IL66234A - Capacitance pressure sensor - Google Patents

Capacitance pressure sensor

Info

Publication number
IL66234A
IL66234A IL66234A IL6623482A IL66234A IL 66234 A IL66234 A IL 66234A IL 66234 A IL66234 A IL 66234A IL 6623482 A IL6623482 A IL 6623482A IL 66234 A IL66234 A IL 66234A
Authority
IL
Israel
Prior art keywords
pressure sensor
capacitance pressure
capacitance
sensor
pressure
Prior art date
Application number
IL66234A
Other languages
English (en)
Other versions
IL66234A0 (en
Original Assignee
Rosemount Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rosemount Inc filed Critical Rosemount Inc
Publication of IL66234A0 publication Critical patent/IL66234A0/xx
Publication of IL66234A publication Critical patent/IL66234A/xx

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/02—Arrangements for preventing, or for compensating for, effects of inclination or acceleration of the measuring device; Zero-setting means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
IL66234A 1981-07-27 1982-07-05 Capacitance pressure sensor IL66234A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/287,307 US4389895A (en) 1981-07-27 1981-07-27 Capacitance pressure sensor

Publications (2)

Publication Number Publication Date
IL66234A0 IL66234A0 (en) 1982-11-30
IL66234A true IL66234A (en) 1986-02-28

Family

ID=23102326

Family Applications (1)

Application Number Title Priority Date Filing Date
IL66234A IL66234A (en) 1981-07-27 1982-07-05 Capacitance pressure sensor

Country Status (8)

Country Link
US (1) US4389895A (fr)
EP (1) EP0083647A4 (fr)
JP (1) JPS58501200A (fr)
BR (1) BR8207848A (fr)
CA (1) CA1180913A (fr)
IL (1) IL66234A (fr)
IT (1) IT1148385B (fr)
WO (1) WO1983000385A1 (fr)

Families Citing this family (75)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5855732A (ja) * 1981-09-30 1983-04-02 Hitachi Ltd 静電容量型圧力センサ
DE3213320A1 (de) * 1982-04-06 1983-10-13 Siemens AG, 1000 Berlin und 8000 München Druck- oder druckdifferenz-messumformer
US4490773A (en) * 1983-12-19 1984-12-25 United Technologies Corporation Capacitive pressure transducer
DE3482394D1 (de) * 1984-03-30 1990-07-05 Rosemount Inc Druckkompensierter differenzdruckmesser.
US4586109A (en) * 1985-04-01 1986-04-29 Bourns Instruments, Inc. Batch-process silicon capacitive pressure sensor
US4774626A (en) * 1986-05-05 1988-09-27 Texas Instruments Incorporated Pressure sensor with improved capacitive pressure transducer
US4982351A (en) * 1986-05-05 1991-01-01 Texas Instruments Incorporated Low cost high precision sensor
US4716492A (en) * 1986-05-05 1987-12-29 Texas Instruments Incorporated Pressure sensor with improved capacitive pressure transducer
US4951236A (en) * 1986-05-05 1990-08-21 Texas Instruments Incorporated Low cost high precision sensor
US5051937A (en) * 1986-05-05 1991-09-24 Texas Instruments Incorporated Low cost high precision sensor
US4800758A (en) * 1986-06-23 1989-01-31 Rosemount Inc. Pressure transducer with stress isolation for hard mounting
IL82960A0 (en) * 1986-06-30 1987-12-20 Rosemount Inc Differential pressure sensor
US4864463A (en) * 1988-04-19 1989-09-05 Allied-Signal Inc. Capacitive pressure sensor
SE461300B (sv) * 1988-05-17 1990-01-29 Hydrolab Ab Tryckmaetare
DE3919411A1 (de) * 1989-03-07 1990-12-20 Pfister Gmbh Drucksensor und zugehoeriges herstellverfahren
US5134887A (en) * 1989-09-22 1992-08-04 Bell Robert L Pressure sensors
US5271277A (en) * 1991-12-23 1993-12-21 The Boc Group, Inc. Capacitance pressure transducer
SE516716C2 (sv) * 1994-04-14 2002-02-19 Mks Instr Tryckgivare för mätning av trycket hos en fluid
US5637802A (en) * 1995-02-28 1997-06-10 Rosemount Inc. Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates
US6484585B1 (en) 1995-02-28 2002-11-26 Rosemount Inc. Pressure sensor for a pressure transmitter
US5854846A (en) * 1996-09-06 1998-12-29 Northrop Grumman Corporation Wafer fabricated electroacoustic transducer
US20040099061A1 (en) * 1997-12-22 2004-05-27 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
DK0992779T3 (da) * 1998-10-06 2003-09-15 Vibro Meter Ag Accelerationskompenseret trykmåler
US6295875B1 (en) 1999-05-14 2001-10-02 Rosemount Inc. Process pressure measurement devices with improved error compensation
CN1151367C (zh) 2000-01-06 2004-05-26 罗斯蒙德公司 微机电系统(mems)用的电互联的晶粒生长
US6508129B1 (en) 2000-01-06 2003-01-21 Rosemount Inc. Pressure sensor capsule with improved isolation
US6520020B1 (en) 2000-01-06 2003-02-18 Rosemount Inc. Method and apparatus for a direct bonded isolated pressure sensor
US6561038B2 (en) 2000-01-06 2003-05-13 Rosemount Inc. Sensor with fluid isolation barrier
US6505516B1 (en) 2000-01-06 2003-01-14 Rosemount Inc. Capacitive pressure sensing with moving dielectric
US6516672B2 (en) 2001-05-21 2003-02-11 Rosemount Inc. Sigma-delta analog to digital converter for capacitive pressure sensor and process transmitter
US6839546B2 (en) 2002-04-22 2005-01-04 Rosemount Inc. Process transmitter with wireless communication link
US6848316B2 (en) * 2002-05-08 2005-02-01 Rosemount Inc. Pressure sensor assembly
US20050187482A1 (en) * 2003-09-16 2005-08-25 O'brien David Implantable wireless sensor
WO2005086331A2 (fr) * 2004-03-02 2005-09-15 Rosemount, Inc. Dispositif de procede avec production d'energie amelioree
US8538560B2 (en) * 2004-04-29 2013-09-17 Rosemount Inc. Wireless power and communication unit for process field devices
US8145180B2 (en) 2004-05-21 2012-03-27 Rosemount Inc. Power generation for process devices
US7262693B2 (en) * 2004-06-28 2007-08-28 Rosemount Inc. Process field device with radio frequency communication
US8160535B2 (en) * 2004-06-28 2012-04-17 Rosemount Inc. RF adapter for field device
US7201057B2 (en) * 2004-09-30 2007-04-10 Mks Instruments, Inc. High-temperature reduced size manometer
US7137301B2 (en) * 2004-10-07 2006-11-21 Mks Instruments, Inc. Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
US7141447B2 (en) * 2004-10-07 2006-11-28 Mks Instruments, Inc. Method of forming a seal between a housing and a diaphragm of a capacitance sensor
US7680460B2 (en) * 2005-01-03 2010-03-16 Rosemount Inc. Wireless process field device diagnostics
US7204150B2 (en) 2005-01-14 2007-04-17 Mks Instruments, Inc. Turbo sump for use with capacitive pressure sensor
US9184364B2 (en) * 2005-03-02 2015-11-10 Rosemount Inc. Pipeline thermoelectric generator assembly
US8118748B2 (en) * 2005-04-28 2012-02-21 Medtronic, Inc. Implantable capacitive pressure sensor system and method
US7334484B2 (en) * 2005-05-27 2008-02-26 Rosemount Inc. Line pressure measurement using differential pressure sensor
US8452255B2 (en) 2005-06-27 2013-05-28 Rosemount Inc. Field device with dynamically adjustable power consumption radio frequency communication
US7379792B2 (en) * 2005-09-29 2008-05-27 Rosemount Inc. Pressure transmitter with acoustic pressure sensor
US7415886B2 (en) * 2005-12-20 2008-08-26 Rosemount Inc. Pressure sensor with deflectable diaphragm
US7308830B2 (en) * 2006-01-26 2007-12-18 Rosemount Inc. Pressure sensor fault detection
US7913566B2 (en) * 2006-05-23 2011-03-29 Rosemount Inc. Industrial process device utilizing magnetic induction
US8188359B2 (en) 2006-09-28 2012-05-29 Rosemount Inc. Thermoelectric generator assembly for field process devices
US8898036B2 (en) 2007-08-06 2014-11-25 Rosemount Inc. Process variable transmitter with acceleration sensor
US7484416B1 (en) 2007-10-15 2009-02-03 Rosemount Inc. Process control transmitter with vibration sensor
WO2009154748A2 (fr) 2008-06-17 2009-12-23 Rosemount Inc. Adaptateur rf pour dispositif de terrain à serrage de sécurité intrinsèque à faible tension
US8250924B2 (en) 2008-04-22 2012-08-28 Rosemount Inc. Industrial process device utilizing piezoelectric transducer
US8929948B2 (en) 2008-06-17 2015-01-06 Rosemount Inc. Wireless communication adapter for field devices
CN102084626B (zh) * 2008-06-17 2013-09-18 罗斯蒙德公司 用于具有环路电流旁路的现场设备的rf适配器
US8847571B2 (en) 2008-06-17 2014-09-30 Rosemount Inc. RF adapter for field device with variable voltage drop
US8694060B2 (en) 2008-06-17 2014-04-08 Rosemount Inc. Form factor and electromagnetic interference protection for process device wireless adapters
US7977924B2 (en) 2008-11-03 2011-07-12 Rosemount Inc. Industrial process power scavenging device and method of deriving process device power from an industrial process
US8327713B2 (en) 2008-12-03 2012-12-11 Rosemount Inc. Method and apparatus for pressure measurement using magnetic property
US7870791B2 (en) * 2008-12-03 2011-01-18 Rosemount Inc. Method and apparatus for pressure measurement using quartz crystal
US7954383B2 (en) * 2008-12-03 2011-06-07 Rosemount Inc. Method and apparatus for pressure measurement using fill tube
US9674976B2 (en) * 2009-06-16 2017-06-06 Rosemount Inc. Wireless process communication adapter with improved encapsulation
US8626087B2 (en) 2009-06-16 2014-01-07 Rosemount Inc. Wire harness for field devices used in a hazardous locations
US8429978B2 (en) 2010-03-30 2013-04-30 Rosemount Inc. Resonant frequency based pressure sensor
US8234927B2 (en) 2010-06-08 2012-08-07 Rosemount Inc. Differential pressure sensor with line pressure measurement
US8132464B2 (en) 2010-07-12 2012-03-13 Rosemount Inc. Differential pressure transmitter with complimentary dual absolute pressure sensors
US10761524B2 (en) 2010-08-12 2020-09-01 Rosemount Inc. Wireless adapter with process diagnostics
RU2470273C1 (ru) * 2011-07-21 2012-12-20 Государственное образовательное учреждение высшего профессионального образования "Нижегородский государственный технический университет им. Р.Е. Алексеева" (НГТУ) Интегральный датчик абсолютного давления
US9310794B2 (en) 2011-10-27 2016-04-12 Rosemount Inc. Power supply for industrial process field device
US8752433B2 (en) 2012-06-19 2014-06-17 Rosemount Inc. Differential pressure transmitter with pressure sensor
US9048901B2 (en) 2013-03-15 2015-06-02 Rosemount Inc. Wireless interface within transmitter
US11371899B2 (en) 2018-05-17 2022-06-28 Rosemount Inc. Measuring element with an extended permeation resistant layer

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2021479A1 (de) * 1970-05-02 1971-11-11 Kleinwaechter Hans Druckmessgeraet zur Messung von Drucken in Gasen und Fluessigkeiten
US3962921A (en) * 1972-02-04 1976-06-15 The Garrett Corporation Compensated pressure transducer
US3858097A (en) * 1973-12-26 1974-12-31 Bendix Corp Pressure-sensing capacitor
GB1563894A (en) * 1976-03-12 1980-04-02 Kavlico Corp Capacitive pressure transducer and method for making same
US4084438A (en) * 1976-03-29 1978-04-18 Setra Systems, Inc. Capacitive pressure sensing device
US4120206A (en) * 1977-01-17 1978-10-17 Rosemount Inc. Differential pressure sensor capsule with low acceleration sensitivity
US4340409A (en) * 1979-04-16 1982-07-20 The Bendix Corporation Method of fabricating a pressure sensor
US4301492A (en) * 1980-01-28 1981-11-17 Paquin Maurice J Pressure-sensing transducer
US4345299A (en) * 1980-11-03 1982-08-17 Motorola, Inc. Capacitive pressure transducer assembly with improved output lead design

Also Published As

Publication number Publication date
EP0083647A4 (fr) 1984-06-29
IT1148385B (it) 1986-12-03
IT8248877A0 (it) 1982-07-23
WO1983000385A1 (fr) 1983-02-03
JPH0444685B2 (fr) 1992-07-22
IL66234A0 (en) 1982-11-30
US4389895A (en) 1983-06-28
EP0083647A1 (fr) 1983-07-20
BR8207848A (pt) 1983-08-30
JPS58501200A (ja) 1983-07-21
CA1180913A (fr) 1985-01-15

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