IL81956A - Liquid metal ion source and alloy for ion emission of multiple ionic species - Google Patents

Liquid metal ion source and alloy for ion emission of multiple ionic species

Info

Publication number
IL81956A
IL81956A IL81956A IL8195687A IL81956A IL 81956 A IL81956 A IL 81956A IL 81956 A IL81956 A IL 81956A IL 8195687 A IL8195687 A IL 8195687A IL 81956 A IL81956 A IL 81956A
Authority
IL
Israel
Prior art keywords
alloy
liquid metal
ionic species
metal ion
multiple ionic
Prior art date
Application number
IL81956A
Other languages
English (en)
Other versions
IL81956A0 (en
Original Assignee
Oregon Graduate Center
Us Health
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oregon Graduate Center, Us Health, Hughes Aircraft Co filed Critical Oregon Graduate Center
Publication of IL81956A0 publication Critical patent/IL81956A0/xx
Publication of IL81956A publication Critical patent/IL81956A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
IL81956A 1986-04-14 1987-03-22 Liquid metal ion source and alloy for ion emission of multiple ionic species IL81956A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/851,755 US4670685A (en) 1986-04-14 1986-04-14 Liquid metal ion source and alloy for ion emission of multiple ionic species

Publications (2)

Publication Number Publication Date
IL81956A0 IL81956A0 (en) 1987-10-20
IL81956A true IL81956A (en) 1990-11-29

Family

ID=25311600

Family Applications (1)

Application Number Title Priority Date Filing Date
IL81956A IL81956A (en) 1986-04-14 1987-03-22 Liquid metal ion source and alloy for ion emission of multiple ionic species

Country Status (5)

Country Link
US (1) US4670685A (cg-RX-API-DMAC7.html)
EP (1) EP0262219B1 (cg-RX-API-DMAC7.html)
JP (1) JPS63503023A (cg-RX-API-DMAC7.html)
IL (1) IL81956A (cg-RX-API-DMAC7.html)
WO (1) WO1987006390A2 (cg-RX-API-DMAC7.html)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0685309B2 (ja) * 1985-12-13 1994-10-26 株式会社日立製作所 液体金属イオン源
US4907422A (en) * 1988-09-30 1990-03-13 The Manitowoc Company, Inc. Harvest cycle refrigerant control system
US4994711A (en) * 1989-12-22 1991-02-19 Hughes Aircraft Company High brightness solid electrolyte ion source
US5447763A (en) * 1990-08-17 1995-09-05 Ion Systems, Inc. Silicon ion emitter electrodes
US5149976A (en) * 1990-08-31 1992-09-22 Hughes Aircraft Company Charged particle beam pattern generation apparatus and method
US6022258A (en) * 1996-03-27 2000-02-08 Thermoceramix, Llc ARC chamber for an ion implantation system
US5914494A (en) * 1996-03-27 1999-06-22 Thermoceramix, Llc Arc chamber for an ion implantation system
US5857889A (en) * 1996-03-27 1999-01-12 Thermoceramix, Llc Arc Chamber for an ion implantation system
US6239440B1 (en) 1996-03-27 2001-05-29 Thermoceramix, L.L.C. Arc chamber for an ion implantation system
FR2806527B1 (fr) 2000-03-20 2002-10-25 Schlumberger Technologies Inc Colonne a focalisation simultanee d'un faisceau de particules et d'un faisceau optique
US6914386B2 (en) * 2003-06-20 2005-07-05 Applied Materials Israel, Ltd. Source of liquid metal ions and a method for controlling the source
US9275823B2 (en) 2012-03-21 2016-03-01 Fei Company Multiple gas injection system
US9105438B2 (en) 2012-05-31 2015-08-11 Fei Company Imaging and processing for plasma ion source
JP6238978B2 (ja) 2012-06-29 2017-11-29 エフ・イ−・アイ・カンパニー 多種イオン源
US9899181B1 (en) 2017-01-12 2018-02-20 Fei Company Collision ionization ion source
US9941094B1 (en) 2017-02-01 2018-04-10 Fei Company Innovative source assembly for ion beam production

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4367429A (en) * 1980-11-03 1983-01-04 Hughes Aircraft Company Alloys for liquid metal ion sources
JPS59191225A (ja) * 1983-04-15 1984-10-30 Hitachi Ltd 液体金属イオン種合金

Also Published As

Publication number Publication date
EP0262219A1 (en) 1988-04-06
EP0262219B1 (en) 1990-04-25
US4670685A (en) 1987-06-02
WO1987006390A3 (en) 1987-11-05
WO1987006390A2 (en) 1987-10-22
IL81956A0 (en) 1987-10-20
JPS63503023A (ja) 1988-11-02
JPH0542095B2 (cg-RX-API-DMAC7.html) 1993-06-25

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Legal Events

Date Code Title Description
KB Patent renewed
HP Change in proprietorship
KB Patent renewed
MM9K Patent not in force due to non-payment of renewal fees