IN2014CN03499A - - Google Patents

Info

Publication number
IN2014CN03499A
IN2014CN03499A IN3499CHN2014A IN2014CN03499A IN 2014CN03499 A IN2014CN03499 A IN 2014CN03499A IN 3499CHN2014 A IN3499CHN2014 A IN 3499CHN2014A IN 2014CN03499 A IN2014CN03499 A IN 2014CN03499A
Authority
IN
India
Prior art keywords
detector
surface layer
tile
primary substrate
pixels
Prior art date
Application number
Inventor
Tiemen Poorter
Ronald Dekker
Vincent Adrianus Henneken
Nicolaas Johannes Anthonius Van Veen
Original Assignee
Koninkl Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Nv filed Critical Koninkl Philips Nv
Publication of IN2014CN03499A publication Critical patent/IN2014CN03499A/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01TMEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16Measuring radiation intensity
    • G01T1/17Circuit arrangements not adapted to a particular type of detector
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01TMEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16Measuring radiation intensity
    • G01T1/20Measuring radiation intensity with scintillation detectors
    • G01T1/2018Scintillation-photodiode combinations
    • G01T1/20182Modular detectors, e.g. tiled scintillators or tiled photodiodes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01TMEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16Measuring radiation intensity
    • G01T1/20Measuring radiation intensity with scintillation detectors
    • G01T1/208Circuits specially adapted for scintillation detectors, e.g. for the photo-multiplier section
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01TMEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16Measuring radiation intensity
    • G01T1/24Measuring radiation intensity with semiconductor detectors
    • G01T1/243Modular detectors, e.g. arrays formed from self contained units
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01TMEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/29Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
    • G01T1/2914Measurement of spatial distribution of radiation
    • G01T1/2921Static instruments for imaging the distribution of radioactivity in one or two dimensions; Radio-isotope cameras
    • G01T1/2928Static instruments for imaging the distribution of radioactivity in one or two dimensions; Radio-isotope cameras using solid state detectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14683Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
    • H01L27/14687Wafer level processing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Power Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Biochemistry (AREA)
  • Electromagnetism (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measurement Of Radiation (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)

Abstract

The present invention relates to a detector tile a detector panel arrangement an X ray detector an X ray imaging system and a method for providing a detector tile for a seamless detector surface with a continuous pixel array. In order to build a large area detector with reduced gap appearance a detector tile (30) is provided having a flat primary substrate (32) and a surface layer (34) with a circuitry arrangement (36). The surface layer is arranged on a front side (38) of the primary substrate covering the primary substrate. The circuitry arrangement comprises a number of detector pixels (40) providing a pixel array (42) wherein at least one connection opening (44) is provided in the surface layer and the flat primary substrate at least at one edge of the detector tile which connection opening is leading from the surface layer to the rear of the substrate for guiding electrical connection elements between the front side and the rear of the detector tiles. At all circumferential edges of the detector tile the surface layer comprises at least portions (46) with pixels which portions extend to the edge.
IN3499CHN2014 2011-11-08 2012-11-06 IN2014CN03499A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201161556870P 2011-11-08 2011-11-08
PCT/IB2012/056176 WO2013068912A1 (en) 2011-11-08 2012-11-06 Seamless tiling to build a large detector

Publications (1)

Publication Number Publication Date
IN2014CN03499A true IN2014CN03499A (en) 2015-10-09

Family

ID=47226243

Family Applications (1)

Application Number Title Priority Date Filing Date
IN3499CHN2014 IN2014CN03499A (en) 2011-11-08 2012-11-06

Country Status (6)

Country Link
US (1) US9513384B2 (en)
EP (1) EP2745142B1 (en)
JP (1) JP6100791B2 (en)
CN (1) CN103917896B (en)
IN (1) IN2014CN03499A (en)
WO (1) WO2013068912A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6478538B2 (en) * 2014-09-10 2019-03-06 キヤノン株式会社 Radiation imaging apparatus and radiation imaging system
CZ2015318A3 (en) 2015-05-12 2016-07-20 Advacam S.R.O. Ionizing radiation detector module
EP3353576B1 (en) * 2015-09-24 2020-07-01 Prismatic Sensors AB Modular x-ray detector
EP3346296B1 (en) * 2017-01-10 2021-10-27 Oxford Instruments Technologies Oy A semiconductor radiation detector
US20190353805A1 (en) * 2018-05-21 2019-11-21 General Electric Company Digital x-ray detector having polymeric substrate
DE102020213171A1 (en) 2020-10-19 2022-04-21 Siemens Healthcare Gmbh X-ray detector module and method of providing an X-ray detector module
US11647973B2 (en) * 2021-05-04 2023-05-16 Siemens Medical Solutions Usa, Inc. Three-dimensional tileable gamma ray detector

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4891522A (en) 1988-10-11 1990-01-02 Microtronics Associates, Inc. Modular multi-element high energy particle detector
US5629524A (en) 1995-02-21 1997-05-13 Advanced Scientific Concepts, Inc. High speed crystallography detector
US6204087B1 (en) 1997-02-07 2001-03-20 University Of Hawai'i Fabrication of three-dimensional architecture for solid state radiation detectors
US6853411B2 (en) * 2001-02-20 2005-02-08 Eastman Kodak Company Light-producing high aperture ratio display having aligned tiles
AU2003209622A1 (en) 2002-03-03 2003-10-13 Interon As Pixel sensor array and method of manufacture thereof
CN1230693C (en) * 2002-11-26 2005-12-07 张亚美 Small area pixel electrode direct plane plate X-ray detector
US7170049B2 (en) * 2003-12-30 2007-01-30 Dxray, Inc. Pixelated cadmium zinc telluride based photon counting mode detector
US20050286682A1 (en) 2004-06-29 2005-12-29 General Electric Company Detector for radiation imaging systems
US20060192087A1 (en) * 2005-02-28 2006-08-31 Real Time Radiography Ltd. Two-dimensional CMOS-based flat panel imaging sensor
JP5070637B2 (en) * 2005-12-07 2012-11-14 株式会社アクロラド Radiation image detection module
JP5172267B2 (en) * 2007-10-09 2013-03-27 富士フイルム株式会社 Imaging device
JP4808760B2 (en) * 2008-11-19 2011-11-02 浜松ホトニクス株式会社 Manufacturing method of radiation detector
WO2010058335A2 (en) 2008-11-21 2010-05-27 Koninklijke Philips Electronics N.V. Assembly method for a tiled radiation detector
JP2011163868A (en) * 2010-02-08 2011-08-25 Hitachi Cable Ltd Radiation detection module
CN102445703A (en) * 2010-10-12 2012-05-09 上海生物医学工程研究中心 Photoelectric sensing detector based on seamless splicing and manufacturing method thereof

Also Published As

Publication number Publication date
JP6100791B2 (en) 2017-03-22
EP2745142A1 (en) 2014-06-25
US9513384B2 (en) 2016-12-06
US20140307850A1 (en) 2014-10-16
CN103917896B (en) 2017-08-15
JP2015506117A (en) 2015-02-26
WO2013068912A1 (en) 2013-05-16
EP2745142B1 (en) 2021-03-17
CN103917896A (en) 2014-07-09

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