IT1006729B - Sensore di temperatura a semicon duttore - Google Patents
Sensore di temperatura a semicon duttoreInfo
- Publication number
- IT1006729B IT1006729B IT19097/74A IT1909774A IT1006729B IT 1006729 B IT1006729 B IT 1006729B IT 19097/74 A IT19097/74 A IT 19097/74A IT 1909774 A IT1909774 A IT 1909774A IT 1006729 B IT1006729 B IT 1006729B
- Authority
- IT
- Italy
- Prior art keywords
- temperature sensor
- semicon ductor
- semicon
- ductor
- sensor
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
- G01K7/22—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a non-linear resistance, e.g. thermistor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6845—Micromachined devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
- G01P5/10—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables
- G01P5/12—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables using variation of resistance of a heated conductor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Aviation & Aerospace Engineering (AREA)
- Fluid Mechanics (AREA)
- Measuring Volume Flow (AREA)
- Thermistors And Varistors (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US334660A US3881181A (en) | 1973-02-22 | 1973-02-22 | Semiconductor temperature sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| IT1006729B true IT1006729B (it) | 1976-10-20 |
Family
ID=23308202
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IT19097/74A IT1006729B (it) | 1973-02-22 | 1974-01-04 | Sensore di temperatura a semicon duttore |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US3881181A (it) |
| JP (1) | JPS531191B2 (it) |
| CA (1) | CA1005928A (it) |
| DE (1) | DE2407374B2 (it) |
| FR (1) | FR2219406B1 (it) |
| GB (1) | GB1450265A (it) |
| IT (1) | IT1006729B (it) |
| SE (1) | SE407626B (it) |
Families Citing this family (53)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3992940A (en) * | 1973-11-02 | 1976-11-23 | Chrysler Corporation | Solid state fluid flow sensor |
| US4116063A (en) * | 1975-11-26 | 1978-09-26 | Agence Nationale De Valorisation De La Recherche | Liquid helium-cooled bolometer wherein the sensitive element and the elements linking the latter to the electrical connections are obtained from the same semiconductor body |
| US4112312A (en) * | 1977-03-14 | 1978-09-05 | Mcgalliard James D | Fluid sensitive switching member |
| US4257061A (en) * | 1977-10-17 | 1981-03-17 | John Fluke Mfg. Co., Inc. | Thermally isolated monolithic semiconductor die |
| DE3106354C2 (de) * | 1981-02-20 | 1983-01-13 | Texas Instruments Deutschland Gmbh, 8050 Freising | Halbleitervorrichtung und Verfahren zu ihrer Herstellung |
| EP0060427B1 (de) * | 1981-03-16 | 1987-08-12 | Hanno Prof. Dr.-Ing. Schaumburg | Sensor zur Messung physikalischer Grössen sowie Verfahren zu seiner Herstellung und seine Verwendung |
| US4484215A (en) * | 1981-05-18 | 1984-11-20 | Burroughs Corporation | Flexible mounting support for wafer scale integrated circuits |
| US4696188A (en) * | 1981-10-09 | 1987-09-29 | Honeywell Inc. | Semiconductor device microstructure |
| EP0076935B1 (en) * | 1981-10-09 | 1989-07-19 | Honeywell Inc. | Integrated semiconductor device and method of fabricating said device |
| US4472239A (en) * | 1981-10-09 | 1984-09-18 | Honeywell, Inc. | Method of making semiconductor device |
| EP0094497A1 (en) * | 1982-03-31 | 1983-11-23 | Honeywell Inc. | Gas flow sensing apparatus |
| US4478076A (en) * | 1982-09-30 | 1984-10-23 | Honeywell Inc. | Flow sensor |
| US4478077A (en) * | 1982-09-30 | 1984-10-23 | Honeywell Inc. | Flow sensor |
| US4825693A (en) * | 1982-09-30 | 1989-05-02 | Honeywell Inc. | Slotted diaphragm semiconductor device |
| US4651564A (en) * | 1982-09-30 | 1987-03-24 | Honeywell Inc. | Semiconductor device |
| US4677850A (en) * | 1983-02-11 | 1987-07-07 | Nippon Soken, Inc. | Semiconductor-type flow rate detecting apparatus |
| JPS601525A (ja) * | 1983-06-20 | 1985-01-07 | Nippon Soken Inc | 半導体式流量検出装置 |
| US4633578A (en) * | 1983-12-01 | 1987-01-06 | Aine Harry E | Miniature thermal fluid flow sensors and batch methods of making same |
| GB2150747B (en) * | 1983-12-02 | 1987-04-23 | Philips Electronic Associated | Pyroelectric infra-red radiation detector |
| US4829818A (en) * | 1983-12-27 | 1989-05-16 | Honeywell Inc. | Flow sensor housing |
| JPS60151517A (ja) * | 1984-01-18 | 1985-08-09 | Nippon Soken Inc | 半導体式流量検出装置 |
| DE3431811A1 (de) * | 1984-08-30 | 1986-03-13 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Halbleiter-temperatursensor |
| DE3539402A1 (de) * | 1985-11-07 | 1987-05-21 | Rohde & Schwarz | Leistungsmesssensor zum messen von hochfrequenzleistung |
| US4808009A (en) * | 1986-06-05 | 1989-02-28 | Rosemount, Inc. | Integrated semiconductor resistance temperature sensor and resistive heater |
| DE3853197T2 (de) * | 1987-12-07 | 1995-06-29 | Nippon Electric Co | Kühlungssystem für integrierte Schaltungspackung. |
| EP0341950B1 (en) * | 1988-05-09 | 1994-09-14 | Nec Corporation | Flat cooling structure of integrated circuit |
| US4975766A (en) * | 1988-08-26 | 1990-12-04 | Nec Corporation | Structure for temperature detection in a package |
| JPH06100408B2 (ja) * | 1988-09-09 | 1994-12-12 | 日本電気株式会社 | 冷却装置 |
| US5014777A (en) * | 1988-09-20 | 1991-05-14 | Nec Corporation | Cooling structure |
| US5216918A (en) * | 1990-01-18 | 1993-06-08 | Integrated Control Concepts, Inc. | Fluid mass flow detecting |
| US5231877A (en) * | 1990-12-12 | 1993-08-03 | University Of Cincinnati | Solid state microanemometer |
| DE4320326A1 (de) * | 1993-06-18 | 1994-12-22 | Siemens Ag | Vorrichtung zur Messung einer radialen Gas- oder Flüssigkeitsströmung mit einer Wheatstone-Brücke von vier temperaturempfindlichen Widerständen |
| US5415203A (en) * | 1994-06-28 | 1995-05-16 | Huang; L. S. | Pipe having temperature display chips that change color |
| US5600174A (en) * | 1994-10-11 | 1997-02-04 | The Board Of Trustees Of The Leeland Stanford Junior University | Suspended single crystal silicon structures and method of making same |
| US5572060A (en) * | 1995-02-01 | 1996-11-05 | Southern Methodist University | Uncooled YBaCuO thin film infrared detector |
| US5821598A (en) * | 1995-02-01 | 1998-10-13 | Research Corporation Technologies, Inc. | Uncooled amorphous YBaCuO thin film infrared detector |
| US6182509B1 (en) | 1996-06-26 | 2001-02-06 | Simon Fraser University | Accelerometer without proof mass |
| AU3162297A (en) | 1996-06-26 | 1998-01-14 | Simon Fraser University | Accelerometer without proof mass |
| US6589433B2 (en) | 1996-06-26 | 2003-07-08 | Simon Fraser University | Accelerometer without proof mass |
| US6361206B1 (en) * | 1999-01-28 | 2002-03-26 | Honeywell International Inc. | Microsensor housing |
| EP1161662A1 (de) * | 1999-03-17 | 2001-12-12 | Siemens Aktiengesellschaft | Elektrische hochspannungsmaschine, insbesondere turbogenerator, und verfahren zur messung einer temperatur in einer elektrischen hochspannungsmaschine |
| ATE301822T1 (de) | 2000-05-04 | 2005-08-15 | Sensirion Ag | Flusssensor für flüssigkeiten |
| DE10191688B4 (de) * | 2000-05-04 | 2010-09-16 | Sensirion Holding Ag | Sensorbaustein und ein Verfahren zu dessen Herstellung |
| US6596059B1 (en) * | 2000-09-12 | 2003-07-22 | Skyline Products, Inc. | Automated filter changing device and method |
| US6631638B2 (en) | 2001-01-30 | 2003-10-14 | Rosemount Aerospace Inc. | Fluid flow sensor |
| JP2003031579A (ja) * | 2001-07-18 | 2003-01-31 | Denso Corp | センサ及びその製造方法 |
| US6679625B2 (en) * | 2001-12-17 | 2004-01-20 | International Business Machines Corporation | Scanning heat flow probe |
| US7306967B1 (en) | 2003-05-28 | 2007-12-11 | Adsem, Inc. | Method of forming high temperature thermistors |
| US7292132B1 (en) * | 2003-12-17 | 2007-11-06 | Adsem, Inc. | NTC thermistor probe |
| US7812705B1 (en) | 2003-12-17 | 2010-10-12 | Adsem, Inc. | High temperature thermistor probe |
| US7577859B2 (en) * | 2004-02-20 | 2009-08-18 | International Business Machines Corporation | System and method of controlling power consumption in an electronic system by applying a uniquely determined minimum operating voltage to an integrated circuit rather than a predetermined nominal voltage selected for a family of integrated circuits |
| DE102006031343A1 (de) * | 2006-07-06 | 2008-01-10 | Epcos Ag | Temperaturmessvorrichtung |
| US9976409B2 (en) * | 2013-10-08 | 2018-05-22 | Halliburton Energy Services, Inc. | Assembly for measuring temperature of materials flowing through tubing in a well system |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3202820A (en) * | 1963-01-28 | 1965-08-24 | Barnes Eng Co | Infrared detector mounting structure |
| US3343114A (en) * | 1963-12-30 | 1967-09-19 | Texas Instruments Inc | Temperature transducer |
| US3406366A (en) * | 1966-01-13 | 1968-10-15 | Ibm | Electrical temperature sensor device |
| US3426252A (en) * | 1966-05-03 | 1969-02-04 | Bell Telephone Labor Inc | Semiconductive device including beam leads |
| US3484534A (en) * | 1966-07-29 | 1969-12-16 | Texas Instruments Inc | Multilead package for a multilead electrical device |
| US3484658A (en) * | 1966-08-25 | 1969-12-16 | Nippon Telegraph & Telephone | Temperature compensated semiconductor resistor |
| US3491325A (en) * | 1967-02-15 | 1970-01-20 | Ibm | Temperature compensation for semiconductor devices |
| GB1188451A (en) * | 1968-01-26 | 1970-04-15 | Ass Elect Ind | Improvements relating to methods of making Connections to Small Components |
| US3729662A (en) * | 1971-03-26 | 1973-04-24 | Ibm | Semiconductor resistor |
| US3717564A (en) * | 1971-10-01 | 1973-02-20 | Cogar Corp | Fabrication method for making an aluminum alloy having a high resistance to electromigration |
| US3733897A (en) * | 1971-10-14 | 1973-05-22 | Fischer & Porter Co | Sensor assembly for vortex-type flowmeters |
-
1973
- 1973-02-22 US US334660A patent/US3881181A/en not_active Expired - Lifetime
-
1974
- 1974-01-04 IT IT19097/74A patent/IT1006729B/it active
- 1974-01-25 FR FR7402575A patent/FR2219406B1/fr not_active Expired
- 1974-02-15 GB GB712774A patent/GB1450265A/en not_active Expired
- 1974-02-15 DE DE2407374A patent/DE2407374B2/de not_active Withdrawn
- 1974-02-20 CA CA193,075A patent/CA1005928A/en not_active Expired
- 1974-02-21 JP JP2097874A patent/JPS531191B2/ja not_active Expired
- 1974-02-21 SE SE7402297A patent/SE407626B/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| JPS49115784A (it) | 1974-11-05 |
| FR2219406B1 (it) | 1976-05-07 |
| JPS531191B2 (it) | 1978-01-17 |
| SE407626B (sv) | 1979-04-02 |
| GB1450265A (en) | 1976-09-22 |
| DE2407374B2 (de) | 1980-06-19 |
| US3881181A (en) | 1975-04-29 |
| CA1005928A (en) | 1977-02-22 |
| FR2219406A1 (it) | 1974-09-20 |
| DE2407374A1 (de) | 1974-08-29 |
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