IT1299013B1 - Procedimento per effettuare misure di distanze e di spessori mediante retroriflessione ottica e relativa apparecchiatura - Google Patents
Procedimento per effettuare misure di distanze e di spessori mediante retroriflessione ottica e relativa apparecchiaturaInfo
- Publication number
- IT1299013B1 IT1299013B1 ITMI980713A IT1299013B1 IT 1299013 B1 IT1299013 B1 IT 1299013B1 IT MI980713 A ITMI980713 A IT MI980713A IT 1299013 B1 IT1299013 B1 IT 1299013B1
- Authority
- IT
- Italy
- Prior art keywords
- procedure
- related equipment
- optical reflection
- thickness measurements
- making distances
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
- G01B9/02021—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different faces of object, e.g. opposite faces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02025—Interference between three or more discrete surfaces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02056—Passive reduction of errors
- G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/0209—Low-coherence interferometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02092—Self-mixing interferometers, i.e. feedback of light from object into laser cavity
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Optical Measuring Cells (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT98MI000713 IT1299013B1 (it) | 1998-04-03 | 1998-04-03 | Procedimento per effettuare misure di distanze e di spessori mediante retroriflessione ottica e relativa apparecchiatura |
AU36046/99A AU3604699A (en) | 1998-04-03 | 1999-04-01 | Interferometrical, optical retroreflection with low coherence source |
PCT/EP1999/002264 WO1999051938A1 (en) | 1998-04-03 | 1999-04-01 | Interferometrical, optical retroreflection with low coherence source |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT98MI000713 IT1299013B1 (it) | 1998-04-03 | 1998-04-03 | Procedimento per effettuare misure di distanze e di spessori mediante retroriflessione ottica e relativa apparecchiatura |
Publications (2)
Publication Number | Publication Date |
---|---|
ITMI980713A1 ITMI980713A1 (it) | 1999-10-03 |
IT1299013B1 true IT1299013B1 (it) | 2000-02-07 |
Family
ID=11379641
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT98MI000713 IT1299013B1 (it) | 1998-04-03 | 1998-04-03 | Procedimento per effettuare misure di distanze e di spessori mediante retroriflessione ottica e relativa apparecchiatura |
Country Status (3)
Country | Link |
---|---|
AU (1) | AU3604699A (it) |
IT (1) | IT1299013B1 (it) |
WO (1) | WO1999051938A1 (it) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2084490A1 (en) | 2006-11-17 | 2009-08-05 | Koninklijke Philips Electronics N.V. | Self-mixing optical coherence detector without an external beamsplitter |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4824240A (en) * | 1986-04-15 | 1989-04-25 | Hughes Aircraft Company | Internal laser interferometer |
DE4400680C2 (de) * | 1994-01-12 | 1995-11-02 | Kayser Threde Gmbh | Vorrichtung zur Bestimmung von Abstandsänderungen eines Objekts |
-
1998
- 1998-04-03 IT IT98MI000713 patent/IT1299013B1/it active IP Right Grant
-
1999
- 1999-04-01 AU AU36046/99A patent/AU3604699A/en not_active Abandoned
- 1999-04-01 WO PCT/EP1999/002264 patent/WO1999051938A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
AU3604699A (en) | 1999-10-25 |
ITMI980713A1 (it) | 1999-10-03 |
WO1999051938A1 (en) | 1999-10-14 |
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Legal Events
Date | Code | Title | Description |
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0001 | Granted |