IT939894B - PROCEDURE FOR THE GROWTH OF SEMICONDUCTOR CRYSTALS BY EPITAXIAL DEPOSITION - Google Patents
PROCEDURE FOR THE GROWTH OF SEMICONDUCTOR CRYSTALS BY EPITAXIAL DEPOSITIONInfo
- Publication number
- IT939894B IT939894B IT70184/71A IT7018471A IT939894B IT 939894 B IT939894 B IT 939894B IT 70184/71 A IT70184/71 A IT 70184/71A IT 7018471 A IT7018471 A IT 7018471A IT 939894 B IT939894 B IT 939894B
- Authority
- IT
- Italy
- Prior art keywords
- growth
- procedure
- epitaxial deposition
- semiconductor crystals
- crystals
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/10—Controlling or regulating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/097—Lattice strain and defects
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/107—Melt
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/108—Melt back
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Led Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US7655070A | 1970-09-29 | 1970-09-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
IT939894B true IT939894B (en) | 1973-02-10 |
Family
ID=22132733
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT70184/71A IT939894B (en) | 1970-09-29 | 1971-09-28 | PROCEDURE FOR THE GROWTH OF SEMICONDUCTOR CRYSTALS BY EPITAXIAL DEPOSITION |
Country Status (8)
Country | Link |
---|---|
US (1) | US3729348A (en) |
JP (1) | JPS505026B1 (en) |
BE (1) | BE772812A (en) |
CA (1) | CA947186A (en) |
DE (1) | DE2147265B2 (en) |
FR (1) | FR2106326A5 (en) |
GB (1) | GB1355852A (en) |
IT (1) | IT939894B (en) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3862859A (en) * | 1972-01-10 | 1975-01-28 | Rca Corp | Method of making a semiconductor device |
US3877883A (en) * | 1973-07-13 | 1975-04-15 | Rca Corp | Method of growing single crystals of compounds |
JPS5137915B2 (en) * | 1973-10-19 | 1976-10-19 | ||
US4246050A (en) * | 1979-07-23 | 1981-01-20 | Varian Associates, Inc. | Lattice constant grading in the Aly Ca1-y As1-x Sbx alloy system |
GB2097695B (en) * | 1981-03-24 | 1984-08-22 | Mitsubishi Monsanto Chem | Method for producing a single crystal |
US4421576A (en) * | 1981-09-14 | 1983-12-20 | Rca Corporation | Method for forming an epitaxial compound semiconductor layer on a semi-insulating substrate |
US5091333A (en) * | 1983-09-12 | 1992-02-25 | Massachusetts Institute Of Technology | Reducing dislocations in semiconductors utilizing repeated thermal cycling during multistage epitaxial growth |
US4632712A (en) * | 1983-09-12 | 1986-12-30 | Massachusetts Institute Of Technology | Reducing dislocations in semiconductors utilizing repeated thermal cycling during multistage epitaxial growth |
FR2606036B1 (en) * | 1986-11-05 | 1988-12-02 | Pechiney | PROCESS FOR OBTAINING, BY COOLING MOLTEN ALLOYS, CRYSTALS OF INTERMETALLIC COMPOUNDS, IN PARTICULAR, ISOLATED SINGLE CRYSTALS |
JPH0787187B2 (en) * | 1987-08-13 | 1995-09-20 | 古河電気工業株式会社 | Method for manufacturing GaAs compound semiconductor substrate |
US5209811A (en) * | 1988-03-25 | 1993-05-11 | Shin-Etsu Handotai Company Limited Of Japan | Method for heat-treating gallium arsenide monocrystals |
US5228927A (en) * | 1988-03-25 | 1993-07-20 | Shin-Etsu Handotai Company Limited | Method for heat-treating gallium arsenide monocrystals |
JPH04198095A (en) * | 1990-11-28 | 1992-07-17 | Fujitsu Ltd | Method for growing thin film of compound semiconductor |
US6010937A (en) * | 1995-09-05 | 2000-01-04 | Spire Corporation | Reduction of dislocations in a heteroepitaxial semiconductor structure |
-
1970
- 1970-09-29 US US00076550A patent/US3729348A/en not_active Expired - Lifetime
-
1971
- 1971-04-15 CA CA110,442A patent/CA947186A/en not_active Expired
- 1971-09-20 BE BE772812A patent/BE772812A/en unknown
- 1971-09-22 DE DE19712147265 patent/DE2147265B2/en active Pending
- 1971-09-22 GB GB4414971A patent/GB1355852A/en not_active Expired
- 1971-09-28 IT IT70184/71A patent/IT939894B/en active
- 1971-09-28 FR FR7134808A patent/FR2106326A5/fr not_active Expired
- 1971-09-29 JP JP46075519A patent/JPS505026B1/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
US3729348A (en) | 1973-04-24 |
JPS505026B1 (en) | 1975-02-27 |
DE2147265A1 (en) | 1972-03-30 |
CA947186A (en) | 1974-05-14 |
BE772812A (en) | 1972-01-17 |
GB1355852A (en) | 1974-06-05 |
FR2106326A5 (en) | 1972-04-28 |
DE2147265B2 (en) | 1973-08-23 |
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