IN167003B - - Google Patents
Info
- Publication number
- IN167003B IN167003B IN273/DEL/86A IN273DE1986A IN167003B IN 167003 B IN167003 B IN 167003B IN 273DE1986 A IN273DE1986 A IN 273DE1986A IN 167003 B IN167003 B IN 167003B
- Authority
- IN
- India
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Photovoltaic Devices (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US06/718,571 US4601260A (en) | 1985-04-01 | 1985-04-01 | Vertical semiconductor processor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| IN167003B true IN167003B (es) | 1990-08-18 |
Family
ID=24886579
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IN273/DEL/86A IN167003B (es) | 1985-04-01 | 1986-03-24 |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US4601260A (es) |
| EP (1) | EP0200332A2 (es) |
| JP (1) | JPH0738378B2 (es) |
| AU (1) | AU5553386A (es) |
| BR (1) | BR8601420A (es) |
| CA (1) | CA1242816A (es) |
| ES (1) | ES8708093A1 (es) |
| IN (1) | IN167003B (es) |
| ZA (1) | ZA862256B (es) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2590808B1 (fr) * | 1985-12-04 | 1989-09-15 | Canon Kk | Dispositif de soufflage de particules fines |
| US4723507A (en) * | 1986-01-16 | 1988-02-09 | Energy Conversion Devices, Inc. | Isolation passageway including annular region |
| US4829189A (en) * | 1986-07-18 | 1989-05-09 | Sando Iron Works Co., Ltd. | Apparatus for low-temperature plasma treatment of sheet material |
| KR910003742B1 (ko) | 1986-09-09 | 1991-06-10 | 세미콘덕터 에너지 라보라터리 캄파니 리미티드 | Cvd장치 |
| JPH02148715A (ja) * | 1988-11-29 | 1990-06-07 | Canon Inc | 半導体デバイスの連続形成装置 |
| US5105762A (en) * | 1988-12-20 | 1992-04-21 | Texas Instruments Incorporated | Support and seal structure for CCVD reactor |
| JP3101330B2 (ja) * | 1991-01-23 | 2000-10-23 | キヤノン株式会社 | マイクロ波プラズマｃｖｄ法による大面積の機能性堆積膜を連続的に形成する方法及び装置 |
| DE4324320B4 (de) * | 1992-07-24 | 2006-08-31 | Fuji Electric Co., Ltd., Kawasaki | Verfahren und Vorrichtung zur Herstellung einer als dünne Schicht ausgebildeten fotovoltaischen Umwandlungsvorrichtung |
| US6720576B1 (en) * | 1992-09-11 | 2004-04-13 | Semiconductor Energy Laboratory Co., Ltd. | Plasma processing method and photoelectric conversion device |
| US5821597A (en) * | 1992-09-11 | 1998-10-13 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion device |
| AU5598194A (en) * | 1992-11-13 | 1994-06-08 | Energy Conversion Devices Inc. | Microwave apparatus for depositing thin films |
| FR2786208B1 (fr) * | 1998-11-25 | 2001-02-09 | Centre Nat Rech Scient | Procede de croissance cristalline sur substrat et reacteur pour sa mise en oeuvre |
| US6225611B1 (en) | 1999-11-15 | 2001-05-01 | Hull Corporation | Microwave lyophilizer having corona discharge control |
| TW514557B (en) * | 2000-09-15 | 2002-12-21 | Shipley Co Llc | Continuous feed coater |
| JP4003163B2 (ja) * | 2002-01-15 | 2007-11-07 | 富士フイルム株式会社 | 多層塗布膜の製造装置 |
| US20060278163A1 (en) * | 2002-08-27 | 2006-12-14 | Ovshinsky Stanford R | High throughput deposition apparatus with magnetic support |
| US20090068344A1 (en) * | 2007-07-31 | 2009-03-12 | Vincent Cannella | System and method for manufacturing thin film electrical devices |
| EP2123793A1 (en) | 2008-05-20 | 2009-11-25 | Helianthos B.V. | Vapour deposition process |
| CN102021576B (zh) * | 2010-09-30 | 2012-06-27 | 深圳市信诺泰创业投资企业(普通合伙) | 一种连续生产挠性覆铜板的方法 |
| CN102820374A (zh) * | 2012-07-24 | 2012-12-12 | 海宁博大科技有限公司 | 一种太阳能电池组背膜的生产设备 |
| DE102013219816B4 (de) * | 2013-09-30 | 2023-06-22 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung mit Abscheidekammer mit turbulenter Gasführung zur kontinuierlichen Beschichtung von Substraten mittels Gasphasenabscheidung sowie Verfahren zu diesem Zweck unter Verwendung einer solchen Vorrichtung |
| US11578004B2 (en) | 2016-06-02 | 2023-02-14 | Applied Materials, Inc. | Methods and apparatus for depositing materials on a continuous substrate |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4519339A (en) * | 1981-03-16 | 1985-05-28 | Sovonics Solar Systems | Continuous amorphous solar cell production system |
| US4513684A (en) * | 1982-12-22 | 1985-04-30 | Energy Conversion Devices, Inc. | Upstream cathode assembly |
-
1985
- 1985-04-01 US US06/718,571 patent/US4601260A/en not_active Expired - Lifetime
-
1986
- 1986-03-17 CA CA000504278A patent/CA1242816A/en not_active Expired
- 1986-03-19 EP EP86302039A patent/EP0200332A2/en not_active Withdrawn
- 1986-03-24 IN IN273/DEL/86A patent/IN167003B/en unknown
- 1986-03-26 ZA ZA862256A patent/ZA862256B/xx unknown
- 1986-03-28 JP JP61070661A patent/JPH0738378B2/ja not_active Expired - Lifetime
- 1986-03-31 ES ES553530A patent/ES8708093A1/es not_active Expired
- 1986-03-31 BR BR8601420A patent/BR8601420A/pt unknown
- 1986-04-01 AU AU55533/86A patent/AU5553386A/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| ES8708093A1 (es) | 1987-09-01 |
| ES553530A0 (es) | 1987-09-01 |
| AU5553386A (en) | 1986-10-09 |
| US4601260A (en) | 1986-07-22 |
| JPS61263120A (ja) | 1986-11-21 |
| JPH0738378B2 (ja) | 1995-04-26 |
| BR8601420A (pt) | 1986-12-09 |
| CA1242816A (en) | 1988-10-04 |
| ZA862256B (en) | 1986-11-26 |
| EP0200332A2 (en) | 1986-11-05 |