ITRM20060692A1 - Procedimento per il trattamento di sospensioni abrasive esauste dal processo di lappatura per il recupero della componente di abrasivo riciclabile e relativo impianto. - Google Patents

Procedimento per il trattamento di sospensioni abrasive esauste dal processo di lappatura per il recupero della componente di abrasivo riciclabile e relativo impianto.

Info

Publication number
ITRM20060692A1
ITRM20060692A1 IT000692A ITRM20060692A ITRM20060692A1 IT RM20060692 A1 ITRM20060692 A1 IT RM20060692A1 IT 000692 A IT000692 A IT 000692A IT RM20060692 A ITRM20060692 A IT RM20060692A IT RM20060692 A1 ITRM20060692 A1 IT RM20060692A1
Authority
IT
Italy
Prior art keywords
abrasive
exhausted
recovery
slurry
procedure
Prior art date
Application number
IT000692A
Other languages
English (en)
Inventor
Guido Fragiacomo
Original Assignee
Garbo S R L
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Garbo S R L filed Critical Garbo S R L
Priority to IT000692A priority Critical patent/ITRM20060692A1/it
Priority to AT07866781T priority patent/ATE546256T1/de
Priority to PCT/IT2007/000844 priority patent/WO2008078349A1/en
Priority to EP07866781A priority patent/EP2094441B1/en
Priority to TW096148180A priority patent/TW200841991A/zh
Publication of ITRM20060692A1 publication Critical patent/ITRM20060692A1/it

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
    • B24B55/03—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant designed as a complete equipment for feeding or clarifying coolant
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Treatment Of Sludge (AREA)
  • Disintegrating Or Milling (AREA)
IT000692A 2006-12-22 2006-12-22 Procedimento per il trattamento di sospensioni abrasive esauste dal processo di lappatura per il recupero della componente di abrasivo riciclabile e relativo impianto. ITRM20060692A1 (it)

Priority Applications (5)

Application Number Priority Date Filing Date Title
IT000692A ITRM20060692A1 (it) 2006-12-22 2006-12-22 Procedimento per il trattamento di sospensioni abrasive esauste dal processo di lappatura per il recupero della componente di abrasivo riciclabile e relativo impianto.
AT07866781T ATE546256T1 (de) 2006-12-22 2007-12-04 Verfahren und vorrichtung zur behandlung von verbrauchten schleifschlämmen aus dem läppverfahren zur rückgewinnung ihrer wiederverwendbaren schleifbestandteile
PCT/IT2007/000844 WO2008078349A1 (en) 2006-12-22 2007-12-04 Process and apparatus for treating exhausted abrasive slurries from the lapping process for the recovery of their reusable abrasive component
EP07866781A EP2094441B1 (en) 2006-12-22 2007-12-04 Process and apparatus for treating exhausted abrasive slurries from the lapping process for the recovery of their reusable abrasive component
TW096148180A TW200841991A (en) 2006-12-22 2007-12-17 Process and apparatus for treating exhausted abrasive slurries from the lapping process for the recovery of their reusable abrasive component

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT000692A ITRM20060692A1 (it) 2006-12-22 2006-12-22 Procedimento per il trattamento di sospensioni abrasive esauste dal processo di lappatura per il recupero della componente di abrasivo riciclabile e relativo impianto.

Publications (1)

Publication Number Publication Date
ITRM20060692A1 true ITRM20060692A1 (it) 2008-06-23

Family

ID=39315222

Family Applications (1)

Application Number Title Priority Date Filing Date
IT000692A ITRM20060692A1 (it) 2006-12-22 2006-12-22 Procedimento per il trattamento di sospensioni abrasive esauste dal processo di lappatura per il recupero della componente di abrasivo riciclabile e relativo impianto.

Country Status (5)

Country Link
EP (1) EP2094441B1 (it)
AT (1) ATE546256T1 (it)
IT (1) ITRM20060692A1 (it)
TW (1) TW200841991A (it)
WO (1) WO2008078349A1 (it)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010253621A (ja) * 2009-04-27 2010-11-11 Ihi Compressor & Machinery Co Ltd ワイヤソーのクーラント管理方法及び装置
JP5399125B2 (ja) * 2009-04-27 2014-01-29 株式会社Ｉｈｉ回転機械 ワイヤソーのクーラント管理方法及び装置
DE102010011853A1 (de) 2010-03-09 2011-09-15 Schmid Silicon Technology Gmbh Verfahren zur Herstellung von hochreinem Silizium
GB2484348A (en) 2010-10-08 2012-04-11 Rec Wafer Norway As Abrasive slurry and method of production of photovoltaic wafers
DE102011115081B4 (de) 2011-09-19 2017-08-31 Baufeld-Mineralölraffinerie GmbH Verfahren zur Gewinnung von Solarsilizium aus Sägeabfällen
TWI461258B (zh) * 2012-11-09 2014-11-21 Sino American Silicon Prod Inc 研磨漿料回收利用方法及運用在該研磨漿料回收利用方法的研磨漿料回收利用設備
CN114193329B (zh) * 2021-12-09 2023-03-21 中环领先半导体材料有限公司 一种磨片在线回收的浆液利用方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0741535B2 (ja) * 1991-04-10 1995-05-10 中小企業事業団 ラップ加工装置の砥粒液再生・循環装置
JP2001287163A (ja) * 2000-04-06 2001-10-16 Nec Corp 研磨用スラリー再生装置

Also Published As

Publication number Publication date
EP2094441B1 (en) 2012-02-22
EP2094441A1 (en) 2009-09-02
ATE546256T1 (de) 2012-03-15
TW200841991A (en) 2008-11-01
WO2008078349A1 (en) 2008-07-03

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