IT8148932A0 - TRIMMING VALUE ADJUSTMENT OF THIN FILM RESISTORS USING IONIC EROSION - Google Patents
TRIMMING VALUE ADJUSTMENT OF THIN FILM RESISTORS USING IONIC EROSIONInfo
- Publication number
- IT8148932A0 IT8148932A0 IT8148932A IT4893281A IT8148932A0 IT 8148932 A0 IT8148932 A0 IT 8148932A0 IT 8148932 A IT8148932 A IT 8148932A IT 4893281 A IT4893281 A IT 4893281A IT 8148932 A0 IT8148932 A0 IT 8148932A0
- Authority
- IT
- Italy
- Prior art keywords
- thin film
- value adjustment
- film resistors
- trimming value
- ionic erosion
- Prior art date
Links
- 230000003628 erosive effect Effects 0.000 title 1
- 239000010409 thin film Substances 0.000 title 1
- 238000009966 trimming Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
- H01C17/24—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material
- H01C17/2404—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material by charged particle impact, e.g. by electron or ion beam milling, sputtering, plasma etching
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT48932/81A IT1171401B (en) | 1981-07-20 | 1981-07-20 | TRIMMING VALUE ADJUSTMENT THIN FILM RESISTORS BY IONIC EROSION |
EP82830171A EP0070809A3 (en) | 1981-07-20 | 1982-06-15 | Adjustment to desired value (trimming) on thin film resistors by ion sputtering |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT48932/81A IT1171401B (en) | 1981-07-20 | 1981-07-20 | TRIMMING VALUE ADJUSTMENT THIN FILM RESISTORS BY IONIC EROSION |
Publications (2)
Publication Number | Publication Date |
---|---|
IT8148932A0 true IT8148932A0 (en) | 1981-07-20 |
IT1171401B IT1171401B (en) | 1987-06-10 |
Family
ID=11269073
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT48932/81A IT1171401B (en) | 1981-07-20 | 1981-07-20 | TRIMMING VALUE ADJUSTMENT THIN FILM RESISTORS BY IONIC EROSION |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP0070809A3 (en) |
IT (1) | IT1171401B (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2213986A (en) * | 1987-12-16 | 1989-08-23 | Philips Electronic Associated | Fabrication of resistors in microwave and other circuits |
US6475400B2 (en) * | 2001-02-26 | 2002-11-05 | Trw Inc. | Method for controlling the sheet resistance of thin film resistors |
DE10162540A1 (en) * | 2001-12-19 | 2003-07-10 | Infineon Technologies Ag | Component and method for its production |
US10680056B1 (en) | 2018-12-26 | 2020-06-09 | Texas Instruments Incorporated | IC with ion milled thin-film resistors |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3860783A (en) * | 1970-10-19 | 1975-01-14 | Bell Telephone Labor Inc | Ion etching through a pattern mask |
DE2144656A1 (en) * | 1971-09-07 | 1973-03-15 | Hottinger Messtechnik Baldwin | PROCEDURE AND ARRANGEMENT FOR CHANGING THE ELECTRICAL RESISTANCE |
DE2449731A1 (en) * | 1973-12-03 | 1975-06-05 | Hewlett Packard Co | ETCHING PROCEDURE |
FR2354617A1 (en) * | 1976-06-08 | 1978-01-06 | Electro Resistance | PROCESS FOR THE MANUFACTURE OF ELECTRICAL RESISTORS FROM METAL SHEETS OR FILMS AND RESISTANCES OBTAINED |
-
1981
- 1981-07-20 IT IT48932/81A patent/IT1171401B/en active
-
1982
- 1982-06-15 EP EP82830171A patent/EP0070809A3/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
IT1171401B (en) | 1987-06-10 |
EP0070809A2 (en) | 1983-01-26 |
EP0070809A3 (en) | 1983-07-13 |
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