IT1392270B1 - Metodo di fabbricazione di dispositivi a nanostrutture filamentose di carbonio sopra una superficie relativamente ampia - Google Patents

Metodo di fabbricazione di dispositivi a nanostrutture filamentose di carbonio sopra una superficie relativamente ampia

Info

Publication number
IT1392270B1
IT1392270B1 ITVA2008A000061A ITVA20080061A IT1392270B1 IT 1392270 B1 IT1392270 B1 IT 1392270B1 IT VA2008A000061 A ITVA2008A000061 A IT VA2008A000061A IT VA20080061 A ITVA20080061 A IT VA20080061A IT 1392270 B1 IT1392270 B1 IT 1392270B1
Authority
IT
Italy
Prior art keywords
filamentose
manufacture
carbon
devices
relatively wide
Prior art date
Application number
ITVA2008A000061A
Other languages
English (en)
Inventor
Maria Fortuna Bevilacqua
Danilo Mascolo
Original Assignee
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl filed Critical St Microelectronics Srl
Priority to ITVA2008A000061A priority Critical patent/IT1392270B1/it
Priority to US12/627,426 priority patent/US8048785B2/en
Publication of ITVA20080061A1 publication Critical patent/ITVA20080061A1/it
Priority to US13/269,923 priority patent/US8212234B2/en
Application granted granted Critical
Publication of IT1392270B1 publication Critical patent/IT1392270B1/it

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10Deposition of organic active material
    • H10K71/191Deposition of organic active material characterised by provisions for the orientation or alignment of the layer to be deposited
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/20Carbon compounds, e.g. carbon nanotubes or fullerenes
    • H10K85/221Carbon nanotubes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40Organic transistors
    • H10K10/46Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462Insulated gate field-effect transistors [IGFETs]
    • H10K10/491Vertical transistors, e.g. vertical carbon nanotube field effect transistors [CNT-FETs]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00Nanotechnology
    • Y10S977/70Nanostructure
    • Y10S977/734Fullerenes, i.e. graphene-based structures, such as nanohorns, nanococoons, nanoscrolls or fullerene-like structures, e.g. WS2 or MoS2 chalcogenide nanotubes, planar C3N4, etc.
    • Y10S977/742Carbon nanotubes, CNTs
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00Nanotechnology
    • Y10S977/84Manufacture, treatment, or detection of nanostructure
    • Y10S977/89Deposition of materials, e.g. coating, cvd, or ald
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00Nanotechnology
    • Y10S977/84Manufacture, treatment, or detection of nanostructure
    • Y10S977/901Manufacture, treatment, or detection of nanostructure having step or means utilizing electromagnetic property, e.g. optical, x-ray, electron beamm

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Inorganic Fibers (AREA)
ITVA2008A000061A 2008-12-12 2008-12-12 Metodo di fabbricazione di dispositivi a nanostrutture filamentose di carbonio sopra una superficie relativamente ampia IT1392270B1 (it)

Priority Applications (3)

Application Number Priority Date Filing Date Title
ITVA2008A000061A IT1392270B1 (it) 2008-12-12 2008-12-12 Metodo di fabbricazione di dispositivi a nanostrutture filamentose di carbonio sopra una superficie relativamente ampia
US12/627,426 US8048785B2 (en) 2008-12-12 2009-11-30 Method of fabricating nanosized filamentary carbon devices over a relatively large-area
US13/269,923 US8212234B2 (en) 2008-12-12 2011-10-10 Method of fabricating nanosized filamentary carbon devices over a relatively large-area

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITVA2008A000061A IT1392270B1 (it) 2008-12-12 2008-12-12 Metodo di fabbricazione di dispositivi a nanostrutture filamentose di carbonio sopra una superficie relativamente ampia

Publications (2)

Publication Number Publication Date
ITVA20080061A1 ITVA20080061A1 (it) 2010-06-13
IT1392270B1 true IT1392270B1 (it) 2012-02-22

Family

ID=40933826

Family Applications (1)

Application Number Title Priority Date Filing Date
ITVA2008A000061A IT1392270B1 (it) 2008-12-12 2008-12-12 Metodo di fabbricazione di dispositivi a nanostrutture filamentose di carbonio sopra una superficie relativamente ampia

Country Status (2)

Country Link
US (2) US8048785B2 (it)
IT (1) IT1392270B1 (it)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106989828A (zh) * 2016-01-20 2017-07-28 优利斯公司 制造具有微囊的电磁辐射探测器的方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7385262B2 (en) * 2001-11-27 2008-06-10 The Board Of Trustees Of The Leland Stanford Junior University Band-structure modulation of nano-structures in an electric field
JP4627188B2 (ja) * 2003-05-22 2011-02-09 富士通株式会社 電界効果トランジスタ及びその製造方法
US7345296B2 (en) * 2004-09-16 2008-03-18 Atomate Corporation Nanotube transistor and rectifying devices
US7279433B2 (en) * 2004-09-20 2007-10-09 Freescale Semiconductor, Inc. Deposition and patterning of boron nitride nanotube ILD
KR100749751B1 (ko) * 2006-08-02 2007-08-17 삼성전자주식회사 트랜지스터 및 그 제조 방법

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106989828A (zh) * 2016-01-20 2017-07-28 优利斯公司 制造具有微囊的电磁辐射探测器的方法

Also Published As

Publication number Publication date
US8212234B2 (en) 2012-07-03
US8048785B2 (en) 2011-11-01
US20100264399A1 (en) 2010-10-21
US20120025166A1 (en) 2012-02-02
ITVA20080061A1 (it) 2010-06-13

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