IT1295400B1 - Procedimento perfezionato di passivazione di dispositivi elettronici al silicio particolarmente memorie flash eprom - Google Patents

Procedimento perfezionato di passivazione di dispositivi elettronici al silicio particolarmente memorie flash eprom

Info

Publication number
IT1295400B1
IT1295400B1 ITRM970580A IT1295400B1 IT 1295400 B1 IT1295400 B1 IT 1295400B1 IT RM970580 A ITRM970580 A IT RM970580A IT 1295400 B1 IT1295400 B1 IT 1295400B1
Authority
IT
Italy
Prior art keywords
layers
silicon oxide
deactivating
nitride
flash eprom
Prior art date
Application number
Other languages
English (en)
Inventor
Roberto Diamanti
Andrea Gunnella
Sudhanshu Misra
Original Assignee
Consorzio Eagle
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Consorzio Eagle filed Critical Consorzio Eagle
Priority to ITRM970580 priority Critical patent/IT1295400B1/it
Priority to JP10307778A priority patent/JPH11233511A/ja
Publication of ITRM970580A1 publication Critical patent/ITRM970580A1/it
Application granted granted Critical
Publication of IT1295400B1 publication Critical patent/IT1295400B1/it

Links

Landscapes

  • Formation Of Insulating Films (AREA)
  • Non-Volatile Memory (AREA)
  • Chemical Vapour Deposition (AREA)
  • Semiconductor Memories (AREA)
ITRM970580 1997-09-24 1997-09-24 Procedimento perfezionato di passivazione di dispositivi elettronici al silicio particolarmente memorie flash eprom IT1295400B1 (it)

Priority Applications (2)

Application Number Priority Date Filing Date Title
ITRM970580 IT1295400B1 (it) 1997-09-24 1997-09-24 Procedimento perfezionato di passivazione di dispositivi elettronici al silicio particolarmente memorie flash eprom
JP10307778A JPH11233511A (ja) 1997-09-24 1998-09-24 シリコン電子デバイス、特にフラッシュｅｐｒｏｍメモリを不活性化する改良されたプロセス

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITRM970580 IT1295400B1 (it) 1997-09-24 1997-09-24 Procedimento perfezionato di passivazione di dispositivi elettronici al silicio particolarmente memorie flash eprom

Publications (2)

Publication Number Publication Date
ITRM970580A1 ITRM970580A1 (it) 1999-03-24
IT1295400B1 true IT1295400B1 (it) 1999-05-12

Family

ID=11405268

Family Applications (1)

Application Number Title Priority Date Filing Date
ITRM970580 IT1295400B1 (it) 1997-09-24 1997-09-24 Procedimento perfezionato di passivazione di dispositivi elettronici al silicio particolarmente memorie flash eprom

Country Status (2)

Country Link
JP (1) JPH11233511A (it)
IT (1) IT1295400B1 (it)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5412048B2 (ja) 2008-04-02 2014-02-12 ルネサスエレクトロニクス株式会社 半導体記憶装置及びその製造方法

Also Published As

Publication number Publication date
JPH11233511A (ja) 1999-08-27
ITRM970580A1 (it) 1999-03-24

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