GB2156989B - Device and method for measuring and adjusting lengths - Google Patents

Device and method for measuring and adjusting lengths

Info

Publication number
GB2156989B
GB2156989B GB08508212A GB8508212A GB2156989B GB 2156989 B GB2156989 B GB 2156989B GB 08508212 A GB08508212 A GB 08508212A GB 8508212 A GB8508212 A GB 8508212A GB 2156989 B GB2156989 B GB 2156989B
Authority
GB
United Kingdom
Prior art keywords
measuring
adjusting lengths
lengths
adjusting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08508212A
Other versions
GB8508212D0 (en
GB2156989A (en
Inventor
Gerd Schuchardt
Hans-Joachim Freitag
Friedrich Tzschach
Rolf Thiemer
Lothar Voigt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Jena GmbH filed Critical Carl Zeiss Jena GmbH
Publication of GB8508212D0 publication Critical patent/GB8508212D0/en
Publication of GB2156989A publication Critical patent/GB2156989A/en
Application granted granted Critical
Publication of GB2156989B publication Critical patent/GB2156989B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24428—Error prevention
    • G01D5/24433—Error prevention by mechanical means
    • G01D5/24438—Special design of the sensing element or scale
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24471—Error correction
    • G01D5/24476—Signal processing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
GB08508212A 1984-04-02 1985-03-29 Device and method for measuring and adjusting lengths Expired GB2156989B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD84261535A DD225497A1 (en) 1984-04-02 1984-04-02 DEVICE AND METHOD FOR MEASURING AND ADJUSTING LENGTHS

Publications (3)

Publication Number Publication Date
GB8508212D0 GB8508212D0 (en) 1985-05-09
GB2156989A GB2156989A (en) 1985-10-16
GB2156989B true GB2156989B (en) 1988-02-03

Family

ID=5555828

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08508212A Expired GB2156989B (en) 1984-04-02 1985-03-29 Device and method for measuring and adjusting lengths

Country Status (6)

Country Link
JP (1) JPS6144320A (en)
CH (1) CH669254A5 (en)
DD (1) DD225497A1 (en)
DE (1) DE3506537A1 (en)
GB (1) GB2156989B (en)
IT (1) IT1184929B (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4304964A (en) * 1978-04-28 1981-12-08 Texas Instruments Incorporated Variable frame length data converter for a speech synthesis circuit
DE3644979A1 (en) * 1986-12-24 1988-07-07 Pav Praezisions Apparatebau Ag Slide gauge
DE3711070A1 (en) * 1987-04-02 1988-11-24 Heidenhain Gmbh Dr Johannes LENGTH OR ANGLE MEASURING DEVICE
GB2204691A (en) * 1987-05-07 1988-11-16 Advanced Manufacturing Technol Position measurement
JP2648181B2 (en) * 1988-08-31 1997-08-27 オ−クマ株式会社 Linear encoder
DE19625016B4 (en) * 1996-06-22 2004-07-01 Robert Bosch Gmbh Procedure for exact position measurement
JP5057235B2 (en) * 2008-04-04 2012-10-24 株式会社ニコン Calibration method, exposure method, device manufacturing method, and exposure apparatus

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB760321A (en) * 1953-03-14 1956-10-31 Ferranti Ltd Improvements relating to measuring apparatus
DE1266001B (en) * 1963-12-04 1968-04-11 Contraves Ag Device for increasing the measuring accuracy in optical-electrical measuring devices
US3197873A (en) * 1963-12-16 1965-08-03 Sheffield Corp Gaging device
GB1070150A (en) * 1964-09-30 1967-05-24 Spezialwaagenfabrik Rapido Veb Device for conversion of movement of an indicating element into electrical digital signals
US3597750A (en) * 1969-01-21 1971-08-03 Information Storage Systems Servo with agc for positioning a magnetic head
DE2952106C2 (en) * 1979-12-22 1982-11-04 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Photoelectric incremental length or angle measuring device
GB2111199A (en) * 1981-12-02 1983-06-29 Gec Elliott Mech Handling Movement monitor

Also Published As

Publication number Publication date
DE3506537A1 (en) 1985-10-10
DD225497A1 (en) 1985-07-31
IT1184929B (en) 1987-10-28
GB8508212D0 (en) 1985-05-09
JPS6144320A (en) 1986-03-04
GB2156989A (en) 1985-10-16
CH669254A5 (en) 1989-02-28
IT8567290A0 (en) 1985-03-26
IT8567290A1 (en) 1986-09-26

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee