DE202008006110U1 - Device for edge deletion in large-area solar cells - Google Patents

Device for edge deletion in large-area solar cells

Info

Publication number
DE202008006110U1
DE202008006110U1 DE202008006110U DE202008006110U DE202008006110U1 DE 202008006110 U1 DE202008006110 U1 DE 202008006110U1 DE 202008006110 U DE202008006110 U DE 202008006110U DE 202008006110 U DE202008006110 U DE 202008006110U DE 202008006110 U1 DE202008006110 U1 DE 202008006110U1
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DE
Germany
Prior art keywords
laser
solar cell
characterized
device according
scanner
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE202008006110U
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German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
4JET MICTROTECH GMBH & CO. KG, DE
Original Assignee
4JET Sales and Service GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 4JET Sales and Service GmbH filed Critical 4JET Sales and Service GmbH
Priority to DE202008006110U priority Critical patent/DE202008006110U1/en
Publication of DE202008006110U1 publication Critical patent/DE202008006110U1/en
Anticipated expiration legal-status Critical
Application status is Expired - Lifetime legal-status Critical

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/16Removal of by-products, e.g. particles or vapours produced during treatment of a workpiece
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/40Removing material taking account of the properties of the material involved
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50Working by transmitting the laser beam through or within the workpiece
    • B23K26/57Working by transmitting the laser beam through or within the workpiece the laser beam entering a face of the workpiece from which it is transmitted through the workpiece material to work on a different workpiece face, e.g. for effecting removal, fusion splicing, modifying or reforming
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L31/00Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus peculiar to the manufacture or treatment of these devices or of parts thereof
    • H01L31/186Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L31/00Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus peculiar to the manufacture or treatment of these devices or of parts thereof
    • H01L31/20Processes or apparatus peculiar to the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials
    • H01L31/208Particular post-treatment of the devices, e.g. annealing, short-circuit elimination
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/16Composite materials, e.g. fibre reinforced
    • B23K2103/166Multilayered materials
    • B23K2103/172Multilayered materials wherein at least one of the layers is non-metallic
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/50Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product
    • Y02P70/52Manufacturing of products or systems for producing renewable energy
    • Y02P70/521Photovoltaic generators

Abstract

contraption for removing layers on glass by means of laser radiation at a Thin-film solar cell, in particular for producing a insulating edge, in which a Q-switched, diode-pumped Neodymium laser is used and when using the radiation of the laser Focal spots are generated on the layer, which are aligned by a two-axis scanner, so that in a limited field, a surface removal takes place characterized in that laser, scanner and focusing optics as compact unit are mounted on a linear axis, and at the Edge stripping the relative movement between scanner field and solar cell to one by moving the unit on the linear axis transverse to the transfer direction at fixed position of the solar cell and the other by back and forth Returning the solar cell by means of the transfer system takes place at a fixed position of the unit.

Description

  • task
  • In the industrial production of thin-film solar cells, glass panes are predominantly used as substrate carriers. These discs currently have a surface area of 0.5 m 2 to 6 m 2 with up to 60 m 2 of surface area in the project planning.
  • in the Passing process involving several different physical and chemical processes, a layer system is applied to these disks applied, in which the conversion of solar energy into electrical Energy takes place. The layer system has a metallic layer as a conductor, a semiconductive layer, in the light of exposure to light the separation of the charge carriers takes place and a translucent, electrically conductive Metal oxide layer (TCO). The layers are homogeneous over applied the entire surface. The layer thicknesses are in the μm range.
  • The The voltage generated by the layer system is in the range 0.5-1 Volt. By longitudinal grooves of different depths, the layer system divided into strips on the disk and electrically connected in series connected so that the output from the disc voltage up to 100V added. At the edge of the disc is this tension at. It must therefore be ensured that there is none there Losses by ground fault comes. Therefore, the solar cell must be comprehensive an insulating edge with a width of about one centimeter in which the layer system remains residue-free from the glass substrate is removed, d. H. without the slightest residues of conductive materials. The insulation resistance must be in the gigaohm range.
  • State of the art
  • For this edge deletion usually a special sandblasting method is used, in which a fine compressed air jet with abrasive medium along the edge of the solar cell is performed. The basically simple procedure can fulfill the task. However, it has the following disadvantages.
    • - The sandblasting process can induce micro-cracks in the glass substrate, which leads to the ingress of moisture and thus failure of the solar cell under the weather and temperature conditions in the field.
    • - Despite elaborate suction devices, it is not possible to quantitatively detect the blasting material during blasting. The plant therefore represents a source of dust in the production area of the solar cell. This is in contrast to the clean room conditions that otherwise prevail in solar cell production.
    • - The blasting material is loaded by the layer material separated from the solar cells. In part, these are highly toxic materials such as cadmium compounds. When the blasting material is renewed, these problematic materials are dragged off, resulting in a relatively large amount of problematic waste.
    • - Sandblasting does not create a sharp edge between the solar active and the stripped zone. This leads to the reduction of the usable solar area and thus to the reduction of the efficiency.
  • In the patent DE 199 33 703 B4 of 28.07.2005 a device and a method is described in which, bypassing the mentioned disadvantages, the edge deletion is carried out by means of pulsed laser radiation.
  • in this connection For edge deletion, this is the result of many applications (eg cleaning of works of art or vulcanizing tools) known methods of Laser ablation used. In this case, the layer to be removed with irradiated a short laser pulse. This increases in the impact zone the temperature abruptly. this leads to for local flaking of the material due to thermal stresses and induced shock waves.
  • Accordingly, in the preamble of said patent specification, the following well-known features are mentioned as prior art:
    • - The generation of the pulsed laser radiation by Q-switching of the resonator.
    • - The use of a laser beam with a substantially homogeneous intensity distribution
    • - An adjusting device for generating a relative movement between the laser beam and the solar cell
    • - Another adjusting device for setting a constant machining angle
  • In the description of the method and in the claims, the following parameters are mentioned as essential for processing: laser type Nd-YAG Surface of the machining beam mm to a few mm 2 Energy pulse density about 1 J / cm 2 pulse duration 25-100 ns traversing the adjusting device 1 cm / s pulse frequency 50 Hz
  • Currently Typical thin-film solar cells are rectangular and have about 4 m circumference. The tact time for the production of such Cells is 40-60 seconds.
  • In the described method is referred to as the traversing speed of the adjusting device 1 cm / s. This results in 400 s processing time for the 4 m long edge. A corresponding value is also obtained, if one starts from 2 mm 2 working surface of the laser, 50 Hz pulse frequency. If it is possible to place the processing surfaces without gaps and without overlap, then an area rate of 100 mm 2 / s corresponds to 1 cm 2 / s. For a 1 cm wide edge, the area to be coated is 400 cm 2 ; accordingly, the cycle time 400 s.
  • from that follows that in a current production line to Solution of the stripping task 10 laser systems this Kind would be required.
  • This applies to solar cells with approx. 0.9 m 2 area. There are already production facilities for 6 m 2 solar cells and there may be even larger cells in the future. There is therefore an urgent need for systems that deliver significantly higher area services and allow the processing of large-area cells.
  • Description of the device
  • in the The following is a device for edge deletion of thin-film solar cells which is also based on the principle of laser ablation, but at a similar cost a multiple higher Application allowed. In addition, the device also suitable for solar cells with length dimensions of to work several meters.
  • The Laser light source in the plant is a diode-pumped neodymium-vanadate laser. The laser has a plate-shaped as an active medium Crystal, which is pumped frontally. The stable / unstable hybrid resonator with internal electro-optical Q-switch enabled Jet characteristics, which are especially for the task are suitable. First, the beam has a rectangular cross-section with relatively sharp edges and more uniform Intensity distribution. On the other hand, the short resonator in conjunction with an el. opt. Modulator intensive Pulses that are only 10 ns long. Typically, the laser is with 50 kHz repetition rate and 400-600 W average power operated.
  • The rectangular beam exit at the laser is depicted as a reduced rectangle with a surface area of approx. 0.3 mm 2 on the surface layer to be processed. Pulse by pulse is lined up rectangle by rectangle using a two-axis galvo scanner. Thanks to the relatively sharp edges of the rectangles, so a gapless coverage can be achieved without large overlap losses. The scanner typically processes a 10 × 10 mm 2 field. Superimposed on the fast scanner movement, is a much slower relative movement between the processed field and the solar cell.
  • In the pictures 1 and 2 the attachment is shown. 1 schematically shows a perspective view of the plant.
  • In the housing of the laser station 1 are the pulsed neodymium-vanadate laser, the 2-axis galvo scanner and the focusing optics.
  • The dimensions of the housing are L × W × H = 1200 × 500 × 450 mm 3 . It is completely closed and has only one opening for the jet exit and connections for supply and control lines of laser and scanner.
  • The solar cells 2 be with the coated side up by a belt conveyor 3 transported to the laser processing zone. The belt conveyor is in the two segments 3.1 and 3.2 divided, so that transversely to the transport direction, a free gap is formed.
  • There is the laser / scanner unit 1 on the carriage of a linear axis 1.1 mounted, which is arranged transversely to the conveying direction of the solar cell below the conveyor belt. When moving the linear axis, the laser beam can process the layer from behind along the gap unhindered from bottom to top through the glass pane.
  • As in 2 can be seen, located above the glass, a suction 4 with a funnel-shaped opening. This extraction nozzle is on a second linear axis 4.1 mounted, which is arranged above the conveyor belt. Laser unit and extraction nozzle are moved synchronously. As a result, the dissipated material is quantitatively recorded and via a flexible line 4.2 a suction unit 5 fed, which binds the sucked in vapors and dusts in a multi-stage particulate matter and adsorption.
  • The course of the boundary deletion is as follows:
    First, the solar cell 2 with the belt conveyor 3 delivered to the laser processing zone and stopped so that the front edge of the cell is above the free gap. Then, with the cell still, the laser / scanner unit becomes 1 with the transverse axis 1.1 proceed from left to right. The front edge is then stripped and the laser is on the right. The next step will be with a fixed laser station 1 the cell 2 with the belt conveyor 3 transported further. Now the right longitudinal edge is stripped. In the next two steps, the laser moves to the left and the cell back. After completion of the stripping, the cell can be discharged either through the station or backwards.
  • To ensure constant processing parameters, the distance between the lens and the cell surface must be kept to a precision of +/- 1 mm. Because of the thermal distortion caused by the production process and because of possible sagging due to its own weight, this requirement can not be met without further ado, in particular in the case of large solar cells. Therefore, there is a distance sensor 6 together with the suction nozzle 4 on the linear axis 4.1 , Deviations of the cell from the planarity are thus determined. The signal of the sensor 6 controls an electromechanical actuator by moving the focusing lens within the unit 1 corrected the distance.
  • Across from The prior art offers the described system a number of improvements.
  • The 10 ns pulses of the described laser are significantly shorter as the pulses of the usual rod or disk laser comparable Average power. Because the laser ablation of the pulse power depends on the same energy, a short pulse is more efficient as a long one.
  • Of the for the hybrid resonator specific, almost homogeneous, rectangular cross section of the output beam can be with simple optical elements as a sharp-edged miniaturized Picture rectangle on the layer to be removed. This results when stacking the pulses much less overlap loss, as with the usual round laser beams with pronounced Mid maximum.
  • Due to these two factors, the selected laser achieves significantly better area performance than with conventional lasers. With 400 W average power up to 80 cm 2 / s are achieved in the edge deletion. This is far enough for the current size of the solar cell.
  • The Arrangement of the compact laser station on a linear axis in connection with the moving through the transfer system solar cell allows a very simple and robust optical design. In contrast to "flying optics" or transmission of radiation With fiber optics, remains in this structure, the laser spot over the entire object constant in size, shape, Alignment and intensity distribution.
  • at This arrangement is also the range of laser action exactly Are defined. This makes the suction very effective and inexpensive be designed. Also, the shielding of the laser area in terms of to endanger the environment much easier than at Arrangements with "flying" optics or fiber optics.
  • QUOTES INCLUDE IN THE DESCRIPTION
  • This list The documents listed by the applicant have been automated generated and is solely for better information recorded by the reader. The list is not part of the German Patent or utility model application. The DPMA takes over no liability for any errors or omissions.
  • Cited patent literature
    • - DE 19933703 B4 [0005]

Claims (9)

  1. Device for removing layers on glass by means of laser radiation in a thin-film solar cell, in particular for producing an insulating edge, in which a Q-switched, diode-pumped neodymium laser is used and in which with the radiation of the laser focal spots are produced on the layer, which by a two Axis scanners are juxtaposed, so that in a limited field, a surface removal is characterized in that laser, scanner and focusing optics are mounted as a compact unit on a linear axis, and in the edge deletion, the relative movement between scanner field and solar cell on the one hand by unit operation the linear axis takes place transversely to the transfer direction in a fixed position of the solar cell and on the other hand by driving back and forth of the solar cell by means of the transfer system at a fixed position of the unit.
  2. Device according to claim 1, characterized that the transfer system in the field of laser processing divided into two is, and thus leaves a gap free, within which the laser beam passes through the upper functional layer from below can work through the glass substrate.
  3. Device according to claims 1 and 2, characterized that there is a suction opening above the glass plate, which is guided by a second, overhead linear axis is moved in synchronism with the underlying laser unit which causes the blasted material throughout the stripping area is recorded quantitatively.
  4. Device according to claim 1, characterized that the distance between solar cell and focusing optics with a distance sensor is controlled, wherein in deviation from Setpoint the signal of the sensor for controlling an electromechanical Actuator is used, which tracks the focusing lens accordingly.
  5. Device according to claims 3 and 4, characterized that a laser triangulation sensor is used to measure the distance which is also guided by the overhead linear axis becomes.
  6. Device according to claim 1, characterized that the laser as an active medium a plate-shaped Neodymium vanadate crystal has, the front of gallium arsenide laser diodes is pumped and designed its resonator as a stable / unstable hybrid is, whereby the jet has a rectangular cross section with homogeneous Has intensity profile.
  7. Device according to claim 6, characterized that as a Q-switch for the resonator a faster electro-optical modulator is used, reducing pulse durations of about 10 ns can be generated.
  8. Apparatus according to claim 6 and 7, characterized in that the laser is operated at about 50 kHz repetition rate, and the focusing optics is selected so that during a pulse in the focal spot on the layer at least 1 J / cm 2 energy density is present.
  9. Device according to claims 6, 7 and 8, characterized in that with the focusing optics the laser's rectangular beam on the layer a scaled down, rectangular focal spot with relatively sharp edges is generated and that this focal spot with the scanner pulse by pulse each offset by one edge length, with a possible small overlap between the focal spots becomes.
DE202008006110U 2008-05-03 2008-05-03 Device for edge deletion in large-area solar cells Expired - Lifetime DE202008006110U1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE202008006110U DE202008006110U1 (en) 2008-05-03 2008-05-03 Device for edge deletion in large-area solar cells

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009020365A1 (en) * 2009-05-07 2010-11-11 Jenoptik Automatisierungstechnik Gmbh Process for the production of thin-film solar cell modules with a predetermined transparency
DE102009021273A1 (en) 2009-05-14 2010-11-18 Schott Solar Ag Method and device for producing a photovoltaic thin-film module
ITUD20090105A1 (en) * 2009-05-27 2010-11-28 Applied Materials Inc fiber laser Application for a process of removal of the film edge in solar cell applications
CN102110745A (en) * 2010-12-20 2011-06-29 东莞宏威数码机械有限公司 Device and method for clearing edge of thin-film layer
CN102329085A (en) * 2010-06-18 2012-01-25 初星太阳能公司 System and method for modifying an article and a modified article
EP2481133A4 (en) * 2009-09-22 2017-08-02 First Solar, Inc System and method for removing coating from an edge of a substrate
EP2480342A4 (en) * 2009-09-22 2017-08-02 First Solar, Inc System and method for tracking and removing coating from an edge of a substrate

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19933703B4 (en) 1999-04-07 2005-07-28 Shell Solar Gmbh Device and method for removing layers on a solar cell

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19933703B4 (en) 1999-04-07 2005-07-28 Shell Solar Gmbh Device and method for removing layers on a solar cell

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009020365A1 (en) * 2009-05-07 2010-11-11 Jenoptik Automatisierungstechnik Gmbh Process for the production of thin-film solar cell modules with a predetermined transparency
DE102009021273A1 (en) 2009-05-14 2010-11-18 Schott Solar Ag Method and device for producing a photovoltaic thin-film module
ITUD20090105A1 (en) * 2009-05-27 2010-11-28 Applied Materials Inc fiber laser Application for a process of removal of the film edge in solar cell applications
WO2010136081A1 (en) * 2009-05-27 2010-12-02 Applied Materials, Inc. Fiber laser application for edge film removal process in solar cell applications
EP2481133A4 (en) * 2009-09-22 2017-08-02 First Solar, Inc System and method for removing coating from an edge of a substrate
EP2480342A4 (en) * 2009-09-22 2017-08-02 First Solar, Inc System and method for tracking and removing coating from an edge of a substrate
CN102329085A (en) * 2010-06-18 2012-01-25 初星太阳能公司 System and method for modifying an article and a modified article
EP2397450A3 (en) * 2010-06-18 2014-06-18 First Solar Malaysia SDN.BHD System and method for modifying a glass article
CN102110745A (en) * 2010-12-20 2011-06-29 东莞宏威数码机械有限公司 Device and method for clearing edge of thin-film layer

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