IL67142A0 - Cooled mirror and method of cooling same particularly useful in lasers - Google Patents

Cooled mirror and method of cooling same particularly useful in lasers

Info

Publication number
IL67142A0
IL67142A0 IL67142A IL6714282A IL67142A0 IL 67142 A0 IL67142 A0 IL 67142A0 IL 67142 A IL67142 A IL 67142A IL 6714282 A IL6714282 A IL 6714282A IL 67142 A0 IL67142 A0 IL 67142A0
Authority
IL
Israel
Prior art keywords
lasers
particularly useful
cooling same
same particularly
cooled mirror
Prior art date
Application number
IL67142A
Other languages
English (en)
Original Assignee
Metalworking Lasers Int Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Metalworking Lasers Int Ltd filed Critical Metalworking Lasers Int Ltd
Priority to IL67142A priority Critical patent/IL67142A0/xx
Publication of IL67142A0 publication Critical patent/IL67142A0/xx
Priority to GB08328042A priority patent/GB2129961B/en
Priority to US06/544,132 priority patent/US4552439A/en
Priority to JP58203595A priority patent/JPS59104604A/ja
Priority to DE19833339076 priority patent/DE3339076A1/de

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/181Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
    • G02B7/1815Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation with cooling or heating systems
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02Constructional details
    • H01S3/04Arrangements for thermal management
    • H01S3/0401Arrangements for thermal management of optical elements being part of laser resonator, e.g. windows, mirrors, lenses

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Lasers (AREA)
IL67142A 1982-11-01 1982-11-01 Cooled mirror and method of cooling same particularly useful in lasers IL67142A0 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
IL67142A IL67142A0 (en) 1982-11-01 1982-11-01 Cooled mirror and method of cooling same particularly useful in lasers
GB08328042A GB2129961B (en) 1982-11-01 1983-10-20 Cooled mirror and method of cooling particularly useful in lasers
US06/544,132 US4552439A (en) 1982-11-01 1983-10-21 Cooled mirror and method of cooling same particularly useful in lasers
JP58203595A JPS59104604A (ja) 1982-11-01 1983-10-27 レ−ザにおいて特に有用な冷却ミラ−
DE19833339076 DE3339076A1 (de) 1982-11-01 1983-10-28 Gekuehlter spiegel, insbesondere fuer laser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IL67142A IL67142A0 (en) 1982-11-01 1982-11-01 Cooled mirror and method of cooling same particularly useful in lasers

Publications (1)

Publication Number Publication Date
IL67142A0 true IL67142A0 (en) 1983-03-31

Family

ID=11053852

Family Applications (1)

Application Number Title Priority Date Filing Date
IL67142A IL67142A0 (en) 1982-11-01 1982-11-01 Cooled mirror and method of cooling same particularly useful in lasers

Country Status (5)

Country Link
US (1) US4552439A (ja)
JP (1) JPS59104604A (ja)
DE (1) DE3339076A1 (ja)
GB (1) GB2129961B (ja)
IL (1) IL67142A0 (ja)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3333732C1 (de) * 1983-09-17 1984-10-04 Bodenseewerk Geraetetech Optisches Abbildungssystem
US4657358A (en) * 1985-08-23 1987-04-14 Itek Corporation Cooled deformable mirror
GB2181267A (en) * 1985-10-10 1987-04-15 Shibuya Kogyo Co Ltd Device for cooling reflecting mirror
US5312693A (en) * 1986-05-28 1994-05-17 The United States Of America As Represented By The Secretary Of The Air Force Nonsacrificial laser hardening
US4956037A (en) * 1988-11-25 1990-09-11 United Technologies Corporation Cooled optical component manufacture
US5073831A (en) * 1989-05-03 1991-12-17 Martin Marietta Corporation Cooled transmissive mirrors, beam splitters, windows, and refractive elements for high-power applications
DE10052250A1 (de) * 2000-10-21 2002-04-25 Lt Ultra Prec Technology Gmbh Spiegel, insbesondere adaptiver Spiegel
DE10102935C2 (de) * 2001-01-16 2003-04-17 Curamik Electronics Gmbh Spiegel für Laseranwendungen sowie Verfahren zu seiner Herstellung
EP1227353B1 (de) 2001-01-16 2005-05-04 Curamik Electronics GmbH Spiegel für Laseranwendungen sowie Verfahren zu seiner Herstellung
DE10201334A1 (de) * 2002-01-16 2003-08-14 Rofin Sinar Laser Gmbh Spiegel für einen Laserstrahl
US7472741B2 (en) * 2005-02-09 2009-01-06 Raytheon Company Foil slot impingement cooler with effective light-trap cavities
DE102005053415A1 (de) * 2005-11-04 2007-05-10 Carl Zeiss Laser Optics Gmbh Optisches Bauelement mit verbessertem thermischen Verhalten
US8831170B2 (en) 2006-11-03 2014-09-09 Carl Zeiss Smt Gmbh Mirror with a mirror carrier and projection exposure apparatus
EP2343586A1 (en) 2009-12-30 2011-07-13 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Shape stabilized mirror module and method to stabilize a reflective element.
DE102012200733A1 (de) * 2012-01-19 2013-01-24 Carl Zeiss Smt Gmbh Spiegelanordnung, insbesondere zum Einsatz in einem optischen System, insbesondere einer mikrolithographischen Projektionsbelichtungsanlage
CN106324792B (zh) * 2015-06-19 2020-11-03 中国科学院大连化学物理研究所 一种适用高功率激光使用的相变冷却反射镜
DE102016205638B4 (de) 2016-04-05 2019-05-09 Trumpf Laser Gmbh Prallkühlvorrichtung für eine Laserscheibe und zugehöriges Laserscheibenmodul
CN107748427B (zh) * 2017-11-16 2019-03-29 中国科学院长春光学精密机械与物理研究所 一种可拆卸的柔性支撑组件

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3942880A (en) * 1968-09-27 1976-03-09 Avco Corporation Laser mirror
US3909118A (en) * 1974-03-04 1975-09-30 Textron Inc Fluid cooled mirror
US4143946A (en) * 1977-12-05 1979-03-13 The United States Of America As Represented By The Secretary Of The Navy Impingement cooled deformable laser mirror
US4431269A (en) * 1981-11-06 1984-02-14 Itek Corporation Low distortion cooled mirror

Also Published As

Publication number Publication date
GB8328042D0 (en) 1983-11-23
GB2129961B (en) 1986-01-29
JPS59104604A (ja) 1984-06-16
GB2129961A (en) 1984-05-23
DE3339076A1 (de) 1984-05-03
US4552439A (en) 1985-11-12

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Legal Events

Date Code Title Description
RH Patent void