IL300054A - משאבת ואקום, להב סטטור וחוצץ - Google Patents

משאבת ואקום, להב סטטור וחוצץ

Info

Publication number
IL300054A
IL300054A IL300054A IL30005423A IL300054A IL 300054 A IL300054 A IL 300054A IL 300054 A IL300054 A IL 300054A IL 30005423 A IL30005423 A IL 30005423A IL 300054 A IL300054 A IL 300054A
Authority
IL
Israel
Prior art keywords
stator blade
blades
rim
outer rim
tapered surface
Prior art date
Application number
IL300054A
Other languages
English (en)
Original Assignee
Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Japan Ltd filed Critical Edwards Japan Ltd
Publication of IL300054A publication Critical patent/IL300054A/he

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/403—Casings; Connections of working fluid especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/545—Ducts
    • F04D29/547—Ducts having a special shape in order to influence fluid flow

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
IL300054A 2020-08-21 2021-07-30 משאבת ואקום, להב סטטור וחוצץ IL300054A (he)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020140495A JP7546412B2 (ja) 2020-08-21 2020-08-21 真空ポンプ、固定翼、およびスペーサ
PCT/JP2021/028253 WO2022038996A1 (ja) 2020-08-21 2021-07-30 真空ポンプ、固定翼、およびスペーサ

Publications (1)

Publication Number Publication Date
IL300054A true IL300054A (he) 2023-03-01

Family

ID=80322644

Family Applications (1)

Application Number Title Priority Date Filing Date
IL300054A IL300054A (he) 2020-08-21 2021-07-30 משאבת ואקום, להב סטטור וחוצץ

Country Status (7)

Country Link
US (1) US20230323890A1 (he)
EP (1) EP4202227A4 (he)
JP (1) JP7546412B2 (he)
KR (1) KR20230050310A (he)
CN (1) CN115803530B (he)
IL (1) IL300054A (he)
WO (1) WO2022038996A1 (he)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4325061B1 (de) * 2023-12-20 2025-11-12 Pfeiffer Vacuum Technology AG Turbomolekularvakuumpumpe

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19937392A1 (de) 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit pumpaktiven Elementen
DE10338222A1 (de) * 2003-08-20 2005-03-10 Leybold Vakuum Gmbh Kombinierter Antrieb mit Lagerung
JP4749054B2 (ja) 2005-06-22 2011-08-17 エドワーズ株式会社 ターボ分子ポンプ、およびターボ分子ポンプの組み立て方法
KR101629979B1 (ko) * 2008-07-14 2016-06-13 에드워즈 가부시키가이샤 진공 펌프
CN107044430B (zh) * 2016-02-05 2021-10-15 埃地沃兹日本有限公司 真空泵及被用于其中的转子及定子
JP7015106B2 (ja) 2016-08-30 2022-02-02 エドワーズ株式会社 真空ポンプ、および真空ポンプに備わる回転円筒体
JP6782141B2 (ja) 2016-10-06 2020-11-11 エドワーズ株式会社 真空ポンプ、ならびに真空ポンプに備わるらせん状板、スペーサおよび回転円筒体
JP6882624B2 (ja) 2017-09-25 2021-06-02 株式会社島津製作所 ターボ分子ポンプ

Also Published As

Publication number Publication date
CN115803530A (zh) 2023-03-14
EP4202227A1 (en) 2023-06-28
JP7546412B2 (ja) 2024-09-06
KR20230050310A (ko) 2023-04-14
WO2022038996A1 (ja) 2022-02-24
US20230323890A1 (en) 2023-10-12
JP2022035881A (ja) 2022-03-04
CN115803530B (zh) 2025-09-19
EP4202227A4 (en) 2024-09-11

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