IL84897A - Microbeam laser machine for operating on objects having thin layers of material - Google Patents
Microbeam laser machine for operating on objects having thin layers of materialInfo
- Publication number
- IL84897A IL84897A IL84897A IL8489787A IL84897A IL 84897 A IL84897 A IL 84897A IL 84897 A IL84897 A IL 84897A IL 8489787 A IL8489787 A IL 8489787A IL 84897 A IL84897 A IL 84897A
- Authority
- IL
- Israel
- Prior art keywords
- objects
- operating
- thin layers
- laser machine
- microbeam laser
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Microscoopes, Condenser (AREA)
- Laser Beam Processing (AREA)
- Lasers (AREA)
- Immobilizing And Processing Of Enzymes And Microorganisms (AREA)
- Apparatus Associated With Microorganisms And Enzymes (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8618079A FR2608484B1 (fr) | 1986-12-23 | 1986-12-23 | Machine a microfaisceau laser d'intervention sur des objets a couches minces de materiau |
Publications (2)
Publication Number | Publication Date |
---|---|
IL84897A0 IL84897A0 (en) | 1988-06-30 |
IL84897A true IL84897A (en) | 1992-05-25 |
Family
ID=9342235
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL84897A IL84897A (en) | 1986-12-23 | 1987-12-21 | Microbeam laser machine for operating on objects having thin layers of material |
Country Status (9)
Country | Link |
---|---|
US (1) | US4825034A (ja) |
EP (1) | EP0277444B1 (ja) |
JP (1) | JPS63238988A (ja) |
KR (1) | KR880007163A (ja) |
DE (1) | DE3773484D1 (ja) |
ES (1) | ES2026934T3 (ja) |
FR (1) | FR2608484B1 (ja) |
IL (1) | IL84897A (ja) |
IN (1) | IN172171B (ja) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5059764A (en) * | 1988-10-31 | 1991-10-22 | Spectra-Physics, Inc. | Diode-pumped, solid state laser-based workstation for precision materials processing and machining |
FR2639567B1 (fr) * | 1988-11-25 | 1991-01-25 | France Etat | Machine a microfaisceau laser d'intervention sur des objets a couche mince, en particulier pour la gravure ou le depot de matiere par voie chimique en presence d'un gaz reactif |
FR2657803A1 (fr) * | 1990-02-02 | 1991-08-09 | Bertin & Cie | Machine a micro-faisceau laser d'intervention sur des objets a couches minces, tels que des circuits integres. |
EP0458199B1 (en) * | 1990-05-21 | 1995-08-23 | Ntn Corporation | Laser processing device and laser processing method |
IT1240515B (it) * | 1990-07-27 | 1993-12-17 | Prima Ind Spa | Dispositivo di regolazione per allineare un raggio laser secondo una linea di riferimento prestabilita |
US5464960A (en) * | 1993-01-12 | 1995-11-07 | Iatrotech, Inc. | Laser calibration device |
US5416821A (en) * | 1993-05-10 | 1995-05-16 | Trw Inc. | Grid formed with a silicon substrate |
US5585016A (en) * | 1993-07-20 | 1996-12-17 | Integrated Device Technology, Inc. | Laser patterned C-V dot |
JP3399590B2 (ja) * | 1993-08-04 | 2003-04-21 | 富士通株式会社 | 配線の切断装置 |
US5872051A (en) * | 1995-08-02 | 1999-02-16 | International Business Machines Corporation | Process for transferring material to semiconductor chip conductive pads using a transfer substrate |
US6472671B1 (en) * | 2000-02-09 | 2002-10-29 | Jean I. Montagu | Quantified fluorescence microscopy |
US6794424B2 (en) * | 2001-12-04 | 2004-09-21 | Agilent Technologies, Inc. | Devices for calibrating optical scanners and methods of using the same |
US20040094526A1 (en) * | 2002-11-15 | 2004-05-20 | Mccoy Edward D. | Cutting laser beam nozzle assembly |
US7534561B2 (en) | 2003-04-02 | 2009-05-19 | Agilent Technologies, Inc. | Nucleic acid array in situ fabrication methods and arrays produced using the same |
DE102004063692B3 (de) * | 2004-12-28 | 2006-05-11 | Georg-August-Universität Göttingen | Positioniereinrichtung |
DE102005059649B4 (de) * | 2005-12-14 | 2017-09-07 | Leica Microsystems Cms Gmbh | Vorrichtung zur Montage für mehrere Laser |
DE102005059650B4 (de) * | 2005-12-14 | 2011-08-18 | Leica Microsystems CMS GmbH, 35578 | Vorrichtung zur Montage für mehrere Laser und Mikroskop |
WO2009002544A1 (en) * | 2007-06-26 | 2008-12-31 | Rolls-Royce Corporation | Prism mount for a laser deposition device |
US8374818B2 (en) * | 2008-12-19 | 2013-02-12 | Affymetrix, Inc. | System, method and apparatus for calibrating inspection tools |
DE102011000505A1 (de) * | 2011-02-04 | 2012-08-09 | A. Monforts Werkzeugmaschinen Gmbh & Co. Kg | Werkzeugwechselträger und Werkzeugsystem |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR919297A (ja) * | 1959-09-04 | 1947-04-01 | ||
US3782823A (en) * | 1972-03-23 | 1974-01-01 | American Optical Corp | Laser microprobe |
US3769663A (en) * | 1972-05-04 | 1973-11-06 | T Perl | Flashlight attachment clip for spectacles |
FR2454635A1 (fr) * | 1979-04-18 | 1980-11-14 | Commissariat Energie Atomique | Procede et dispositif de reglage de l'impact sur une cible d'un faisceau de lumiere monochromatique emis par une source laser |
JPS5720261A (en) * | 1980-07-14 | 1982-02-02 | Olympus Optical Co | Medical treating device |
FR2541468B1 (fr) * | 1983-02-17 | 1986-07-11 | Commissariat Energie Atomique | Dispositif d'alignement d'un faisceau laser par l'intermediaire de moyens optiques de visee, procede de reperage de l'axe d'emission du faisceau laser et procede de mise en oeuvre du dispositif, pour controler l'alignement |
-
1986
- 1986-12-23 FR FR8618079A patent/FR2608484B1/fr not_active Expired
-
1987
- 1987-12-21 IL IL84897A patent/IL84897A/xx not_active IP Right Cessation
- 1987-12-22 ES ES198787402961T patent/ES2026934T3/es not_active Expired - Lifetime
- 1987-12-22 DE DE8787402961T patent/DE3773484D1/de not_active Expired - Fee Related
- 1987-12-22 US US07/136,349 patent/US4825034A/en not_active Expired - Fee Related
- 1987-12-22 EP EP87402961A patent/EP0277444B1/fr not_active Expired - Lifetime
- 1987-12-23 KR KR870014875A patent/KR880007163A/ko not_active Application Discontinuation
- 1987-12-23 JP JP62326626A patent/JPS63238988A/ja active Pending
- 1987-12-29 IN IN1146/DEL/87A patent/IN172171B/en unknown
Also Published As
Publication number | Publication date |
---|---|
DE3773484D1 (de) | 1991-11-07 |
IL84897A0 (en) | 1988-06-30 |
EP0277444A1 (fr) | 1988-08-10 |
FR2608484B1 (fr) | 1989-04-28 |
US4825034A (en) | 1989-04-25 |
FR2608484A1 (fr) | 1988-06-24 |
IN172171B (ja) | 1993-04-24 |
EP0277444B1 (fr) | 1991-10-02 |
JPS63238988A (ja) | 1988-10-05 |
KR880007163A (ko) | 1988-08-26 |
ES2026934T3 (es) | 1992-05-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RH | Patent void |