IT1397231B1 - Condensatore mim con piatto ad elevato punto di fusione - Google Patents

Condensatore mim con piatto ad elevato punto di fusione

Info

Publication number
IT1397231B1
IT1397231B1 ITMI2009A002353A ITMI20092353A IT1397231B1 IT 1397231 B1 IT1397231 B1 IT 1397231B1 IT MI2009A002353 A ITMI2009A002353 A IT MI2009A002353A IT MI20092353 A ITMI20092353 A IT MI20092353A IT 1397231 B1 IT1397231 B1 IT 1397231B1
Authority
IT
Italy
Prior art keywords
mim
condenser
plate
high melt
melt point
Prior art date
Application number
ITMI2009A002353A
Other languages
English (en)
Inventor
Antonio Molfese
Alessandro Dundulachi
Original Assignee
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl filed Critical St Microelectronics Srl
Priority to ITMI2009A002353A priority Critical patent/IT1397231B1/it
Priority to US12/972,606 priority patent/US8916436B2/en
Publication of ITMI20092353A1 publication Critical patent/ITMI20092353A1/it
Application granted granted Critical
Publication of IT1397231B1 publication Critical patent/IT1397231B1/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H01L28/60—Electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
ITMI2009A002353A 2009-12-30 2009-12-30 Condensatore mim con piatto ad elevato punto di fusione IT1397231B1 (it)

Priority Applications (2)

Application Number Priority Date Filing Date Title
ITMI2009A002353A IT1397231B1 (it) 2009-12-30 2009-12-30 Condensatore mim con piatto ad elevato punto di fusione
US12/972,606 US8916436B2 (en) 2009-12-30 2010-12-20 MIM capacitor with plate having high melting point

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITMI2009A002353A IT1397231B1 (it) 2009-12-30 2009-12-30 Condensatore mim con piatto ad elevato punto di fusione

Publications (2)

Publication Number Publication Date
ITMI20092353A1 ITMI20092353A1 (it) 2011-06-30
IT1397231B1 true IT1397231B1 (it) 2013-01-04

Family

ID=42246131

Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI2009A002353A IT1397231B1 (it) 2009-12-30 2009-12-30 Condensatore mim con piatto ad elevato punto di fusione

Country Status (2)

Country Link
US (1) US8916436B2 (it)
IT (1) IT1397231B1 (it)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2509296B (en) 2012-09-25 2016-10-26 Cambridge Silicon Radio Ltd Composite reconstituted wafer structures
US9666661B2 (en) * 2015-09-08 2017-05-30 Taiwan Semiconductor Manufacturing Company, Ltd. Coplanar metal-insulator-metal capacitive structure

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3149817B2 (ja) * 1997-05-30 2001-03-26 日本電気株式会社 半導体装置およびその製造方法
US6441419B1 (en) * 1998-03-31 2002-08-27 Lsi Logic Corporation Encapsulated-metal vertical-interdigitated capacitor and damascene method of manufacturing same
US6281142B1 (en) * 1999-06-04 2001-08-28 Micron Technology, Inc. Dielectric cure for reducing oxygen vacancies
US20060014384A1 (en) * 2002-06-05 2006-01-19 Jong-Cheol Lee Method of forming a layer and forming a capacitor of a semiconductor device having the same layer
JP2004165559A (ja) * 2002-11-15 2004-06-10 Toshiba Corp 半導体装置
JP2005210076A (ja) * 2003-12-25 2005-08-04 Semiconductor Leading Edge Technologies Inc 窒化珪素膜の成膜方法及びこの方法を使用する半導体装置の製造方法
US7160772B2 (en) * 2005-02-23 2007-01-09 International Business Machines Corporation Structure and method for integrating MIM capacitor in BEOL wiring levels
KR100698089B1 (ko) * 2005-12-29 2007-03-23 동부일렉트로닉스 주식회사 커패시터를 갖는 반도체 소자 및 이의 제조방법
KR20080018685A (ko) * 2006-08-25 2008-02-28 삼성전자주식회사 반도체 배선 구조, 커패시터를 포함하는 반도체 소자 및 그제조방법
US8242551B2 (en) * 2009-03-04 2012-08-14 Taiwan Semiconductor Manufacturing Company, Ltd. Metal-insulator-metal structure for system-on-chip technology
US8614497B2 (en) * 2009-08-07 2013-12-24 Broadcom Corporation Method for fabricating a MIM capacitor using gate metal for electrode and related structure
US8143135B2 (en) * 2009-10-08 2012-03-27 International Business Machines Corporation Embedded series deep trench capacitors and methods of manufacture
US8125049B2 (en) * 2009-11-16 2012-02-28 International Business Machines Corporation MIM capacitor structure in FEOL and related method

Also Published As

Publication number Publication date
US8916436B2 (en) 2014-12-23
ITMI20092353A1 (it) 2011-06-30
US20110156207A1 (en) 2011-06-30

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