IT201700097531A1 - Sensore inerziale fm e metodo di funzionamento del sensore inerziale fm - Google Patents

Sensore inerziale fm e metodo di funzionamento del sensore inerziale fm

Info

Publication number
IT201700097531A1
IT201700097531A1 IT102017000097531A IT201700097531A IT201700097531A1 IT 201700097531 A1 IT201700097531 A1 IT 201700097531A1 IT 102017000097531 A IT102017000097531 A IT 102017000097531A IT 201700097531 A IT201700097531 A IT 201700097531A IT 201700097531 A1 IT201700097531 A1 IT 201700097531A1
Authority
IT
Italy
Prior art keywords
inertial
sensor
functioning method
functioning
Prior art date
Application number
IT102017000097531A
Other languages
English (en)
Inventor
Alessandro Tocchio
Francesco Rizzini
Carlo Valzasina
Giacomo Langfelder
Cristiano Rocco Marra
Original Assignee
St Microelectronics Srl
Milano Politecnico
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl, Milano Politecnico filed Critical St Microelectronics Srl
Priority to IT102017000097531A priority Critical patent/IT201700097531A1/it
Priority to EP18188857.9A priority patent/EP3450992B1/en
Priority to CN201810996348.9A priority patent/CN109444466B/zh
Priority to US16/116,467 priority patent/US10809280B2/en
Priority to CN201821403583.2U priority patent/CN209043927U/zh
Publication of IT201700097531A1 publication Critical patent/IT201700097531A1/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
    • G01P2015/0882—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system for providing damping of vibrations

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Pressure Sensors (AREA)
  • Gyroscopes (AREA)
IT102017000097531A 2017-08-30 2017-08-30 Sensore inerziale fm e metodo di funzionamento del sensore inerziale fm IT201700097531A1 (it)

Priority Applications (5)

Application Number Priority Date Filing Date Title
IT102017000097531A IT201700097531A1 (it) 2017-08-30 2017-08-30 Sensore inerziale fm e metodo di funzionamento del sensore inerziale fm
EP18188857.9A EP3450992B1 (en) 2017-08-30 2018-08-14 Fm inertial sensor and method for operating the fm inertial sensor
CN201810996348.9A CN109444466B (zh) 2017-08-30 2018-08-29 Fm惯性传感器和用于操作fm惯性传感器的方法
US16/116,467 US10809280B2 (en) 2017-08-30 2018-08-29 FM inertial sensor and method for operating the FM inertial sensor
CN201821403583.2U CN209043927U (zh) 2017-08-30 2018-08-29 惯性传感器和mems器件

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT102017000097531A IT201700097531A1 (it) 2017-08-30 2017-08-30 Sensore inerziale fm e metodo di funzionamento del sensore inerziale fm

Publications (1)

Publication Number Publication Date
IT201700097531A1 true IT201700097531A1 (it) 2019-03-02

Family

ID=60766070

Family Applications (1)

Application Number Title Priority Date Filing Date
IT102017000097531A IT201700097531A1 (it) 2017-08-30 2017-08-30 Sensore inerziale fm e metodo di funzionamento del sensore inerziale fm

Country Status (4)

Country Link
US (1) US10809280B2 (it)
EP (1) EP3450992B1 (it)
CN (2) CN109444466B (it)
IT (1) IT201700097531A1 (it)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT201700097531A1 (it) * 2017-08-30 2019-03-02 St Microelectronics Srl Sensore inerziale fm e metodo di funzionamento del sensore inerziale fm
CN111157760B (zh) * 2020-01-02 2021-01-19 西安交通大学 一种基于mems超谐同步加速度计的频率自动跟踪方法及系统
US11307218B2 (en) 2020-05-22 2022-04-19 Invensense, Inc. Real-time isolation of self-test and linear acceleration signals
CN114859077A (zh) * 2022-05-12 2022-08-05 东南大学 一种基于奇异点的高灵敏度微加速度计及其使用方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998037380A1 (en) * 1997-02-24 1998-08-27 The Charles Stark Draper Laboratory, Inc. Tuning fork gyro with split electrode
US20050150297A1 (en) * 2004-01-13 2005-07-14 Farrokh Ayazi High-resolution in-plane tuning fork gyroscope and methods of fabrication
WO2015097435A1 (en) * 2013-12-23 2015-07-02 Atlantic Inertial Systems Limited Accelerometers

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7444869B2 (en) * 2006-06-29 2008-11-04 Honeywell International Inc. Force rebalancing and parametric amplification of MEMS inertial sensors
CN101792109B (zh) * 2010-03-16 2012-01-11 杭州电子科技大学 一种嵌入横向可动电极的微惯性传感器及其制作方法
CN103760382B (zh) * 2014-01-16 2016-04-27 中国工程物理研究院电子工程研究所 一种静电刚度式硅微谐振加速度传感器芯片
CN103901227B (zh) * 2014-04-02 2016-04-27 清华大学 硅微谐振式加速度计
DE102014211054A1 (de) * 2014-06-10 2015-12-17 Robert Bosch Gmbh Mikromechanischer Beschleunigungssensor
CN105137120B (zh) 2015-09-01 2018-04-13 中国人民解放军国防科学技术大学 一种v形梁扭摆式单轴微机械加速度计及其制备方法
ITUB20159197A1 (it) * 2015-12-29 2017-06-29 St Microelectronics Srl Giroscopio microelettromeccanico con reiezione di disturbi e metodo di rilevamento di una velocita' angolare
CN106932609B (zh) * 2017-03-02 2019-05-21 清华大学 一种单锚定点四质量块mems六轴惯性传感器
IT201700097531A1 (it) * 2017-08-30 2019-03-02 St Microelectronics Srl Sensore inerziale fm e metodo di funzionamento del sensore inerziale fm

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998037380A1 (en) * 1997-02-24 1998-08-27 The Charles Stark Draper Laboratory, Inc. Tuning fork gyro with split electrode
US20050150297A1 (en) * 2004-01-13 2005-07-14 Farrokh Ayazi High-resolution in-plane tuning fork gyroscope and methods of fabrication
WO2015097435A1 (en) * 2013-12-23 2015-07-02 Atlantic Inertial Systems Limited Accelerometers

Also Published As

Publication number Publication date
US20190064205A1 (en) 2019-02-28
EP3450992A1 (en) 2019-03-06
CN209043927U (zh) 2019-06-28
CN109444466B (zh) 2021-04-27
US10809280B2 (en) 2020-10-20
EP3450992B1 (en) 2020-04-01
CN109444466A (zh) 2019-03-08

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