ITUA20163033A1 - Trasduttore acustico integrato con ridotta propagazione di onde acustiche indesiderate - Google Patents

Trasduttore acustico integrato con ridotta propagazione di onde acustiche indesiderate

Info

Publication number
ITUA20163033A1
ITUA20163033A1 ITUA2016A003033A ITUA20163033A ITUA20163033A1 IT UA20163033 A1 ITUA20163033 A1 IT UA20163033A1 IT UA2016A003033 A ITUA2016A003033 A IT UA2016A003033A IT UA20163033 A ITUA20163033 A IT UA20163033A IT UA20163033 A1 ITUA20163033 A1 IT UA20163033A1
Authority
IT
Italy
Prior art keywords
unwanted
integrated
reduced propagation
acoustic
acoustic waves
Prior art date
Application number
ITUA2016A003033A
Other languages
English (en)
Inventor
Marco Morelli
Fabio Quaglia
Fabrizio Fausto Renzo Toia
Giuseppe Barillaro
Marco Sambi
Original Assignee
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl filed Critical St Microelectronics Srl
Priority to ITUA2016A003033A priority Critical patent/ITUA20163033A1/it
Priority to EP16206869.6A priority patent/EP3238629A1/en
Priority to CN201621467767.6U priority patent/CN206993400U/zh
Priority to CN201611248216.5A priority patent/CN107343246A/zh
Priority to US15/463,858 priority patent/US20170312782A1/en
Publication of ITUA20163033A1 publication Critical patent/ITUA20163033A1/it

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R9/00—Transducers of moving-coil, moving-strip, or moving-wire type
    • H04R9/06—Loudspeakers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
    • B06B1/0662—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface
    • B06B1/067—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface which is used as, or combined with, an impedance matching layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
    • B06B1/0662—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface
    • B06B1/0681—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface and a damping structure
    • B06B1/0685—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface and a damping structure on the back only of piezoelectric elements
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/02—Mechanical acoustic impedances; Impedance matching, e.g. by horns; Acoustic resonators
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K9/00—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers
    • G10K9/18—Details, e.g. bulbs, pumps, pistons, switches or casings
    • G10K9/22—Mountings; Casings
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R9/00—Transducers of moving-coil, moving-strip, or moving-wire type
    • H04R9/02—Details
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2400/00—Loudspeakers
    • H04R2400/11—Aspects regarding the frame of loudspeaker transducers
ITUA2016A003033A 2016-04-29 2016-04-29 Trasduttore acustico integrato con ridotta propagazione di onde acustiche indesiderate ITUA20163033A1 (it)

Priority Applications (5)

Application Number Priority Date Filing Date Title
ITUA2016A003033A ITUA20163033A1 (it) 2016-04-29 2016-04-29 Trasduttore acustico integrato con ridotta propagazione di onde acustiche indesiderate
EP16206869.6A EP3238629A1 (en) 2016-04-29 2016-12-23 Integrated acoustic transducer with reduced propagation of undesired acoustic waves
CN201621467767.6U CN206993400U (zh) 2016-04-29 2016-12-29 声学器件
CN201611248216.5A CN107343246A (zh) 2016-04-29 2016-12-29 具有减少的非期望声波的传播的集成声学换能器
US15/463,858 US20170312782A1 (en) 2016-04-29 2017-03-20 Integrated acoustic transducer with reduced propagation of undesired acoustic waves

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITUA2016A003033A ITUA20163033A1 (it) 2016-04-29 2016-04-29 Trasduttore acustico integrato con ridotta propagazione di onde acustiche indesiderate

Publications (1)

Publication Number Publication Date
ITUA20163033A1 true ITUA20163033A1 (it) 2017-10-29

Family

ID=56682211

Family Applications (1)

Application Number Title Priority Date Filing Date
ITUA2016A003033A ITUA20163033A1 (it) 2016-04-29 2016-04-29 Trasduttore acustico integrato con ridotta propagazione di onde acustiche indesiderate

Country Status (4)

Country Link
US (1) US20170312782A1 (it)
EP (1) EP3238629A1 (it)
CN (2) CN107343246A (it)
IT (1) ITUA20163033A1 (it)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITUA20163033A1 (it) * 2016-04-29 2017-10-29 St Microelectronics Srl Trasduttore acustico integrato con ridotta propagazione di onde acustiche indesiderate
EP4003612B1 (en) * 2019-07-24 2024-05-15 Vermon S.A. Method of manufacturing a panel transducer scale package
DE102021213327B3 (de) 2021-11-26 2023-03-16 Carl Zeiss Smt Gmbh Metrologiesystem zur Untersuchung von Objekten mit EUV-Messlicht
CN114101015B (zh) * 2022-01-25 2022-07-05 深圳市大族封测科技股份有限公司 一种超声波换能器及其控制系统、方法和装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070164632A1 (en) * 2004-03-06 2007-07-19 Olympus Corporation Capacitive ultrasonic transducer, production method thereof, and capacitive ultrasonic probe
US9154057B2 (en) * 2010-06-07 2015-10-06 Canon Kabushiki Kaisha Electromechanical transducer device and analyte information acquiring apparatus

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6639339B1 (en) * 2000-05-11 2003-10-28 The Charles Stark Draper Laboratory, Inc. Capacitive ultrasound transducer
US6831394B2 (en) 2002-12-11 2004-12-14 General Electric Company Backing material for micromachined ultrasonic transducer devices
US7280435B2 (en) 2003-03-06 2007-10-09 General Electric Company Switching circuitry for reconfigurable arrays of sensor elements
WO2004102203A1 (ja) * 2003-05-16 2004-11-25 Olympus Corporation 超音波プラットフォーム型マイクロチップ及びアレイ状超音波トランスデューサの駆動方法
US7880565B2 (en) * 2005-08-03 2011-02-01 Kolo Technologies, Inc. Micro-electro-mechanical transducer having a surface plate
EP3309823B1 (en) * 2008-09-18 2020-02-12 FUJIFILM SonoSite, Inc. Ultrasound transducers
JP6149425B2 (ja) * 2013-03-01 2017-06-21 コニカミノルタ株式会社 超音波探触子の製造方法
JP6402983B2 (ja) * 2014-08-29 2018-10-10 セイコーエプソン株式会社 超音波デバイス、超音波デバイスの製造方法、超音波プローブ、超音波測定装置、電子機器
ITUA20163033A1 (it) * 2016-04-29 2017-10-29 St Microelectronics Srl Trasduttore acustico integrato con ridotta propagazione di onde acustiche indesiderate

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070164632A1 (en) * 2004-03-06 2007-07-19 Olympus Corporation Capacitive ultrasonic transducer, production method thereof, and capacitive ultrasonic probe
US9154057B2 (en) * 2010-06-07 2015-10-06 Canon Kabushiki Kaisha Electromechanical transducer device and analyte information acquiring apparatus

Also Published As

Publication number Publication date
US20170312782A1 (en) 2017-11-02
CN206993400U (zh) 2018-02-09
EP3238629A1 (en) 2017-11-01
CN107343246A (zh) 2017-11-10

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