JP1734728S - Support ring for interlock processing kits in substrate processing chambers - Google Patents

Support ring for interlock processing kits in substrate processing chambers

Info

Publication number
JP1734728S
JP1734728S JP2022020005F JP2022020005F JP1734728S JP 1734728 S JP1734728 S JP 1734728S JP 2022020005 F JP2022020005 F JP 2022020005F JP 2022020005 F JP2022020005 F JP 2022020005F JP 1734728 S JP1734728 S JP 1734728S
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JP
Japan
Prior art keywords
support ring
kits
interlock
substrate processing
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022020005F
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Application granted granted Critical
Publication of JP1734728S publication Critical patent/JP1734728S/en
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Anticipated expiration legal-status Critical

Links

JP2022020005F 2022-03-18 2022-09-16 Support ring for interlock processing kits in substrate processing chambers Active JP1734728S (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US202229831297 2022-03-18

Publications (1)

Publication Number Publication Date
JP1734728S true JP1734728S (en) 2023-01-17

Family

ID=84900707

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022020005F Active JP1734728S (en) 2022-03-18 2022-09-16 Support ring for interlock processing kits in substrate processing chambers

Country Status (2)

Country Link
JP (1) JP1734728S (en)
TW (1) TWD226236S (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD917825S1 (en) 2019-07-16 2021-04-27 Entegris, Inc. Wafer support ring

Also Published As

Publication number Publication date
TWD226236S (en) 2023-07-01

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