IT1399480B1 - Apparecchiatura per la deposizione di materiale semiconduttore su vetro - Google Patents

Apparecchiatura per la deposizione di materiale semiconduttore su vetro

Info

Publication number
IT1399480B1
IT1399480B1 ITMI2010A000416A ITMI20100416A IT1399480B1 IT 1399480 B1 IT1399480 B1 IT 1399480B1 IT MI2010A000416 A ITMI2010A000416 A IT MI2010A000416A IT MI20100416 A ITMI20100416 A IT MI20100416A IT 1399480 B1 IT1399480 B1 IT 1399480B1
Authority
IT
Italy
Prior art keywords
deposition
glass
equipment
semiconductive material
semiconductive
Prior art date
Application number
ITMI2010A000416A
Other languages
English (en)
Inventor
Marco Ronchi
Original Assignee
Stral S R L
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stral S R L filed Critical Stral S R L
Priority to ITMI2010A000416A priority Critical patent/IT1399480B1/it
Priority to PCT/EP2011/000897 priority patent/WO2011113518A1/en
Priority to US13/634,339 priority patent/US20130000556A1/en
Priority to EP11705819A priority patent/EP2548219A1/en
Priority to CN201180013855.2A priority patent/CN102804357B/zh
Publication of ITMI20100416A1 publication Critical patent/ITMI20100416A1/it
Application granted granted Critical
Publication of IT1399480B1 publication Critical patent/IT1399480B1/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Glass Fibres Or Filaments (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Inorganic Insulating Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
ITMI2010A000416A 2010-03-15 2010-03-15 Apparecchiatura per la deposizione di materiale semiconduttore su vetro IT1399480B1 (it)

Priority Applications (5)

Application Number Priority Date Filing Date Title
ITMI2010A000416A IT1399480B1 (it) 2010-03-15 2010-03-15 Apparecchiatura per la deposizione di materiale semiconduttore su vetro
PCT/EP2011/000897 WO2011113518A1 (en) 2010-03-15 2011-02-24 Apparatus for the deposition of semiconductor material on a glass sheet
US13/634,339 US20130000556A1 (en) 2010-03-15 2011-02-24 Apparatus for the deposition of semiconductor material on a glass sheet
EP11705819A EP2548219A1 (en) 2010-03-15 2011-02-24 Apparatus for the deposition of semiconductor material on a glass sheet
CN201180013855.2A CN102804357B (zh) 2010-03-15 2011-02-24 用于在玻璃板上沉积半导体材料的设备

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITMI2010A000416A IT1399480B1 (it) 2010-03-15 2010-03-15 Apparecchiatura per la deposizione di materiale semiconduttore su vetro

Publications (2)

Publication Number Publication Date
ITMI20100416A1 ITMI20100416A1 (it) 2011-09-16
IT1399480B1 true IT1399480B1 (it) 2013-04-19

Family

ID=42671818

Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI2010A000416A IT1399480B1 (it) 2010-03-15 2010-03-15 Apparecchiatura per la deposizione di materiale semiconduttore su vetro

Country Status (5)

Country Link
US (1) US20130000556A1 (it)
EP (1) EP2548219A1 (it)
CN (1) CN102804357B (it)
IT (1) IT1399480B1 (it)
WO (1) WO2011113518A1 (it)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8557093B2 (en) 2007-03-22 2013-10-15 Sunpower Corporation Deposition system with electrically isolated pallet and anode assemblies
KR101830782B1 (ko) 2011-09-22 2018-04-05 삼성전자주식회사 그래핀을 포함하는 전극 구조체 및 전계효과 트랜지스터

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4635788A (en) * 1984-07-12 1987-01-13 Cincinnati Milacron Inc. Conveyor
US5110249A (en) * 1986-10-23 1992-05-05 Innotec Group, Inc. Transport system for inline vacuum processing
US5170714A (en) * 1988-06-13 1992-12-15 Asahi Glass Company, Ltd. Vacuum processing apparatus and transportation system thereof
US5248349A (en) 1992-05-12 1993-09-28 Solar Cells, Inc. Process for making photovoltaic devices and resultant product
US6875468B2 (en) 2001-04-06 2005-04-05 Rwe Solar Gmbh Method and device for treating and/or coating a surface of an object
CN101646800A (zh) * 2007-02-01 2010-02-10 威拉德&凯尔西太阳能集团有限责任公司 用于玻璃板半导体涂覆的系统和方法
US8557093B2 (en) * 2007-03-22 2013-10-15 Sunpower Corporation Deposition system with electrically isolated pallet and anode assemblies
US20090191031A1 (en) * 2008-01-28 2009-07-30 Willard & Kelsey Solar Group, Llc System and method for cooling semiconductor coated hot glass sheets
US8252619B2 (en) * 2010-04-23 2012-08-28 Primestar Solar, Inc. Treatment of thin film layers photovoltaic module manufacture

Also Published As

Publication number Publication date
CN102804357B (zh) 2016-05-25
EP2548219A1 (en) 2013-01-23
ITMI20100416A1 (it) 2011-09-16
US20130000556A1 (en) 2013-01-03
CN102804357A (zh) 2012-11-28
WO2011113518A1 (en) 2011-09-22

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