ITMI20001835A0 - Testa di misura a sonde verticali. - Google Patents
Testa di misura a sonde verticali.Info
- Publication number
- ITMI20001835A0 ITMI20001835A0 IT2000MI001835A ITMI20001835A ITMI20001835A0 IT MI20001835 A0 ITMI20001835 A0 IT MI20001835A0 IT 2000MI001835 A IT2000MI001835 A IT 2000MI001835A IT MI20001835 A ITMI20001835 A IT MI20001835A IT MI20001835 A0 ITMI20001835 A0 IT MI20001835A0
- Authority
- IT
- Italy
- Prior art keywords
- measuring head
- vertical probes
- probes
- vertical
- measuring
- Prior art date
Links
- 239000000523 sample Substances 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT2000MI001835A IT1318734B1 (it) | 2000-08-04 | 2000-08-04 | Testa di misura a sonde verticali. |
EP01118596A EP1179734A1 (en) | 2000-08-04 | 2001-08-02 | Testing head having vertical probes |
US09/921,646 US20020070743A1 (en) | 2000-08-04 | 2001-08-03 | Testing head having vertical probes |
US09/922,002 US6674298B2 (en) | 2000-08-04 | 2001-08-03 | Testing head having cantilever probes |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT2000MI001835A IT1318734B1 (it) | 2000-08-04 | 2000-08-04 | Testa di misura a sonde verticali. |
Publications (3)
Publication Number | Publication Date |
---|---|
ITMI20001835A0 true ITMI20001835A0 (it) | 2000-08-04 |
ITMI20001835A1 ITMI20001835A1 (it) | 2002-02-04 |
IT1318734B1 IT1318734B1 (it) | 2003-09-10 |
Family
ID=11445679
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT2000MI001835A IT1318734B1 (it) | 2000-08-04 | 2000-08-04 | Testa di misura a sonde verticali. |
Country Status (3)
Country | Link |
---|---|
US (2) | US6674298B2 (it) |
EP (1) | EP1179734A1 (it) |
IT (1) | IT1318734B1 (it) |
Families Citing this family (46)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5914613A (en) | 1996-08-08 | 1999-06-22 | Cascade Microtech, Inc. | Membrane probing system with local contact scrub |
US6256882B1 (en) | 1998-07-14 | 2001-07-10 | Cascade Microtech, Inc. | Membrane probing system |
US6965226B2 (en) | 2000-09-05 | 2005-11-15 | Cascade Microtech, Inc. | Chuck for holding a device under test |
US6914423B2 (en) | 2000-09-05 | 2005-07-05 | Cascade Microtech, Inc. | Probe station |
DE20114544U1 (de) | 2000-12-04 | 2002-02-21 | Cascade Microtech, Inc., Beaverton, Oreg. | Wafersonde |
AU2002327490A1 (en) | 2001-08-21 | 2003-06-30 | Cascade Microtech, Inc. | Membrane probing system |
US7492172B2 (en) | 2003-05-23 | 2009-02-17 | Cascade Microtech, Inc. | Chuck for holding a device under test |
US7057404B2 (en) | 2003-05-23 | 2006-06-06 | Sharp Laboratories Of America, Inc. | Shielded probe for testing a device under test |
US7250626B2 (en) | 2003-10-22 | 2007-07-31 | Cascade Microtech, Inc. | Probe testing structure |
JP2007517231A (ja) | 2003-12-24 | 2007-06-28 | カスケード マイクロテック インコーポレイテッド | アクティブ・ウェハプローブ |
US7187188B2 (en) | 2003-12-24 | 2007-03-06 | Cascade Microtech, Inc. | Chuck with integrated wafer support |
TWI286606B (en) * | 2004-03-16 | 2007-09-11 | Gunsei Kimoto | Electric signal connecting device, and probe assembly and prober device using it |
US8988091B2 (en) | 2004-05-21 | 2015-03-24 | Microprobe, Inc. | Multiple contact probes |
US9097740B2 (en) * | 2004-05-21 | 2015-08-04 | Formfactor, Inc. | Layered probes with core |
USRE43503E1 (en) | 2006-06-29 | 2012-07-10 | Microprobe, Inc. | Probe skates for electrical testing of convex pad topologies |
US9476911B2 (en) | 2004-05-21 | 2016-10-25 | Microprobe, Inc. | Probes with high current carrying capability and laser machining methods |
US7733101B2 (en) * | 2004-05-21 | 2010-06-08 | Microprobe, Inc. | Knee probe having increased scrub motion |
US7659739B2 (en) * | 2006-09-14 | 2010-02-09 | Micro Porbe, Inc. | Knee probe having reduced thickness section for control of scrub motion |
US7759949B2 (en) * | 2004-05-21 | 2010-07-20 | Microprobe, Inc. | Probes with self-cleaning blunt skates for contacting conductive pads |
KR20070058522A (ko) | 2004-09-13 | 2007-06-08 | 캐스케이드 마이크로테크 인코포레이티드 | 양측 프루빙 구조 |
US7535247B2 (en) | 2005-01-31 | 2009-05-19 | Cascade Microtech, Inc. | Interface for testing semiconductors |
US7656172B2 (en) | 2005-01-31 | 2010-02-02 | Cascade Microtech, Inc. | System for testing semiconductors |
DE102005044760B3 (de) * | 2005-09-20 | 2007-04-12 | Georgsmarienhütte Gmbh | Vorrichtung zur Ultraschallprüfung von heißem Walzmaterial |
US7649367B2 (en) * | 2005-12-07 | 2010-01-19 | Microprobe, Inc. | Low profile probe having improved mechanical scrub and reduced contact inductance |
US7312617B2 (en) | 2006-03-20 | 2007-12-25 | Microprobe, Inc. | Space transformers employing wire bonds for interconnections with fine pitch contacts |
US7723999B2 (en) | 2006-06-12 | 2010-05-25 | Cascade Microtech, Inc. | Calibration structures for differential signal probing |
US7403028B2 (en) | 2006-06-12 | 2008-07-22 | Cascade Microtech, Inc. | Test structure and probe for differential signals |
US7764072B2 (en) | 2006-06-12 | 2010-07-27 | Cascade Microtech, Inc. | Differential signal probing system |
US7786740B2 (en) * | 2006-10-11 | 2010-08-31 | Astria Semiconductor Holdings, Inc. | Probe cards employing probes having retaining portions for potting in a potting region |
US8907689B2 (en) | 2006-10-11 | 2014-12-09 | Microprobe, Inc. | Probe retention arrangement |
US7514948B2 (en) | 2007-04-10 | 2009-04-07 | Microprobe, Inc. | Vertical probe array arranged to provide space transformation |
US7876114B2 (en) | 2007-08-08 | 2011-01-25 | Cascade Microtech, Inc. | Differential waveguide probe |
US8723546B2 (en) * | 2007-10-19 | 2014-05-13 | Microprobe, Inc. | Vertical guided layered probe |
US7671610B2 (en) * | 2007-10-19 | 2010-03-02 | Microprobe, Inc. | Vertical guided probe array providing sideways scrub motion |
DE102008023761B9 (de) | 2008-05-09 | 2012-11-08 | Feinmetall Gmbh | Elektrisches Kontaktelement zum Berührungskontaktieren von elektrischen Prüflingen sowie entsprechende Kontaktieranordnung |
US8230593B2 (en) * | 2008-05-29 | 2012-07-31 | Microprobe, Inc. | Probe bonding method having improved control of bonding material |
US7888957B2 (en) | 2008-10-06 | 2011-02-15 | Cascade Microtech, Inc. | Probing apparatus with impedance optimized interface |
US8410806B2 (en) | 2008-11-21 | 2013-04-02 | Cascade Microtech, Inc. | Replaceable coupon for a probing apparatus |
US8319503B2 (en) | 2008-11-24 | 2012-11-27 | Cascade Microtech, Inc. | Test apparatus for measuring a characteristic of a device under test |
US8073019B2 (en) * | 2009-03-02 | 2011-12-06 | Jian Liu | 810 nm ultra-short pulsed fiber laser |
US20120139574A1 (en) * | 2010-12-06 | 2012-06-07 | International Business Machines Corporation | Vertical probe tip rotational scrub and method |
JP6110086B2 (ja) | 2012-07-23 | 2017-04-05 | 株式会社日本マイクロニクス | 接触検査装置 |
JP2018503805A (ja) * | 2014-12-04 | 2018-02-08 | テクノプローベ エス.ピー.エー. | 垂直プローブを含むテストヘッド |
JP2018513389A (ja) * | 2015-03-13 | 2018-05-24 | テクノプローベ エス.ピー.エー. | 様々な動作状態での試験ヘッドでのプローブ保持を適正化し、各々のガイドホールでのスライドを改善するバーチカルプローブをもつ試験ヘッド |
JP2018151360A (ja) * | 2017-03-15 | 2018-09-27 | 株式会社村田製作所 | コンタクトプローブ |
DE102018204106A1 (de) * | 2018-03-16 | 2019-09-19 | Feinmetall Gmbh | Prüfkarte zum elektrischen Verbinden eines Prüflings mit einer elektrischen Prüfeinrichtung |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5225777A (en) * | 1992-02-04 | 1993-07-06 | International Business Machines Corporation | High density probe |
EP0740160A1 (en) * | 1995-04-24 | 1996-10-30 | Nihon Denshizairyo Kabushiki Kaisha | Vertically operative probe card assembly |
KR0150334B1 (ko) * | 1995-08-17 | 1998-12-01 | 남재우 | 수직형니들을 가지는 프로브카드 및 그 제조방법 |
JP3388307B2 (ja) * | 1996-05-17 | 2003-03-17 | 東京エレクトロン株式会社 | プローブカード及びその組立方法 |
WO1998030914A1 (en) * | 1997-01-13 | 1998-07-16 | Peter Hoang Nguyen | Contact probe assembly for testing electrical devices |
US5923178A (en) * | 1997-04-17 | 1999-07-13 | Cerprobe Corporation | Probe assembly and method for switchable multi-DUT testing of integrated circuit wafers |
US5952843A (en) * | 1998-03-24 | 1999-09-14 | Vinh; Nguyen T. | Variable contact pressure probe |
-
2000
- 2000-08-04 IT IT2000MI001835A patent/IT1318734B1/it active
-
2001
- 2001-08-02 EP EP01118596A patent/EP1179734A1/en not_active Withdrawn
- 2001-08-03 US US09/922,002 patent/US6674298B2/en not_active Expired - Fee Related
- 2001-08-03 US US09/921,646 patent/US20020070743A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
US20020070743A1 (en) | 2002-06-13 |
US6674298B2 (en) | 2004-01-06 |
IT1318734B1 (it) | 2003-09-10 |
US20020067178A1 (en) | 2002-06-06 |
EP1179734A1 (en) | 2002-02-13 |
ITMI20001835A1 (it) | 2002-02-04 |
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