IT1089040B - Dispositivo di incisione a plasma,particolarmente utile nella tecnologia dei semiconduttori - Google Patents

Dispositivo di incisione a plasma,particolarmente utile nella tecnologia dei semiconduttori

Info

Publication number
IT1089040B
IT1089040B IT2998677A IT2998677A IT1089040B IT 1089040 B IT1089040 B IT 1089040B IT 2998677 A IT2998677 A IT 2998677A IT 2998677 A IT2998677 A IT 2998677A IT 1089040 B IT1089040 B IT 1089040B
Authority
IT
Italy
Prior art keywords
particularly useful
semiconductor technology
engraving device
plasma engraving
plasma
Prior art date
Application number
IT2998677A
Other languages
English (en)
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Application granted granted Critical
Publication of IT1089040B publication Critical patent/IT1089040B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67109—Apparatus for thermal treatment mainly by convection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3435—Target holders (includes backing plates and endblocks)
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67069—Apparatus for fluid treatment for etching for drying etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
IT2998677A 1976-11-29 1977-11-24 Dispositivo di incisione a plasma,particolarmente utile nella tecnologia dei semiconduttori IT1089040B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19762654083 DE2654083A1 (de) 1976-11-29 1976-11-29 Plasmaaetzverfahren

Publications (1)

Publication Number Publication Date
IT1089040B true IT1089040B (it) 1985-06-10

Family

ID=5994209

Family Applications (1)

Application Number Title Priority Date Filing Date
IT2998677A IT1089040B (it) 1976-11-29 1977-11-24 Dispositivo di incisione a plasma,particolarmente utile nella tecnologia dei semiconduttori

Country Status (5)

Country Link
JP (1) JPS5368642A (it)
BE (1) BE861311A (it)
DE (1) DE2654083A1 (it)
FR (1) FR2372571A1 (it)
IT (1) IT1089040B (it)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6025233A (ja) * 1983-07-22 1985-02-08 Fujitsu Ltd 真空処理方法
AT386316B (de) * 1985-11-11 1988-08-10 Voest Alpine Ag Plasmareaktor zum aetzen von leiterplatten
US4711197A (en) * 1986-10-16 1987-12-08 Thermco Systems, Inc. Gas scavenger

Also Published As

Publication number Publication date
DE2654083A1 (de) 1978-06-01
BE861311A (fr) 1978-03-16
FR2372571A1 (fr) 1978-06-23
JPS5368642A (en) 1978-06-19

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