IL93551A - Capacitive accelerometer - Google Patents

Capacitive accelerometer

Info

Publication number
IL93551A
IL93551A IL93551A IL9355190A IL93551A IL 93551 A IL93551 A IL 93551A IL 93551 A IL93551 A IL 93551A IL 9355190 A IL9355190 A IL 9355190A IL 93551 A IL93551 A IL 93551A
Authority
IL
Israel
Prior art keywords
capacitive accelerometer
accelerometer
capacitive
Prior art date
Application number
IL93551A
Other languages
English (en)
Other versions
IL93551A0 (en
Original Assignee
United Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Technologies Corp filed Critical United Technologies Corp
Publication of IL93551A0 publication Critical patent/IL93551A0/xx
Publication of IL93551A publication Critical patent/IL93551A/xx

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/003—Details of instruments used for damping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
IL93551A 1989-02-28 1990-02-27 Capacitive accelerometer IL93551A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/317,240 US4930042A (en) 1989-02-28 1989-02-28 Capacitive accelerometer with separable damping and sensitivity

Publications (2)

Publication Number Publication Date
IL93551A0 IL93551A0 (en) 1990-11-29
IL93551A true IL93551A (en) 1993-02-21

Family

ID=23232758

Family Applications (1)

Application Number Title Priority Date Filing Date
IL93551A IL93551A (en) 1989-02-28 1990-02-27 Capacitive accelerometer

Country Status (7)

Country Link
US (1) US4930042A (fr)
EP (1) EP0387518B1 (fr)
JP (1) JPH0348168A (fr)
BR (1) BR9000844A (fr)
CA (1) CA2009489A1 (fr)
DE (1) DE69023025T2 (fr)
IL (1) IL93551A (fr)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5417111A (en) * 1990-08-17 1995-05-23 Analog Devices, Inc. Monolithic chip containing integrated circuitry and suspended microstructure
US5314572A (en) * 1990-08-17 1994-05-24 Analog Devices, Inc. Method for fabricating microstructures
US5620931A (en) * 1990-08-17 1997-04-15 Analog Devices, Inc. Methods for fabricating monolithic device containing circuitry and suspended microstructure
JPH0644008B2 (ja) * 1990-08-17 1994-06-08 アナログ・ディバイセス・インコーポレーテッド モノリシック加速度計
US5326726A (en) * 1990-08-17 1994-07-05 Analog Devices, Inc. Method for fabricating monolithic chip containing integrated circuitry and suspended microstructure
US5069071A (en) * 1990-08-27 1991-12-03 United Technologies Corporation Vibration monitoring in the frequency domain with a capacitive accelerometer
US5101664A (en) * 1990-10-15 1992-04-07 United Technologies Corporation Optical pressure transducer
US5221400A (en) * 1990-12-11 1993-06-22 Delco Electronics Corporation Method of making a microaccelerometer having low stress bonds and means for preventing excessive z-axis deflection
JP2804196B2 (ja) * 1991-10-18 1998-09-24 株式会社日立製作所 マイクロセンサ及びそれを用いた制御システム
US5291066A (en) * 1991-11-14 1994-03-01 General Electric Company Moisture-proof electrical circuit high density interconnect module and method for making same
DE4201578A1 (de) * 1992-01-22 1993-11-04 Bosch Gmbh Robert Kapazitiver sensor
FR2687778B1 (fr) * 1992-02-20 1994-05-20 Sextant Avionique Micro-capteur capacitif a capacite parasite reduite et procede de fabrication.
US5333504A (en) * 1992-09-01 1994-08-02 Rosemount Inc. High overpressure low range pressure sensor
FR2698447B1 (fr) * 1992-11-23 1995-02-03 Suisse Electronique Microtech Cellule de mesure micro-usinée.
US5780742A (en) * 1993-04-15 1998-07-14 Honeywell Inc. Mechanical resonance, silicon accelerometer
US5814727A (en) * 1993-11-08 1998-09-29 Motorola, Inc. Semiconductor accelerometer having reduced sensor plate flexure
JP2825664B2 (ja) * 1994-03-28 1998-11-18 アイ／オー、センサーズ、インコーポレーテッド Ｌ字形状のばね脚部を有するセンサー構造
US5777226A (en) * 1994-03-28 1998-07-07 I/O Sensors, Inc. Sensor structure with L-shaped spring legs
US5827965A (en) * 1994-06-20 1998-10-27 Sony Corporation Navigation device employing an electret vibration sensor
CN1090319C (zh) * 1994-06-20 2002-09-04 索尼公司 振动传感器
US5901031A (en) * 1995-02-01 1999-05-04 Murata Manufacturing Co., Ltd. Variable capacitor
JP3946255B2 (ja) * 1995-08-15 2007-07-18 アライドシグナル インコーポレイテッド 加速度計の星形リード
US20040112135A1 (en) * 1995-08-15 2004-06-17 Letrondo Norberto P. Star patterned accelerometer reed
US6041655A (en) * 1997-04-22 2000-03-28 Alliedsignal, Inc. Active cover accelerometer
US6000287A (en) * 1998-08-28 1999-12-14 Ford Motor Company Capacitor center of area sensitivity in angular motion micro-electromechanical systems
JP2000206142A (ja) * 1998-11-13 2000-07-28 Denso Corp 半導体力学量センサおよびその製造方法
US20020104379A1 (en) * 2000-05-30 2002-08-08 Input/Output, Inc. Accelerometer with re-entrant grooves
US20070163346A1 (en) * 2006-01-18 2007-07-19 Honeywell International Inc. Frequency shifting of rotational harmonics in mems devices
US8776337B2 (en) 2010-07-30 2014-07-15 Hewlett-Packard Development Company, L.P. Methods of forming capacitive sensors
CN103547895B (zh) 2011-02-07 2016-08-24 离子地球物理学公司 用于感测水下信号的方法和设备
WO2014174812A1 (fr) * 2013-04-26 2014-10-30 パナソニックＩｐマネジメント株式会社 Capteur
CN106908624A (zh) 2017-03-24 2017-06-30 京东方科技集团股份有限公司 一种加速度敏感器及加速度计

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2130372A (en) * 1982-11-17 1984-05-31 Stc Plc Accelerometer device
GB2130373B (en) * 1982-11-17 1986-12-31 Stc Plc Accelerometer device
US4699006A (en) * 1984-03-19 1987-10-13 The Charles Stark Draper Laboratory, Inc. Vibratory digital integrating accelerometer
US4574327A (en) * 1984-05-18 1986-03-04 Becton, Dickinson And Company Capacitive transducer
US4609968A (en) * 1984-05-18 1986-09-02 Becton, Dickinson And Company Glass inlays for use in bonding semiconductor wafers
US4679434A (en) * 1985-07-25 1987-07-14 Litton Systems, Inc. Integrated force balanced accelerometer
DE3625411A1 (de) * 1986-07-26 1988-02-04 Messerschmitt Boelkow Blohm Kapazitiver beschleunigungssensor

Also Published As

Publication number Publication date
EP0387518B1 (fr) 1995-10-18
BR9000844A (pt) 1991-02-05
JPH0348168A (ja) 1991-03-01
EP0387518A2 (fr) 1990-09-19
IL93551A0 (en) 1990-11-29
DE69023025T2 (de) 1996-03-21
CA2009489A1 (fr) 1990-08-31
EP0387518A3 (fr) 1992-03-18
US4930042A (en) 1990-05-29
DE69023025D1 (de) 1995-11-23

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Legal Events

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KB Patent renewed
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