IT8122145A0 - Generatore di fasci elettronici ad elevata costanza per la lavorazione di materiali. - Google Patents
Generatore di fasci elettronici ad elevata costanza per la lavorazione di materiali.Info
- Publication number
- IT8122145A0 IT8122145A0 IT8122145A IT2214581A IT8122145A0 IT 8122145 A0 IT8122145 A0 IT 8122145A0 IT 8122145 A IT8122145 A IT 8122145A IT 2214581 A IT2214581 A IT 2214581A IT 8122145 A0 IT8122145 A0 IT 8122145A0
- Authority
- IT
- Italy
- Prior art keywords
- materials
- processing
- beam generator
- electronic beam
- high constancy
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/063—Geometrical arrangement of electrodes for beam-forming
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/029—Schematic arrangements for beam forming
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/DE1980/000086 WO1981003579A1 (en) | 1980-06-07 | 1980-06-07 | High stability electron gun for the shaping of materials |
Publications (2)
Publication Number | Publication Date |
---|---|
IT8122145A0 true IT8122145A0 (it) | 1981-06-05 |
IT1167457B IT1167457B (it) | 1987-05-13 |
Family
ID=6711755
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT22145/81A IT1167457B (it) | 1980-06-07 | 1981-06-05 | Generatore di fasci elettronici ad elevata costanza per la lavorazione di materiali |
Country Status (6)
Country | Link |
---|---|
US (1) | US4500791A (it) |
EP (1) | EP0053107B1 (it) |
JP (1) | JPH0752633B2 (it) |
DE (1) | DE3070002D1 (it) |
IT (1) | IT1167457B (it) |
WO (1) | WO1981003579A1 (it) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4019620A1 (de) * | 1990-06-20 | 1992-01-02 | Adatomed Pharma & Med | Verfahren und vorrichtung zur sterilisation von implantaten |
DE4104845C5 (de) * | 1991-02-16 | 2004-09-09 | PTR Präzisionstechnik GmbH | Elektronenstrahlerzeuger, insbesondere für eine Elektronenstrahlkanone |
US5665756A (en) * | 1994-08-03 | 1997-09-09 | Hoechst Marion Roussel, Inc. | Aminoalkyloximes useful in the treatment of depression and obsessive compulsive disorders |
US6815875B2 (en) * | 2001-02-27 | 2004-11-09 | Hewlett-Packard Development Company, L.P. | Electron source having planar emission region and focusing structure |
CN103608894B (zh) | 2011-02-14 | 2016-08-10 | 麻省理工学院 | 用于质谱分析的方法、装置及系统 |
JP6166910B2 (ja) * | 2013-02-26 | 2017-07-19 | 株式会社ニューフレアテクノロジー | カソードの動作温度調整方法、及び描画装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1062831B (de) * | 1958-06-13 | 1959-08-06 | Siemens Reiniger Werke Ag | Diagnostik-Roentgenapparat mit Mitteln zur Regelung des Roentgenroehren-emissionsstromes vor Aufnahmebeginn |
US3846660A (en) * | 1969-08-06 | 1974-11-05 | Gen Electric | Electron beam generating system with collimated focusing means |
FR2114205A5 (it) * | 1970-11-19 | 1972-06-30 | Commissariat Energie Atomique |
-
1980
- 1980-06-07 WO PCT/DE1980/000086 patent/WO1981003579A1/de active IP Right Grant
- 1980-06-07 US US06/348,064 patent/US4500791A/en not_active Expired - Lifetime
- 1980-06-07 EP EP80901264A patent/EP0053107B1/de not_active Expired
- 1980-06-07 DE DE8080901264T patent/DE3070002D1/de not_active Expired
- 1980-06-07 JP JP55501539A patent/JPH0752633B2/ja not_active Expired - Lifetime
-
1981
- 1981-06-05 IT IT22145/81A patent/IT1167457B/it active
Also Published As
Publication number | Publication date |
---|---|
JPH0752633B2 (ja) | 1995-06-05 |
DE3070002D1 (en) | 1985-03-07 |
EP0053107B1 (de) | 1985-01-23 |
US4500791A (en) | 1985-02-19 |
JPS57501307A (it) | 1982-07-22 |
EP0053107A1 (de) | 1982-06-09 |
IT1167457B (it) | 1987-05-13 |
WO1981003579A1 (en) | 1981-12-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
TA | Fee payment date (situation as of event date), data collected since 19931001 |
Effective date: 19950629 |