IT1059401B - Perfezionamento negli apparecchi generatori di fasci di particelle cariche per esempio cannoni elettronici e ionici - Google Patents

Perfezionamento negli apparecchi generatori di fasci di particelle cariche per esempio cannoni elettronici e ionici

Info

Publication number
IT1059401B
IT1059401B IT48785/76A IT4878576A IT1059401B IT 1059401 B IT1059401 B IT 1059401B IT 48785/76 A IT48785/76 A IT 48785/76A IT 4878576 A IT4878576 A IT 4878576A IT 1059401 B IT1059401 B IT 1059401B
Authority
IT
Italy
Prior art keywords
cannons
appliances
ionic
improvement
charged particle
Prior art date
Application number
IT48785/76A
Other languages
English (en)
Italian (it)
Original Assignee
Minnesota Mining & Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Minnesota Mining & Mfg filed Critical Minnesota Mining & Mfg
Application granted granted Critical
Publication of IT1059401B publication Critical patent/IT1059401B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/08—Deviation, concentration or focusing of the beam by electric or magnetic means
    • G21K1/087—Deviation, concentration or focusing of the beam by electric or magnetic means by electrical means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/063—Geometrical arrangement of electrodes for beam-forming

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Electron Tubes For Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Particle Accelerators (AREA)
IT48785/76A 1975-03-31 1976-03-30 Perfezionamento negli apparecchi generatori di fasci di particelle cariche per esempio cannoni elettronici e ionici IT1059401B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/563,330 US3937958A (en) 1975-03-31 1975-03-31 Charged particle beam apparatus

Publications (1)

Publication Number Publication Date
IT1059401B true IT1059401B (it) 1982-05-31

Family

ID=24250074

Family Applications (1)

Application Number Title Priority Date Filing Date
IT48785/76A IT1059401B (it) 1975-03-31 1976-03-30 Perfezionamento negli apparecchi generatori di fasci di particelle cariche per esempio cannoni elettronici e ionici

Country Status (8)

Country Link
US (1) US3937958A (https=)
JP (1) JPS51121245A (https=)
CA (1) CA1059656A (https=)
CH (1) CH613812A5 (https=)
DE (1) DE2608958A1 (https=)
FR (1) FR2306523A1 (https=)
GB (1) GB1549451A (https=)
IT (1) IT1059401B (https=)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4002912A (en) * 1975-12-30 1977-01-11 The United States Of America As Represented By The United States Energy Research And Development Administration Electrostatic lens to focus an ion beam to uniform density
US4107526A (en) * 1976-03-22 1978-08-15 Minnesota Mining And Manufacturing Company Ion scattering spectrometer with modified bias
US4389571A (en) * 1981-04-01 1983-06-21 The United States Of America As Represented By The United States Department Of Energy Multiple sextupole system for the correction of third and higher order aberration
US4563587A (en) * 1981-05-26 1986-01-07 Hughes Aircraft Company Focused ion beam microfabrication column
DE3204897A1 (de) * 1982-02-12 1983-08-25 Siemens AG, 1000 Berlin und 8000 München Korpuskularstrahlerzeugendes system und verfahren zu seinem betrieb
DE3205027A1 (de) * 1982-02-12 1983-08-25 Siemens AG, 1000 Berlin und 8000 München Integriertes korpuskularstrahlerzeugendes system
US4491735A (en) * 1982-04-05 1985-01-01 The Perkin-Elmer Corporation Restricted ion source of high current density
US4556798A (en) * 1983-07-12 1985-12-03 Hughes Aircraft Company Focused ion beam column
US5019712A (en) * 1989-06-08 1991-05-28 Hughes Aircraft Company Production of focused ion cluster beams
US5063296A (en) * 1990-05-31 1991-11-05 Shimadzu Corporation Electron-optical system for making a pseudoparallel micro electron-beam
US5436460A (en) * 1991-08-20 1995-07-25 Ims Ionen Mikrofabrikations Systeme Gesellschaft M.B.H. Ion-optical imaging system
JP4647866B2 (ja) * 1999-06-22 2011-03-09 エフ イー アイ カンパニ 高い輝度と大きいビーム電流の間で切換可能な粒子源を含む粒子光学装置
GB0700754D0 (en) * 2007-01-15 2007-02-21 Oxford Instr Analytical Ltd Charged particle analyser and method
GB2488429B (en) * 2011-02-28 2016-09-28 Agilent Technologies Inc Ion slicer with acceleration and deceleration optics

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2422807A (en) * 1945-03-29 1947-06-24 Rca Corp Art of ascertaining the atomic structure of materials
US3665182A (en) 1969-08-18 1972-05-23 Minnesota Mining & Mfg Elemental analyzing apparatus
JPS5246514B2 (https=) * 1972-01-28 1977-11-25

Also Published As

Publication number Publication date
CH613812A5 (https=) 1979-10-15
CA1059656A (en) 1979-07-31
DE2608958A1 (de) 1976-10-14
JPS51121245A (en) 1976-10-23
FR2306523A1 (fr) 1976-10-29
FR2306523B1 (https=) 1979-04-06
GB1549451A (en) 1979-08-08
US3937958A (en) 1976-02-10

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