IN2012DN00672A - - Google Patents

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Publication number
IN2012DN00672A
IN2012DN00672A IN672DEN2012A IN2012DN00672A IN 2012DN00672 A IN2012DN00672 A IN 2012DN00672A IN 672DEN2012 A IN672DEN2012 A IN 672DEN2012A IN 2012DN00672 A IN2012DN00672 A IN 2012DN00672A
Authority
IN
India
Prior art keywords
frame
probe head
base
region
measurement point
Prior art date
Application number
Inventor
Bo Pettersson
Knut Siercks
Original Assignee
Leica Geosystems Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to EP09164602A priority Critical patent/EP2270425A1/en
Application filed by Leica Geosystems Ag filed Critical Leica Geosystems Ag
Priority to PCT/EP2010/059495 priority patent/WO2011000954A1/en
Publication of IN2012DN00672A publication Critical patent/IN2012DN00672A/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof in so far as they are not adapted to particular types of measuring means of the preceding groups
    • G01B21/02Measuring arrangements or details thereof in so far as they are not adapted to particular types of measuring means of the preceding groups for measuring length, width, or thickness
    • G01B21/04Measuring arrangements or details thereof in so far as they are not adapted to particular types of measuring means of the preceding groups for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/045Correction of measurements

Abstract

The present invention relates to a coordinate measuring machine (1) for determination of at least one spatial coordinate of a measurement point (13) on an object (12) to be measured. The coordinate measuring machine (1) comprises a stationary base (3), a probe head (6) for approaching the measurement point (13) and a frame structure (15) for linking the probe head (6) to the base (3). Thereby, the frame structure (15) comprises at least a first and a second frame component (14,22,24) and at least one linear drive mechanism (2) moveably linking the first and the second frame components (14,22,24), for provision of movability of the probe head (6) relative to the base (3) in a first direction (X,Y,Z). According to the invention, at least a first mechanical reference element (72) extending along a first part of the frame structure (15) is fastened fixedly to the frame structure (15) in a substantially unloaded way, and at least one displacement sensor (9,9a,9b) is assigned to the first reference element (72), wherein the first reference element (72) and the displacement sensor (9,9a,9b) are designed and arranged in such a way, that a distance from the first reference element (72) to the frame structure (15) in the region of the first part is measurable, the distance indicating a displacement and/or deformation of the frame structure (15) in the region of the first part. Fig. 6
IN672DEN2012 2009-07-03 2010-07-02 IN2012DN00672A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP09164602A EP2270425A1 (en) 2009-07-03 2009-07-03 Coordinate measuring machine (CMM) and method of compensating errors in a CMM
PCT/EP2010/059495 WO2011000954A1 (en) 2009-07-03 2010-07-02 Coordinate measuring machine (cmm) and method of compensating errors in a cmm

Publications (1)

Publication Number Publication Date
IN2012DN00672A true IN2012DN00672A (en) 2015-08-21

Family

ID=41398051

Family Applications (2)

Application Number Title Priority Date Filing Date
IN673DEN2012 IN2012DN00673A (en) 2009-07-03 2010-07-02
IN672DEN2012 IN2012DN00672A (en) 2009-07-03 2010-07-02

Family Applications Before (1)

Application Number Title Priority Date Filing Date
IN673DEN2012 IN2012DN00673A (en) 2009-07-03 2010-07-02

Country Status (6)

Country Link
US (2) US8537372B2 (en)
EP (3) EP2270425A1 (en)
CN (2) CN102472616B (en)
BR (2) BR112012000112B1 (en)
IN (2) IN2012DN00673A (en)
WO (2) WO2011000955A1 (en)

Families Citing this family (82)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006031580A1 (en) 2006-07-03 2008-01-17 Faro Technologies, Inc., Lake Mary Method and device for the three-dimensional detection of a spatial area
US8250772B2 (en) * 2008-02-07 2012-08-28 Eaton Homer L Spatial measurement and robotic arm device
US9551575B2 (en) 2009-03-25 2017-01-24 Faro Technologies, Inc. Laser scanner having a multi-color light source and real-time color receiver
DE102009015920B4 (en) 2009-03-25 2014-11-20 Faro Technologies, Inc. Device for optically scanning and measuring an environment
US8453337B2 (en) * 2009-06-02 2013-06-04 James Richard Lacy System and method for workpiece coordinate measurements
EP2270425A1 (en) * 2009-07-03 2011-01-05 Leica Geosystems AG Coordinate measuring machine (CMM) and method of compensating errors in a CMM
CH701868B1 (en) * 2009-09-07 2015-01-15 Tesa Sa Measuring machine of coordinates motorized manual programming and control method of such a machine.
US9113023B2 (en) 2009-11-20 2015-08-18 Faro Technologies, Inc. Three-dimensional scanner with spectroscopic energy detector
DE102009057101A1 (en) 2009-11-20 2011-05-26 Faro Technologies, Inc., Lake Mary Device for optically scanning and measuring an environment
US9529083B2 (en) 2009-11-20 2016-12-27 Faro Technologies, Inc. Three-dimensional scanner with enhanced spectroscopic energy detector
US8630314B2 (en) 2010-01-11 2014-01-14 Faro Technologies, Inc. Method and apparatus for synchronizing measurements taken by multiple metrology devices
JP5615382B2 (en) 2010-01-20 2014-10-29 ファロ テクノロジーズ インコーポレーテッド Portable articulated arm coordinate measuring machine using multibus arm technology
US9879976B2 (en) 2010-01-20 2018-01-30 Faro Technologies, Inc. Articulated arm coordinate measurement machine that uses a 2D camera to determine 3D coordinates of smoothly continuous edge features
DE112011100300T5 (en) 2010-01-20 2013-03-07 Faro Technologies, Inc. Integrated temperature measuring system for parts
US8898919B2 (en) 2010-01-20 2014-12-02 Faro Technologies, Inc. Coordinate measurement machine with distance meter used to establish frame of reference
US9628775B2 (en) 2010-01-20 2017-04-18 Faro Technologies, Inc. Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations
US9607239B2 (en) 2010-01-20 2017-03-28 Faro Technologies, Inc. Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations
US8875409B2 (en) 2010-01-20 2014-11-04 Faro Technologies, Inc. Coordinate measurement machines with removable accessories
US8615893B2 (en) 2010-01-20 2013-12-31 Faro Technologies, Inc. Portable articulated arm coordinate measuring machine having integrated software controls
JP2013539541A (en) 2010-09-08 2013-10-24 ファロ テクノロジーズ インコーポレーテッド Laser scanner or laser tracking device having a projector
US9163922B2 (en) 2010-01-20 2015-10-20 Faro Technologies, Inc. Coordinate measurement machine with distance meter and camera to determine dimensions within camera images
US8677643B2 (en) 2010-01-20 2014-03-25 Faro Technologies, Inc. Coordinate measurement machines with removable accessories
CN102782442A (en) 2010-01-20 2012-11-14 法罗技术股份有限公司 Coordinate measuring machine having an illuminated probe end and method of operation
US8832954B2 (en) 2010-01-20 2014-09-16 Faro Technologies, Inc. Coordinate measurement machines with removable accessories
KR101126808B1 (en) * 2010-03-02 2012-03-23 경북대학교 산학협력단 Error estimation method and device for multi-axis controlled machines
DE102010020925B4 (en) 2010-05-10 2014-02-27 Faro Technologies, Inc. Method for optically scanning and measuring an environment
US9168654B2 (en) 2010-11-16 2015-10-27 Faro Technologies, Inc. Coordinate measuring machines with dual layer arm
EP2472216B1 (en) * 2010-12-30 2013-08-14 Hexagon Metrology S.p.A. Coordinate measuring machine
EP2505956A1 (en) * 2011-03-29 2012-10-03 Hexagon Technology Center GmbH Coordinate measuring machine
CN102288143A (en) * 2011-04-28 2011-12-21 昆山双虎电子科技有限公司 High-passing performance three-coordinate measuring device
JP2012248098A (en) * 2011-05-30 2012-12-13 Okuma Corp Error compensation value calculation method for machine
US9671257B2 (en) * 2011-07-08 2017-06-06 Carl Zeiss Industrielle Messtechnik Gmbh Correcting and/or preventing errors during the measurement of coordinates of a workpiece
EP2557390B1 (en) * 2011-08-12 2019-05-22 Hexagon Metrology S.p.A. Measuring machine provided with a block of concrete having the function of foundation or machine bed, and method for compensating the measuring errors due to deformations of the block
CN103185546A (en) * 2011-12-30 2013-07-03 鸿富锦精密工业(深圳)有限公司 Width measuring method and system
DE102012100609A1 (en) 2012-01-25 2013-07-25 Faro Technologies, Inc. Device for optically scanning and measuring an environment
EP2820374B1 (en) 2012-03-02 2020-07-29 Hexagon Metrology, Inc Coordinate measuring machine with constrained counterweight
DE102012205599A1 (en) * 2012-04-04 2013-10-10 Carl Zeiss Industrielle Messtechnik Gmbh Reduction of errors of a rotating device in the determination of coordinates of a workpiece or in the machining of a workpiece
DE102012012197B4 (en) * 2012-05-02 2016-10-13 Wenzel Präzision GmbH Coordinate measuring machine and method for operating a coordinate measuring machine
US9062962B2 (en) * 2012-07-05 2015-06-23 Flextronics Ap, Llc Laser measurement system and method in a CNC machine
US8997362B2 (en) 2012-07-17 2015-04-07 Faro Technologies, Inc. Portable articulated arm coordinate measuring machine with optical communications bus
EP2687815A1 (en) 2012-07-20 2014-01-22 Hexagon Technology Center GmbH Measurement machine communication
EP2698596A1 (en) * 2012-08-16 2014-02-19 Hexagon Technology Center GmbH Method and system for determining spatial coordinates with a mobile coordinate measuring machine
JP6479309B2 (en) * 2012-08-20 2019-03-06 Dmg森精機株式会社 Scale device, position information generation method, and multi-axis stage device
US20140056705A1 (en) * 2012-08-21 2014-02-27 General Electric Company Load control system and method for wind turbine
US10218672B2 (en) 2012-09-05 2019-02-26 Hexagon Technology Center Gmbh Measuring machine communication with automatic address allocation
DE102012109481A1 (en) 2012-10-05 2014-04-10 Faro Technologies, Inc. Device for optically scanning and measuring an environment
US9513107B2 (en) 2012-10-05 2016-12-06 Faro Technologies, Inc. Registration calculation between three-dimensional (3D) scans based on two-dimensional (2D) scan data from a 3D scanner
US10067231B2 (en) 2012-10-05 2018-09-04 Faro Technologies, Inc. Registration calculation of three-dimensional scanner data performed between scans based on measurements by two-dimensional scanner
EP2735843A1 (en) * 2012-11-21 2014-05-28 Hexagon Technology Center GmbH Measuring machine and method for automated measurement of an object
CN103018505A (en) * 2012-12-04 2013-04-03 无锡圆方半导体测试有限公司 Probe correcting device
CN103017726B (en) * 2012-12-19 2014-12-31 华南理工大学 Robot pose error measuring system and method in Cartesian coordinate mode
EP2943743B1 (en) 2013-01-09 2020-04-01 Carl Zeiss Industrielle Messtechnik GmbH Arrangement for determining rotation errors of a rotating apparatus
JP6181935B2 (en) * 2013-02-14 2017-08-16 清野 慧 Coordinate measuring machine
CN103267461B (en) * 2013-06-09 2015-08-12 南京晨光集团有限责任公司 For the method for measurement space object repetitive positioning accuracy
CN104251676A (en) * 2013-06-28 2014-12-31 鸿富锦精密工业(深圳)有限公司 Three dimensional measuring device
EP2824420B1 (en) * 2013-07-08 2019-03-06 Hexagon Technology Center GmbH Device for determining position with an inertial measuring unit
CN103529655A (en) * 2013-10-29 2014-01-22 天津芯硕精密机械有限公司 Method and system for calibrating linearity of displacement platform
KR101448509B1 (en) * 2013-12-04 2014-10-13 순환엔지니어링 주식회사 Dynamic and thermal error real time compensation system for linear motion single-plane gantry stage, stage apparatus and manufacturing, measuring and inspecting equipment
CN103615979B (en) * 2013-12-05 2018-04-03 天津芯硕精密机械有限公司 Scaling method and device applied to different-thickness substrate in laser imaging system
JP2015141139A (en) * 2014-01-29 2015-08-03 株式会社ミツトヨ Manual measurement device
JP6254456B2 (en) * 2014-02-21 2017-12-27 株式会社ミツトヨ CMM and correction matrix calculation method using CMM
KR101448510B1 (en) * 2014-04-10 2014-10-14 순환엔지니어링 주식회사 System of measuring orthogonality of stage and home positioning method using the same
US9441935B2 (en) 2014-07-07 2016-09-13 Tokyo Seimitsu Co., Ltd. Three-dimensional coordinate measuring machine
DE102015205567A1 (en) * 2015-03-26 2016-09-29 Carl Zeiss Industrielle Messtechnik Gmbh Calibration of a rotating device attached to a moving part of a CMM
EP3289310A1 (en) * 2015-04-28 2018-03-07 Hexagon Technology Center GmbH Active damping of a measuring device
WO2016177370A1 (en) * 2015-05-05 2016-11-10 Micro-Epsilon Messtechnik Gmbh & Co. Kg Measuring system with temperature compensation, and device comprising such a measuring system
US10598476B2 (en) 2015-05-12 2020-03-24 Hexagon Metrology, Inc. Apparatus and method of controlling CMM using environmental information or CMM information
CN106168493B (en) * 2015-05-20 2019-04-23 冯黎 The double crossbeam design structures of gantry measuring machine combined by guide beam with load-bearing driving beam
CN105136007B (en) * 2015-05-20 2017-12-08 广州中国科学院先进技术研究所 A kind of Linear displacement detection device based on capacitive displacement meter
US10203192B2 (en) 2015-05-29 2019-02-12 Hexagon Metrology, Inc. CMM with object location logic
US20180173188A1 (en) * 2015-06-15 2018-06-21 Hpt Sinergy S.R.L. Cartesian numerically controlled machine tool for high-precision machining and optical apparatus for monitoring deformations for cartesian machine tools for high-precision machining
CN105252341B (en) * 2015-09-02 2017-06-23 大连理工大学 Five-axle number control machine tool dynamic error vision measuring method
DE102015122844A1 (en) 2015-12-27 2017-06-29 Faro Technologies, Inc. 3D measuring device with battery pack
CN105509678A (en) * 2016-02-18 2016-04-20 苏州莱测检测科技有限公司 Coordinate measuring machine
CN106054179B (en) * 2016-06-10 2018-09-14 比业电子(北京)有限公司 A kind of working sensor region Auto-Test System
US10635758B2 (en) 2016-07-15 2020-04-28 Fastbrick Ip Pty Ltd Brick/block laying machine incorporated in a vehicle
JP2018031754A (en) * 2016-08-26 2018-03-01 株式会社ミツトヨ Three-dimensional measurement device and coordinate correction method
JP6341962B2 (en) * 2016-08-26 2018-06-13 株式会社ミツトヨ Three-dimensional measuring apparatus and coordinate correction method
DE102016221260A1 (en) 2016-10-28 2018-05-03 Carl Zeiss Industrielle Messtechnik Gmbh Linear guide for a coordinate measuring machine and coordinate measuring machine
US10352679B2 (en) * 2017-03-31 2019-07-16 Mitutoyo Corporation Compact coordinate measurement machine configuration with large working volume relative to size
US20190011327A1 (en) * 2017-07-07 2019-01-10 Fives Machining Systems, Inc. Cnc machine geometry error and accuracy monitoring and evaluation
CN109443203B (en) * 2018-11-06 2019-11-12 华中科技大学 A kind of high-precision two-dimentional work bench Z axis error compensating method and system

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2330997B1 (en) 1975-11-07 1982-04-02 Sagem
GB2042719B (en) 1978-12-27 1983-03-09 Ferranti Ltd Positional measuring apparatus
GB2098759A (en) * 1981-05-14 1982-11-24 Lk Tool Co Ltd Apparatus for correcting misalignment
DE3150977A1 (en) 1981-12-23 1983-06-30 Zeiss Carl Fa Method and device for determining and correcting leadership
GB8616431D0 (en) * 1986-07-05 1986-08-13 Renishaw Plc Locating co-ordinates of object
US4819195A (en) * 1987-01-20 1989-04-04 The Warner & Swasey Company Method for calibrating a coordinate measuring machine and the like and system therefor
US4939678A (en) 1987-11-19 1990-07-03 Brown & Sharpe Manufacturing Company Method for calibration of coordinate measuring machine
SE468727B (en) * 1991-07-09 1993-03-08 Johansson Ab C E Machine base, Saers kilt Foer called koordinatmaetmaskiner, jaemte saett to utfoera machine frame
JP2001330428A (en) * 2000-05-23 2001-11-30 Asanuma Giken:Kk Evaluation method for measuring error of three- dimensional measuring machine and gage for three- dimensional measuring machine
DE10313038B4 (en) * 2003-03-24 2005-02-17 Klingelnberg Gmbh Device for detecting the position of a probe element in a multi-coordinate measuring device
GB0326532D0 (en) 2003-11-13 2003-12-17 Renishaw Plc Method of error compensation
JP4675047B2 (en) 2004-02-02 2011-04-20 株式会社ミツトヨ Measuring coordinate correction method for three-dimensional measuring machine and three-dimensional measuring system
GB2425840A (en) 2005-04-13 2006-11-08 Renishaw Plc Error correction of workpiece measurements
JPWO2007083758A1 (en) * 2006-01-19 2009-06-11 株式会社ニコン Mobile body driving method, mobile body driving system, pattern forming method, pattern forming apparatus, exposure method, exposure apparatus, and device manufacturing method
CN101821582B (en) * 2007-06-28 2013-04-17 海克斯康测量技术有限公司 Method for determining dynamic errors in measuring machine
JP5297818B2 (en) * 2009-01-06 2013-09-25 株式会社ミツトヨ Cmm
DE102009008722A1 (en) * 2009-02-06 2010-08-19 Carl Zeiss Industrielle Messtechnik Gmbh Coordinate measuring device for determining spatial coordinates on a measurement object and a probe system for such a coordinate measuring machine
EP2219010A1 (en) * 2009-02-11 2010-08-18 Leica Geosystems AG Coordinate measuring machine (CMM) and method of compensating errors in a CMM
EP2270425A1 (en) * 2009-07-03 2011-01-05 Leica Geosystems AG Coordinate measuring machine (CMM) and method of compensating errors in a CMM
EP2472216B1 (en) * 2010-12-30 2013-08-14 Hexagon Metrology S.p.A. Coordinate measuring machine

Also Published As

Publication number Publication date
EP2270425A1 (en) 2011-01-05
CN102472615B (en) 2014-07-02
BR112012000112B1 (en) 2019-10-08
EP2449342B1 (en) 2013-05-29
WO2011000954A1 (en) 2011-01-06
BR112012000112A2 (en) 2016-03-15
CN102472615A (en) 2012-05-23
US20120084989A1 (en) 2012-04-12
EP2449341A1 (en) 2012-05-09
CN102472616B (en) 2014-06-04
BR112012000111A2 (en) 2016-03-15
BR112012000111B1 (en) 2019-10-08
CN102472616A (en) 2012-05-23
WO2011000955A1 (en) 2011-01-06
IN2012DN00673A (en) 2015-08-21
EP2449342A1 (en) 2012-05-09
US8607466B2 (en) 2013-12-17
EP2449341B1 (en) 2013-05-29
US20120105866A1 (en) 2012-05-03
US8537372B2 (en) 2013-09-17

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