IT7925708A0 - Diffusione selettiva a tubo aperto di alluminio in silicio. - Google Patents
Diffusione selettiva a tubo aperto di alluminio in silicio.Info
- Publication number
- IT7925708A0 IT7925708A0 IT7925708A IT2570879A IT7925708A0 IT 7925708 A0 IT7925708 A0 IT 7925708A0 IT 7925708 A IT7925708 A IT 7925708A IT 2570879 A IT2570879 A IT 2570879A IT 7925708 A0 IT7925708 A0 IT 7925708A0
- Authority
- IT
- Italy
- Prior art keywords
- silicon
- aluminum
- open tube
- tube diffusion
- selective open
- Prior art date
Links
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 title 1
- 229910052782 aluminium Inorganic materials 0.000 title 1
- 238000009792 diffusion process Methods 0.000 title 1
- 229910052710 silicon Inorganic materials 0.000 title 1
- 239000010703 silicon Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/761—PN junctions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
- H01L21/223—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a gaseous phase
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electrodes Of Semiconductors (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Thyristors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/943,451 US4188245A (en) | 1978-09-18 | 1978-09-18 | Selective open tube aluminum diffusion |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| IT7925708A0 true IT7925708A0 (it) | 1979-09-14 |
| IT1123144B IT1123144B (it) | 1986-04-30 |
Family
ID=25479691
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IT25708/79A IT1123144B (it) | 1978-09-18 | 1979-09-14 | Diffusione selettiva a tubo aperto di alluminio in silicio |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US4188245A (it) |
| JP (1) | JPS5837977B2 (it) |
| DE (1) | DE2937518A1 (it) |
| FR (1) | FR2436496A1 (it) |
| GB (1) | GB2031649B (it) |
| IT (1) | IT1123144B (it) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5824007B2 (ja) * | 1979-07-16 | 1983-05-18 | 株式会社日立製作所 | 半導体装置の製造方法 |
| EP0709878B1 (en) * | 1994-10-24 | 1998-04-01 | Naoetsu Electronics Company | Method for the preparation of discrete substrate plates of semiconductor silicon wafer |
| FR2785089B1 (fr) * | 1998-10-23 | 2002-03-01 | St Microelectronics Sa | Realisation de mur d'isolement |
| US6736942B2 (en) * | 2000-05-02 | 2004-05-18 | Johns Hopkins University | Freestanding reactive multilayer foils |
| US7361412B2 (en) * | 2000-05-02 | 2008-04-22 | Johns Hopkins University | Nanostructured soldered or brazed joints made with reactive multilayer foils |
| CN104217932B (zh) * | 2014-09-15 | 2016-11-30 | 吉林华微电子股份有限公司 | 提高扩散炉首尾芯片参数一致性的方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2770761A (en) * | 1954-12-16 | 1956-11-13 | Bell Telephone Labor Inc | Semiconductor translators containing enclosed active junctions |
| US2813048A (en) * | 1954-06-24 | 1957-11-12 | Bell Telephone Labor Inc | Temperature gradient zone-melting |
| GB1264265A (it) * | 1969-03-13 | 1972-02-16 | ||
| US3972838A (en) * | 1973-11-01 | 1976-08-03 | Denki Kagaku Kogyo Kabushiki Kaisha | Composition for diffusing phosphorus |
| DE2506436C3 (de) * | 1975-02-15 | 1980-05-14 | Deutsche Itt Industries Gmbh, 7800 Freiburg | Diffusionsverfahren zum Herstellen aluminiumdotierter Isolationszonen für Halbleiterbauelemente |
| GB1536545A (en) * | 1975-03-26 | 1978-12-20 | Mullard Ltd | Semiconductor device manufacture |
-
1978
- 1978-09-18 US US05/943,451 patent/US4188245A/en not_active Expired - Lifetime
-
1979
- 1979-09-06 GB GB7930997A patent/GB2031649B/en not_active Expired
- 1979-09-14 IT IT25708/79A patent/IT1123144B/it active
- 1979-09-17 FR FR7923123A patent/FR2436496A1/fr active Granted
- 1979-09-17 DE DE19792937518 patent/DE2937518A1/de not_active Withdrawn
- 1979-09-18 JP JP54118880A patent/JPS5837977B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| FR2436496B1 (it) | 1984-08-24 |
| IT1123144B (it) | 1986-04-30 |
| GB2031649A (en) | 1980-04-23 |
| FR2436496A1 (fr) | 1980-04-11 |
| GB2031649B (en) | 1983-03-30 |
| JPS5555525A (en) | 1980-04-23 |
| US4188245A (en) | 1980-02-12 |
| JPS5837977B2 (ja) | 1983-08-19 |
| DE2937518A1 (de) | 1980-03-27 |
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