IT1397509B1 - Compensazione di quadratura per un sensore di velocita' di rotazione - Google Patents

Compensazione di quadratura per un sensore di velocita' di rotazione

Info

Publication number
IT1397509B1
IT1397509B1 ITMI2009A002028A ITMI20092028A IT1397509B1 IT 1397509 B1 IT1397509 B1 IT 1397509B1 IT MI2009A002028 A ITMI2009A002028 A IT MI2009A002028A IT MI20092028 A ITMI20092028 A IT MI20092028A IT 1397509 B1 IT1397509 B1 IT 1397509B1
Authority
IT
Italy
Prior art keywords
rotation speed
speed sensor
square compensation
compensation
square
Prior art date
Application number
ITMI2009A002028A
Other languages
English (en)
Inventor
Joerg Hauer
Christoph Gauger
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of ITMI20092028A1 publication Critical patent/ITMI20092028A1/it
Application granted granted Critical
Publication of IT1397509B1 publication Critical patent/IT1397509B1/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
ITMI2009A002028A 2008-11-25 2009-11-18 Compensazione di quadratura per un sensore di velocita' di rotazione IT1397509B1 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102008044053.1A DE102008044053B4 (de) 2008-11-25 2008-11-25 Quadraturkompensation für einen Drehratensensor

Publications (2)

Publication Number Publication Date
ITMI20092028A1 ITMI20092028A1 (it) 2010-05-26
IT1397509B1 true IT1397509B1 (it) 2013-01-16

Family

ID=42114343

Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI2009A002028A IT1397509B1 (it) 2008-11-25 2009-11-18 Compensazione di quadratura per un sensore di velocita' di rotazione

Country Status (3)

Country Link
US (1) US8650954B2 (it)
DE (1) DE102008044053B4 (it)
IT (1) IT1397509B1 (it)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009045432A1 (de) * 2009-10-07 2011-04-14 Robert Bosch Gmbh Drehratensensor und Verfahren zum Betrieb eines Drehratensensors
US8619911B2 (en) * 2009-12-15 2013-12-31 Stmicroelectronics International N.V. Quadrature signal decoding using a driver
EP2616388A4 (en) 2010-09-18 2014-08-13 Fairchild Semiconductor HERMETIC ENCLOSURE FOR MICROELECTROMECHANICAL SYSTEMS
KR101352827B1 (ko) 2010-09-18 2014-01-17 페어차일드 세미컨덕터 코포레이션 단일 프루프 매스를 가진 미세기계화 3축 가속도계
EP2619536B1 (en) 2010-09-20 2016-11-02 Fairchild Semiconductor Corporation Microelectromechanical pressure sensor including reference capacitor
DE102010063857A1 (de) * 2010-12-22 2012-06-28 Robert Bosch Gmbh Mikromechanischer Sensor zur Messung von Drehraten sowie entsprechendes Verfahren
EP2527788A1 (en) 2011-05-26 2012-11-28 Maxim Integrated Products, Inc. Quadrature error compensation
EP2647952B1 (en) 2012-04-05 2017-11-15 Fairchild Semiconductor Corporation Mems device automatic-gain control loop for mechanical amplitude drive
EP2647955B8 (en) 2012-04-05 2018-12-19 Fairchild Semiconductor Corporation MEMS device quadrature phase shift cancellation
US9625272B2 (en) * 2012-04-12 2017-04-18 Fairchild Semiconductor Corporation MEMS quadrature cancellation and signal demodulation
DE102013014881B4 (de) 2012-09-12 2023-05-04 Fairchild Semiconductor Corporation Verbesserte Silizium-Durchkontaktierung mit einer Füllung aus mehreren Materialien
US9759564B2 (en) 2013-03-15 2017-09-12 Fairchild Semiconductor Corporation Temperature and power supply calibration
DE102013216898B4 (de) * 2013-08-26 2023-02-09 Robert Bosch Gmbh Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelements
DE102013216935A1 (de) * 2013-08-26 2015-02-26 Robert Bosch Gmbh Drehratensensor mit voreingestelltem Quadratur-Offset
DE102015214970A1 (de) 2015-08-06 2017-02-09 Robert Bosch Gmbh Elektrodenanordnung für Inertialsensoren, insbesondere Q-Kompensationelektrode für oop DRS ohne Epi-Fenster
JP6984342B2 (ja) * 2017-11-22 2021-12-17 セイコーエプソン株式会社 物理量センサー、物理量センサーの製造方法、慣性計測ユニット、携帯型電子機器、電子機器、および移動体
CN115812153A (zh) 2020-06-08 2023-03-17 美国亚德诺半导体公司 应力释放mems陀螺仪
US11692825B2 (en) 2020-06-08 2023-07-04 Analog Devices, Inc. Drive and sense stress relief apparatus
US11698257B2 (en) 2020-08-24 2023-07-11 Analog Devices, Inc. Isotropic attenuated motion gyroscope

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6257059B1 (en) 1999-09-24 2001-07-10 The Charles Stark Draper Laboratory, Inc. Microfabricated tuning fork gyroscope and associated three-axis inertial measurement system to sense out-of-plane rotation
US6619121B1 (en) 2001-07-25 2003-09-16 Northrop Grumman Corporation Phase insensitive quadrature nulling method and apparatus for coriolis angular rate sensors
US7213458B2 (en) * 2005-03-22 2007-05-08 Honeywell International Inc. Quadrature reduction in MEMS gyro devices using quad steering voltages
DE102006058746A1 (de) 2006-12-12 2008-06-19 Robert Bosch Gmbh Drehratensensor

Also Published As

Publication number Publication date
DE102008044053A1 (de) 2010-05-27
DE102008044053B4 (de) 2022-07-14
US8650954B2 (en) 2014-02-18
US20100132461A1 (en) 2010-06-03
ITMI20092028A1 (it) 2010-05-26

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