IL62751A - Exb mass separator for separating and focusing ion beams - Google Patents

Exb mass separator for separating and focusing ion beams

Info

Publication number
IL62751A
IL62751A IL62751A IL6275181A IL62751A IL 62751 A IL62751 A IL 62751A IL 62751 A IL62751 A IL 62751A IL 6275181 A IL6275181 A IL 6275181A IL 62751 A IL62751 A IL 62751A
Authority
IL
Israel
Prior art keywords
separating
ion beams
mass separator
focusing ion
exb mass
Prior art date
Application number
IL62751A
Other languages
English (en)
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Publication of IL62751A publication Critical patent/IL62751A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Physical Vapour Deposition (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
IL62751A 1980-05-19 1981-04-29 Exb mass separator for separating and focusing ion beams IL62751A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/151,009 US4315153A (en) 1980-05-19 1980-05-19 Focusing ExB mass separator for space-charge dominated ion beams

Publications (1)

Publication Number Publication Date
IL62751A true IL62751A (en) 1984-03-30

Family

ID=22536942

Family Applications (1)

Application Number Title Priority Date Filing Date
IL62751A IL62751A (en) 1980-05-19 1981-04-29 Exb mass separator for separating and focusing ion beams

Country Status (5)

Country Link
US (1) US4315153A (xx)
JP (1) JPS5723458A (xx)
FR (1) FR2482768A1 (xx)
GB (1) GB2076588B (xx)
IL (1) IL62751A (xx)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1982004351A1 (en) * 1981-05-26 1982-12-09 Aircraft Co Hughes Focused ion beam microfabrication column
US4563587A (en) * 1981-05-26 1986-01-07 Hughes Aircraft Company Focused ion beam microfabrication column
JPS6062045A (ja) * 1983-09-14 1985-04-10 Hitachi Ltd イオンマイクロビ−ム打込み装置
JPH0724209B2 (ja) * 1985-03-08 1995-03-15 日新電機株式会社 イオン注入装置
US4835399A (en) * 1986-08-22 1989-05-30 Hitachi, Ltd. Charged particle beam apparatus
JP2706471B2 (ja) * 1987-09-30 1998-01-28 日本真空技術株式会社 静電掃引型イオン注入機用平行掃引装置
US5313061A (en) * 1989-06-06 1994-05-17 Viking Instrument Miniaturized mass spectrometer system
US5019712A (en) * 1989-06-08 1991-05-28 Hughes Aircraft Company Production of focused ion cluster beams
EP0462554B1 (en) * 1990-06-20 2000-10-11 Hitachi, Ltd. Charged particle beam apparatus
JP2671657B2 (ja) * 1991-04-22 1997-10-29 富士電機株式会社 高分子センサ
US6495823B1 (en) 1999-07-21 2002-12-17 The Charles Stark Draper Laboratory, Inc. Micromachined field asymmetric ion mobility filter and detection system
US7129482B2 (en) * 1999-07-21 2006-10-31 Sionex Corporation Explosives detection using differential ion mobility spectrometry
US7005632B2 (en) * 2002-04-12 2006-02-28 Sionex Corporation Method and apparatus for control of mobility-based ion species identification
US6690004B2 (en) * 1999-07-21 2004-02-10 The Charles Stark Draper Laboratory, Inc. Method and apparatus for electrospray-augmented high field asymmetric ion mobility spectrometry
US6815669B1 (en) 1999-07-21 2004-11-09 The Charles Stark Draper Laboratory, Inc. Longitudinal field driven ion mobility filter and detection system
US6815668B2 (en) * 1999-07-21 2004-11-09 The Charles Stark Draper Laboratory, Inc. Method and apparatus for chromatography-high field asymmetric waveform ion mobility spectrometry
US7098449B1 (en) 1999-07-21 2006-08-29 The Charles Stark Draper Laboratory, Inc. Spectrometer chip assembly
US6806463B2 (en) * 1999-07-21 2004-10-19 The Charles Stark Draper Laboratory, Inc. Micromachined field asymmetric ion mobility filter and detection system
US7064491B2 (en) * 2000-11-30 2006-06-20 Semequip, Inc. Ion implantation system and control method
EP1347804A4 (en) * 2000-11-30 2009-04-22 Semequip Inc ION IMPLANTATION SYSTEM AND CONTROL METHOD
ATE553372T1 (de) * 2001-06-30 2012-04-15 Dh Technologies Dev Pte Ltd System zum sammeln von daten und zur identifizierung unbekannter substanzen in einem elektrischen feld
US7274015B2 (en) * 2001-08-08 2007-09-25 Sionex Corporation Capacitive discharge plasma ion source
US7091481B2 (en) 2001-08-08 2006-08-15 Sionex Corporation Method and apparatus for plasma generation
US6727496B2 (en) * 2001-08-14 2004-04-27 Sionex Corporation Pancake spectrometer
US7122794B1 (en) 2002-02-21 2006-10-17 Sionex Corporation Systems and methods for ion mobility control
US20050061997A1 (en) * 2003-09-24 2005-03-24 Benveniste Victor M. Ion beam slit extraction with mass separation
EP1733219A2 (en) * 2004-01-13 2006-12-20 Sionex Corporation Methods and apparatus for enhanced sample identification based on combined analytical techniques
GB0408235D0 (en) * 2004-04-13 2004-05-19 Kratos Analytical Ltd Ion selector
US7399959B2 (en) * 2004-12-03 2008-07-15 Sionex Corporation Method and apparatus for enhanced ion based sample filtering and detection
EP1913379A2 (en) 2005-07-26 2008-04-23 Sionex Corporation Ultra compact ion mobility based analyzer apparatus, method, and system
GB2434845B (en) 2006-02-01 2010-10-13 Intelligent Energy Ltd Variable compressibility gaskets
US8217344B2 (en) 2007-02-01 2012-07-10 Dh Technologies Development Pte. Ltd. Differential mobility spectrometer pre-filter assembly for a mass spectrometer
GB2622401A (en) * 2022-09-14 2024-03-20 Thermo Fisher Scient Bremen Gmbh Tuning a mass spectrometer filter

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2243362A (en) * 1938-08-20 1941-05-27 Thomas W Sukumlyn Electron microscope system
US2947868A (en) * 1959-07-27 1960-08-02 Geophysics Corp Of America Mass spectrometer
FR2043973A5 (xx) * 1969-05-05 1971-02-19 Thomson Csf
US3816748A (en) * 1972-04-28 1974-06-11 Alpha Ind Inc Ion accelerator employing crossed-field selector
NL7415318A (nl) * 1974-11-25 1976-05-28 Philips Nv Wienfilter.
DE2556291C3 (de) * 1975-12-13 1980-11-27 Gesellschaft Fuer Strahlen- Und Umweltforschung Mbh, 8000 Muenchen Raster-Ionenmikroskop
US4163151A (en) * 1977-12-28 1979-07-31 Hughes Aircraft Company Separated ion source

Also Published As

Publication number Publication date
JPS5723458A (en) 1982-02-06
US4315153A (en) 1982-02-09
GB2076588B (en) 1984-01-11
GB2076588A (en) 1981-12-02
FR2482768A1 (fr) 1981-11-20
FR2482768B1 (xx) 1984-11-16

Similar Documents

Publication Publication Date Title
IL62751A (en) Exb mass separator for separating and focusing ion beams
DE3171592D1 (en) Plasma separator
GB2049818B (en) Foreign particle separator
AU568686B2 (en) Separation of thorium ions from an insoluble composition
AU557760B2 (en) Method for discriminating between unstained and absorbing dye-stained cells
DE3374626D1 (en) Charged particle beam exposure device incorporating beam splitting
JPS57113548A (en) Device for deflecting wide ion plasma beam
JPS57113874A (en) Separator for substance
JPS5794317A (en) High magnetic dradient type magnetic separator
JPS5787053A (en) Particle beam interrupting device
JPS5799378A (en) Separator for substance
DE3362664D1 (en) Negative ion beam etching process
EP0155700A3 (en) Apparatus for quantitive secondary ion mass spectrometry
DE3379616D1 (en) Charged-particle beam exposure device incorporating beam splitting
GB2130913B (en) Parallel plate separator
DE3376662D1 (en) Battery separator and process for manufacturing it
GB2130118B (en) Particle separator
JPS5744969A (en) Material for battery separator
AU560668B2 (en) Moisture separator reheater
AU2224383A (en) Magnetic separators
GB2061773B (en) Particle separators
JPS571453A (en) Magnetic separator
AU1799783A (en) Magnetic separator
GB2143673B (en) Ionizing samples for secondary ion mass spectrometry
GB2116873B (en) Baffle separator