IT8567290A0 - DEVICE AND PROCEDURE FOR MEASUREMENT AND ADJUSTMENT OF LENGTHS - Google Patents

DEVICE AND PROCEDURE FOR MEASUREMENT AND ADJUSTMENT OF LENGTHS

Info

Publication number
IT8567290A0
IT8567290A0 IT8567290A IT6729085A IT8567290A0 IT 8567290 A0 IT8567290 A0 IT 8567290A0 IT 8567290 A IT8567290 A IT 8567290A IT 6729085 A IT6729085 A IT 6729085A IT 8567290 A0 IT8567290 A0 IT 8567290A0
Authority
IT
Italy
Prior art keywords
lengths
procedure
adjustment
measurement
Prior art date
Application number
IT8567290A
Other languages
Italian (it)
Other versions
IT1184929B (en
IT8567290A1 (en
Inventor
Gerd Schuchardt
Hans Joachim Freitag
Friedrich Tzschach Rol Thiemer
E Lothar Voigt
Original Assignee
Jenoptik Jena Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jenoptik Jena Gmbh filed Critical Jenoptik Jena Gmbh
Publication of IT8567290A0 publication Critical patent/IT8567290A0/en
Publication of IT8567290A1 publication Critical patent/IT8567290A1/en
Application granted granted Critical
Publication of IT1184929B publication Critical patent/IT1184929B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24428—Error prevention
    • G01D5/24433—Error prevention by mechanical means
    • G01D5/24438—Special design of the sensing element or scale
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24471—Error correction
    • G01D5/24476—Signal processing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Optical Transform (AREA)
IT67290/85A 1984-04-02 1985-03-26 DEVICE AND PROCEDURE FOR THE MEASUREMENT AND ADJUSTMENT OF LENGTHS IT1184929B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD84261535A DD225497A1 (en) 1984-04-02 1984-04-02 DEVICE AND METHOD FOR MEASURING AND ADJUSTING LENGTHS

Publications (3)

Publication Number Publication Date
IT8567290A0 true IT8567290A0 (en) 1985-03-26
IT8567290A1 IT8567290A1 (en) 1986-09-26
IT1184929B IT1184929B (en) 1987-10-28

Family

ID=5555828

Family Applications (1)

Application Number Title Priority Date Filing Date
IT67290/85A IT1184929B (en) 1984-04-02 1985-03-26 DEVICE AND PROCEDURE FOR THE MEASUREMENT AND ADJUSTMENT OF LENGTHS

Country Status (6)

Country Link
JP (1) JPS6144320A (en)
CH (1) CH669254A5 (en)
DD (1) DD225497A1 (en)
DE (1) DE3506537A1 (en)
GB (1) GB2156989B (en)
IT (1) IT1184929B (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4304964A (en) * 1978-04-28 1981-12-08 Texas Instruments Incorporated Variable frame length data converter for a speech synthesis circuit
DE3644979A1 (en) * 1986-12-24 1988-07-07 Pav Praezisions Apparatebau Ag Slide gauge
DE3711070A1 (en) * 1987-04-02 1988-11-24 Heidenhain Gmbh Dr Johannes LENGTH OR ANGLE MEASURING DEVICE
GB2204691A (en) * 1987-05-07 1988-11-16 Advanced Manufacturing Technol Position measurement
JP2648181B2 (en) * 1988-08-31 1997-08-27 オ−クマ株式会社 Linear encoder
DE19625016B4 (en) * 1996-06-22 2004-07-01 Robert Bosch Gmbh Procedure for exact position measurement
JP5057235B2 (en) * 2008-04-04 2012-10-24 株式会社ニコン Calibration method, exposure method, device manufacturing method, and exposure apparatus

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB760321A (en) * 1953-03-14 1956-10-31 Ferranti Ltd Improvements relating to measuring apparatus
DE1266001B (en) * 1963-12-04 1968-04-11 Contraves Ag Device for increasing the measuring accuracy in optical-electrical measuring devices
US3197873A (en) * 1963-12-16 1965-08-03 Sheffield Corp Gaging device
GB1070150A (en) * 1964-09-30 1967-05-24 Spezialwaagenfabrik Rapido Veb Device for conversion of movement of an indicating element into electrical digital signals
US3597750A (en) * 1969-01-21 1971-08-03 Information Storage Systems Servo with agc for positioning a magnetic head
DE2952106C2 (en) * 1979-12-22 1982-11-04 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Photoelectric incremental length or angle measuring device
GB2111199A (en) * 1981-12-02 1983-06-29 Gec Elliott Mech Handling Movement monitor

Also Published As

Publication number Publication date
GB2156989A (en) 1985-10-16
IT1184929B (en) 1987-10-28
GB2156989B (en) 1988-02-03
DE3506537A1 (en) 1985-10-10
CH669254A5 (en) 1989-02-28
GB8508212D0 (en) 1985-05-09
IT8567290A1 (en) 1986-09-26
DD225497A1 (en) 1985-07-31
JPS6144320A (en) 1986-03-04

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