ITRM20130508A1 - MODULAR DEVICE FOR HANDLING SAMPLES, MATERIALS AND TOOLS IN A GLOVES BOX - Google Patents
MODULAR DEVICE FOR HANDLING SAMPLES, MATERIALS AND TOOLS IN A GLOVES BOXInfo
- Publication number
- ITRM20130508A1 ITRM20130508A1 IT000508A ITRM20130508A ITRM20130508A1 IT RM20130508 A1 ITRM20130508 A1 IT RM20130508A1 IT 000508 A IT000508 A IT 000508A IT RM20130508 A ITRM20130508 A IT RM20130508A IT RM20130508 A1 ITRM20130508 A1 IT RM20130508A1
- Authority
- IT
- Italy
- Prior art keywords
- trolley
- guide
- glove
- fact
- shuttle
- Prior art date
Links
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
- H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67718—Changing orientation of the substrate, e.g. from a horizontal position to a vertical position
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/6776—Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Sampling And Sample Adjustment (AREA)
- Packages (AREA)
Description
Descrizione dell’invenzione industriale dal titolo: APPARATO MODULARE PER LA MOVIMENTAZIONE DI CAMPIONI, MATERIALI E UTENSILI IN UNA SCATOLA A GUANTI; Description of the industrial invention entitled: MODULAR APPARATUS FOR HANDLING SAMPLES, MATERIALS AND TOOLS IN A GLOVE BOX;
La presente invenzione riguarda sostanzialmente un apparato per trasporto di oggetti all’interno di una “Glove-Box” (o scatola a guanti). The present invention substantially relates to an apparatus for transporting objects inside a "Glove-Box" (or glove box).
Tale innovativo apparato comprende sostanzialmente una navetta porta-materiale/portacampioni agganciata ad un carrello che scorre in una guida (o binario) munita preferibilmente di sostegni rialzati disposti a distanza fissa o variabile tra loro. In altre parole, gli elementi o moduli che compongono il binario di guida poggiano preferibilmente su dei pilastrini che possono essere agganciati al rispettivo modulo in qualsiasi posizione rispetto alla sua lunghezza: ciò consente di appoggiare il modulo, e quindi l'intero binario di guida, anche su superfici in cui siano presenti ostacoli fissi o mobili o in zone del fondo della glove-box che devono essere comunque lasciate sgombre. This innovative apparatus substantially comprises a material / sample holder shuttle hooked to a carriage which slides in a guide (or track) preferably equipped with raised supports arranged at a fixed or variable distance from each other. In other words, the elements or modules that make up the guide rail preferably rest on pillars that can be hooked to the respective module in any position with respect to its length: this allows the module to be placed, and therefore the entire guide rail, even on surfaces where there are fixed or mobile obstacles or in areas of the bottom of the glove-box that must in any case be left clear.
Grazie agli artifizi realizzati secondo il trovato, il sistema è compatibile con l’ambiente presente nelle glove-box per la fabbricazione di dispositivi elettronici in ambiente vuoto, in atmosfera controllata, da soluzione o mediante altro processo fisico o chimico. Thanks to the artifices implemented according to the invention, the system is compatible with the environment present in the glove-boxes for the manufacture of electronic devices in a vacuum environment, in a controlled atmosphere, from solution or by other physical or chemical process.
Vantaggiosamente, l’invenzione permette il trasporto di oggetti o materiali da una parte all’altra della glove-box, lungo distanze tipiche dei sistemi di controllo/purificazione di atmosfera, senza la necessità di utilizzare guanti o strutture di appoggio intermedie. Advantageously, the invention allows the transport of objects or materials from one side of the glove-box to the other, along distances typical of atmosphere control / purification systems, without the need to use gloves or intermediate support structures.
Come si vedrà meglio nel seguito, le metodologie di fabbricazione e le caratteristiche progettuali ne consentono una adattabilità ad ambienti di qualunque topologia. As will be seen better in the following, the manufacturing methodologies and the design characteristics allow it to be adaptable to environments of any topology.
Stato dell’arte State of the art
In Letteratura esistono numerosi brevetti riguardanti sistemi orientati alla parziale o piena automazione di glove-box, alcuni dei quali sono dedicati al generico funzionamento della scatola (WO2011/139828), altri invece sono specificamente preposti alla movimentazione di campioni (US 2006/0225299, US 2007/02699293, US007418982, WO2013054698) e altri ancora sono pensati per trasferimento di campioni specificamente in ambienti di glove box (JPH10324421). Tuttavia, tali soluzioni note per la movimentazione risultano essere legate a specifiche geometrie/configurazioni delle glove-box e quindi sono difficilmente adattabili a contesti differenti rispetto a quelli per i quali sono state progettate. In the literature there are numerous patents concerning systems oriented to the partial or full automation of glove-boxes, some of which are dedicated to the generic operation of the box (WO2011 / 139828), while others are specifically designed to handle samples (US 2006/0225299, US 2007/02699293, US007418982, WO2013054698) and others are designed for sample transfer specifically in glove box environments (JPH10324421). However, these known solutions for handling are linked to specific geometries / configurations of the glove-boxes and therefore are difficult to adapt to contexts different from those for which they were designed.
A differenza di tali sistemi noti, la presente invenzione può essere rapidamente adattata a sistemi e glove-box preesistenti (ad esempio con configurazione in pianta ad “L”). Unlike such known systems, the present invention can be rapidly adapted to pre-existing systems and glove-boxes (for example with an “L” shaped plan configuration).
Problema tecnico Technical problem
Uno dei problemi principali che si incontrano quando si lavora con dispositivi elettronici prototipali, in particolare organici o ibridi, è il deterioramento delle prestazioni elettriche dovuto all’interazione dei materiali attivi con l’atmosfera circostante. Più in generale, in fase di fabbricazione o di caratterizzazione, i dispositivi elettronici di questo tipo non dispongono di un packaging e neppure di una adeguata passivazione che abbatta le derive da invecchiamento estrinseco; mancano, cioè, le interfacce elettriche, meccaniche e termiche che ne consentano il funzionamento in ambienti in cui siano presenti condizioni di polverosità, presenza di gas atmosferici, luce, ecc. non controllate. One of the main problems encountered when working with prototype electronic devices, in particular organic or hybrid devices, is the deterioration of electrical performance due to the interaction of active materials with the surrounding atmosphere. More generally, in the manufacturing or characterization phase, electronic devices of this type do not have a packaging or even an adequate passivation that reduces the drifts of extrinsic aging; that is, there are no electrical, mechanical and thermal interfaces that allow it to work in environments where there are conditions of dustiness, the presence of atmospheric gases, light, etc. don't check.
Per ovviare a tali problemi, in contesti sperimentali/prototipali, ci si avvale di opportune scatole a guanti (d’ora in avanti: glove-box) che risolvono il problema di realizzare o caratterizzare dispositivi elettronici in condizioni di atmosfera/luce/temperatura e purezza ben definite. To overcome these problems, in experimental / prototype contexts, appropriate glove boxes are used (hereinafter: glove-box) which solve the problem of creating or characterizing electronic devices in conditions of atmosphere / light / temperature and well-defined purities.
Tuttavia, la presenza di una glove box, e dei guanti che consentono l’accesso ad essa, rende difficile la manipolazione dei materiali, dei substrati e degli utensili mediante i quali si deve operare. Ciò è dovuto al fatto che si devono utilizzare guanti di gomma dello spessore di svariati millimetri i quali sono posizionati in punti fissi della camera, che spesso è abbastanza grande da richiedere la presenza di svariate coppie di guanti al fine di realizzare i processi per i quali è progettata. However, the presence of a glove box, and of the gloves that allow access to it, makes it difficult to handle the materials, substrates and tools with which to operate. This is due to the fact that rubber gloves with a thickness of several millimeters must be used which are positioned in fixed points of the chamber, which is often large enough to require the presence of several pairs of gloves in order to carry out the processes for which is designed.
Le difficoltà di movimentazione e di manipolazione sopra descritte sono evidentemente causate dalla necessità di dover lavorare con le barriere sopracitate. Uno dei problemi maggiormente sentiti dagli operatori, infatti, è la difficoltà che si incontra nel trasferire un substrato (rigido o flessibile) da una estremità all’altra della glovebox senza danneggiare/contaminare il dispositivo attraverso il contatto coi guanti e, al contempo, di limitare l’utilizzo dei guanti stessi durante le operazioni di trasferimento poiché esse sono spesso responsabili di errori e/o contaminazioni nella fase di processo interessata. The handling and manipulation difficulties described above are evidently caused by the need to work with the aforementioned barriers. One of the problems most felt by operators, in fact, is the difficulty encountered in transferring a substrate (rigid or flexible) from one end of the glovebox to the other without damaging / contaminating the device through contact with gloves and, at the same time, of limit the use of the gloves themselves during transfer operations as they are often responsible for errors and / or contaminations in the process phase involved.
Secondo la presente invenzione, tale problema viene risolto prevedendo di installare nella camera a guanti un sistema di trasporto comprendente una guida componibile e modulare appoggiata sul fondo della glove-box mediante sostegni a distanza regolabile. In particolare, detta guida è dotata di un carrello atto a muovere una navetta di trasporto nelle due direzioni lungo la guida stessa. A tale scopo è previsto un motore elettrico di azionamento del carrello, alimentato preferibilmente a corrente continua (DC) attraverso un cavo passante nella glove box. According to the present invention, this problem is solved by providing to install in the glove chamber a transport system comprising a sectional and modular guide resting on the bottom of the glove-box by means of adjustable distance supports. In particular, said guide is equipped with a carriage adapted to move a transport shuttle in the two directions along the guide itself. For this purpose, an electric motor for driving the trolley is provided, preferably powered by direct current (DC) through a cable passing through the glove box.
Ciò è stato ottenuto, secondo il trovato, prevedendo sostanzialmente una rotaia di guida realizzata ad elementi modulari, lungo la quale scorre un carrello, azionato da un motore elettrico comandato dall’esterno, atto a scorrere nelle due direzioni lungo detta rotaia di guida. This was achieved, according to the invention, by providing substantially a guide rail made of modular elements, along which a carriage runs, driven by an electric motor controlled from the outside, able to slide in both directions along said guide rail.
Una migliore comprensione dell’invenzione si avrà con la seguente descrizione e con riferimento alle figure allegate che mostrano, a puro titolo esemplificativo e non già limitativo, una preferita forma di realizzazione. A better understanding of the invention will be obtained with the following description and with reference to the attached figures which show, purely by way of example and not limiting, a preferred embodiment.
Nei disegni: In the drawings:
Figura 1: dettaglio della parte di movimentazione del trovato; Figure 1: detail of the moving part of the invention;
Figura 2: dettaglio della parte elettrica e della navetta mobile lungo la guida; Figure 2: detail of the electrical part and of the shuttle moving along the guide;
Figura 3A: dettaglio meccanica di trascinamento della navetta; Figure 3A: mechanical detail of the shuttle drive;
Figura 3B; particolare autocentratura di un modulo per realizzare la guida; Figure 3B; particular self-centering of a module to make the guide;
Figura 3C: vista in sezione del canale della guida in cui scorre il carrello porta-navetta; Figure 3C: sectional view of the guide channel in which the shuttle-carrying trolley slides;
Figura 4A: dettaglio del carrello al quale è fissata la navetta; Figure 4A: detail of the carriage to which the shuttle is fixed;
Figura 4B: vista in sezione del porta-navetta: viene evidenziato in linea blu tratto-punto la sede del filo di nylon e il relativo fissaggio (b-1) spiegare meglio Figure 4B: sectional view of the shuttle holder: the seat of the nylon thread and its fastening (b-1) are highlighted in a blue line.
Figura 5A: dettaglio glove-box con configurazione in pianta ad L con navetta posizionata in curva; Figure 5A: glove-box detail with L-shaped plan configuration with shuttle positioned in the curve;
Figura 5B: vista 3D del tratto curvo della guida; Figure 5B: 3D view of the curved section of the guide;
Figura 6: dettaglio che mostra un esempio di caricamento della navetta; Figure 6: detail showing an example of shuttle loading;
Figura 7A: particolare del percorso nella navetta con dettaglio quadro di comando; Figure 7A: detail of the path in the shuttle with detail of the control panel;
Figura 7B: dettaglio del passante elettrico; Figura 8: dettaglio del meccanismo di trascinamento del carrello innestato sul binario, al quale viene fissata la navetta; Figure 7B: detail of the electrical loop; Figure 8: detail of the carriage drive mechanism engaged on the track, to which the shuttle is fixed;
Figura 9: vista in sezione che mostra il carrello scorrevole nel binario di guida. Figure 9: Sectional view showing the carriage sliding in the guide rail.
Con riferimento alle figure, la soluzione proposta consiste in una struttura a moduli 3 dotati di sistemi di fissaggio standard, come ad esempio delle viti 13, 15, per fissare reciprocamente i moduli tra loro e ai supporti, nonché per vincolare un contenitore o navetta 11 al carrello 16 che scorre lungo la guida. La guida modulare termina da un lato col sistema di trascinamento composto dal motore/riduttore 1 con una puleggia di trascinamento 5 e con viti di bloccaggio 6, e dall’altro termina con una puleggia di ritorno 10 del cavo di movimentazione. With reference to the figures, the proposed solution consists of a module structure 3 equipped with standard fastening systems, such as screws 13, 15, to reciprocally fix the modules to each other and to the supports, as well as to constrain a container or shuttle 11 to the carriage 16 which slides along the guide. The modular guide ends on one side with the drive system consisting of the motor / reducer 1 with a drive pulley 5 and with locking screws 6, and on the other end with a return pulley 10 of the handling cable.
Il motore 1 è preferibilmente a corrente continua (DC) ed è alimentato mediante un cavo elettrico 2 che – nell’esempio illustrato - viene fatto passare al di sotto i moduli 3 della guida all’interno degli elementi di sostegno 4 dei moduli stessi, al fine di limitare l’ingombro del cavo all’interno della glove-box. The motor 1 is preferably at direct current (DC) and is powered by an electric cable 2 which - in the example illustrated - is passed under the modules 3 of the guide inside the supporting elements 4 of the modules themselves, to the in order to limit the overall dimensions of the cable inside the glove-box.
Detto cavo 2 di alimentazione elettrica viene connesso ad un interruttore con inversione, visibile nel quadro di comando 8, e poi all’alimentatore 12V DC indicato col riferimento 7 mediante il passante elettrico 9. Il comando, avendo la possibilità di invertire la tensione fornita al motore dall’alimentatore, consente lo spostamento della navetta nelle due direzioni lungo la guida. Said power supply cable 2 is connected to a switch with inversion, visible in the control panel 8, and then to the 12V DC power supply indicated with reference 7 by means of the electrical loop 9. The command, having the possibility of inverting the voltage supplied to the motor from the feeder, allows the shuttle to be moved in both directions along the guide.
E’ appena il caso di osservare che, nel caso in cui il motore 1 sia collocato in corrispondenza dell’estremità della guida più vicina al passante elettrico 9, il cavo di alimentazione del motore non percorrerà tutta la guida ma collegherà il motore direttamente al passante senza ingombrare altre parti della glove-box. It is hardly necessary to observe that, in the event that the motor 1 is placed at the end of the guide closest to the electric bushing 9, the power supply cable of the motor will not run along the entire guide but will connect the motor directly to the bushing. without cluttering other parts of the glove-box.
Il carrello 16 a cui è fissata la navetta 11 viene mosso dal motore elettrico 1 preferibilmente per mezzo del cavo di nylon 14 tramite la puleggia di trascinamento 5 e la puleggia di ritorno 10. The carriage 16 to which the shuttle 11 is fixed is moved by the electric motor 1 preferably by means of the nylon cable 14 by means of the drive pulley 5 and the return pulley 10.
Il cavo di nylon 14 è fissato al carrello 16 porta-navetta che a sua volta è accoppiato alla navetta 11 mediante delle viti 17. Ciò permette al carrello 16 di scorrere negli elementi 12 della guida che sono fissati mediante delle viti 13 e sostenuti dai moduli portanti 4 mediante delle viti di ancoraggio 15. In figura 3B è rappresentata una vista 3D di un modulo rettilineo della struttura di guida in cui è mostrata la sede delle viti 13 a testa svasata che consentono l’autocentratura dei moduli adiacenti. The nylon cable 14 is fixed to the shuttle-carrying trolley 16 which in turn is coupled to the shuttle 11 by means of screws 17. This allows the trolley 16 to slide in the elements 12 of the guide which are fixed by means of screws 13 and supported by the modules bearing 4 by means of anchoring screws 15. Figure 3B shows a 3D view of a rectilinear module of the guide structure in which the seat of the countersunk screws 13 which allow the self-centering of the adjacent modules is shown.
Vantaggiosamente, l’elemento di guida ricurvo, mostrato in figura 5, consente la realizzazione di guide caratterizzate da topologie non rettilinee per poter essere installate in glove-box di qualunque forma, pur consentendo un agevole scorrimento del filo di trascinamento 14. Advantageously, the curved guide element, shown in figure 5, allows the creation of guides characterized by non-rectilinear topologies in order to be installed in glove-boxes of any shape, while allowing easy sliding of the dragging wire 14.
Secondo una caratteristica peculiare del trovato, è preferibile utilizzare un filo di nylon privo di dentellature o di asperità che renderebbero altrimenti impossibile il funzionamento dell’invenzione. According to a peculiar feature of the invention, it is preferable to use a nylon thread without indentations or roughness that would otherwise make it impossible for the invention to work.
Vantaggiosamente, l’utilizzo di filo di nylon (o altro materiale analogo) non richiede alcuna lubrificazione e questo, oltre ad evitare la necessità di manutenzione, riveste particolare rilevanza nel caso in cui la glove-box sia sottovuoto, evitando la dispersione di particelle di lubrificante che potrebbero risultare inquinanti per le attività svolte nella stessa glove-box. Advantageously, the use of nylon thread (or other similar material) does not require any lubrication and this, in addition to avoiding the need for maintenance, is of particular importance in the case in which the glove-box is vacuum-packed, avoiding the dispersion of particles of lubricant that could be polluting due to the activities carried out in the glove-box itself.
Un dettaglio del meccanismo di avanzamento della navetta è mostrato in fig. 8A in cui viene mostrato l’alloggiamento del filo di nylon all’interno delle due sedi nel carrello 16 portanavetta di cui una (a-1) è passante mentre l’altra (a-2) è destinata al trascinamento del carrello 16. A tale proposito giova notare che nella figura 4B è riportata la sezione del sistema di fissaggio del filo di nylon 14 (parte non passante) al carrello 16 portanavetta. Il filo, in ingresso al foro a-2 di fig 8A, risale il canale di ingresso b-1 di fig. 4B e viene fissato nella zona centrale del carrello portanavetta per poi immettersi in un vano del carrello 16 portanavetta in cui il filo di nylon viene fissato mediante un nodo o altro elemento di fissaggio. Il filo di nylon ridiscende il canale di uscita per poi proseguire il percorso sul modulo del binario alle spalle della navetta. A detail of the shuttle advancement mechanism is shown in fig. 8A showing the housing of the nylon thread inside the two seats in the trolley 16, one of which (a-1) passes through while the other (a-2) is intended for dragging the trolley 16. A this purpose it should be noted that figure 4B shows the section of the fixing system of the nylon thread 14 (non-passing part) to the trolley 16 for carrying the cable. The wire, entering the hole a-2 of fig 8A, goes up the inlet channel b-1 of fig. 4B and is fixed in the central area of the shuttle carrier trolley and then enters a compartment of the shuttle carrier trolley 16 in which the nylon thread is fixed by means of a knot or other fastening element. The nylon line goes down the exit channel and then continues the path on the track module behind the shuttle.
In alternativa, nella cavità del vano del carrello 16 portanavetta è possibile alloggiare un tendicavo per il fissaggio del filo 14. Alternatively, a cable tensioner for fixing the wire 14 can be housed in the cavity of the compartment of the trolley 16.
Il foro passante a-1 di fig 8A è evidenziato graficamente nella sezione di fig. 8B assegnando il contorno bianco al foro passante, mentre il contorno scuro del foro a-2 di trascinamento serve a sottolineare la presenza, in quest'ultimo caso, del percorso dei canali all'interno del carrello 16 portanavetta. The through hole a-1 of fig 8A is shown graphically in the section of fig. 8B assigning the white outline to the through hole, while the dark outline of the dragging hole a-2 serves to underline the presence, in the latter case, of the path of the channels inside the shuttle-carrying trolley 16.
Il trovato può trovare immediata applicazione pratica nei laboratori di ricerca nel settore dell’Elettronica Organica, fabbricazione e packaging di dispositivi elettronici sperimentali, movimentazione di materiali, substrati e utensili in ambienti logisticamente ostili. The invention can find immediate practical application in research laboratories in the Organic Electronics sector, manufacturing and packaging of experimental electronic devices, handling of materials, substrates and tools in logistically hostile environments.
Infine, è opportuno notare che le glove-box attualmente in commercio non sono generalmente integrate con sistemi di movimentazione poiché essi inficerebbero le scelte progettuali nel disegno della camera stessa o dell’automazione. Finally, it should be noted that the glove-boxes currently on the market are not generally integrated with handling systems since they would affect the design choices in the design of the room itself or of the automation.
La soluzione tecnica fin qui descritta secondo la presente invenzione, invece, risulta essere un sistema economicamente e tecnicamente più vantaggioso rispetto alla realizzazione di una struttura dedicata alla movimentazione (ad es. in acciaio) grazie al processo di realizzazione delle guide e dei sostegni basato su stampa 3D e prototipazione rapida. The technical solution described up to now according to the present invention, on the other hand, turns out to be an economically and technically more advantageous system than the realization of a structure dedicated to handling (e.g. in steel) thanks to the process of making the guides and supports based on 3D printing and rapid prototyping.
Ciò consente, infatti, una rapida ed economica adattabilità del trovato a strutture di glove-box preesistenti, potendo intercambiare rapidamente i diversi moduli della guida per realizzare percorsi arbitrari in geometrie comunque complesse, lungo uno stesso piano o con altezze variabili per realizzare piccoli dislivelli disposti preferibilmente in tratti rettilinei della rotaia di guida. In questi casi si prevede di realizzare opportuni moduli FULL-CUSTOM: ad esempio si può definire la forma di una rampa di salita/discesa, di un “ponte” o simili. This allows, in fact, a rapid and economical adaptability of the invention to pre-existing glove-box structures, being able to quickly interchange the different modules of the guide to create arbitrary paths in anyway complex geometries, along the same plane or with variable heights to create small differences in level arranged. preferably in straight sections of the guide rail. In these cases it is envisaged to create suitable FULL-CUSTOM modules: for example, the shape of an up / down ramp, a “bridge” or the like can be defined.
Inoltre, si deve notare che la tecnologia meccanica utilizzata secondo il trovato è compatibile coi sistemi di purificazione e filtraggio che garantiscono la pulizia e la purezza delle glove-box, infatti, come si è già accennato, il sistema non necessità di lubrificazioni in quanto le componenti meccaniche in moto sono a secco. In oltre consente ad un singolo operatore di trasferire materiali e substrati lungo distanze che superano la lunghezza delle braccia senza dover necessariamente sfilare e infilare varie coppie di guanti e senza richiedere l’intervento di ulteriori operatori per una semplice traslazione. In questo modo, quindi, resa e produttività dell’intero processo di fabbricazione dei dispositivi aumentano senza il problema di progettare o realizzare automazioni full-custom per una data glove-box. Furthermore, it should be noted that the mechanical technology used according to the invention is compatible with the purification and filtering systems that guarantee the cleanliness and purity of the glove-boxes, in fact, as already mentioned, the system does not require lubrication as the mechanical components in motion are dry. In addition, it allows a single operator to transfer materials and substrates over distances that exceed the length of the arms without necessarily having to remove and put on various pairs of gloves and without requiring the intervention of additional operators for simple translation. In this way, therefore, the yield and productivity of the entire device manufacturing process increase without the problem of designing or implementing full-custom automations for a given glove-box.
La presente invenzione è stata descritta ed illustrata con riferimento ad una preferita forma realizzativa, ma è evidente che qualunque tecnico esperto del ramo potrà apportarvi modifiche e/o sostituzioni tecnicamente equivalenti, senza esulare dall’ambito di tutela della presente privativa industriale. The present invention has been described and illustrated with reference to a preferred embodiment, but it is clear that any technician skilled in the art will be able to make changes and / or replacements that are technically equivalent, without going beyond the scope of protection of this industrial right.
Claims (15)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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IT000508A ITRM20130508A1 (en) | 2013-09-13 | 2013-09-13 | MODULAR DEVICE FOR HANDLING SAMPLES, MATERIALS AND TOOLS IN A GLOVES BOX |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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IT000508A ITRM20130508A1 (en) | 2013-09-13 | 2013-09-13 | MODULAR DEVICE FOR HANDLING SAMPLES, MATERIALS AND TOOLS IN A GLOVES BOX |
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ITRM20130508A1 true ITRM20130508A1 (en) | 2015-03-14 |
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IT000508A ITRM20130508A1 (en) | 2013-09-13 | 2013-09-13 | MODULAR DEVICE FOR HANDLING SAMPLES, MATERIALS AND TOOLS IN A GLOVES BOX |
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Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020150447A1 (en) * | 1999-01-27 | 2002-10-17 | Takumi Mizokawa | Conveyance system |
US20030012885A1 (en) * | 2001-07-16 | 2003-01-16 | Gramarossa Daniel J. | Method of processing and plating planar articles |
US20070020080A1 (en) * | 2004-07-09 | 2007-01-25 | Paul Wirth | Transfer devices and methods for handling microfeature workpieces within an environment of a processing machine |
-
2013
- 2013-09-13 IT IT000508A patent/ITRM20130508A1/en unknown
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020150447A1 (en) * | 1999-01-27 | 2002-10-17 | Takumi Mizokawa | Conveyance system |
US20030012885A1 (en) * | 2001-07-16 | 2003-01-16 | Gramarossa Daniel J. | Method of processing and plating planar articles |
US20070020080A1 (en) * | 2004-07-09 | 2007-01-25 | Paul Wirth | Transfer devices and methods for handling microfeature workpieces within an environment of a processing machine |
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