ITTO20031054A1 - Procedimento per realizzare un dispositivo a microcavita' di fabry-perot integrato in tecnologia al silicio. - Google Patents

Procedimento per realizzare un dispositivo a microcavita' di fabry-perot integrato in tecnologia al silicio.

Info

Publication number
ITTO20031054A1
ITTO20031054A1 ITTO20031054A ITTO20031054A1 IT TO20031054 A1 ITTO20031054 A1 IT TO20031054A1 IT TO20031054 A ITTO20031054 A IT TO20031054A IT TO20031054 A1 ITTO20031054 A1 IT TO20031054A1
Authority
IT
Italy
Prior art keywords
perot
fabry
realizing
procedure
silicon technology
Prior art date
Application number
Other languages
English (en)
Inventor
Pierluigi Bellutti
Nicola Daldosso
Alberto Lui
Lorenzo Pavesi
Georg Pucker
Original Assignee
Ist Trentino Di Cultura
Uni Degli Studi Di Trento
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ist Trentino Di Cultura, Uni Degli Studi Di Trento filed Critical Ist Trentino Di Cultura
Priority to ITTO20031054 priority Critical patent/ITTO20031054A1/it
Priority to PCT/EP2004/053719 priority patent/WO2005064394A1/en
Publication of ITTO20031054A1 publication Critical patent/ITTO20031054A1/it

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/216Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference using liquid crystals, e.g. liquid crystal Fabry-Perot filters
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/34Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 reflector
    • G02F2201/346Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 reflector distributed (Bragg) reflector

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
ITTO20031054 2003-12-30 2003-12-30 Procedimento per realizzare un dispositivo a microcavita' di fabry-perot integrato in tecnologia al silicio. ITTO20031054A1 (it)

Priority Applications (2)

Application Number Priority Date Filing Date Title
ITTO20031054 ITTO20031054A1 (it) 2003-12-30 2003-12-30 Procedimento per realizzare un dispositivo a microcavita' di fabry-perot integrato in tecnologia al silicio.
PCT/EP2004/053719 WO2005064394A1 (en) 2003-12-30 2004-12-28 Method for producing an integrated fabry-perot microcavity device with silicon technology

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITTO20031054 ITTO20031054A1 (it) 2003-12-30 2003-12-30 Procedimento per realizzare un dispositivo a microcavita' di fabry-perot integrato in tecnologia al silicio.

Publications (1)

Publication Number Publication Date
ITTO20031054A1 true ITTO20031054A1 (it) 2005-06-30

Family

ID=34717650

Family Applications (1)

Application Number Title Priority Date Filing Date
ITTO20031054 ITTO20031054A1 (it) 2003-12-30 2003-12-30 Procedimento per realizzare un dispositivo a microcavita' di fabry-perot integrato in tecnologia al silicio.

Country Status (2)

Country Link
IT (1) ITTO20031054A1 (it)
WO (1) WO2005064394A1 (it)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117003197A (zh) * 2023-09-26 2023-11-07 之江实验室 具有垂直法珀腔的可晶上集成的高温惯性芯片制备方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2979434B1 (fr) 2011-08-24 2013-09-27 Commissariat Energie Atomique Procede de realisation d'un reflecteur optique a nanocristaux de semi-conducteur
KR20140094217A (ko) * 2013-01-21 2014-07-30 삼성디스플레이 주식회사 액정 표시 장치 및 그 제조 방법
WO2021056257A1 (zh) * 2019-09-25 2021-04-01 深圳市海谱纳米光学科技有限公司 一种可调光学滤波器件

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9309003D0 (en) * 1993-04-30 1993-06-16 Marconi Gec Ltd Optical devices
US6384953B1 (en) * 2000-06-29 2002-05-07 The United States Of America As Represented By The Secretary Of The Navy Micro-dynamic optical device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117003197A (zh) * 2023-09-26 2023-11-07 之江实验室 具有垂直法珀腔的可晶上集成的高温惯性芯片制备方法
CN117003197B (zh) * 2023-09-26 2024-03-26 之江实验室 具有垂直法珀腔的可晶上集成的高温惯性芯片制备方法

Also Published As

Publication number Publication date
WO2005064394A1 (en) 2005-07-14

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