IT966124B - MONOLITHIC INTEGRATED CIRCUIT AND METHOD FOR PRODUCING IT - Google Patents

MONOLITHIC INTEGRATED CIRCUIT AND METHOD FOR PRODUCING IT

Info

Publication number
IT966124B
IT966124B IT53081/72A IT5308172A IT966124B IT 966124 B IT966124 B IT 966124B IT 53081/72 A IT53081/72 A IT 53081/72A IT 5308172 A IT5308172 A IT 5308172A IT 966124 B IT966124 B IT 966124B
Authority
IT
Italy
Prior art keywords
producing
integrated circuit
monolithic integrated
monolithic
circuit
Prior art date
Application number
IT53081/72A
Other languages
Italian (it)
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Application granted granted Critical
Publication of IT966124B publication Critical patent/IT966124B/en

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/40Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00 with at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of IGFETs with BJTs
    • H10D84/401Combinations of FETs or IGBTs with BJTs
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76Making of isolation regions between components
    • H01L21/761PN junctions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/60Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of BJTs
    • H10D84/67Complementary BJTs
    • H10D84/673Vertical complementary BJTs

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Bipolar Integrated Circuits (AREA)
  • Element Separation (AREA)
  • Bipolar Transistors (AREA)
IT53081/72A 1971-09-30 1972-09-30 MONOLITHIC INTEGRATED CIRCUIT AND METHOD FOR PRODUCING IT IT966124B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP46076438A JPS4842685A (en) 1971-09-30 1971-09-30

Publications (1)

Publication Number Publication Date
IT966124B true IT966124B (en) 1974-02-11

Family

ID=13605139

Family Applications (1)

Application Number Title Priority Date Filing Date
IT53081/72A IT966124B (en) 1971-09-30 1972-09-30 MONOLITHIC INTEGRATED CIRCUIT AND METHOD FOR PRODUCING IT

Country Status (7)

Country Link
JP (1) JPS4842685A (en)
CA (1) CA959973A (en)
DE (1) DE2247911C2 (en)
FR (1) FR2154786B1 (en)
GB (1) GB1368190A (en)
IT (1) IT966124B (en)
NL (1) NL7213284A (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51123577A (en) * 1975-04-22 1976-10-28 Toshiba Corp Semiconductor integrating circuit including epitaxial base typ vertica l directional transistor
DE2740449C2 (en) * 1977-09-08 1986-08-21 Röhm GmbH, 6100 Darmstadt Process for the manufacture of lubricating oil additives
CA1120269A (en) * 1978-05-25 1982-03-23 Robert D. Tack Additive combinations and fuels containing them
FR2523370B1 (en) * 1982-03-12 1985-12-13 Thomson Csf HIGH CURRENT PNP TRANSISTOR PART OF A MONOLITHIC INTEGRATED CIRCUIT
JPS61126120A (en) * 1984-11-22 1986-06-13 Mitsui Petrochem Ind Ltd Liquid modified ethylene random copolymer
US5070382A (en) * 1989-08-18 1991-12-03 Motorola, Inc. Semiconductor structure for high power integrated circuits
JP2835116B2 (en) * 1989-09-29 1998-12-14 株式会社東芝 Power IC and method of manufacturing the same
JPH03138974A (en) * 1989-10-24 1991-06-13 Toshiba Corp Bi-CMOS integrated circuit

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3460006A (en) * 1966-02-28 1969-08-05 Westinghouse Electric Corp Semiconductor integrated circuits with improved isolation
FR1538402A (en) * 1967-06-30 1968-09-06 Radiotechnique Coprim Rtc Manufacturing process of integrated semiconductor devices

Also Published As

Publication number Publication date
DE2247911A1 (en) 1973-04-05
FR2154786B1 (en) 1978-03-10
JPS4842685A (en) 1973-06-21
FR2154786A1 (en) 1973-05-11
CA959973A (en) 1974-12-24
GB1368190A (en) 1974-09-25
NL7213284A (en) 1973-04-03
DE2247911C2 (en) 1985-01-17

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