CH613812A5 - - Google Patents
Info
- Publication number
- CH613812A5 CH613812A5 CH396576A CH396576A CH613812A5 CH 613812 A5 CH613812 A5 CH 613812A5 CH 396576 A CH396576 A CH 396576A CH 396576 A CH396576 A CH 396576A CH 613812 A5 CH613812 A5 CH 613812A5
- Authority
- CH
- Switzerland
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/08—Ion sources; Ion guns
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/08—Deviation, concentration or focusing of the beam by electric or magnetic means
- G21K1/087—Deviation, concentration or focusing of the beam by electric or magnetic means by electrical means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/063—Geometrical arrangement of electrodes for beam-forming
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Electron Tubes For Measurement (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Particle Accelerators (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/563,330 US3937958A (en) | 1975-03-31 | 1975-03-31 | Charged particle beam apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH613812A5 true CH613812A5 (https=) | 1979-10-15 |
Family
ID=24250074
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH396576A CH613812A5 (https=) | 1975-03-31 | 1976-03-30 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US3937958A (https=) |
| JP (1) | JPS51121245A (https=) |
| CA (1) | CA1059656A (https=) |
| CH (1) | CH613812A5 (https=) |
| DE (1) | DE2608958A1 (https=) |
| FR (1) | FR2306523A1 (https=) |
| GB (1) | GB1549451A (https=) |
| IT (1) | IT1059401B (https=) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4002912A (en) * | 1975-12-30 | 1977-01-11 | The United States Of America As Represented By The United States Energy Research And Development Administration | Electrostatic lens to focus an ion beam to uniform density |
| US4107526A (en) * | 1976-03-22 | 1978-08-15 | Minnesota Mining And Manufacturing Company | Ion scattering spectrometer with modified bias |
| US4389571A (en) * | 1981-04-01 | 1983-06-21 | The United States Of America As Represented By The United States Department Of Energy | Multiple sextupole system for the correction of third and higher order aberration |
| US4563587A (en) * | 1981-05-26 | 1986-01-07 | Hughes Aircraft Company | Focused ion beam microfabrication column |
| DE3204897A1 (de) * | 1982-02-12 | 1983-08-25 | Siemens AG, 1000 Berlin und 8000 München | Korpuskularstrahlerzeugendes system und verfahren zu seinem betrieb |
| DE3205027A1 (de) * | 1982-02-12 | 1983-08-25 | Siemens AG, 1000 Berlin und 8000 München | Integriertes korpuskularstrahlerzeugendes system |
| US4491735A (en) * | 1982-04-05 | 1985-01-01 | The Perkin-Elmer Corporation | Restricted ion source of high current density |
| US4556798A (en) * | 1983-07-12 | 1985-12-03 | Hughes Aircraft Company | Focused ion beam column |
| US5019712A (en) * | 1989-06-08 | 1991-05-28 | Hughes Aircraft Company | Production of focused ion cluster beams |
| US5063296A (en) * | 1990-05-31 | 1991-11-05 | Shimadzu Corporation | Electron-optical system for making a pseudoparallel micro electron-beam |
| US5436460A (en) * | 1991-08-20 | 1995-07-25 | Ims Ionen Mikrofabrikations Systeme Gesellschaft M.B.H. | Ion-optical imaging system |
| JP4647866B2 (ja) * | 1999-06-22 | 2011-03-09 | エフ イー アイ カンパニ | 高い輝度と大きいビーム電流の間で切換可能な粒子源を含む粒子光学装置 |
| GB0700754D0 (en) * | 2007-01-15 | 2007-02-21 | Oxford Instr Analytical Ltd | Charged particle analyser and method |
| GB2488429B (en) * | 2011-02-28 | 2016-09-28 | Agilent Technologies Inc | Ion slicer with acceleration and deceleration optics |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2422807A (en) * | 1945-03-29 | 1947-06-24 | Rca Corp | Art of ascertaining the atomic structure of materials |
| US3665182A (en) | 1969-08-18 | 1972-05-23 | Minnesota Mining & Mfg | Elemental analyzing apparatus |
| JPS5246514B2 (https=) * | 1972-01-28 | 1977-11-25 |
-
1975
- 1975-03-31 US US05/563,330 patent/US3937958A/en not_active Expired - Lifetime
-
1976
- 1976-02-17 CA CA245,963A patent/CA1059656A/en not_active Expired
- 1976-03-02 DE DE19762608958 patent/DE2608958A1/de not_active Ceased
- 1976-03-29 JP JP51034256A patent/JPS51121245A/ja active Pending
- 1976-03-30 IT IT48785/76A patent/IT1059401B/it active
- 1976-03-30 CH CH396576A patent/CH613812A5/xx not_active IP Right Cessation
- 1976-03-30 FR FR7609182A patent/FR2306523A1/fr active Granted
- 1976-03-30 GB GB12792/76A patent/GB1549451A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| CA1059656A (en) | 1979-07-31 |
| DE2608958A1 (de) | 1976-10-14 |
| JPS51121245A (en) | 1976-10-23 |
| FR2306523A1 (fr) | 1976-10-29 |
| IT1059401B (it) | 1982-05-31 |
| FR2306523B1 (https=) | 1979-04-06 |
| GB1549451A (en) | 1979-08-08 |
| US3937958A (en) | 1976-02-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PL | Patent ceased | ||
| PL | Patent ceased |