IT1393678B1 - Procedimento per la fabbricazione di una struttura micromeccanica e struttura micromeccanica. - Google Patents

Procedimento per la fabbricazione di una struttura micromeccanica e struttura micromeccanica.

Info

Publication number
IT1393678B1
IT1393678B1 ITMI2009A000513A ITMI20090513A IT1393678B1 IT 1393678 B1 IT1393678 B1 IT 1393678B1 IT MI2009A000513 A ITMI2009A000513 A IT MI2009A000513A IT MI20090513 A ITMI20090513 A IT MI20090513A IT 1393678 B1 IT1393678 B1 IT 1393678B1
Authority
IT
Italy
Prior art keywords
micromechanical structure
procedure
manufacture
micromechanical
Prior art date
Application number
ITMI2009A000513A
Other languages
English (en)
Inventor
Marco Lammer
Andreas Scheurle
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of ITMI20090513A1 publication Critical patent/ITMI20090513A1/it
Application granted granted Critical
Publication of IT1393678B1 publication Critical patent/IT1393678B1/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00261—Processes for packaging MEMS devices
    • B81C1/00333—Aspects relating to packaging of MEMS devices, not covered by groups B81C1/00269 - B81C1/00325
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/01—Packaging MEMS
    • B81C2203/0136—Growing or depositing of a covering layer

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
ITMI2009A000513A 2008-04-08 2009-03-31 Procedimento per la fabbricazione di una struttura micromeccanica e struttura micromeccanica. IT1393678B1 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200810001042 DE102008001042A1 (de) 2008-04-08 2008-04-08 Herstellungsverfahren einer mikromechanischen Struktur und mikromechanische Struktur

Publications (2)

Publication Number Publication Date
ITMI20090513A1 ITMI20090513A1 (it) 2009-10-09
IT1393678B1 true IT1393678B1 (it) 2012-05-08

Family

ID=41060273

Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI2009A000513A IT1393678B1 (it) 2008-04-08 2009-03-31 Procedimento per la fabbricazione di una struttura micromeccanica e struttura micromeccanica.

Country Status (2)

Country Link
DE (1) DE102008001042A1 (it)
IT (1) IT1393678B1 (it)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009027898B4 (de) 2009-07-21 2019-09-05 Robert Bosch Gmbh Herstellungsverfahren für ein mikromechanisches Bauelement

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19940512A1 (de) 1999-08-26 2001-03-22 Bosch Gmbh Robert Verfahren zur Verkappung eines Bauelementes mit einer Kavernenstruktur und Verfahren zur Herstellung der Kavernenstruktur

Also Published As

Publication number Publication date
ITMI20090513A1 (it) 2009-10-09
DE102008001042A1 (de) 2009-10-15

Similar Documents

Publication Publication Date Title
IT1397663B1 (it) Bocchettone e procedimento per la sua fabbricazione.
DK2094029T3 (da) Implanterbar transducer
DK2338287T3 (da) Transducersystem
ATE554604T1 (de) Verbesserter ohrhörer
BRPI0925037A2 (pt) Composição contendo piceatanol e método de produzir a composição contendo piceatanol.
DK3216802T3 (da) Produktionsfremgangsmåde
IT1391230B1 (it) Metodo per la produzione di una struttura antiproiettile e struttura antiproiettile
ITTO20060245A1 (it) Procedimento per la fabbricazione di una biella
SMT201500159B (it) Struttura gradini
ITMI20112169A1 (it) Procedimento e dispositivo per la rappresentazione di una sezione di unambiente
ITBS20090181A1 (it) Procedimento per la fabbricazione di una porzione di un inserto di una maniglia e relativa porzione
DE602007009636D1 (de) Sektionaltor
DE112009001669A5 (de) Sektionaltor
IT1392170B1 (it) Apparecchiatura per la produzione di una bevanda gassata
ES1069414Y (es) Manometro
IT1393678B1 (it) Procedimento per la fabbricazione di una struttura micromeccanica e struttura micromeccanica.
FI20085902A0 (fi) Porrasrakenne
DK2321980T3 (da) Høreapparat
FI20095422A (fi) Kiinnirullain
FR2937843B1 (fr) Paravent medical
IT1391776B1 (it) Procedimento per la preparazione di dexlansoprazolo
FI20085362A (fi) Kahmari
FR2927888B1 (fr) >
ITME20080002A1 (it) Filcomplex - potabilizzatore di acque.
IT1395100B1 (it) Strutture micromeccaniche e procedimento per la produzione di strutture micromeccaniche