DE3871374D1 - Interferometersystem fuer geradheitsmessung. - Google Patents

Interferometersystem fuer geradheitsmessung.

Info

Publication number
DE3871374D1
DE3871374D1 DE8888907351T DE3871374T DE3871374D1 DE 3871374 D1 DE3871374 D1 DE 3871374D1 DE 8888907351 T DE8888907351 T DE 8888907351T DE 3871374 T DE3871374 T DE 3871374T DE 3871374 D1 DE3871374 D1 DE 3871374D1
Authority
DE
Germany
Prior art keywords
interferometer system
straightness measurement
straightness
measurement
interferometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8888907351T
Other languages
English (en)
Inventor
John Chaney
Roberts Mcmurtry
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renishaw PLC
Original Assignee
Renishaw PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renishaw PLC filed Critical Renishaw PLC
Application granted granted Critical
Publication of DE3871374D1 publication Critical patent/DE3871374D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02097—Self-interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE8888907351T 1987-08-25 1988-08-24 Interferometersystem fuer geradheitsmessung. Expired - Fee Related DE3871374D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB878720014A GB8720014D0 (en) 1987-08-25 1987-08-25 Straightness interferometer
PCT/GB1988/000693 WO1989002059A1 (en) 1987-08-25 1988-08-24 Straightness interferometer system

Publications (1)

Publication Number Publication Date
DE3871374D1 true DE3871374D1 (de) 1992-06-25

Family

ID=10622766

Family Applications (2)

Application Number Title Priority Date Filing Date
DE8888907351T Expired - Fee Related DE3871374D1 (de) 1987-08-25 1988-08-24 Interferometersystem fuer geradheitsmessung.
DE3852649T Expired - Fee Related DE3852649T2 (de) 1987-08-25 1988-08-24 Geradheits-Interferometer.

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE3852649T Expired - Fee Related DE3852649T2 (de) 1987-08-25 1988-08-24 Geradheits-Interferometer.

Country Status (6)

Country Link
US (1) US5026163A (de)
EP (2) EP0397289B1 (de)
JP (1) JP2630345B2 (de)
DE (2) DE3871374D1 (de)
GB (1) GB8720014D0 (de)
WO (1) WO1989002059A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9202691D0 (en) * 1992-02-08 1992-03-25 Renishaw Transducer Syst Straightness interferometer system
GB9403206D0 (en) * 1994-02-19 1994-04-13 Renishaw Plc Laser interferometer
JP3540054B2 (ja) * 1995-06-16 2004-07-07 株式会社ソキア 真直度干渉計
US5757491A (en) * 1996-08-19 1998-05-26 The Hong Kong University Of Science & Technology Laser interferometer system for straightness measurements
US6519042B1 (en) 2000-08-25 2003-02-11 Industrial Technology Research Institute Interferometer system for displacement and straightness measurements
CN103471531B (zh) * 2013-09-27 2016-01-20 吉林大学 轴类零件直线度在线非接触测量方法
GB2555646A (en) 2016-11-03 2018-05-09 Mbda Uk Ltd Interferometric position sensor

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3523735A (en) * 1966-10-07 1970-08-11 Gen Dynamics Corp Interferometer system for distance measurement
US3458259A (en) * 1966-11-07 1969-07-29 Hewlett Packard Co Interferometric system
FR1541747A (fr) * 1967-08-28 1968-10-11 Comp Generale Electricite Dispositif de détection et de mesure à distance de déplacements
GB1367886A (en) * 1971-10-29 1974-09-25 Ti Group Serivces Ltd Measuring apparatus
US3790284A (en) * 1972-05-08 1974-02-05 Hewlett Packard Co Interferometer system for measuring straightness and roll
US4180328A (en) * 1976-07-06 1979-12-25 United Kingdom Atomic Energy Authority Interferometer which corrects for spurious vibrations
GB2069169A (en) * 1980-02-06 1981-08-19 Breyer K H Measuring apparatus and method for determining the three- dimensional position of a body
US4355900A (en) * 1980-08-08 1982-10-26 The United States Of America As Represented By The Secretary Of The Air Force Self-calibrating interferometer
US4436424A (en) * 1981-07-27 1984-03-13 Gca Corporation Interferometer using transverse deviation of test beam
JPS6358106A (ja) * 1986-08-29 1988-03-12 Hitachi Ltd 送りテ−ブルの真直度測定装置
US5079418A (en) * 1990-02-20 1992-01-07 Dr. Johannes Heidenhain Gmbh Position measuring apparatus with reflection

Also Published As

Publication number Publication date
DE3852649D1 (de) 1995-02-09
JP2630345B2 (ja) 1997-07-16
EP0397289A3 (de) 1991-05-02
DE3852649T2 (de) 1995-05-24
JPH02500615A (ja) 1990-03-01
EP0397289B1 (de) 1994-12-28
WO1989002059A1 (en) 1989-03-09
EP0397289A2 (de) 1990-11-14
EP0333783A1 (de) 1989-09-27
US5026163A (en) 1991-06-25
EP0333783B1 (de) 1992-05-20
GB8720014D0 (en) 1987-09-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee