of these
It is also possible to use a mixture of species or more.

In the mixture, the mixing ratio of the hardly sinterable material to the resin hardening agent is preferably about 6: 4 to 9: 1. By setting the mixing ratio in this range, the mixture has appropriate fluidity to fill the space 3 and is excellent in handleability. Further, the strength and shape retention of the intermediate molded body 31 formed by solidification can be favorably obtained.

The space 3 in which the intermediate molded body 31 is formed is filled with the powder material 7 constituting the bearing 4.

As shown in FIG. 3, the housing 2 is mounted between a pair of conductive carbon forming dies 10a. Then, the mold 14 and the mold 15a are mounted on the housing 2.

Next, the powder material 7 is placed in the space 3 of the housing 2.
Fill. At this time, it is preferable that the powder material 7 can be filled also in the mold 14. As a result, a required amount of the powder material 7 is filled in anticipation of a reduction in volume due to compression during sintering, and a sintered body (bearing) having a desired size can be formed.

The average particle size of the powder material 7 is
Is preferably larger than the interval of the gap 9 that forms the flow path 61 communicating with the air passage. Thus, the flow path 61 is secured without the powder material 7 entering the gap 9.

Alternatively, as the mold 15a, a mold 15c having a shape as shown in FIG. 4 can be used. In this case, since the gap 9 is not formed, the average particle size of the powder material 7 is not particularly limited in relation to the gap 9.

The powder material 7 is preferably a spherical powder, and its average particle size is preferably 1 to 10 mm.
2-6 mm is more preferred. By setting the particle diameter in this range, it is possible to easily form a hole communicating between the front and back surfaces through which the fluid can pass. If the average particle diameter of the powder material 7 is less than 1 mm, the bearing 4 formed by sintering the powder material 7 becomes too dense, and may not be able to function sufficiently as a bearing such as a fluid bearing. If it exceeds 10 mm, the sintered body (bearing) may have too large a pore diameter or porosity, and may not have sufficient strength.

The constituent material of the powder material 7 is not particularly limited, and metal materials such as Fe, Cu, Zn, Ni, Al or alloys thereof, and cemented carbides, metal oxides, carbides, nitrides, and boron Examples include various ceramic materials such as oxides and fluorides, cermet materials, intermetallic compounds, and composite materials thereof, among which metal materials are preferred, and Cu-Sn alloys are particularly preferred. Cu-Sn alloy has a lower sintering temperature than ceramic materials and other metal materials, and its sintered body is excellent in terms of wear resistance, durability, etc., and has excellent toughness and excellent workability. Secondary processing can be easily performed.

Mold 14 and mold 15a or mold 15c
Preferably, conductive carbon paper or the like is interposed between the powder material 7 and the powder material 7. Thereby, it is possible to prevent the powder material 7 and the carbon contained in the material of the mold from reacting and being fixed during sintering.

The Cu content of the Cu—Sn alloy is 60 to 95.
wt% is preferred, and 80 to 95 wt% is more preferred. Thereby, a sintered body (bearing) having higher toughness and better workability can be formed.

Next, a bearing is sintered and formed while applying a pressure to the powder material 7 by a pair of pressure punches 13a and a sintering forming punch 11a. As a result, the processing steps can be greatly simplified, and the manufacturing cost can be reduced.

The sintering method is not particularly limited, and examples thereof include a hot press sintering method, a hot isostatic sintering method, a normal pressure sintering method, and a discharge plasma sintering method. Is preferred.

In the discharge plasma sintering method (SPS method), pulsed electric energy is directly applied to the gap between particles, and the high energy of the discharge plasma instantaneously generated by the spark discharge phenomenon is effectively applied to thermal diffusion, electric field diffusion, and the like. Is a kind of solid compression sintering applied to

As described above, the SPS method is extremely excellent in thermal efficiency because of the direct heat generation method by electric discharge, and has the advantage that a uniform and high-quality sintered body can be easily obtained by uniform heating by dispersing the electric discharge points. It has excellent features such as good controllability of sintering energy, ease of handling operation, safety and good reliability.

Further, sinter molding or sinter bonding can be performed in a short time of about 5 to 20 minutes including the time of temperature rise and holding.
Furthermore, porous sintering, which is usually difficult, can be easily performed, and has a uniform and large number of holes penetrating between the front and back surfaces,
A porous sintered body suitable as a fluid bearing such as an air bearing can be manufactured. By controlling the sintering conditions, the pore size, open porosity, etc. of the sintered body can be freely adjusted. Therefore, the bearing device manufactured according to the present invention exerts a good bearing function because the fluid (air or the like) is uniformly supplied from the porous bearing.

Further, by sinter-joining the bearing 4 and the housing 2 by the SPS method, even if different materials or a small ground contact area can be easily and surely joined, an arbitrary material design is possible. .

The sintering temperature is not particularly limited.
It is preferably about 1000 ° C, more preferably 700 to 900 ° C. If the sintering temperature is too low, the strength, toughness, bonding strength, etc. of the sintered body (bearing 4) may not be sufficiently obtained, while if the sintering temperature is too high, cracks may occur in the sintered body. There is.

The holding time at the above sintering temperature is 3 to 10 mi.
n is preferred. By setting the holding time in this range, the strength of the sintered body and the bonding strength can be sufficiently obtained,
Oversintering and the like can be prevented.

The pressure during sintering is 100 to 1000 kg.
f / cm ² is preferable, and about 150 to 500 kgf / cm ² is more preferable. If the pressure during sintering is too low, the sintered body (bearing 4)
If the pressure is too high, the sintered body becomes excessively dense, and a material that cannot function well as a hydrodynamic bearing such as a hydrostatic air bearing may be formed. is there. Further, the pressure resistance of the mold 14 and the forming die 10a becomes a problem. The sintering temperature and pressure may be changed continuously or stepwise.

The bearing 4 formed by sintering the powder material 7 as described above is preferably a porous body, and more preferably has a hole communicating between the front and back surfaces. Thus, a fluid such as air can be supplied or exhausted through the communication hole, and a bearing function is exhibited.

The open porosity of the bearing 4 is preferably 30 to 60%, more preferably 35 to 40%. If the open porosity is less than 30%, the bearing 4 may not be able to sufficiently permeate the fluid, and may not be able to function sufficiently as a bearing.
On the other hand, if the open porosity exceeds 60%, the strength may be reduced.

After sintering the bearing 4 by sintering and joining with the housing 2, the molding die 10 a, the pressure punch 13 a and the sintering punch 11 a are removed and cooled, and the housing 2 is taken out.

By removing the mold 15a from the housing 2 and removing the intermediate molded body 31, a processed body as shown in FIG. 6 is obtained.

As shown in FIG. 4, when the mold 15c has a shape that cannot be removed, if the mold 15c is made of carbon or the like, the mold 15c can be removed from the housing 2 while being crushed.

In the intermediate molded body 31, the resin hardener is carbonized by the sintering step, and only the hardly sinterable material remains. Therefore, the powder made of the hardly sinterable material can be easily supplied to the air supply port 5.
Can be taken from.

Next, a tap such as a pipe taper screw R1 / 4, for example, is provided around the air supply port 5 of the housing 2 so as to connect an air joint as shown in FIG.
7 is formed.

Further, both end portions of the bearing 4 and the housing 2 and the inner diameter portion of the bearing 4 are finished to designated dimensions by a plane grinder, a cylindrical grinder, or the like. The rigidity of the bearing device 1 is determined by adjusting the clearance with the rotating body 19 by this processing.

Finally, the shaft portion of the rotating body 19 is inserted into the hollow portion 41 for insertion and final adjustment is performed, and the bearing device 1 is obtained.

The bearing device 1 thus manufactured is not particularly limited, but is preferably a sliding bearing device.
Hydrodynamic bearing devices are more preferred, and hydrostatic air bearing devices are even more preferred. In the bearing structure of the hydrostatic air bearing device, a porous body is used for an air supply portion. According to the method of the present invention, a bearing having excellent strength and a uniform porous body can be formed. Further, the bearing and the housing can be firmly joined by a simple method, and a bearing structure having an excellent bearing function can be stably formed.

Next, the second method of the method for manufacturing a bearing device according to the present invention will be described.
An embodiment will be described. 7 to 10 are longitudinal sectional views showing the manufacturing process of the bearing device of the present embodiment. Hereinafter, differences from the above-described first embodiment will be mainly described.

In this embodiment, the bearing 4 made of a porous material is used.
And a method of manufacturing the bearing device 1 having the bearing 4 and the housing 2 capable of housing the rotating body 19 supported by the bearing 4, wherein the bearing 4 and the housing 2 are joined by a discharge plasma sintering method. I do.

By joining the bearing 4 and the housing 2 by the discharge plasma sintering method, even if different materials or a small ground contact area are small, they can be easily and reliably joined in a short time. Material design becomes possible. In particular, according to the present embodiment, even in a combination in which it is difficult to simultaneously form the bearing and join the bearing and the housing due to restrictions on the sintering characteristics of each material, the simple and reliable A high bearing device can be manufactured.

First, a cylindrical housing 2 as shown in FIG. 1 is formed. As a method of forming the housing 2 and constituent materials, the same as those in the first embodiment can be used.

Next, the bearing 4 shown in FIGS.
To form The bearing 4 has a ring shape and is provided with a hollow portion 41 for supporting the rotating body at the center.

The bearing 4 is preferably a porous body, and more preferably has a hole communicating between the front and back surfaces. Thus, a fluid such as air can be circulated through the communication hole.

The open porosity of the bearing 4 is preferably 30 to 60%, more preferably 35 to 40%. If the open porosity is less than 30%, the bearing 4 may not be able to sufficiently pass the fluid, and may not be able to function sufficiently as a bearing.
On the other hand, if the open porosity exceeds 60%, the strength may be reduced.

The method of forming the bearing 4 is not particularly limited.
The sintering method is preferred, and the spark plasma sintering method is more preferred.

As a result, a porous sintered body having uniform and many holes penetrating between the front and back surfaces can be manufactured, and a bearing more suitable as a fluid bearing such as an air bearing can be manufactured. Further, by controlling the sintering conditions, the pore diameter, open porosity and the like of the sintered body can be freely adjusted.

FIG. 7 is a schematic longitudinal sectional view when the bearing 4 is formed by the spark plasma sintering method. As shown in the drawing, the molding material 12 is filled with the powder material 7, and discharge plasma sintering is performed while applying pressure by a pair of upper and lower pressing punches 13c and a sintering forming punch 11c. The forming die 12 and the sintering forming punch 11c are formed of conductive carbon or the like, and pulse current generated by a sintering power supply (not shown) is applied to the forming die 12, the pressing punch 13c and the sintering It is configured to flow into the powder material 7 via the forming punch 11c.

At this time, it is preferable that conductive carbon paper or the like is interposed between the molding material 12 and the sintering molding punch 11 c and the powder material 7. Thus, during sintering, the powder material 7 and the constituent material of the molding die 12 react with each other, and the problem that the powder material 7 is fixed to the inner wall surface of the molding die 12 can be prevented.

As in the case of the first embodiment, the bearing 4 is preferably formed by sintering a powder material 7 which is a spherical powder and has an average particle size of 1 to 10 mm. Thereby, a bearing having a hole communicating between the front and back surfaces can be more easily formed. If the average particle diameter of the powder material 7 is less than 1 mm, the bearing 4 formed by sintering the powder material 7 becomes too dense, and may not be able to function sufficiently as a bearing such as a fluid bearing. If it exceeds 10 mm, the pore diameter and the porosity of the sintered body (bearing) become too large, and the strength may be reduced.

The constituent material of the powder material 7 is not particularly limited, and the same materials as those in the first embodiment can be used. In particular, a Cu—Sn alloy is particularly preferable. Cu
-Sn alloy has a lower sintering temperature than ceramic materials and other metal materials, and its sintered body is excellent in wear resistance, durability, etc., and has excellent toughness and excellent workability. Secondary processing is easy. The Cu content of the Cu-Sn alloy is preferably 60 to 95 wt%, and 80 to 9 wt%.
5 wt% is more preferred.

Further, the bearing 4 by pressurization in the next joining step
It is preferable that the axial length of the bearing 4 at the time of molding is slightly larger than that at the time of completion of the bearing device.

The bearing 4 formed as described above is arranged at a predetermined position of the housing 2 manufactured earlier.

Next, as shown in FIG. 10, the housing 2 is mounted between a pair of conductive carbon forming dies 10b. Further, the mold 15 b is inserted into the hollow portion 41 of the bearing 4. It is preferable that conductive carbon paper or the like be interposed between the molding die 10b and the housing 2 for the same reason as in the first embodiment.

In this state, a pair of upper and lower pressure punches 1
3b, spark plasma sintering is performed while applying pressure by the sintering forming punch 11b.

The sintering temperature is not particularly limited,
It is preferably about 1000 ° C, more preferably 700 to 900 ° C. If the sintering temperature is too low, sufficient bonding strength may not be obtained, while if the sintering temperature is too high, the bearing 4
Cracks may occur.

The holding time at the sintering temperature is preferably about 3 to 10 minutes for the same reason as in the first embodiment.

Further, the pressure at the time of joining is 100 to 1000 kg.
f / cm ² is preferable, and about 150 to 500 kgf / cm ² is more preferable. If the pressure during sintering is too low, the bonding strength may be insufficient, while if the pressure is too high, the mold 15
b, The pressure resistance of the forming die 10b becomes a problem.

Finally, the connecting portion 17 was provided, the rotating body 19 was attached, and final adjustment was performed in the same manner as in the first embodiment, thereby producing the bearing device 1 as shown in FIG.

The bearing device 1 manufactured as described above has a first
Although not particularly limited as in the case of the embodiment, a sliding bearing device is preferable, a hydrodynamic bearing device is more preferable, and a hydrostatic air bearing device is further preferable. ADVANTAGE OF THE INVENTION According to the method of this invention, the bearing structure which is excellent in intensity | strength and has a homogeneous porous body can be manufactured stably and easily. Therefore, the bearing device manufactured according to the present invention exhibits a good bearing function because the fluid (air or the like) is uniformly supplied from the porous bearing.

The embodiments of the method of manufacturing the bearing device of the present invention have been described above. However, the present invention is not limited to these embodiments. For example, the bearing 4 may be made of a functionally graded material. Further, an intermediate substance may be interposed at the joint between the housing 2 and the bearing 4 to improve the joint strength.

The sintering temperature and the pressure may be changed stepwise or continuously during the sintering of the bearing or the joining of the bearing and the housing.

[0100]

Next, specific examples of the present invention will be described.

1. Production of bearing device (Example 1)

First, as shown in FIG.
US 2440C) cylindrical bored housing 2
For example, it is manufactured by machining using a lathe or a milling machine. The housing 2 had a total length of 72 mm and an outer diameter of 40 mm.

Next, after inserting the middle mold into the housing 2, a mixture of alumina beads (average particle size: 1 mm) and epoxy resin (mixing ratio: 8: 2) is filled from the air supply port 5, and the space 3 and the supply space are filled. The mouth 5 was filled. After filling, the housing 2 was heated to 50 ° C. to solidify the resin, thereby forming the intermediate molded body 31.

As shown in FIG. 3, both sides of the housing 2 are sandwiched between a pair of forming dies 10a,
4 was attached.

Thereafter, bronze beads having an average particle size of 2 mm (Cu
-Sn alloy (Cu: 90 wt%) was filled in the housing 2.

The powder material 7 is formed by a pair of pressure punches 13a.
While pressurizing, was subjected to spark plasma sintering. The sintering conditions are as follows: sintering temperature: 700 ° C., holding time: 3 min, pressure: 2
It was 50 kgf / cm ² .

After cooling, the housing 2 was taken out of the spark plasma sintering apparatus, and the mold 15a and the intermediate molded body 31 were removed.

The epoxy resin as a constituent material of the intermediate molded body 31 was carbonized by a sintering process, and the alumina beads were taken out from the air supply port 5.

[0109] Both end surfaces of the housing 2 were finished to predetermined dimensions with a surface grinder, and a tapping process of a pipe taper screw R1 / 4 was performed on the air supply port 5 to form a connection portion 17 to which an air joint could be connected.

Further, the inner diameter of the bearing 4 was processed by a cylindrical grinder or the like so that the inner diameter of the bearing 4 was 8 mm and the clearance from the shaft diameter of the rotating body 19 was about 10 μm.

Finally, the rotating body 19 is inserted into the hollow portion 41 of the bearing 4.
Insert the rotating shaft and attach the flange 20 to both ends of the shaft.
The adjustment was performed to produce the bearing device 1 of the hydrostatic air bearing device. Table 1 shows sintering conditions, constituent materials, and the like.

[0112]

[Table 1]

(Example 2) First, a housing 2 was manufactured in the same manner as in Example 1.

Next, using the same bronze beads as in Example 1 (average particle diameter: 2 mm, Cu: 90 wt%), the bearing 4 as shown in FIGS. Formed. The sintering conditions were as follows: sintering temperature: 700 ° C., holding time: 3 min, pressure: 250 kgf / cm ² .

The two bearings 4 thus formed were placed in the housing 2 prepared as shown in FIG. afterwards,
The housing 2 is sandwiched between a pair of forming dies 10b,
Was inserted into the hollow portion 41. While applying pressure by the sintering forming punch 11b and the pressing punch 13b, sintering and joining were performed by the discharge plasma sintering method. The sintering conditions at this time were as follows: sintering temperature: 700 ° C., holding time: 3 min, pressure: 250 kgf /
cm ² .

Finally, the connecting portion 17 is provided on the housing 2 in the same manner as in the first embodiment, the rotating body 19 is further attached, the connecting portion 17 is formed, and the housing and the like are subjected to finishing processing as shown in FIG. The bearing device 1 of the hydrostatic air bearing device was manufactured. Table 1 shows sintering conditions, constituent materials, and the like.

[0117] 2. Function Evaluation of Bearing Device The following evaluation was performed on the bearings of the bearing devices manufactured in Example 1 and Example 2.

Open porosity The open porosity of the bearing is calculated by measuring the weight and volume of the manufactured bearing and using the following formula (I) from the density of the bearing constituent material.

Open porosity = (1-B / A) ÷ C × 100 (I) A: Bearing volume [cm ³ ] B: Bearing weight [g] C: Bearing configuration Material density [g / cm ³ ]

Bearing Performance A turbine was attached to the rotating body, and the rotating body was continuously rotated at 30,000 rpm for one week by blowing air on the turbine, and it was confirmed whether or not the bearing and the housing were galling.

Further, the displacement of the side and end faces of the flange during rotation was checked, and the presence or absence of a runout of 0.1 μm or more was confirmed by a laser displacement meter.

The evaluation method was as follows: 場合 when the displacement was less than 0.1 μm, and × when the displacement was 0.1 μm or more.

Further, a load was applied to the side surface and the end surface of the flange, and the amount of displacement was measured to determine the radial axial rigidity of the bearing device. Table 1 shows the results.

It was found that all the bearings manufactured in each of the examples had an open porosity of 30% or more, had high gas permeability, and could supply air stably.

Also, since there is almost no displacement or deflection of the rotating body (shaft) during rotation, the pores of the bearing are formed uniformly, and the air supply is made even. It was found that they were firmly joined.

[0126]

As described above, according to the method of manufacturing a bearing device of the present invention, a bearing device can be easily manufactured in a short time. Further, in the bearing structure of the bearing device, the joining between the housing and the bearing is reliably performed, and the joining force does not decrease with time.

If the bearing and the housing are joined by the discharge plasma sintering method, the joining can be easily and surely performed even when different materials are used or the ground contact area is small.
Arbitrary material design becomes possible.

When a bearing is manufactured by the spark plasma sintering method, the fine pores are formed with a high open porosity and uniformly, so that a good bearing function is exhibited. Further, by controlling the sintering conditions, the pore size, open porosity, etc. of the sintered body can be freely selected and adjusted.

In the bearing device thus manufactured, the bearing and the housing are stably and firmly joined, and there is no rotation unevenness of the rotating body and the reliability is high.

Further, even if continuous operation is performed under severe use environment such as supply of air containing high temperature, high humidity or oil, the joint state between the bearing and the housing is maintained well.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view showing a first embodiment of a method for manufacturing a bearing device of the present invention.

FIG. 2 is a longitudinal sectional view showing a first embodiment of a method for manufacturing a bearing device of the present invention.

FIG. 3 is a longitudinal sectional view showing a first embodiment of a method for manufacturing a bearing device of the present invention.

FIG. 4 is another longitudinal sectional view showing the first embodiment of the method for manufacturing a bearing device of the present invention.

FIG. 5 is a longitudinal sectional view showing a first embodiment of a method for manufacturing a bearing device of the present invention.

FIG. 6 is a longitudinal sectional view showing an example of a bearing device manufactured by the method for manufacturing a bearing device of the present invention.

FIG. 7 is a longitudinal sectional view showing a second embodiment of the method for manufacturing a bearing device of the present invention.

FIG. 8 is a longitudinal sectional view showing a second embodiment of the method for manufacturing a bearing device of the present invention.

FIG. 9 is a longitudinal sectional view showing a second embodiment of the method for manufacturing a bearing device of the present invention.

FIG. 10 is a longitudinal sectional view showing a second embodiment of the method for manufacturing a bearing device of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Bearing device 2 Housing 3 Space 31 Intermediate molded object 4 Bearing 41 Hollow part 5 Air supply port 6 Exhaust port 61 Flow path 7 Powder material 8 Space 9 Gap 10a, 10b Molding dies 11a, 11b, 11c Sintering molding punch 12 Molding Mold 13a, 13b, 13c Pressing punch 14 Mold 15a, 15b, 15c Mold 17 Connection part 19 Rotating body 20 Flange

Claims (26)

[Claims] 1. A method of manufacturing a bearing device having a bearing made of a porous body, and a housing capable of accommodating the bearing and a rotating body supported by the bearing. A method for manufacturing a bearing device, comprising: 2. The sintering temperature at the time of joining is 500 to 100.
The method for producing a bearing device according to claim 1, wherein the temperature is 0 ° C. 3. The pressure at the time of joining is 100 to 1000 kg.
^{3. The} method for producing a bearing device according to claim 1, wherein f / cm ² is f / cm ² . 4. The method according to claim 1, wherein the bearing is formed by a sintering method. 5. The method according to claim 4, wherein the sintering method is spark plasma sintering. 6. The method according to claim 4, wherein the bearing is formed by sintering a powder material having an average particle diameter of 1 to 10 mm. 7. The method for manufacturing a bearing device according to claim 6, wherein the powder material is mainly composed of a Cu—Sn alloy. 8. The alloy having a Cu content of 60 to 95 wt%.
The method for manufacturing a bearing device according to claim 7, wherein 9. The method of manufacturing a bearing device according to claim 1, wherein the bearing has a hole communicating between the front and back surfaces. 10. The method for manufacturing a bearing device according to claim 1, wherein the open porosity of the bearing is 30 to 60%. 11. The method according to claim 1, wherein the bearing device is a hydrostatic air bearing device. 12. A method of manufacturing a bearing device comprising: a bearing made of a porous sintered body; and a housing capable of accommodating the bearing and a rotating body supported by the bearing, wherein the bearing is formed when the bearing is sintered. A method for manufacturing a bearing device, comprising: sintering a housing to the housing. 13. The method according to claim 12, wherein the sintering is performed by a spark plasma sintering method. 14. The sintering temperature during sintering is 500 to 10
The method for manufacturing a bearing device according to claim 12 or 13, wherein the temperature is 00 ° C. 15. The pressure during sintering is 100 to 1000.
The method for producing a bearing device according to any one of claims 12 to 14, wherein the pressure is kgf / cm ² . 16. The method according to claim 12, wherein the bearing is formed by sintering a powder material having an average particle diameter of 1 to 10 mm. 17. The method according to claim 16, wherein the powder material is mainly made of a Cu—Sn alloy. 18. A Cu content of the alloy is 60 to 95 wt.
The method of manufacturing a bearing device according to claim 17, wherein the ratio is%. 19. The method according to claim 12, wherein the bearing has a hole communicating between the front and back surfaces. 20. The method according to claim 12, wherein the open porosity of the bearing is 30 to 60%. 21. The method for manufacturing a bearing device according to claim 12, wherein said bearing device is a hydrostatic air bearing device. 22. The method for manufacturing a bearing device according to claim 12, wherein an intermediate formed body is formed in the housing before the sintering. 23. The method for manufacturing a bearing device according to claim 22, wherein the intermediate molded body is made of a mixture containing a hardly sinterable material and a resin hardener. 24. The mixture according to claim 2, wherein the hardly sinterable material and the resin hardener are contained in a ratio of 6: 4 to 9: 1.
3. The method for manufacturing a bearing device according to item 3. 25. The method according to claim 23, wherein the hardly sinterable material is alumina. 26. A bearing device manufactured by the method according to claim 1. Description: