IN187493B - - Google Patents

Info

Publication number
IN187493B
IN187493B IN246CA1996A IN187493B IN 187493 B IN187493 B IN 187493B IN 246CA1996 A IN246CA1996 A IN 246CA1996A IN 187493 B IN187493 B IN 187493B
Authority
IN
India
Application number
Other languages
English (en)
Inventor
Myung-Kwon Koo
Jae-Hyuk Chung
Original Assignee
Daewoo Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1019950009390A external-priority patent/KR0153999B1/ko
Priority claimed from KR1019950009395A external-priority patent/KR960039450A/ko
Priority claimed from KR1019950010581A external-priority patent/KR0154926B1/ko
Priority claimed from KR1019950010582A external-priority patent/KR0154927B1/ko
Priority claimed from KR1019950018673A external-priority patent/KR0159369B1/ko
Application filed by Daewoo Electronics Co Ltd filed Critical Daewoo Electronics Co Ltd
Publication of IN187493B publication Critical patent/IN187493B/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/90—Methods

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Transforming Electric Information Into Light Information (AREA)
IN246CA1996 1995-04-21 1996-02-12 IN187493B (fr)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
KR1019950009390A KR0153999B1 (ko) 1995-04-21 1995-04-21 광로 조절 장치의 건식 식각장치
KR1019950009395A KR960039450A (ko) 1995-04-21 1995-04-21 광로 조절 장치의 건조방법
KR1019950010581A KR0154926B1 (ko) 1995-04-29 1995-04-29 광로 조절 장치의 에어갭 형성방법
KR1019950010582A KR0154927B1 (ko) 1995-04-29 1995-04-29 광로 조절 장치의 에어갭 형성방법
KR1019950018673A KR0159369B1 (ko) 1995-06-30 1995-06-30 광로 조절 장치의 에어갭 형성방법

Publications (1)

Publication Number Publication Date
IN187493B true IN187493B (fr) 2002-05-04

Family

ID=27532174

Family Applications (1)

Application Number Title Priority Date Filing Date
IN246CA1996 IN187493B (fr) 1995-04-21 1996-02-12

Country Status (3)

Country Link
US (1) US5677785A (fr)
JP (1) JPH08292382A (fr)
IN (1) IN187493B (fr)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6969635B2 (en) * 2000-12-07 2005-11-29 Reflectivity, Inc. Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
US5949568A (en) * 1996-12-30 1999-09-07 Daewoo Electronics Co., Ltd. Array of thin film actuated mirrors having a levelling member
CN1283369A (zh) * 1997-10-31 2001-02-07 大宇电子株式会社 光学投影系统中的薄膜驱动的反光镜组的制造方法
JP3527117B2 (ja) * 1998-12-24 2004-05-17 富士電機デバイステクノロジー株式会社 半導体力学量センサの製造方法およびその製造装置
US6203715B1 (en) * 1999-01-19 2001-03-20 Daewoo Electronics Co., Ltd. Method for the manufacture of a thin film actuated mirror array
FR2820834B1 (fr) * 2001-02-15 2004-06-25 Teem Photonics Procede de fabrication d'un micro-miroir optique et micro-miroir ou matrice de micro-miroirs obtenu par ce procede
US6906846B2 (en) * 2002-08-14 2005-06-14 Triquint Technology Holding Co. Micro-electro-mechanical system device and method of making same
US7420725B2 (en) 2004-09-27 2008-09-02 Idc, Llc Device having a conductive light absorbing mask and method for fabricating same
US7289259B2 (en) 2004-09-27 2007-10-30 Idc, Llc Conductive bus structure for interferometric modulator array
KR100851074B1 (ko) 2005-12-14 2008-08-12 삼성전기주식회사 보호막을 가지는 광변조기 소자 및 그 제조 방법
US7527998B2 (en) 2006-06-30 2009-05-05 Qualcomm Mems Technologies, Inc. Method of manufacturing MEMS devices providing air gap control
US7684106B2 (en) 2006-11-02 2010-03-23 Qualcomm Mems Technologies, Inc. Compatible MEMS switch architecture
US8541315B2 (en) 2011-09-19 2013-09-24 International Business Machines Corporation High throughput epitaxial lift off for flexible electronics

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5172262A (en) * 1985-10-30 1992-12-15 Texas Instruments Incorporated Spatial light modulator and method

Also Published As

Publication number Publication date
US5677785A (en) 1997-10-14
JPH08292382A (ja) 1996-11-05

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