JP2000003030A5 - Fine-shaped parts, their manufacturing methods, and inkjet heads using fine-shaped parts - Google Patents
Fine-shaped parts, their manufacturing methods, and inkjet heads using fine-shaped parts Download PDFInfo
- Publication number
- JP2000003030A5 JP2000003030A5 JP1998167948A JP16794898A JP2000003030A5 JP 2000003030 A5 JP2000003030 A5 JP 2000003030A5 JP 1998167948 A JP1998167948 A JP 1998167948A JP 16794898 A JP16794898 A JP 16794898A JP 2000003030 A5 JP2000003030 A5 JP 2000003030A5
- Authority
- JP
- Japan
- Prior art keywords
- transparent substrate
- fine
- opaque film
- wall
- photosensitive material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 239000000758 substrate Substances 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 8
- 239000007788 liquid Substances 0.000 claims description 6
- 238000000059 patterning Methods 0.000 claims description 5
- 230000001678 irradiating Effects 0.000 claims description 3
- 230000000875 corresponding Effects 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
Description
【０００１】
【発明の属する技術分野】
本発明は小型機器、精密機器などに用いられる微細形状を有した微細形状部品及びその製造方法並びに微細形状部品を用いたインクジェットヘッドに関する。
[0001]
[Technical field to which the invention belongs]
The present invention relates to an ink jet head using small devices, precision equipment fine shape having a fine shape for use in such components and manufacturing method as well as fine shape part thereof.
本発明は、高精度で微細な傾斜壁を有する微細形状部品を提供し、且つ加工時間が短く生産性の高い微細形状部品の製造方法を提供すると共に微細形状部品を用いたインクジェットヘッドを提供することを目的とする。 The present invention provides a finely shaped part having a fine inclined wall with high accuracy, provides a method for manufacturing a finely shaped part having a short processing time and high productivity, and provides an inkjet head using the finely shaped part. The purpose is.
【０００６】
【課題を解決するための手段】
上記課題を解決するために本発明の微細形状部品は透明基板と、該透明基板の表面に所望の形状にパターン化されて形成された不透明膜と、該不透明膜または透明基板の表面のうちいずれか一方にパターン化された形状に対応して形成される壁とを有し、該壁が透明基板の平面に垂直な面に対して所定の角度で傾斜した微細な傾斜壁であることを特徴とする。また、傾斜壁が感光性材料で形成されていることを特徴とする。また、複数の傾斜壁を有し、該複数の傾斜壁が互いに所定の微細間隔で配置されていることを特徴とする。
また、本発明のインクジェットヘッドはインクを溜めておくマニホールドと、インクの加圧を行う液室と、該液室の端部に設けるノズル板とからなるインクジェツトヘッドにおいて、前記マニホールド内に本発明の微細形状部品を有し、該微細形状部品は、その傾斜壁が前記液室側に傾斜するように配置されていることを特徴とする。
また、本発明の微細形状部品の製造方法は、基台上に所定の角度で傾斜した微細な壁が形成された微細形状部品の製造方法であって、透明基板上に不透明膜を所望の形状でパターン化し、前記透明基板の前記不透明膜の形成された一方の面上に感光性材料を塗被する工程と、前記透明基板の前記不透明膜の形成されていない他方の面側から、且つ前記透明基板の平面に垂直な面に対して所定の傾斜角度で光を照射し前記感光性材料を露光する工程と、露光された前記感光性材料を現像しパターン化する工程とを有することを特徴とする。
0006
[Means for solving problems]
In order to solve the above problems, the finely shaped component of the present invention is either a transparent substrate, an opaque film formed by patterning on the surface of the transparent substrate in a desired shape, or the surface of the opaque film or the transparent substrate. One of them has a wall formed corresponding to a patterned shape, and the wall is a fine inclined wall inclined at a predetermined angle with respect to a plane perpendicular to the plane of the transparent substrate. And . Further, the inclined wall is made of a photosensitive material. Further, it is characterized by having a plurality of inclined walls, and the plurality of inclined walls are arranged at predetermined fine intervals from each other.
Further, the inkjet head of the present invention is an ink jet head including a manifold for storing ink, a liquid chamber for pressurizing ink, and a nozzle plate provided at an end of the liquid chamber, and the present invention is provided in the manifold. The micro-shaped component is characterized in that its inclined wall is arranged so as to be inclined toward the liquid chamber side.
Further, the method for manufacturing a finely shaped part of the present invention is a method for manufacturing a finely shaped part in which a fine wall inclined at a predetermined angle is formed on a base, and an opaque film is formed on a transparent substrate in a desired shape. And the step of applying the photosensitive material on one surface of the transparent substrate on which the opaque film is formed, and from the other surface side of the transparent substrate on which the opaque film is not formed, and said. It is characterized by having a step of irradiating a plane perpendicular to a plane of a transparent substrate with light at a predetermined inclination angle to expose the photosensitive material, and a step of developing and patterning the exposed photosensitive material. And.
Claims (5)
透明基板上に不透明膜を所望の形状でパターン化し、前記透明基板の前記不透明膜の形成された一方の面上に感光性材料を塗被する工程と、
前記透明基板の前記不透明膜の形成されていない他方の面側から、且つ前記透明基板の平面に垂直な面に対して所定の傾斜角度で光を照射し前記感光性材料を露光する工程と、
露光された前記感光性材料を現像しパターン化する工程とを有することを特徴とする微細形状部品の製造方法。A manufacturing method of a micro-shaped component in which a fine wall inclined at a predetermined angle is formed on a base,
Patterning an opaque film in a desired shape on a transparent substrate, and coating a photosensitive material on one surface of the transparent substrate on which the opaque film is formed;
Irradiating the photosensitive material by irradiating light at a predetermined inclination angle with respect to a surface perpendicular to the plane of the transparent substrate from the other surface side of the transparent substrate where the opaque film is not formed;
And a step of developing and patterning the exposed photosensitive material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16794898A JP4303331B2 (en) | 1998-06-16 | 1998-06-16 | Micro-shaped parts and inkjet heads using micro-shaped parts |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16794898A JP4303331B2 (en) | 1998-06-16 | 1998-06-16 | Micro-shaped parts and inkjet heads using micro-shaped parts |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2000003030A JP2000003030A (en) | 2000-01-07 |
| JP2000003030A5 true JP2000003030A5 (en) | 2005-10-20 |
| JP4303331B2 JP4303331B2 (en) | 2009-07-29 |
Family
ID=15859025
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16794898A Expired - Fee Related JP4303331B2 (en) | 1998-06-16 | 1998-06-16 | Micro-shaped parts and inkjet heads using micro-shaped parts |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4303331B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7771803B2 (en) * | 2004-10-27 | 2010-08-10 | Palo Alto Research Center Incorporated | Oblique parts or surfaces |
| CN104062845A (en) * | 2014-05-23 | 2014-09-24 | 京东方科技集团股份有限公司 | Lower substrate, manufacturing method of lower substrate and liquid crystal lens |
-
1998
- 1998-06-16 JP JP16794898A patent/JP4303331B2/en not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0682988A1 (en) | Acoustic deposition of material layers | |
| DE3507338C2 (en) | ||
| CN1678460A (en) | Print head | |
| ATE220005T1 (en) | METHOD FOR PRODUCING AN INK JET HEAD, INK JET PRINT HEAD PRODUCED BY THIS METHOD AND INK JET APPARATUS COMPRISING THIS PRINT HEAD | |
| DE69123932T2 (en) | Manufacturing process of an ink jet print head | |
| TW201309135A (en) | Thin film forming method and thin film forming apparatus | |
| CN102529381A (en) | Liquid ejection head manufacturing method | |
| TW589253B (en) | Method for producing nozzle plate of ink-jet print head by photolithography | |
| TWI740074B (en) | Film forming method, film forming device and composite substrate with film formed | |
| JP2000003030A5 (en) | Fine-shaped parts, their manufacturing methods, and inkjet heads using fine-shaped parts | |
| JPS57208256A (en) | Ink jet head | |
| KR20030077626A (en) | Method of manufacturing printer head, and method of manufacturing electrostatic actuator | |
| KR960029103A (en) | Manufacturing method of inkjet printer head | |
| JP4303331B2 (en) | Micro-shaped parts and inkjet heads using micro-shaped parts | |
| CN1254648A (en) | Technology for manufacturing jet piece | |
| JPS5512906A (en) | Manufacturing of reflexive plate | |
| US6684504B2 (en) | Method of manufacturing an imageable support matrix for printhead nozzle plates | |
| JPS5850794A (en) | Method of forming electronic circuit | |
| JPH11236694A (en) | Production of injection molding die for fine parts | |
| US7592044B2 (en) | Method for manufacturing patterned layer on substrate | |
| TWI277781B (en) | Color filter and method for manufacturing same | |
| TW200842936A (en) | Method for manufacturing patterned thin-film layer and ultraviolet source device | |
| JPS5617652A (en) | Manufacture of fine nozzle | |
| JP2001047628A5 (en) | Inkjet head and its manufacturing method, photomask and image forming apparatus | |
| JPH04191052A (en) | Manufacture of liquid jet record head |