JP1767341S - Wafer cleaning device transport unit - Google Patents
Wafer cleaning device transport unitInfo
- Publication number
- JP1767341S JP1767341S JP2023027111F JP2023027111F JP1767341S JP 1767341 S JP1767341 S JP 1767341S JP 2023027111 F JP2023027111 F JP 2023027111F JP 2023027111 F JP2023027111 F JP 2023027111F JP 1767341 S JP1767341 S JP 1767341S
- Authority
- JP
- Japan
- Prior art keywords
- cleaning device
- wafer cleaning
- transport unit
- device transport
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004140 cleaning Methods 0.000 title abstract 2
- 235000012431 wafers Nutrition 0.000 abstract 2
- 238000010586 diagram Methods 0.000 abstract 1
Abstract
本物品は、ウェハ洗浄装置内に取り付けて使用されるものであり、使用状態を示す参考図に示すように、ウェハを搬送するために使用されるものである。This product is installed in a wafer cleaning device and used to transport wafers, as shown in the reference diagram showing the usage state.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023027111F JP1767341S (en) | 2023-12-27 | 2023-12-27 | Wafer cleaning device transport unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023027111F JP1767341S (en) | 2023-12-27 | 2023-12-27 | Wafer cleaning device transport unit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP1767341S true JP1767341S (en) | 2024-04-03 |
Family
ID=90474330
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023027111F Active JP1767341S (en) | 2023-12-27 | 2023-12-27 | Wafer cleaning device transport unit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP1767341S (en) |
-
2023
- 2023-12-27 JP JP2023027111F patent/JP1767341S/en active Active
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