IN2014MU02658A - - Google Patents

Info

Publication number
IN2014MU02658A
IN2014MU02658A IN2658MU2014A IN2014MU02658A IN 2014MU02658 A IN2014MU02658 A IN 2014MU02658A IN 2658MU2014 A IN2658MU2014 A IN 2658MU2014A IN 2014MU02658 A IN2014MU02658 A IN 2014MU02658A
Authority
IN
India
Prior art keywords
power semiconductor
housing component
cooling
cooling housing
heat sink
Prior art date
Application number
Inventor
Bogen Ingo
Beck Markus
Kulas Hartmut
Popescu Alexander
Helldoerfer Reinhard
Original Assignee
Semikron Elektronik Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semikron Elektronik Gmbh filed Critical Semikron Elektronik Gmbh
Publication of IN2014MU02658A publication Critical patent/IN2014MU02658A/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/367Cooling facilitated by shape of device
    • H01L23/3675Cooling facilitated by shape of device characterised by the shape of the housing
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00Constructional details common to different types of electric apparatus
    • H05K7/20Modifications to facilitate cooling, ventilating, or heating
    • H05K7/2089Modifications to facilitate cooling, ventilating, or heating for power electronics, e.g. for inverters for controlling motor
    • H05K7/20927Liquid coolant without phase change
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/48Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814Conductive parts
    • H01L21/4871Bases, plates or heatsinks
    • H01L21/4882Assembly of heatsink parts
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/367Cooling facilitated by shape of device
    • H01L23/3672Foil-like cooling fins or heat sinks
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/367Cooling facilitated by shape of device
    • H01L23/3677Wire-like or pin-like cooling fins or heat sinks
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/832Applying energy for connecting
    • H01L2224/83237Applying energy for connecting using an electron beam
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/832Applying energy for connecting
    • H01L2224/83238Applying energy for connecting using electric resistance welding, i.e. ohmic heating
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/838Bonding techniques
    • H01L2224/83801Soldering or alloying
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/12Passive devices, e.g. 2 terminal devices
    • H01L2924/1204Optical Diode
    • H01L2924/12042LASER
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/13Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304Transistor
    • H01L2924/1305Bipolar Junction Transistor [BJT]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/13Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304Transistor
    • H01L2924/1305Bipolar Junction Transistor [BJT]
    • H01L2924/13055Insulated gate bipolar transistor [IGBT]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/13Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304Transistor
    • H01L2924/1306Field-effect transistor [FET]
    • H01L2924/13091Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/156Material
    • H01L2924/157Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
    • H01L2924/15738Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950 C and less than 1550 C
    • H01L2924/15747Copper [Cu] as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/20Parameters
    • H01L2924/201Temperature ranges
    • H01L2924/20103Temperature range 60 C=<T<100 C, 333.15 K =< T< 373.15K
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/20Parameters
    • H01L2924/201Temperature ranges
    • H01L2924/20104Temperature range 100 C=<T<150 C, 373.15 K =< T < 423.15K

Abstract

The invention relates to a power semiconductor device comprising a power semiconductor module and a heat sink, wherein the heat sink has a first cooling housing component, which has a cutout passing through the first cooling housing component, and a second cooling housing component, wherein the cooling plate is arranged in the cutout, wherein the first and second cooling housing components have such a shape and are arranged relative to one another in such a way that a cavity is formed at the side of the cooling plate facing away from the power semiconductor components, wherein the cooling plate is connected to the first cooling housing component by means of a first weld seam extending circumferentially around the cooling plate, wherein the first weld seam seals the cooling plate in relation to the first cooling housing component, wherein the second cooling housing component is connected to the first cooling housing component. Furthermore, the invention relates to a method for producing a power semiconductor device. The invention provides a power semiconductor device which has a good heat conduction from the power semiconductor components to a heat sink of the power semiconductor device, through which heat sink a liquid can flow, and in the case of which the heat sink is leaktight reliably and over the long term.
IN2658MU2014 2013-09-03 2014-08-19 IN2014MU02658A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE201310109589 DE102013109589B3 (en) 2013-09-03 2013-09-03 Power semiconductor device and method for producing a power semiconductor device

Publications (1)

Publication Number Publication Date
IN2014MU02658A true IN2014MU02658A (en) 2015-10-09

Family

ID=51167798

Family Applications (1)

Application Number Title Priority Date Filing Date
IN2658MU2014 IN2014MU02658A (en) 2013-09-03 2014-08-19

Country Status (7)

Country Link
US (1) US9111900B2 (en)
EP (1) EP2844051A3 (en)
JP (1) JP2015050465A (en)
KR (1) KR20150026862A (en)
CN (1) CN104425406B (en)
DE (1) DE102013109589B3 (en)
IN (1) IN2014MU02658A (en)

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* Cited by examiner, † Cited by third party
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DE102015211163A1 (en) * 2015-06-17 2016-12-22 Zf Friedrichshafen Ag Arrangement for cooling a power module
DE102015211160A1 (en) * 2015-06-17 2016-12-22 Zf Friedrichshafen Ag Arrangement for cooling a power module
JP6384609B2 (en) * 2015-06-17 2018-09-05 富士電機株式会社 Power semiconductor module and cooler
EP3116292B1 (en) 2015-07-06 2021-03-17 EDAG Engineering AG Electronic module with generative cooling body
DE102015114188B4 (en) * 2015-08-26 2019-03-07 Semikron Elektronik Gmbh & Co. Kg Power electronic submodule with a two-part housing
DE102015223413A1 (en) * 2015-11-26 2017-06-01 Zf Friedrichshafen Ag Copper-aluminum heat sinks
US9824953B1 (en) 2016-05-16 2017-11-21 Caterpillar Inc. Mounting and environmental protection device for an IGBT module
JP6811551B2 (en) * 2016-05-27 2021-01-13 日産自動車株式会社 Manufacturing method and cooling structure of power converter
KR101956983B1 (en) 2016-09-20 2019-03-11 현대자동차일본기술연구소 Power module and manufacturing method therefor
DE102017101269B4 (en) 2017-01-24 2019-03-07 Semikron Elektronik Gmbh & Co. Kg Power semiconductor device with a power semiconductor module and a heat sink
DE102017001351A1 (en) * 2017-02-11 2018-08-16 Leopold Kostal Gmbh & Co. Kg Electrical device and method of making an electrical device
WO2018146816A1 (en) * 2017-02-13 2018-08-16 新電元工業株式会社 Electronic device
JP6988432B2 (en) * 2017-12-18 2022-01-05 株式会社デンソー Reactor unit
DE102019200142A1 (en) * 2019-01-08 2020-07-09 Volkswagen Aktiengesellschaft Cooling unit for removing waste heat from at least one power component
DE102019202903A1 (en) * 2019-03-04 2020-09-10 Abb Schweiz Ag Electronic converter trained based on welding technologies
DE102019202902A1 (en) * 2019-03-04 2020-09-10 Abb Schweiz Ag Direct cooling of a converter using an embossed plate
CN110173957B (en) * 2019-06-19 2023-09-08 广东文轩热能科技股份有限公司 Novel liquid cooling plate
EP3824494B1 (en) 2019-07-25 2021-12-22 Hitachi Energy Switzerland AG Power semiconductor module and method of forming the same
DE102020207966A1 (en) * 2019-11-25 2021-05-27 Volkswagen Aktiengesellschaft Cooling arrangement for electronic components of a motor vehicle
DE102020110937B4 (en) 2020-04-22 2022-06-09 Semikron Elektronik Gmbh & Co. Kg Cooling device for cooling a power semiconductor module
DE102020111528A1 (en) * 2020-04-28 2021-10-28 Semikron Elektronik Gmbh & Co. Kg Power electronic arrangement with a multi-phase power semiconductor module
CN114206064A (en) * 2020-09-02 2022-03-18 春鸿电子科技(重庆)有限公司 Liquid cooling head and manufacturing method thereof
CN114361122A (en) * 2021-08-11 2022-04-15 华为技术有限公司 Packaging structure and packaging method of power module
DE102022201557B3 (en) 2022-02-15 2023-07-20 Magna powertrain gmbh & co kg Power module assembly and assembly method for the power module assembly

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US5323292A (en) * 1992-10-06 1994-06-21 Hewlett-Packard Company Integrated multi-chip module having a conformal chip/heat exchanger interface
US5514906A (en) * 1993-11-10 1996-05-07 Fujitsu Limited Apparatus for cooling semiconductor chips in multichip modules
JP3946018B2 (en) * 2001-09-18 2007-07-18 株式会社日立製作所 Liquid-cooled circuit device
WO2005088714A1 (en) * 2004-03-08 2005-09-22 Remmele Engineering, Inc. Cold plate and method of making the same
US7071552B2 (en) * 2004-03-29 2006-07-04 Intel Corporation IC die with directly bonded liquid cooling device
JP4600199B2 (en) * 2005-07-29 2010-12-15 三菱マテリアル株式会社 Cooler and power module
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Also Published As

Publication number Publication date
CN104425406B (en) 2019-01-08
CN104425406A (en) 2015-03-18
US9111900B2 (en) 2015-08-18
JP2015050465A (en) 2015-03-16
KR20150026862A (en) 2015-03-11
DE102013109589B3 (en) 2015-03-05
US20150061112A1 (en) 2015-03-05
EP2844051A2 (en) 2015-03-04
EP2844051A3 (en) 2016-06-01

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