IN2012DN02446A - - Google Patents

Download PDF

Info

Publication number
IN2012DN02446A
IN2012DN02446A IN2446DEN2012A IN2012DN02446A IN 2012DN02446 A IN2012DN02446 A IN 2012DN02446A IN 2446DEN2012 A IN2446DEN2012 A IN 2446DEN2012A IN 2012DN02446 A IN2012DN02446 A IN 2012DN02446A
Authority
IN
India
Prior art keywords
substrate
edge
coating
path
laser beam
Prior art date
Application number
Inventor
Catalano Michael
P Murphy Stephen
Diderich Steve
Original Assignee
First Solar Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by First Solar Inc filed Critical First Solar Inc
Publication of IN2012DN02446A publication Critical patent/IN2012DN02446A/en

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • H10F71/137Batch treatment of the devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03Observing, e.g. monitoring, the workpiece
    • B23K26/032Observing, e.g. monitoring, the workpiece using optical means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03Observing, e.g. monitoring, the workpiece
    • B23K26/034Observing the temperature of the workpiece
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/082Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/083Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0853Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/16Removal of by-products, e.g. particles or vapours produced during treatment of a workpiece
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/40Removing material taking account of the properties of the material involved
    • B23K26/402Removing material taking account of the properties of the material involved involving non-metallic material, e.g. isolators
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50Working by transmitting the laser beam through or within the workpiece
    • B23K26/57Working by transmitting the laser beam through or within the workpiece the laser beam entering a face of the workpiece from which it is transmitted through the workpiece material to work on a different workpiece face, e.g. for effecting removal, fusion splicing, modifying or reforming
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F19/00Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
    • H10F19/30Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells
    • H10F19/31Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells having multiple laterally adjacent thin-film photovoltaic cells deposited on the same substrate
    • H10F19/33Patterning processes to connect the photovoltaic cells, e.g. laser cutting of conductive or active layers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00Articles made by soldering, welding or cutting
    • B23K2101/34Coated articles, e.g. plated or painted; Surface treated articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00Articles made by soldering, welding or cutting
    • B23K2101/36Electric or electronic devices
    • B23K2101/40Semiconductor devices
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Laser Beam Processing (AREA)
  • Photovoltaic Devices (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Removal Of Insulation Or Armoring From Wires Or Cables (AREA)

Abstract

A method for removing coating from a substrate, the method comprising: locating an edge of a substrate; directing a laser beam along a first path to a first position on a surface of the substrate proximate to an edge of the substrate at an angle of incidence suitable to redirect the laser beam along a second path, through the substrate, to a second position on a second surface of the substrate corresponding to the located edge of the substrate, the second surface comprising a coating; and ablating at least a portion of coating at the second position on the second surface of the substrate.
IN2446DEN2012 2009-09-22 2010-09-21 IN2012DN02446A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US24452409P 2009-09-22 2009-09-22
PCT/US2010/049657 WO2011037921A1 (en) 2009-09-22 2010-09-21 System and method for tracking and removing coating from an edge of a substrate

Publications (1)

Publication Number Publication Date
IN2012DN02446A true IN2012DN02446A (en) 2015-08-21

Family

ID=43796168

Family Applications (1)

Application Number Title Priority Date Filing Date
IN2446DEN2012 IN2012DN02446A (en) 2009-09-22 2010-09-21

Country Status (7)

Country Link
US (1) US8334162B2 (en)
EP (1) EP2480342B1 (en)
CN (1) CN102655949B (en)
IN (1) IN2012DN02446A (en)
MY (1) MY160582A (en)
TW (1) TWI513016B (en)
WO (1) WO2011037921A1 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110308610A1 (en) * 2010-06-18 2011-12-22 Primestar Solar System and method for modifying an article and a modified article
US9024233B2 (en) 2011-11-30 2015-05-05 First Solar, Inc. Side edge cleaning methods and apparatus for thin film photovoltaic devices
US9146207B2 (en) 2012-01-10 2015-09-29 Hzo, Inc. Methods, apparatuses and systems for sensing exposure of electronic devices to moisture
AU2013208273B2 (en) 2012-01-10 2015-11-26 Hzo, Inc. Methods, apparatuses and systems for monitoring for exposure of electronic devices to moisture and reacting to exposure of electronic devices to moisture
US20130206738A1 (en) * 2012-02-10 2013-08-15 First Solar, Inc. In situ inductive ablation meter
US9894776B2 (en) 2013-01-08 2018-02-13 Hzo, Inc. System for refurbishing or remanufacturing an electronic device
KR102253463B1 (en) * 2013-01-08 2021-05-18 에이치제트오 인코포레이티드 Masking substrates for application of protective coatings
US10449568B2 (en) 2013-01-08 2019-10-22 Hzo, Inc. Masking substrates for application of protective coatings
US9908201B2 (en) * 2014-04-22 2018-03-06 Taiwan Semiconductor Manufacturing Company Limited Systems and methods for edge bead removal
US9899546B2 (en) 2014-12-05 2018-02-20 Tesla, Inc. Photovoltaic cells with electrodes adapted to house conductive paste
NL2021701B1 (en) * 2018-09-25 2020-05-07 Suss Microtec Lithography Gmbh Edge bead removal system and method of treating a substrate

Family Cites Families (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US268963A (en) * 1882-12-12 Speeding device for stamp-mills
US127824A (en) * 1872-06-11 Improvement in wheels for vehicles
US189013A (en) * 1877-04-03 Improvement in knob-latches
US265497A (en) * 1882-10-03 Half to edward w
US77805A (en) * 1868-05-12 Gustaye de villepojx
US234564A (en) * 1880-11-16 Mold for pressed glassware
US20087A (en) * 1858-04-27 Improvement in envelopes for letters
US159634A (en) * 1875-02-09 Improvement in brick-machines
US4931152A (en) * 1984-11-19 1990-06-05 Avco Corporation Method for imparting erosion-resistance to metallic substrate
US6265328B1 (en) 1998-01-30 2001-07-24 Silicon Genesis Corporation Wafer edge engineering method and device
JP2000052071A (en) * 1998-08-04 2000-02-22 Sumitomo Heavy Ind Ltd Film removing method using laser lights
US6413839B1 (en) 1998-10-23 2002-07-02 Emcore Corporation Semiconductor device separation using a patterned laser projection
US6660643B1 (en) * 1999-03-03 2003-12-09 Rwe Schott Solar, Inc. Etching of semiconductor wafer edges
DE19933703B4 (en) * 1999-04-07 2005-07-28 Shell Solar Gmbh Device and method for removing layers on a solar cell
AU4712400A (en) * 1999-05-14 2000-12-05 3M Innovative Properties Company Ablation enhancement layer
US6255621B1 (en) 2000-01-31 2001-07-03 International Business Machines Corporation Laser cutting method for forming magnetic recording head sliders
US6423565B1 (en) * 2000-05-30 2002-07-23 Kurt L. Barth Apparatus and processes for the massproduction of photovotaic modules
US6559411B2 (en) * 2001-08-10 2003-05-06 First Solar, Llc Method and apparatus for laser scribing glass sheet substrate coatings
US6874510B2 (en) 2003-02-07 2005-04-05 Lsi Logic Corporation Method to use a laser to perform the edge clean operation on a semiconductor wafer
DE10318681B4 (en) 2003-04-24 2006-07-06 Schott Ag Method and device for removing an edge region of a substrate layer and for substrate coating and substrate
US20050189013A1 (en) * 2003-12-23 2005-09-01 Oliver Hartley Process for manufacturing photovoltaic cells
US20050268963A1 (en) * 2004-02-24 2005-12-08 David Jordan Process for manufacturing photovoltaic cells
KR100719367B1 (en) * 2005-06-24 2007-05-17 삼성전자주식회사 Semiconductor manufacturing apparatus and wafer processing method
US7262115B2 (en) * 2005-08-26 2007-08-28 Dynatex International Method and apparatus for breaking semiconductor wafers
IL174003A0 (en) 2006-02-28 2006-08-01 Shafir Production Systems Ltd A method and apparatus for producing blades
DE102006033296A1 (en) * 2006-07-17 2008-01-31 Manz Automation Ag Plant for structuring solar modules
US20080029152A1 (en) * 2006-08-04 2008-02-07 Erel Milshtein Laser scribing apparatus, systems, and methods
KR20090047388A (en) * 2007-08-31 2009-05-12 어플라이드 머티어리얼스, 인코포레이티드 Production line modules for forming photovoltaic devices of various sizes
US20090212030A1 (en) * 2008-02-25 2009-08-27 Optisolar, Inc., A Delaware Corporation Autofocus for Ablation Laser
CN101527328B (en) * 2008-03-05 2012-03-14 鸿富锦精密工业(深圳)有限公司 Solar cell and manufacturing method thereof
DE202008006110U1 (en) * 2008-05-03 2008-10-16 4Jet Sales + Service Gmbh Device for edge deletion in large-area solar cells
US8071420B2 (en) * 2008-12-19 2011-12-06 Applied Materials, Inc. Edge film removal process for thin film solar cell applications
US20100184244A1 (en) * 2009-01-20 2010-07-22 SunPrint, Inc. Systems and methods for depositing patterned materials for solar panel production
US8111390B2 (en) 2009-04-17 2012-02-07 Applied Materials, Inc. Method and apparatus for residue detection in the edge deleted area of a substrate

Also Published As

Publication number Publication date
EP2480342A4 (en) 2017-08-02
US20110095004A1 (en) 2011-04-28
TWI513016B (en) 2015-12-11
EP2480342B1 (en) 2021-02-24
TW201133876A (en) 2011-10-01
WO2011037921A1 (en) 2011-03-31
CN102655949B (en) 2014-08-06
US8334162B2 (en) 2012-12-18
CN102655949A (en) 2012-09-05
EP2480342A1 (en) 2012-08-01
MY160582A (en) 2017-03-15

Similar Documents

Publication Publication Date Title
IN2012DN02446A (en)
WO2012173770A3 (en) Multi-step and asymmetrically shaped laser beam scribing
EP4372107A3 (en) Laser ablation and processing methods and systems
WO2008014332A3 (en) Methods and apparatuses for directing an ion beam source
WO2013050855A3 (en) Apparatus for and method of laser cleaning of coated materials prior to welding
PH12013501380A1 (en) Beam processor
WO2009148861A3 (en) Method for manufacturing electrochromic devices
WO2012005454A3 (en) Glass substrate cutting system using laser
WO2008140818A3 (en) Method and apparatus for scoring and separating a brittle material with a single beam of radiation
WO2010118231A3 (en) Techniques for processing a substrate
GB0804195D0 (en) Methods and systems for positioning a laser beam spot relative to a semiconductor integrated circuit using a processing target as a metrology target
WO2008114470A1 (en) Method for cutting plastic substrate, and apparatus for cutting plastic substrate
WO2009157994A3 (en) Glass sheet cutting by laser-guided gyrotron beam
TW200602144A (en) Laser processing method and semiconductor chip
WO2009153792A3 (en) Light induced patterning
TW201613710A (en) Method and device for laser-based machining of planar, crystalline substrates, in particular of semiconductor substrates
WO2010093568A3 (en) Non-contact substrate processing
JP2016540248A5 (en)
WO2011087984A3 (en) Switchable neutral beam source
WO2014020421A3 (en) Method and system for narrow groove welding using laser and hot-wire system
TW200613228A (en) Device, system and method for cutting, cleaving or separating a substrate material
EP3776669A4 (en) Local metallization for semiconductor substrates using a laser beam
WO2015031435A3 (en) Method of separating a glass sheet from a carrier
WO2012166265A3 (en) Apparatus and methods for dry etch with edge, side and back protection
WO2010030645A3 (en) Techniques for manufacturing solar cells