IT1070023B - COMPLEMENTARY TRANSISTOR MANUFACTURING PROCESS - Google Patents

COMPLEMENTARY TRANSISTOR MANUFACTURING PROCESS

Info

Publication number
IT1070023B
IT1070023B IT2730876A IT2730876A IT1070023B IT 1070023 B IT1070023 B IT 1070023B IT 2730876 A IT2730876 A IT 2730876A IT 2730876 A IT2730876 A IT 2730876A IT 1070023 B IT1070023 B IT 1070023B
Authority
IT
Italy
Prior art keywords
manufacturing process
transistor manufacturing
complementary transistor
complementary
transistor
Prior art date
Application number
IT2730876A
Other languages
Italian (it)
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Application granted granted Critical
Publication of IT1070023B publication Critical patent/IT1070023B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
    • H01L27/082—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including bipolar components only
    • H01L27/0821—Combination of lateral and vertical transistors only
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
    • H01L21/2205—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities from the substrate during epitaxy, e.g. autodoping; Preventing or using autodoping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/761—PN junctions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
    • H01L21/8222—Bipolar technology
    • H01L21/8228—Complementary devices, e.g. complementary transistors
    • H01L21/82285—Complementary vertical transistors

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Bipolar Integrated Circuits (AREA)
  • Bipolar Transistors (AREA)
IT2730876A 1975-11-24 1976-09-17 COMPLEMENTARY TRANSISTOR MANUFACTURING PROCESS IT1070023B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US63496475A 1975-11-24 1975-11-24

Publications (1)

Publication Number Publication Date
IT1070023B true IT1070023B (en) 1985-03-25

Family

ID=24545858

Family Applications (1)

Application Number Title Priority Date Filing Date
IT2730876A IT1070023B (en) 1975-11-24 1976-09-17 COMPLEMENTARY TRANSISTOR MANUFACTURING PROCESS

Country Status (5)

Country Link
JP (1) JPS5264882A (en)
CA (1) CA1053376A (en)
DE (1) DE2651449A1 (en)
FR (1) FR2347777A1 (en)
IT (1) IT1070023B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4196440A (en) * 1978-05-25 1980-04-01 International Business Machines Corporation Lateral PNP or NPN with a high gain
FR2457564A1 (en) * 1979-05-23 1980-12-19 Thomson Csf Bipolar integrated circuit pnp transistor - has p-type substrate with p-implantation zones and n-type epitaxial layer
US4339767A (en) * 1980-05-05 1982-07-13 International Business Machines Corporation High performance PNP and NPN transistor structure
US5279987A (en) * 1991-10-31 1994-01-18 International Business Machines Corporation Fabricating planar complementary patterned subcollectors with silicon epitaxial layer

Also Published As

Publication number Publication date
CA1053376A (en) 1979-04-24
DE2651449A1 (en) 1977-05-26
FR2347777A1 (en) 1977-11-04
JPS5264882A (en) 1977-05-28

Similar Documents

Publication Publication Date Title
BR7604289A (en) EXTRUSION PROCESS
IT1160290B (en) BIPOLAR TRANSISTOR AND RELATED MANUFACTURING PROCESS
IT1165429B (en) MOS DEVICE MANUFACTURING PROCESS
IT1158723B (en) SEMICONDUCTOR DEVICES MANUFACTURING PROCESS
IT1080581B (en) HYDROFORMILATION PROCESS
BR7708470A (en) DIMETHYLETER PRODUCTION PROCESS
IT1076754B (en) CYCLIC HYDROFORMILATION PROCESS
IT1072852B (en) FIELD-EFFECT TRANSISTORS MANUFACTURING PROCESS
IT1055361B (en) AMMOXIDATION PROCESS
IT1075872B (en) DIMERIZATION PROCESS
IT1013149B (en) METHYLMERCAPTANE MANUFACTURING PROCESS
IT1066757B (en) CALCINATION PROCESS
BR7601472A (en) INTEGRATED REACTION PROCESS
IT1061046B (en) POLYOLEFINE PREPARATION PROCESS
IT1064624B (en) COLD PRODUCTION PROCESS
IT1058596B (en) NICKELING PROCESS
IT7829672A0 (en) IMPROVED FET DEVICES MANUFACTURING PROCESS.
BR7600615A (en) AMINO-2-BUTANOL-1 PREPARATION PROCESS
BR7602380A (en) ELECTROPHORETIC TRANSFER PROCESS
IT1061584B (en) PROCESS HEATER
IT1070023B (en) COMPLEMENTARY TRANSISTOR MANUFACTURING PROCESS
IT1123671B (en) PROCESS FOR THE MANUFACTURE OF SEMICONDUCTIVE DEVICES
BR7603920A (en) PRELAJES MANUFACTURING PROCESS
IT1080379B (en) DECAFFEINIZATION PROCESS
IT1124782B (en) AMMOXIDATION PROCESS