IT1185327B - Sistema di misura capacitivo per la misura della distanza tra due parti in moto relativo - Google Patents

Sistema di misura capacitivo per la misura della distanza tra due parti in moto relativo

Info

Publication number
IT1185327B
IT1185327B IT21756/85A IT2175685A IT1185327B IT 1185327 B IT1185327 B IT 1185327B IT 21756/85 A IT21756/85 A IT 21756/85A IT 2175685 A IT2175685 A IT 2175685A IT 1185327 B IT1185327 B IT 1185327B
Authority
IT
Italy
Prior art keywords
measuring
distance
parts
measurement system
relative motion
Prior art date
Application number
IT21756/85A
Other languages
English (en)
Other versions
IT8521756A0 (it
Inventor
Kurt Ding
Hartwig Knoll
Josef Wenzl
Hermann Biebl
Original Assignee
Mtu Muenchen Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mtu Muenchen Gmbh filed Critical Mtu Muenchen Gmbh
Publication of IT8521756A0 publication Critical patent/IT8521756A0/it
Application granted granted Critical
Publication of IT1185327B publication Critical patent/IT1185327B/it

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
    • F01D21/00—Shutting-down of machines or engines, e.g. in emergency; Regulating, controlling, or safety means not otherwise provided for
    • F01D21/04—Shutting-down of machines or engines, e.g. in emergency; Regulating, controlling, or safety means not otherwise provided for responsive to undesired position of rotor relative to stator or to breaking-off of a part of the rotor, e.g. indicating such position
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/14—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
IT21756/85A 1984-09-11 1985-07-30 Sistema di misura capacitivo per la misura della distanza tra due parti in moto relativo IT1185327B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3433351A DE3433351C1 (de) 1984-09-11 1984-09-11 Kapazitives Messsystem zur Messung des Abstandes zwischen zwei relativ zueinander beweglichen Teilen

Publications (2)

Publication Number Publication Date
IT8521756A0 IT8521756A0 (it) 1985-07-30
IT1185327B true IT1185327B (it) 1987-11-12

Family

ID=6245140

Family Applications (1)

Application Number Title Priority Date Filing Date
IT21756/85A IT1185327B (it) 1984-09-11 1985-07-30 Sistema di misura capacitivo per la misura della distanza tra due parti in moto relativo

Country Status (6)

Country Link
US (2) US4823071A (it)
JP (1) JPS6168501A (it)
DE (1) DE3433351C1 (it)
FR (1) FR2570176B1 (it)
GB (1) GB2164448B (it)
IT (1) IT1185327B (it)

Families Citing this family (85)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3617373A1 (de) * 1986-05-23 1987-11-26 Mtu Muenchen Gmbh Kapazitives messsystem
FR2608751B1 (fr) * 1986-12-19 1990-11-30 Onera (Off Nat Aerospatiale) Chaine de mesure dimensionnelle capacitive
FR2629196B1 (fr) * 1988-03-25 1991-05-31 Thermocoax Cie Capteur capacitif
DE3913996A1 (de) * 1989-02-16 1990-08-23 Rieter Ag Maschf Karde
GB2229004B (en) * 1989-03-07 1993-09-29 Rolls Royce Plc Improvements in or relating to gas turbine engine tip clearance sensors
US5517124A (en) * 1989-07-26 1996-05-14 Extrude Hone Corporation Stylus probe for measuring workpiece surface characteristics
US5070302A (en) * 1989-09-05 1991-12-03 Eastman Kodak Company Capacitance probe for measuring a width of a clearance between parts
US5121068A (en) * 1989-12-26 1992-06-09 Emhart Industries, Inc. Sensor for sensing the wall thickness of an object
US5166626A (en) * 1990-05-29 1992-11-24 General Electric Company Electrical capacitance clearanceometer
US5101165A (en) * 1990-05-29 1992-03-31 General Electric Company Electrical capacitance clearanceometer
US5119036A (en) * 1990-05-29 1992-06-02 General Electric Company Electrical capacitance clearanceometer
US5155444A (en) * 1991-08-22 1992-10-13 Xerox Corporation Trim bar gap verification tool and method using a flexible capacitor sensor having a magnetic metallic laminate
DE4235610C2 (de) * 1992-10-22 2002-07-18 Truetzschler Gmbh & Co Kg Vorrichtung an einer Spinnereivorbereitungsmaschine, z. B. Karde, Reiniger o. dgl., zur Messung von Abständen an Garnituren
US5382911A (en) * 1993-03-29 1995-01-17 International Business Machines Corporation Reaction chamber interelectrode gap monitoring by capacitance measurement
FR2712690B1 (fr) * 1993-11-17 1995-12-15 Snecma Dispositif pour effectuer la mesure dynamique de la distance entre les faces en regard du rotor et du stator d'une machine tournante.
US5513539A (en) * 1994-06-30 1996-05-07 Transalta Utilities Corporation Apparatus and method for determining the best position for inner and outer members in a rotary machine
US5723980A (en) * 1995-06-07 1998-03-03 Aerogage Corporation Clearance measurement system
US5748005A (en) * 1995-10-31 1998-05-05 Creare, Inc. Radial displacement sensor for non-contact bearings
FR2750489B1 (fr) * 1996-06-26 1998-08-28 Philips Electronics Nv Dispositif du type capteur capacitif composite
FR2750490B1 (fr) * 1996-06-26 1998-08-28 Philips Electronics Nv Dispositif du type capteur capacitif integre
GB9620053D0 (en) * 1996-09-26 1996-11-13 Rolls Royce Plc Method and apparatus for measurement
GB2336407B (en) * 1997-01-24 2000-11-15 Seagate Technology Hydrodynamic bearing including means for monitoring the capacitance between the rotor and stator of hydrodynamic bearing
GB9702760D0 (en) * 1997-02-11 1997-04-02 Rotary Power Couple Engines Li Rotary device
US6556025B1 (en) 1997-12-05 2003-04-29 University Of Waterloo DC/low frequency sub-atto signal level measurement circuit
US6175778B1 (en) 1998-06-03 2001-01-16 Performance Friction Corporation Computer vision-based rotor machining system apparatus and method
US6233533B1 (en) 1998-06-04 2001-05-15 Performance Friction Corporation Turning center with integrated non-contact inspection system
US6568091B1 (en) * 2000-02-23 2003-05-27 General Electric Company Rotor component displacement measurement system
US6401460B1 (en) * 2000-08-18 2002-06-11 Siemens Westinghouse Power Corporation Active control system for gas turbine blade tip clearance
US6717418B2 (en) 2001-11-16 2004-04-06 General Electric Company Method and apparatus for measuring turbine blade tip clearance
US6692222B2 (en) 2002-05-14 2004-02-17 The Board Of Trustees Of The Leland Stanford Junior University Micro gas turbine engine with active tip clearance control
US7392713B2 (en) * 2002-09-30 2008-07-01 United Technologies Corporation Monitoring system for turbomachinery
EP1558938B1 (de) * 2002-11-06 2008-08-20 Siemens Aktiengesellschaft Strömungsmaschine
US20090015271A1 (en) * 2003-09-27 2009-01-15 Future Technology (Sensors) Limited Sensors
GB2406381B (en) * 2003-09-27 2005-10-12 Future Technology Sensors
EP1524411B1 (de) 2003-10-13 2011-07-20 Siemens Aktiengesellschaft Turbine und Verfahren zur Minimierung des Spaltes zwischen einer Laufschaufel und einem Gehäuse einer Turbine
US6985822B2 (en) * 2003-11-26 2006-01-10 General Electric Company Methods and systems for proximity system target material variation effects reduction
US7333913B2 (en) * 2005-06-27 2008-02-19 General Electric Company Clearance measurement system and method of operation
US7597537B2 (en) * 2005-12-16 2009-10-06 General Electric Company Thermal control of gas turbine engine rings for active clearance control
US7503179B2 (en) * 2005-12-16 2009-03-17 General Electric Company System and method to exhaust spent cooling air of gas turbine engine active clearance control
US7824147B2 (en) * 2006-05-16 2010-11-02 United Technologies Corporation Airfoil prognosis for turbine engines
US7808233B2 (en) * 2006-06-19 2010-10-05 General Electric Company Methods and apparatus for monitoring rotary machines
US7579844B2 (en) * 2007-03-09 2009-08-25 Standard Aero Limited Rotor blade system for rotor and rotor case inspection
GB2449274A (en) * 2007-05-15 2008-11-19 Thomas William Bach Passive impedance measurer
US8177474B2 (en) * 2007-06-26 2012-05-15 General Electric Company System and method for turbine engine clearance control with rub detection
DE102007051027A1 (de) * 2007-10-25 2009-04-30 Mtu Aero Engines Gmbh Strömungsmaschine, Spaltmesssystem und Verfahren zum Ermitteln eines Rotorspaltes
DE102008006833A1 (de) * 2008-01-30 2009-08-06 Mtu Aero Engines Gmbh Sonde für eine kapazitive Sensoreinrichtung und Spaltmesssystem
FR2938326B1 (fr) * 2008-11-13 2011-03-04 Nanotec Solution Capteur capacitif haute temperature a collage ciment
KR101460133B1 (ko) 2009-08-17 2014-11-11 삼성전자 주식회사 세탁기용 모터와 이를 가지는 세탁기
GB0915038D0 (en) * 2009-08-28 2009-09-30 Cummins Turbo Tech Ltd Speed sensor arrangement
US8056606B2 (en) * 2009-10-26 2011-11-15 General Electric Company Methods of making and using ceramic metallic interlocked components
EP2336492A1 (en) * 2009-12-16 2011-06-22 Siemens Aktiengesellschaft Guide vane with a winglet for an energy converting machine and machine for converting energy comprising the guide vane
EP2397656A1 (de) 2010-06-14 2011-12-21 Siemens Aktiengesellschaft Verfahren zur Einstellung der zwischen Schaufelblattspitzen von Laufschaufeln und einer Kanalwand vorhandenen Radialspalte sowie Vorrichtung zur Messung eines Radialspalts einer axial durchströmbaren Turbomaschine
DE102010036822A1 (de) * 2010-08-03 2012-02-09 Jaudt Dosiertechnik Maschinenfabrik Gmbh Fördervorrichtung und Verfahren zu deren Überwachung
EP2442077A1 (en) 2010-10-12 2012-04-18 Future Technology (Sensors) Ltd Sensor assemblies
US9245786B2 (en) * 2011-06-02 2016-01-26 Applied Materials, Inc. Apparatus and methods for positioning a substrate using capacitive sensors
EP2549059A1 (de) 2011-07-21 2013-01-23 Siemens Aktiengesellschaft Verfahren zum Betrieb einer Rotationsmaschine
US8876460B2 (en) * 2011-08-11 2014-11-04 General Electric Company Method and apparatus for measuring turbine shell clearance
US8926289B2 (en) 2012-03-08 2015-01-06 Hamilton Sundstrand Corporation Blade pocket design
US9605952B2 (en) 2012-03-08 2017-03-28 Quality Manufacturing Inc. Touch sensitive robotic gripper
CA2863197A1 (en) 2012-03-08 2013-09-12 Quality Manufacturing Inc. Touch sensitive robotic gripper
US10392959B2 (en) 2012-06-05 2019-08-27 General Electric Company High temperature flame sensor
US10077992B2 (en) * 2012-08-31 2018-09-18 United Technologies Corporation Tip clearance probe including anti-rotation feature
US9518850B2 (en) * 2012-09-28 2016-12-13 United Technologies Corporation Embedded cap probe
US9417048B2 (en) * 2012-10-31 2016-08-16 General Electric Company Capacitive sensor device and method of manufacture
FR3006434B1 (fr) * 2013-05-30 2016-04-01 Snecma Capteur de mesure de jeu a electrode abradable
US9773584B2 (en) 2014-11-24 2017-09-26 General Electric Company Triaxial mineral insulated cable in flame sensing applications
US10718359B2 (en) 2015-08-21 2020-07-21 Quality Manufacturing Inc. Devices and systems for producing rotational actuation
JP6712845B2 (ja) * 2015-09-10 2020-06-24 三菱日立パワーシステムズ株式会社 光ファイバプローブ、光ファイバ計測装置及びクリアランス制御システム
GB2544751B (en) 2015-11-24 2017-11-22 Future Tech (Sensors) Ltd Multi-Layer Electrically Conductive Sensors
CN107515015A (zh) * 2016-06-15 2017-12-26 苏州宝时得电动工具有限公司 电容传感器及割草机
US10551220B2 (en) 2016-06-27 2020-02-04 Rolls-Royce Corporation Capacitive measurement device
US10724546B2 (en) * 2016-08-05 2020-07-28 Daikin Applied Americas Inc. Centrifugal compressor having a casing with an adjustable clearance and connections for a variable flow rate cooling medium, impeller clearance control apparatus for centrifugal compressor, and impeller clearance control method for centrifugal compressor
US10808570B2 (en) * 2017-09-12 2020-10-20 Raytheon Technologies Corporation Low profile embedded blade tip clearance sensor
US10557373B2 (en) * 2017-12-05 2020-02-11 United Technologies Corporation Low profile embedded blade tip clearance probe assembly
CN108151642A (zh) * 2018-03-19 2018-06-12 无锡研平电子科技有限公司 高压间隙检知器
US10641595B2 (en) * 2018-04-09 2020-05-05 United Technologies Corporation Low profile triaxial blade tip clearance probe assembly with driven guard
US10738645B2 (en) * 2018-08-31 2020-08-11 Raytheon Technologies Corporation Embedded triaxial epoxy cap probe
US11143054B2 (en) 2018-11-19 2021-10-12 Rolls-Royce Corporation Tip clearance radio frequency sensor
GB2579671B (en) * 2018-12-12 2022-12-14 Weston Aerospace Ltd A probe for monitoring a moving engine element
US11145960B2 (en) 2019-02-26 2021-10-12 Rolls-Royce North American Technologies Inc. Tip clearance sensor system with an integral patch antenna array
CN112276371B (zh) * 2019-07-09 2022-07-05 大族激光科技产业集团股份有限公司 一种切割头随动控制系统及方法
CN112577407B (zh) * 2019-09-27 2022-11-08 大族激光科技产业集团股份有限公司 一种电容传感器参数漂移纠正方法及系统
US11913343B2 (en) * 2019-10-03 2024-02-27 Rtx Corporation Replaceable rotor blade tip clearance measurement device for a gas turbine engine
US11479350B2 (en) * 2020-06-19 2022-10-25 Textron Innovations Inc. Tip gap monitoring systems for ducted aircraft
JP2022138980A (ja) * 2021-03-11 2022-09-26 三菱重工業株式会社 クリアランスセンサ

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB756466A (en) * 1953-12-18 1956-09-05 British Thomson Houston Co Ltd Improvements in electrical systems for measuring small distances between relatively movable parts
US2802178A (en) * 1954-09-22 1957-08-06 Gen Electric Motion detecting device
US2842738A (en) * 1956-04-05 1958-07-08 Ford Motor Co Capacitance probe
GB832242A (en) * 1956-11-30 1960-04-06 Power Jets Res & Dev Ltd Improvements in or relating to dimension indicating devices
DE1091346B (de) * 1958-10-22 1960-10-20 Licentia Gmbh Vorrichtung zur Messung des Radial- und Axialspieles an umlaufenden Maschinen mittels kapazitiver Geber
US3027769A (en) * 1959-03-03 1962-04-03 Grant W Coon Diaphragm type capacitance transducer
FR1281292A (fr) * 1960-11-07 1962-01-12 Snecma Procédé et dispositif de mesure du déplacement axial relatif d'un rotor et d'un stator
GB1026353A (en) * 1962-01-31 1966-04-20 Ass Elect Ind Improvements relating to capacitive probes
GB1047600A (en) * 1962-10-12 1966-11-09 Ass Elect Ind Improvements relating to capacitive clearance measurements in turbines
US3400331A (en) * 1965-01-18 1968-09-03 Pratt & Whitney Inc Gaging device including a probe having a plurality of concentric and coextensive electrodes
US3628136A (en) * 1969-09-05 1971-12-14 Garrett Corp Means for measuring clearances in a gas turbine including a coaxial cable capacitor
US4071820A (en) * 1976-04-05 1978-01-31 Alton Corporation Measurement system
US4063167A (en) * 1976-06-07 1977-12-13 Avco Corporation Blade tip clearance measuring apparatus
US4063176A (en) * 1976-07-29 1977-12-13 Vari-L Company, Inc. Broadband high frequency mixer
US4103226A (en) * 1976-09-15 1978-07-25 Westinghouse Electric Corp. Apparatus for gauging the texture of a conducting surface
US4067225A (en) * 1977-03-21 1978-01-10 Mechanical Technology Incorporated Capacitance type non-contact displacement and vibration measuring device and method of maintaining calibration
US4251035A (en) * 1979-05-07 1981-02-17 Chatwin Ian Malcolm Position indicator
GB2063477A (en) * 1979-11-14 1981-06-03 Plessey Co Ltd Measuring Clearance Gap Between Turbine Blades and Surrounding Duct
GB2071852A (en) * 1980-03-12 1981-09-23 Rolls Royce Capacitance frequency modulation probe for blade tip clearance measurement
US4329644A (en) * 1980-04-03 1982-05-11 Avco Corporation Electrode structure for a high temperature capacitance probe for sensing turbine speed
FR2496871A1 (fr) * 1980-12-19 1982-06-25 Commissariat Energie Atomique Procede et dispositif de mesure de faibles distances entre deux pieces metalliques
US4395827A (en) * 1981-12-21 1983-08-02 General Electric Company Clearance measuring method and apparatus
GB2143037B (en) * 1983-07-08 1986-07-30 Rolls Royce Vibration monitoring in rotary bladed machines
FR2568004B1 (fr) * 1984-07-20 1986-12-26 Onera (Off Nat Aerospatiale) Procede et appareil pour effectuer la mesure dynamique, sur une machine tournante en fonctionnement, du jeu entre les faces en regard du rotor et du stator de cette machine

Also Published As

Publication number Publication date
GB8519698D0 (en) 1985-09-11
US4804905A (en) 1989-02-14
FR2570176B1 (fr) 1990-07-20
GB2164448A (en) 1986-03-19
JPS6168501A (ja) 1986-04-08
US4823071A (en) 1989-04-18
FR2570176A1 (fr) 1986-03-14
IT8521756A0 (it) 1985-07-30
DE3433351C1 (de) 1986-01-02
GB2164448B (en) 1988-11-02

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