JP1734730S - Ring for anti-rotation process kit for substrate processing chamber - Google Patents

Ring for anti-rotation process kit for substrate processing chamber

Info

Publication number
JP1734730S
JP1734730S JP2022021399F JP2022021399F JP1734730S JP 1734730 S JP1734730 S JP 1734730S JP 2022021399 F JP2022021399 F JP 2022021399F JP 2022021399 F JP2022021399 F JP 2022021399F JP 1734730 S JP1734730 S JP 1734730S
Authority
JP
Japan
Prior art keywords
ring
processing chamber
substrate processing
rotation process
process kit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022021399F
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Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Application granted granted Critical
Publication of JP1734730S publication Critical patent/JP1734730S/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2022021399F 2022-04-04 2022-10-04 Ring for anti-rotation process kit for substrate processing chamber Active JP1734730S (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US202229833393 2022-04-04

Publications (1)

Publication Number Publication Date
JP1734730S true JP1734730S (en) 2023-01-17

Family

ID=84900697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022021399F Active JP1734730S (en) 2022-04-04 2022-10-04 Ring for anti-rotation process kit for substrate processing chamber

Country Status (1)

Country Link
JP (1) JP1734730S (en)

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