IL62751A - Exb mass separator for separating and focusing ion beams - Google Patents

Exb mass separator for separating and focusing ion beams

Info

Publication number
IL62751A
IL62751A IL62751A IL6275181A IL62751A IL 62751 A IL62751 A IL 62751A IL 62751 A IL62751 A IL 62751A IL 6275181 A IL6275181 A IL 6275181A IL 62751 A IL62751 A IL 62751A
Authority
IL
Israel
Prior art keywords
separating
ion beams
mass separator
focusing ion
exb mass
Prior art date
Application number
IL62751A
Other languages
English (en)
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Publication of IL62751A publication Critical patent/IL62751A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Physical Vapour Deposition (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
IL62751A 1980-05-19 1981-04-29 Exb mass separator for separating and focusing ion beams IL62751A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/151,009 US4315153A (en) 1980-05-19 1980-05-19 Focusing ExB mass separator for space-charge dominated ion beams

Publications (1)

Publication Number Publication Date
IL62751A true IL62751A (en) 1984-03-30

Family

ID=22536942

Family Applications (1)

Application Number Title Priority Date Filing Date
IL62751A IL62751A (en) 1980-05-19 1981-04-29 Exb mass separator for separating and focusing ion beams

Country Status (5)

Country Link
US (1) US4315153A (enExample)
JP (1) JPS5723458A (enExample)
FR (1) FR2482768A1 (enExample)
GB (1) GB2076588B (enExample)
IL (1) IL62751A (enExample)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4563587A (en) * 1981-05-26 1986-01-07 Hughes Aircraft Company Focused ion beam microfabrication column
DE3275679D1 (en) * 1981-05-26 1987-04-16 Hughes Aircraft Co Focused ion beam microfabrication column
JPS6062045A (ja) * 1983-09-14 1985-04-10 Hitachi Ltd イオンマイクロビ−ム打込み装置
JPH0724209B2 (ja) * 1985-03-08 1995-03-15 日新電機株式会社 イオン注入装置
US4835399A (en) * 1986-08-22 1989-05-30 Hitachi, Ltd. Charged particle beam apparatus
JP2706471B2 (ja) * 1987-09-30 1998-01-28 日本真空技術株式会社 静電掃引型イオン注入機用平行掃引装置
US5313061A (en) * 1989-06-06 1994-05-17 Viking Instrument Miniaturized mass spectrometer system
US5019712A (en) * 1989-06-08 1991-05-28 Hughes Aircraft Company Production of focused ion cluster beams
DE69132441T2 (de) * 1990-06-20 2001-06-07 Hitachi, Ltd. Ladungsträgerstrahlgerät
JP2671657B2 (ja) * 1991-04-22 1997-10-29 富士電機株式会社 高分子センサ
US6495823B1 (en) 1999-07-21 2002-12-17 The Charles Stark Draper Laboratory, Inc. Micromachined field asymmetric ion mobility filter and detection system
US6806463B2 (en) 1999-07-21 2004-10-19 The Charles Stark Draper Laboratory, Inc. Micromachined field asymmetric ion mobility filter and detection system
US6815668B2 (en) * 1999-07-21 2004-11-09 The Charles Stark Draper Laboratory, Inc. Method and apparatus for chromatography-high field asymmetric waveform ion mobility spectrometry
US7129482B2 (en) * 1999-07-21 2006-10-31 Sionex Corporation Explosives detection using differential ion mobility spectrometry
US6690004B2 (en) * 1999-07-21 2004-02-10 The Charles Stark Draper Laboratory, Inc. Method and apparatus for electrospray-augmented high field asymmetric ion mobility spectrometry
US7005632B2 (en) * 2002-04-12 2006-02-28 Sionex Corporation Method and apparatus for control of mobility-based ion species identification
US6815669B1 (en) * 1999-07-21 2004-11-09 The Charles Stark Draper Laboratory, Inc. Longitudinal field driven ion mobility filter and detection system
US7098449B1 (en) 1999-07-21 2006-08-29 The Charles Stark Draper Laboratory, Inc. Spectrometer chip assembly
EP2426692A3 (en) * 2000-11-30 2013-08-21 Semequip, Inc. Ion source
US7064491B2 (en) * 2000-11-30 2006-06-20 Semequip, Inc. Ion implantation system and control method
CA2452128A1 (en) * 2001-06-30 2003-01-16 Sionex Corporation System for collection of data and identification of unknown ion species in an electric field
US7714284B2 (en) * 2001-06-30 2010-05-11 Sionex Corporation Methods and apparatus for enhanced sample identification based on combined analytical techniques
US7274015B2 (en) * 2001-08-08 2007-09-25 Sionex Corporation Capacitive discharge plasma ion source
US7091481B2 (en) 2001-08-08 2006-08-15 Sionex Corporation Method and apparatus for plasma generation
US6727496B2 (en) * 2001-08-14 2004-04-27 Sionex Corporation Pancake spectrometer
US7122794B1 (en) 2002-02-21 2006-10-17 Sionex Corporation Systems and methods for ion mobility control
US20050061997A1 (en) * 2003-09-24 2005-03-24 Benveniste Victor M. Ion beam slit extraction with mass separation
GB0408235D0 (en) * 2004-04-13 2004-05-19 Kratos Analytical Ltd Ion selector
WO2006060807A1 (en) * 2004-12-03 2006-06-08 Sionex Corporation Method and apparatus for enhanced ion based sample filtering and detection
US7579589B2 (en) 2005-07-26 2009-08-25 Sionex Corporation Ultra compact ion mobility based analyzer apparatus, method, and system
GB2434845B (en) 2006-02-01 2010-10-13 Intelligent Energy Ltd Variable compressibility gaskets
CA2685169C (en) 2007-02-01 2016-12-13 Sionex Corporation Differential mobility spectrometer pre-filter assembly for a mass spectrometer
GB2622401B (en) * 2022-09-14 2025-01-08 Thermo Fisher Scient Bremen Gmbh Tuning a mass spectrometer filter

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2243362A (en) * 1938-08-20 1941-05-27 Thomas W Sukumlyn Electron microscope system
US2947868A (en) * 1959-07-27 1960-08-02 Geophysics Corp Of America Mass spectrometer
FR2043973A5 (enExample) * 1969-05-05 1971-02-19 Thomson Csf
US3816748A (en) * 1972-04-28 1974-06-11 Alpha Ind Inc Ion accelerator employing crossed-field selector
NL7415318A (nl) * 1974-11-25 1976-05-28 Philips Nv Wienfilter.
DE2556291C3 (de) * 1975-12-13 1980-11-27 Gesellschaft Fuer Strahlen- Und Umweltforschung Mbh, 8000 Muenchen Raster-Ionenmikroskop
US4163151A (en) * 1977-12-28 1979-07-31 Hughes Aircraft Company Separated ion source

Also Published As

Publication number Publication date
US4315153A (en) 1982-02-09
GB2076588A (en) 1981-12-02
JPS5723458A (en) 1982-02-06
FR2482768A1 (fr) 1981-11-20
GB2076588B (en) 1984-01-11
FR2482768B1 (enExample) 1984-11-16

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