IN2014CN04975A - - Google Patents

Info

Publication number
IN2014CN04975A
IN2014CN04975A IN4975CHN2014A IN2014CN04975A IN 2014CN04975 A IN2014CN04975 A IN 2014CN04975A IN 4975CHN2014 A IN4975CHN2014 A IN 4975CHN2014A IN 2014CN04975 A IN2014CN04975 A IN 2014CN04975A
Authority
IN
India
Prior art keywords
substrate
cavity
trenches
cell
cmut cell
Prior art date
Application number
Other languages
English (en)
Inventor
Ronald Dekker
Bout Marcelis
Marcel Mulder
Ruediger Mauczok
Original Assignee
Koninkl Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Nv filed Critical Koninkl Philips Nv
Publication of IN2014CN04975A publication Critical patent/IN2014CN04975A/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
IN4975CHN2014 2011-12-20 2012-12-13 IN2014CN04975A (enrdf_load_stackoverflow)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201161577704P 2011-12-20 2011-12-20
PCT/IB2012/057273 WO2013093728A1 (en) 2011-12-20 2012-12-13 Ultrasound transducer device and method of manufacturing the same

Publications (1)

Publication Number Publication Date
IN2014CN04975A true IN2014CN04975A (enrdf_load_stackoverflow) 2015-09-18

Family

ID=47631486

Family Applications (1)

Application Number Title Priority Date Filing Date
IN4975CHN2014 IN2014CN04975A (enrdf_load_stackoverflow) 2011-12-20 2012-12-13

Country Status (8)

Country Link
US (2) US9802224B2 (enrdf_load_stackoverflow)
EP (1) EP2750806B1 (enrdf_load_stackoverflow)
JP (1) JP6069798B2 (enrdf_load_stackoverflow)
CN (1) CN104023860B (enrdf_load_stackoverflow)
BR (1) BR112014014911A2 (enrdf_load_stackoverflow)
IN (1) IN2014CN04975A (enrdf_load_stackoverflow)
RU (1) RU2607720C2 (enrdf_load_stackoverflow)
WO (1) WO2013093728A1 (enrdf_load_stackoverflow)

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US9085012B2 (en) * 2009-05-25 2015-07-21 Hitachi Medical Corporation Ultrasonic transducer and ultrasonic diagnostic apparatus provided with same
RU2603518C2 (ru) * 2011-10-28 2016-11-27 Конинклейке Филипс Н.В. Предварительно сжатая ячейка емкостного микрообработанного преобразователя с напряженным слоем
CN104023860B (zh) * 2011-12-20 2016-06-15 皇家飞利浦有限公司 超声换能器设备及制造所述超声换能器设备的方法
US9259206B2 (en) * 2013-02-20 2016-02-16 Georgia Tech Research Corporation CMUT-on-CMOS based guidewire intravascular imaging
US9351081B2 (en) * 2013-02-27 2016-05-24 Texas Instruments Incorporated Capacitive micromachined ultrasonic transducer (CMUT) with through-substrate via (TSV) substrate plug
EP3229979B1 (en) * 2014-12-11 2018-04-04 Koninklijke Philips N.V. Catheter transducer with staggered columns of micromachined ultrasonic transducers
CN107735032B (zh) 2015-07-02 2021-09-21 皇家飞利浦有限公司 多模式电容式微加工超声换能器以及相关联的设备、系统和方法
CN109311055B (zh) 2016-06-13 2021-06-29 皇家飞利浦有限公司 宽带超声换能器
US20180180724A1 (en) * 2016-12-26 2018-06-28 Nxp Usa, Inc. Ultrasonic transducer integrated with supporting electronics
WO2019002231A1 (en) 2017-06-30 2019-01-03 Koninklijke Philips N.V. INTRALUMINAL ULTRASONIC IMAGING DEVICE COMPRISING A SUBSTRATE SEPARATED IN A PLURALITY OF SPACED SEGMENTS, INTRALUMINAL ULTRASONIC IMAGING DEVICE COMPRISING A TRENCH, AND METHOD OF MANUFACTURING
JP7180129B2 (ja) * 2018-06-06 2022-11-30 セイコーエプソン株式会社 超音波装置および電子機器
CN109759306B (zh) * 2019-02-03 2020-11-13 中国科学院微电子研究所 超声换能器阵列结构及其制备方法
DE102019214261B3 (de) * 2019-09-19 2020-08-20 Robert Bosch Gmbh Herstellungsverfahren für ein mikromechanisches System und mikromechanisches System
EP3909692A1 (en) * 2020-05-14 2021-11-17 Koninklijke Philips N.V. An ultrasound transducer and a tiled array of ultrasound transducers
EP3909691A1 (en) * 2020-05-14 2021-11-17 Koninklijke Philips N.V. An ultrasound transducer and a tiled array of ultrasound transducers
DE102022122821A1 (de) 2022-09-08 2024-03-14 Infineon Technologies Ag Sensorvorrichtungen mit akustischem Koppelmedium und zugehörige Herstellungsverfahren

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Publication number Priority date Publication date Assignee Title
RU2117415C1 (ru) * 1994-05-31 1998-08-10 Шанаурин Александр Михайлович Электростатический конденсаторный преобразователь
JP4723732B2 (ja) * 2000-07-12 2011-07-13 セイコーインスツル株式会社 脈検出装置及び超音波診断装置
US6669644B2 (en) * 2001-07-31 2003-12-30 Koninklijke Philips Electronics N.V. Micro-machined ultrasonic transducer (MUT) substrate that limits the lateral propagation of acoustic energy
US6659954B2 (en) * 2001-12-19 2003-12-09 Koninklijke Philips Electronics Nv Micromachined ultrasound transducer and method for fabricating same
US7303530B2 (en) * 2003-05-22 2007-12-04 Siemens Medical Solutions Usa, Inc. Transducer arrays with an integrated sensor and methods of use
JP4123192B2 (ja) * 2004-06-03 2008-07-23 セイコーエプソン株式会社 超音波トランスデューサ、および超音波トランスデューサの製造方法
US7037746B1 (en) * 2004-12-27 2006-05-02 General Electric Company Capacitive micromachined ultrasound transducer fabricated with epitaxial silicon membrane
ITRM20050093A1 (it) * 2005-03-04 2006-09-05 Consiglio Nazionale Ricerche Procedimento micromeccanico superficiale di fabbricazione di trasduttori ultracustici capacitivi microlavorati e relativo trasduttore ultracustico capacitivo microlavorato.
US20080304729A1 (en) * 2005-04-25 2008-12-11 Koninklijke Philips Electronics, N.V. Method and Apparatus for Continuous Imaging by Ultrasound Transducer System
US7615834B2 (en) * 2006-02-28 2009-11-10 The Board Of Trustees Of The Leland Stanford Junior University Capacitive micromachined ultrasonic transducer(CMUT) with varying thickness membrane
JP4804961B2 (ja) * 2006-03-03 2011-11-02 オリンパスメディカルシステムズ株式会社 超音波振動子及びそれを搭載した体腔内超音波診断装置
US7741686B2 (en) * 2006-07-20 2010-06-22 The Board Of Trustees Of The Leland Stanford Junior University Trench isolated capacitive micromachined ultrasonic transducer arrays with a supporting frame
JP4800170B2 (ja) * 2006-10-05 2011-10-26 株式会社日立製作所 超音波トランスデューサおよびその製造方法
JP4885779B2 (ja) * 2007-03-29 2012-02-29 オリンパスメディカルシステムズ株式会社 静電容量型トランスデューサ装置及び体腔内超音波診断システム
US8641628B2 (en) * 2007-09-26 2014-02-04 Siemens Medical Solutions Usa, Inc. Aperture synthesis using cMUTs
US7843022B2 (en) * 2007-10-18 2010-11-30 The Board Of Trustees Of The Leland Stanford Junior University High-temperature electrostatic transducers and fabrication method
US9132693B2 (en) * 2008-09-16 2015-09-15 Koninklijke Philps N.V. Capacitive micromachine ultrasound transducer
US20100173437A1 (en) * 2008-10-21 2010-07-08 Wygant Ira O Method of fabricating CMUTs that generate low-frequency and high-intensity ultrasound
JP5495918B2 (ja) * 2009-07-24 2014-05-21 キヤノン株式会社 電気機械変換装置、及び電気機械変換装置の作製方法
KR101593994B1 (ko) * 2009-09-04 2016-02-16 삼성전자주식회사 고출력 초음파 트랜스듀서
EP2455133A1 (en) * 2010-11-18 2012-05-23 Koninklijke Philips Electronics N.V. Catheter comprising capacitive micromachined ultrasonic transducers with an adjustable focus
EP2688686B1 (en) * 2011-03-22 2022-08-17 Koninklijke Philips N.V. Ultrasonic cmut with suppressed acoustic coupling to the substrate
WO2013057642A1 (en) * 2011-10-17 2013-04-25 Koninklijke Philips Electronics N.V. Through-wafer via device and method of manufacturing the same
CN103906579B (zh) * 2011-10-28 2016-08-24 皇家飞利浦有限公司 一种预塌陷电容式微加工换能器单元及其制造方法
RU2603518C2 (ru) * 2011-10-28 2016-11-27 Конинклейке Филипс Н.В. Предварительно сжатая ячейка емкостного микрообработанного преобразователя с напряженным слоем
CN104023860B (zh) * 2011-12-20 2016-06-15 皇家飞利浦有限公司 超声换能器设备及制造所述超声换能器设备的方法
RU2618731C2 (ru) * 2012-01-27 2017-05-11 Конинклейке Филипс Н.В. Емкостной преобразователь, полученный микрообработкой, и способ его изготовления
EP2922707B1 (en) * 2012-11-20 2022-04-27 Koninklijke Philips N.V. Capacitive micro-machined transducer and method of manufacturing the same

Also Published As

Publication number Publication date
BR112014014911A2 (pt) 2017-06-13
CN104023860B (zh) 2016-06-15
RU2014129830A (ru) 2016-02-10
US20140307528A1 (en) 2014-10-16
EP2750806A1 (en) 2014-07-09
WO2013093728A1 (en) 2013-06-27
RU2607720C2 (ru) 2017-01-10
CN104023860A (zh) 2014-09-03
US10835922B2 (en) 2020-11-17
EP2750806B1 (en) 2019-05-08
US9802224B2 (en) 2017-10-31
JP6069798B2 (ja) 2017-02-01
JP2015509304A (ja) 2015-03-26
US20180029077A1 (en) 2018-02-01

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